DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Continued Examination Under 37 CFR 1.114
A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 5/22/26 has been entered.
Considering the amendment filed 5/22/26, claims 2,7 and 13-28 have been canceled. Claim 29 has been withdrawn from consideration as being directed toward a non-elected invention detailed in paper filed 3/26/25. Claim 30 has been added. In conclusion, claims 1,3-6,8-12 and 30 remain in the application for prosecution thereof.
Applicants’ election to a specie of the claimed volatile organo silyl compound has been selected to be tBuMe2SiLi also recited in claims 3 and 30. The other volatile organo silyl compounds have been withdrawn from consideration and should be canceled.
Considering the amendment filed 5/22/26, the 35 USC 112 rejections have been withdrawn. However, the following rejection has been necessitated by the amendment.
The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action.
Claim Rejections - 35 USC § 112
Claims 1,3-8,8-12 and 30 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
With the election of tBuMe2SiLi as the precursor in paper filed 5/22/25, claim 1, 3 and 30 all recite the same limitations (claimed tBuMe2SiLi precursor and ozone) and therefore are not further limiting. While claim 30 recites alternating pulses. Claims 1 and 3 recite ALD which is a method of alternating pulses of gases in forming layer deposition and hence the limitation of alternating pulses is met. The Examiner suggests amending claim 1 to recite the elected volatile organo silyl compound consisting of tBuMe2SiLi while cancelling all the other compounds recited as well as cancelling claims 3 and 30 to overcome the rejection as not being further limiting.
Claims 4-6 and 8-12 are rejected as being dependent upon a rejected base claim.
Reasons for indication of Allowable subject matter
The following is an Examiner’s statement for indication of allowance:
The prior art of records fails to teach performing ALD or MLD of a composition consisting of tBuMe2SiLi in alternating pulses with ozone on a substrate.
Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.”
Any inquiry concerning this communication or earlier communications from the examiner should be directed to BRIAN K TALBOT whose telephone number is (571)272-1428. The examiner can normally be reached Monday -Friday 7-4PM.
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/BRIAN K TALBOT/ Primary Examiner, Art Unit 1712
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