Prosecution Insights
Last updated: August 15, 2026
Application No. 17/789,362

UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER

Non-Final OA §102§112
Filed
Jun 27, 2022
Priority
Dec 31, 2019 — provisional 62/955,542 +2 more
Examiner
CARTER, MICHAEL W
Art Unit
2828
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Cymer LLC
OA Round
5 (Non-Final)
74%
Grant Probability
Favorable
5-6
OA Rounds
0m
Est. Remaining
90%
With Interview

Examiner Intelligence

Grants 74% — above average
74%
Career Allowance Rate
638 granted / 859 resolved
+6.3% vs TC avg
Strong +16% interview lift
Without
With
+15.7%
Interview Lift
resolved cases with interview
Typical timeline
2y 5m
Avg Prosecution
26 currently pending
Career history
885
Total Applications
across all art units

Statute-Specific Performance

§101
0.8%
-39.2% vs TC avg
§103
56.3%
+16.3% vs TC avg
§102
18.0%
-22.0% vs TC avg
§112
21.2%
-18.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 859 resolved cases

Office Action

§102 §112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Continued Examination Under 37 CFR 1.114 A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 6/8/2026 has been entered. Claim Rejections - 35 USC § 112 The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action. Claims 29-30 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 29 recites the light source apparatus of claim 28, and claim 30 depends from claim 29. Claim 28 has been cancelled, and claims 29 and 30 are, therefore, indefinite as it is unclear what if any limitations they should inherit from a cancelled claim. It is assumed that they claims 29-30 should be cancelled as well. Claim Interpretation Claims 11 and 19 use the phrase “extending lengthwise from a first end…to a second end.” A 3-dimensional object such as the electrode in US 2014/0334510 (Bethel) at fig. 3A has an length in the x direction, a length in the y-direction, and a length in the z direction. “lengthwise” is, therefore, interpreted to allow any of the direction. Further, there are first and second ends in the x-direction, the y-direction, and the z-direction. If the claims do not specify the “lengthwise” orientation then it may be chosen from all possible orientations when applying prior art. Fig. 2A of Bethel, for example, may be interpreted to have a length wise direction in the x-direction with a first end at the left side of fig. 2A and a second end at the right side of fig. 2A. Claim Rejections - 35 USC § 102 Claims 11-12, 14, and 19-20 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by US 2014/0334510 (Bethel). For claim 11, Bethel teaches an undercut electrode fig. 2A, and 3A, 203a) comprising: a first surface (fig. 2A, bottom of 203a) extending lengthwise (fig. 2A, left to right) from a first end of the undercut electrode (fig. 2A, left end) to a second end of the undercut electrode (fig. 2A, right end), the first end being separated from the second end by a length of the undercut electrode (length of bottom surface of 203a in the x direction) the first surface being adapted to face a gas discharge medium (fig. 2A, discharge region 205); a second surface opposite the first surface and extending lengthwise from the first end to the second end (fig.2A, top of 203a); a first hollowed-out portion formed across the first end of the undercut electrode between the first and second surfaces (fig. 2A, portion of 203a above 204a and fig. 3A, portion of 203a left of 204a; holes for screws 332 hollow out the portion); and a second hollowed-out portion formed across the second end of the undercut electrode between the first and second surfaces (fig. 2A, portion of 203a above 204b and fig. 3A, portion of 203a left of 204b; holes for screws 332 hollow out the portion). For claim 12, Bethel teaches the undercut electrode includes a bulk thickness (fig. 2A, thickness at center of 203A), and wherein the first and second hollowed-out portions each comprise an undercut portion within the second surface (fig. 2A, top surface of 203a is a portion with an undercut above 204a and 204b) wherein the first and second ends of the undercut electrode have a thickness (fig. 2A, thickness of 203a above 204a and 204b) less than the bulk thickness (fig. 2A, thickness at center of 203A). For claim 14, Bethel teaches the first and second hollowed-out portions contain a solid non-conductive material (fig. 3A, 336, [0023]). For claim 19, Bethel teaches a pair of opposing first and second electrodes configured to excite a gas medium to form a plasma (fig. 2A and 3A, 203a and 203b), each of the first and second electrodes comprising: a first surface (fig. 2A, bottom of 203a and top of 203b) extending lengthwise (fig. 2A, left to right) from a first end of each of the first and second electrodes (fig. 2A, left end) to a second end of each of the first and second electrodes (fig. 2A, right end), the first end of the first electrode being separated from the second end of the first electrode by a length of the first electrode (length of bottom surface of 203a in the x direction) and the first end of the second electrode being separated from the second end of the second electrode by a length of the second electrode (length of top surface of 203b in the x direction) configured and adapted to face the gas medium (fig. 2A, discharge region 205); and a second surface opposite the first surface and extending lengthwise from the first end to the second end (fig.2A, top of 203a bottom of 203b), wherein each of the first and second electrodes comprises first and second recessed portions formed respectively across each of the first end and second end of each of the first and second electrodes (fig. 2A, recessed portions above and below 204a and 204b). For claim 20, Bethel teaches each of the first and second electrodes includes a bulk thickness (fig. 2A, center thickness of 203a and 203b) and the first surface comprises a planar surface adapted to face the gas discharge medium (fig. 2a, surfaces of 203a and 203b bordering discharge region205), and wherein the first and second recessed portions each comprise an undercut portion (fig. 2A, recessed portions above and below 204a and 204b are considered undercut) wherein the first and second ends of each of the first and second electrodes have a center thickness less (fig. 2a, thickness of 203a and 203b above and below 204a and 204b) than the bulk thickness (fig. 2A, center thickness of 203a and 203b). Allowable Subject Matter Claims 1, 3, 7-8, 24, 33 and 35 are allowed. The following is an examiner’s statement of reasons for allowance: Claims are allowed based on applicant’s arguments submitted 10/1/2025. In particular, page 8, paragraph 4 and page 7, paragraph 11 Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.” Response to Arguments Applicant's arguments filed 4/28/2026 have been fully considered but they are not persuasive. Applicant argues that the office incorrectly identifies the “ends” of the electrodes in Bethel at page 10, paragraph 5 of the remarks. However, as discussed in the Claim Interpretation section above the electrode may be considered to have “ends” in the x-direction the y-direction and the z-direction as the x, y, z axis shown in fig. 2A and 3A. Given a broadest reasonable interpretation for the term “end,” there is no clear reason one direction should be preferred over another. The applicant could specify the length wise direction in a manner such that Bethel’s x direction does not read on the claimed invention; however, the current claim set does not, and the applicant’s arguments are unpersuasive. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to Michael W Carter whose telephone number is (571)270-1872. The examiner can normally be reached M-F, 9:00-5:30. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, MinSun Harvey can be reached at 571-272-1835. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /Michael Carter/Primary Examiner, Art Unit 2828
Read full office action

Prosecution Timeline

Show 6 earlier events
Nov 13, 2025
Response after Non-Final Action
Nov 24, 2025
Non-Final Rejection mailed — §102, §112
Feb 11, 2026
Response Filed
Mar 16, 2026
Final Rejection mailed — §102, §112
Apr 28, 2026
Response after Non-Final Action
Jun 08, 2026
Request for Continued Examination
Jun 10, 2026
Response after Non-Final Action
Jun 17, 2026
Non-Final Rejection mailed — §102, §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

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LASER IRRADIATION HEAD AND LASER IRRADIATION DEVICE
3y 4m to grant Granted Aug 04, 2026
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Patent 12676452
INTEGRATED LIGHT RECEIVING AND EMITTING DEVICE COMBINED WITH CONTROL CIRCUIT WAFER AND METHOD THEREOF
4y 7m to grant Granted Jul 07, 2026
Patent 12665393
LIGHT-EMITTING APPARATUS AND MANUFACTURING METHOD THEREOF
3y 11m to grant Granted Jun 23, 2026
Patent 12665369
OPTICAL ARRANGEMENT FOR PULSE COMPRESSION OF A PULSED LASER BEAM, AND LASER SYSTEM
3y 2m to grant Granted Jun 23, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

5-6
Expected OA Rounds
74%
Grant Probability
90%
With Interview (+15.7%)
2y 5m (~0m remaining)
Median Time to Grant
High
PTA Risk
Based on 859 resolved cases by this examiner. Grant probability derived from career allowance rate.

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