Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined
under the first inventor to file provisions of the AIA .
In the event the determination of the status of the application as subject to AIA 35
U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
Election/Restrictions
Applicant’s election without traverse of Group I (Claims 1-9 and 21) in the reply
filed on January 30, 2026 is acknowledged.
Claims 10-20 is withdrawn from further consideration pursuant to 37 CPR
1.142(b) as being drawn to nonelected inventions, there being no allowable generic or linking claim.
DETAILED ACTION
Specification
The specification has not been checked to the extent necessary to determine the
presence of all possible minor errors. The applicant's cooperation is requested in correcting any errors of which the applicant may become aware in the specification.
Claim Objections
Claims 3 and 7-9 are objected to because of the following informalities:
Claim 3
Line 2, “the ferroelectric BO” should be --the ferroelectric BO portion--
Claim 7
line 2, “P-E curve” should be --polarization-electric field (P-E) curve--
Claims 8-9
line 1, “Brag” should be --Bragg--
Appropriate correction is required.
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of AIA 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention.
Claims 1-9 and 21 are rejected under AIA 35 U.S.C. 102(a)(2) as being
anticipated by Burak et al. (U.S. Publication No. 20230170876; hereinafter “Burak”).
Regarding claim 1, Burak discloses a Bulk Acoustic Wave (BAW) resonator, comprising: a bottom electrode (Fig. 1A, 121); a top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151); and a ferroelectric layer (Fig. 1A; [0087]; [0091]) sandwiched between (Fig. 1A) the bottom electrode (Fig. 1A, 121) and the top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151), wherein: the ferroelectric layer (Fig. 1A; [0087]; [0091]) is formed (Fig. 1A) of a ferroelectric material (Fig. 1A; [0087]; [0091]), which has a box-shape polarization-electric field (P-E) curve (Fig. 1A; [0087]; [0091]; Examiner’s Note: The P-E curve for a ferroelectric is box-shaped.); the ferroelectric layer (Fig. 1A; [0087]; [0091]) includes (Fig. 1A) a ferroelectric border (BO) portion (Fig. 1A, 153 border portion of Ferroelectric layer) positioned (Fig. 1A) at a periphery (Fig. 1A, periphery 153) of the ferroelectric layer (Fig. 1A; [0087]; [0091]) and a ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) surrounded (Fig. 1A) by the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer); the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) has a first polarization (Fig. 1A, polarization of 153 border portion of Ferroelectric layer) and a first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer), and the ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) has a second polarization (Fig. 1A, polarization of central portion of Ferroelectric layer) and a second electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of central portion of Ferroelectric layer), wherein an absolute value (Fig. 1A, absolute value of polarization of 153 border portion of Ferroelectric layer) of the first polarization (Fig. 1A, polarization of 153 border portion of Ferroelectric layer) is less than (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) an absolute value (Fig. 1A, absolute value of polarization of polarization of central portion of Ferroelectric layer) of the second polarization (Fig. 1A, polarization of central portion of Ferroelectric layer), and the first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer) is less than (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) the second electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of central portion of Ferroelectric layer); and the ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) is configured to provide (Fig. 1A) a resonance (Fig. 1A, 100 resonance) of the BAW resonator (Fig. 1A, 100).
Regarding claim 2, Burak discloses the BAW resonator of claim 1 wherein the absolute value of the first polarization (Fig. 1A, absolute value of polarization of 153 border portion of Ferroelectric layer) is constant (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”), and the first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer) is constant (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”).
Regarding claim 3, Burak discloses the BAW resonator of claim 2 wherein the first polarization (Fig. 1A, polarization of 153 border portion of Ferroelectric layer) of the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) is a zero polarization (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”), and the first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer) of the ferroelectric BO (Fig. 1A, 153 border portion of Ferroelectric layer) is a zero electromechanical coupling coefficient (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”).
Regarding claim 4, Burak discloses the BAW resonator of claim 1 wherein the absolute value of the first polarization (Fig. 1A, absolute value of polarization of 153 border portion of Ferroelectric layer) gradually reduces (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) from an interior side (Fig. 1A, interior side of 153 border portion of Ferroelectric layer) of the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) towards (Fig. 1A) an outer edge (Fig. 1A, outer edge of 153 border portion of Ferroelectric layer) of the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer), and the first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer) gradually reduces (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) from the interior side (Fig. 1A, interior side of 153 border portion of Ferroelectric layer) of the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) towards (Fig. 1A) the outer edge (Fig. 1A, outer edge of 153 border portion of Ferroelectric layer) of the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer).
Regarding claim 5, Burak discloses the BAW resonator of claim 1 wherein the top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151) comprises a top electrode base (Fig. 1A, 137) over (Fig. 1A) the ferroelectric layer (Fig. 1A; [0087]; [0091]) and a BO ring (Fig. 1A, border ring protruding from periphery of 137) protruding (Fig. 1A) from a periphery (Fig. 1A, periphery of 37) of the top electrode base (Fig. 1A, 137), wherein: a region (Fig. 1A, region of 100)of the BAW resonator (Fig. 1A, 100), within which (Fig. 1A) the BO ring (Fig. 1A, border ring protruding from periphery of 137) is located (Fig. 1A) is a BO region (Fig. 1A, location in 100 within which border ring protruding from periphery of 137 is located); and the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) is confined within (Fig. 1A) the BO region (Fig. 1A, location in 100 within which border ring protruding from periphery of 137 is located) and aligned underneath (Fig. 1A) the BO ring (Fig. 1A, border ring protruding from periphery of 137), while the ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) is not covered (Fig. 1A) by the BO ring (Fig. 1A, border ring protruding from periphery of 137).
Regarding claim 6, Burak discloses the BAW resonator of claim 1 wherein the top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151) has a flat shape (Fig. 1A, flat shape of 37/139/141/143/145/147/149/151).
Regarding claim 7, Burak discloses the BAW resonator of claim 1 wherein the ferroelectric material (Fig. 1A; [0087]; [0091]) is scandium aluminum nitride (ScxAl1-xN) (Fig. 1A; [0087]; [0091]) and the P-E curve (Fig. 1A; [0091] – “ScxAl1-xN”) of ScxAl1-N (Fig. 1A; [0091] – “ScxAl1-xN”) is dependent (Fig. 1A; [0091] – “ScxAl1-xN”) on a scandium concentration x (Fig. 1A; [0091] – “ScxAl1-xN”).
Regarding claim 8, Burak discloses the BAW resonator of claim 1 further comprises a bottom Brag reflector (Fig. 1A, 113; [0121]) formed underneath (Fig. 1A) the bottom electrode (Fig. 1A, 121).
Regarding claim 9, Burak discloses the BAW resonator of claim 8 further comprises a top Brag reflector (Fig. 1A, 115; [0132]) formed over (Fig. 1A) the top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151).
Regarding claim 21, Burak discloses a system, comprising: a radio-frequency (RF) input circuitry (Figs. 1A/11; Fig. 11, 9515N input circuitry); a RF output circuitry (Figs. 1A/11; Fig. 11, 9515N output circuitry); and a filter circuitry (Figs. 1A/11A; Fig. 11, 9112J/9114J/9116J/9118J), which includes at least one Bulk Acoustic Wave (BAW) resonator (Figs. 1A/11; Fig. 1A, 100; Fig. 11, 9112J/9114J/9116J/9118J; [0433]), connected between the RF input circuitry (Figs. 1A/11; Fig. 11, 9515N input circuitry) and the RF output circuitry (Figs. 1A/11; Fig. 11, 9515N output circuitry), wherein the at least one BAW resonator (Figs. 1A/11; Fig. 1A, 100; Fig. 11, 9112J/9114J/9116J/9118J; [0433]) comprises: a bottom electrode (Fig. 1A, 121); a top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151); and a ferroelectric layer (Fig. 1A; [0087]; [0091]) sandwiched between (Fig. 1A) the bottom electrode (Fig. 1A, 121) and the top electrode structure (Fig. 1A, 137/139/141/143/145/147/149/151), wherein: the ferroelectric layer (Fig. 1A; [0087]; [0091]) is formed (Fig. 1A) of a ferroelectric material (Fig. 1A; [0087]; [0091]), which has a box-shape polarization-electric field (P-E) curve (Fig. 1A; [0087]; [0091]; Examiner’s Note: The P-E curve for SCALN is box-shaped.); the ferroelectric layer (Fig. 1A; [0087]; [0091]) includes (Fig. 1A) a ferroelectric border (BO) portion (Fig. 1A, 153 border portion of Ferroelectric layer) positioned (Fig. 1A) at a periphery (Fig. 1A, periphery 153) of the ferroelectric layer (Fig. 1A; [0087]; [0091]) and a ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) surrounded (Fig. 1A) by the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer); the ferroelectric BO portion (Fig. 1A, 153 border portion of Ferroelectric layer) has a first polarization (Fig. 1A, polarization of 153 border portion of Ferroelectric layer) and a first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer), and the ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) has a second polarization (Fig. 1A, polarization of central portion of Ferroelectric layer) and a second electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of central portion of Ferroelectric layer), wherein an absolute value (Fig. 1A, absolute value of polarization of 153 border portion of Ferroelectric layer) of the first polarization (Fig. 1A, polarization of 153 border portion of Ferroelectric layer) is less than (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) an absolute value (Fig. 1A, absolute value of polarization of polarization of central portion of Ferroelectric layer) of the second polarization (Fig. 1A, polarization of central portion of Ferroelectric layer), and the first electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of 153 border portion of Ferroelectric layer) is less than (Fig. 1A; [0146] – “The etched edge region may, but need not, assist with acoustic isolation of the resonators. The etched edge region may, but need not, help with avoiding acoustic losses for the resonators.”) the second electromechanical coupling coefficient (Fig. 1A, electromechanical coupling coefficient of central portion of Ferroelectric layer); and the ferroelectric central portion (Fig. 1A, central portion of Ferroelectric layer) is configured to provide (Fig. 1A) a resonance (Figs. 1A/11; Fig. 1A, resonance of 100; Fig. 11, resonance of 9112J/9114J/9116J/9118J; [0433]) of the BAW resonator (Figs. 1A/11; Fig. 1A, 100; Fig. 11, 9112J/9114J/9116J/9118J; [0433]).
Conclusion
Any inquiry concerning this communication should be directed to MONICA MATA
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supervisor, Dedei Hammond, can be reached on (571) 270-7938. The fax phone number for the organization where this application or proceeding is assigned is (571) 273-8300.
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/MONICA MATA/
Patent Examiner, Art Unit 2837
3 March 2026
/EMILY P PHAM/Primary Examiner, Art Unit 2837