Prosecution Insights
Last updated: April 19, 2026
Application No. 17/667,861

ACETYLENE FLUID SUPPLY PACKAGE, SYSTEM COMPRISING THE SAME AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

Non-Final OA §103
Filed
Feb 09, 2022
Examiner
MERKLING, MATTHEW J
Art Unit
1725
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Praxair Technology Inc.
OA Round
3 (Non-Final)
68%
Grant Probability
Favorable
3-4
OA Rounds
3y 0m
To Grant
81%
With Interview

Examiner Intelligence

Grants 68% — above average
68%
Career Allow Rate
851 granted / 1253 resolved
+2.9% vs TC avg
Moderate +13% lift
Without
With
+13.3%
Interview Lift
resolved cases with interview
Typical timeline
3y 0m
Avg Prosecution
53 currently pending
Career history
1306
Total Applications
across all art units

Statute-Specific Performance

§101
0.5%
-39.5% vs TC avg
§103
49.1%
+9.1% vs TC avg
§102
26.3%
-13.7% vs TC avg
§112
18.2%
-21.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1253 resolved cases

Office Action

§103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Specification The specification and drawings have been reviewed and no clear informalities or objections have been noted. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claim(s) 1-4 is/are rejected under 35 U.S.C. 103 as being unpatentable over Bour (US 2,431,676) in view of Levine (US 2,623,611). Regarding claims 1-3, Bour discloses an acetylene fluid supply package (such as a cylinder 10, see Drawing), comprising a pressure vessel having an interior volume (cylinder); a porous filler in the pressure vessel (such as adsorbent, col. 1 lines 28-33); a solvent within the porous filler, said solvent solubilizing with acetylene absorbed within the improved solvent (such as triethyl phosphate, see claim 9 of Bour), wherein the fill pressure of the acetylene fluid supply package is in the range of about 200-300psig (see col. 1 lines 44-51 which discloses that the pressure is between 10-30 atmospheres). Bour teaches loading triethyl phosphate into the cylinder but does not explicitly teach how much TEP is placed in the cylinder per liter. However, as is known in the art, the amount of acetylene that can be dissolved by triethyl phosphate is known and is associated with a certain volume of acetylene (see Table 1 is Levine which discloses the volume of acetylene that will dissolve in a single volume of triethyl phosphate). It is also known that a cylinder’s capacity for acetylene will be adjustable based on the amount of triethyl phosphate that is placed in the cylinder (more triethyl phosphate in the cylinder, the more acetylene will be dissolved). As such, adjusting the amount of triethyl phosphate to the claimed amount would have been an obvious modification by one of ordinary skill in the art at the time of the invention in order to achieve the desired amount of acetylene within the cylinder. One of ordinary skill would have placed the desired amount of triethyl phosphate in the cylinder to achieve the desired amount of acetylene in the cylinder. A higher desired amount would lend itself for more triethyl phosphate (up to the volume capacity of the cylinder) while a lower desired amount of acetylene would lend itself to a lower amount of triethyl phosphate. Furthermore, while Bour does not explicitly teach the claimed pressure, it does teach an overlapping range (10-30 atmospheres, col. 1 lines 44-49). As such, arriving at the claimed range would have been obvious to one of ordinary skill in the art at the time of the invention. In the case where the claimed ranges "overlap or lie inside ranges disclosed by the prior art" a prima facie case of obviousness exists (see MPEP §2144.05(I)). Regarding claim 4, the limitations regarding the temperature and pressure of the cylinder are directed to a manner of operating the claimed apparatus. Bour discloses an apparatus that CAN be operated in this way. Regarding limitations recited in claim 4 which are directed to a manner of operating disclosed system, neither the manner of operating a disclosed device nor material or article worked upon further limit an apparatus claim. Said limitations do not differentiate apparatus claims from prior art. See MPEP §2114 and 2115. Further, process limitations do not have a patentable weight in an apparatus claim. See Ex parte Thibault, 164 USPQ 666, 667 (Bd. App. 1969) that states "Expressions relating the apparatus to contents thereof and to an intended operation are of no significance in determining patentability of the apparatus claim. Claim(s) 5-9 is/are rejected under 35 U.S.C. 103 as being unpatentable over Bour (US 2,431,676) in view of Jha (US 2010/0154630) and Levine (US 2,623,611). Regarding claims 5, 8 and 9, Bour discloses an acetylene fluid supply package (such as a cylinder 10, see Drawing), comprising a pressure vessel having an interior volume (cylinder); a porous filler in the pressure vessel (such as adsorbent, col. 1 lines 28-33); a solvent within the porous filler, said solvent solubilizing with acetylene absorbed within the improved solvent (such as triethyl phosphate, see claim 9 of Bour), wherein the fill pressure of the acetylene fluid supply package is in the range of about 200-300psig (see col. 1 lines 44-51 which discloses that the pressure is between 10-30 atmospheres). wherein the at least one acetylene fluid supply package is configured to allow a discharge of the acetylene fluid under dispensing conditions (see col. 2 lines 24-29 which discloses discharging of the cylinder). Bour teaches a cylinder for the acetylene but does not teach a tool that utilizes the acetylene attached to the cylinder. Jha also disclose an acetylene cylinder (see abstract). Jha teaches attaching the acetylene cylinder to a process tool that is utilized for manufacturing semiconductors (see Fig. 5 and paragraph 7). As such, it would have been obvious to connect the semiconductor process tool of Jha to the cylinder of Bour in order to provide a means to transport acetylene into the semiconductor manufacturing tools. Furthermore, Bour teaches loading triethyl phosphate into the cylinder but does not explicitly teach how much TEP is placed in the cylinder per liter. However, as is known in the art, the amount of acetylene that can be dissolved by triethyl phosphate is known and is associated with a certain volume of acetylene (see Table 1 is Levine which discloses the volume of acetylene that will dissolve in a single volume of triethyl phosphate). It is also known that a cylinder’s capacity for acetylene will be adjustable based on the amount of triethyl phosphate that is placed in the cylinder (more triethyl phosphate in the cylinder, the more acetylene will be dissolved). As such, adjusting the amount of triethyl phosphate to the claimed amount would have been an obvious modification by one of ordinary skill in the art at the time of the invention in order to achieve the desired amount of acetylene within the cylinder. One of ordinary skill would have placed the desired amount of triethyl phosphate in the cylinder to achieve the desired amount of acetylene in the cylinder. A higher desired amount would lend itself for more triethyl phosphate (up to the volume capacity of the cylinder) while a lower desired amount of acetylene would lend itself to a lower amount of triethyl phosphate. Furthermore, while Bour does not explicitly teach the claimed pressure, it does teach an overlapping range (10-30 atmospheres, col. 1 lines 44-49). As such, arriving at the claimed range would have been obvious to one of ordinary skill in the art at the time of the invention. In the case where the claimed ranges "overlap or lie inside ranges disclosed by the prior art" a prima facie case of obviousness exists (see MPEP §2144.05(I)). Regarding claim 6, Bour, as modified above, further discloses the process tool comprises a chemical vapor deposition tool (such as the semiconductor manufacturing system). Regarding claim 7, Bour, as modified by Jha, further discloses at least one at least one acetylene fluid supply package is contained in a gas cabinet (see Jha paragraph 31 which discloses a cylinder cabinet associated with gas sensors and controllers). Relevant Prior Art US 2,623,611 – Discloses the solubility of acetylene in triethyl phosphate but is silent regarding a pressure vessel. Response to Arguments Applicant’s arguments with respect to claim(s) 1-9 have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to MATTHEW J MERKLING whose telephone number is (571)272-9813. The examiner can normally be reached Monday - Thursday 8am-6pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Basia Ridley can be reached at 571-272-1453. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /MATTHEW J MERKLING/ Primary Examiner, Art Unit 1725
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Prosecution Timeline

Feb 09, 2022
Application Filed
Jun 18, 2025
Non-Final Rejection — §103
Oct 15, 2025
Response Filed
Dec 05, 2025
Final Rejection — §103
Feb 20, 2026
Request for Continued Examination
Mar 02, 2026
Response after Non-Final Action
Mar 10, 2026
Non-Final Rejection — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
68%
Grant Probability
81%
With Interview (+13.3%)
3y 0m
Median Time to Grant
High
PTA Risk
Based on 1253 resolved cases by this examiner. Grant probability derived from career allow rate.

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