DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Continued Examination Under 37 CFR 1.114
A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 3 February 2026 has been entered.
Claim Interpretation
The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action.
This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, because the claim limitation(s) uses a generic placeholder that is coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitation(s) is/are: container transport unit, semiconductor fabrication plant (Claims 1-20), semiconductor fabrication equipment (Claims 1-18), container relay unit (Claims 1-2, 5-10, and 12-20), storage module (Claims 5 and 18-20), and control unit (Claims 16-17).
Claim Rejections - 35 USC § 102
Claim(s) 1 and 7-11 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Iwasaki et al. (US 6129496) (“Iwasaki”).
Claim 1: a container transport unit (42) installed in a semiconductor fabrication plant (FIG. 1-5), the container transport unit transporting containers loaded with semiconductor substrates (40);
a load port unit (32) where the containers are loaded or unloaded;
semiconductor fabrication equipment connected to the load port unit (inside 32), the semiconductor fabrication equipment processing the semiconductor substrates loaded in the containers; and
a container relay unit relaying (36) the containers between the container transport unit and the load port unit,
wherein the container relay unit is installed on the same level as a moving path of the container transport unit, on a level above the load port unit (40 at another 36 in FIG. 1);
wherein the container relay unit is separate from both the container transport unit and the load port unit (FIG. 1 clearly shows this),
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit (42 to 36 in FIG. 1) and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit (the passing from 36 to 32 is directly done at least by 38 in FIG. 1);
Claim 7: a side track buffer (STB) storing the containers,
wherein the container relay unit is installed in the STB (side tracks/etc. in 36);
Claim 8: wherein the STB is installed on a level including the level above the load port unit (FIG. 1/5);
Claim 9: wherein the STB includes a door that can be opened in a direction toward the load port unit (122 or 110);
Claim 10: wherein the door is opened when the containers are delivered to the load port unit (122/110 move to move 40 to eventually get to the load port unit);
Claim 11: wherein the container relay unit includes a door that can be opened in a direction toward the load port unit (FIG. 1/5).
Claim Rejections - 35 USC § 103
Claim(s) 1-6, 12-14, and 16-20 is/are rejected under 35 U.S.C. 103 as being unpatentable over Dovids et al., embodiment of FIG. 5D (US 10497596) (“Dovids5D”) in view of Dovids et al., embodiment of FIG. 7B (US 10497596) (“Dovids7B”). It is noted that the combination above may already be disclosed in Dovids7B alone (see at least col. 11, lines 12-23); however, it is not clear from the written description of Dovids if that is the case.
Dovids5D discloses:
Claim 1: a container transport unit installed in a semiconductor fabrication plant (FIG. 5D), the container transport unit transporting containers loaded with semiconductor substrates (FOUP 553 has semiconductor substrates);
a load port unit (573) where the containers are loaded or unloaded;
semiconductor fabrication equipment connected to the load port unit (“FIGS. 5A, 5B, 5C, 5D and 5E describe, in a side component view, an embodiment of the present invention wherein an operator present on floor of the semiconductor manufacturing and processing facility operates its ceiling mounted storage and processing system.”), the semiconductor fabrication equipment processing the semiconductor substrates loaded in the containers; and
a container relay unit relaying (563) the containers between the container transport unit and the load port unit,
wherein the container relay unit is installed on the same level as a moving path of the container transport unit, on a level above the load port unit (via 513/etc.);
wherein the container relay unit is configured not to be movable in a horizontal direction or along a rail installed in the semiconductor fabrication plant and to transport the container in a vertical direction (FIG. 5D);
Claim 2: wherein the container relay unit includes a lift module, which delivers the containers received from the container transport unit to the load port unit (“As shown, a FOUP 583 may be moved from the floor mounted station 574 to a ceiling mounted station 563” via lift module);
Claim 3: wherein the lift module receives the containers from the container transport unit, or
the container relay unit further includes a robot arm, which picks up the containers from the container transport unit (533; circle is robot);
Claim 4: wherein if the container relay unit further includes the robot arm, the robot arm and the lift module are configured to move in different directions from each other (FIG. 5D);
Claim 5: wherein the container relay unit further include a storage module, which temporarily stores the containers (“ceiling mounted storage”);
Claim 6: wherein the lift module delivers the containers to the load port unit with the containers gripped or stored (FIG. 5D);
Claim 12: wherein the container relay unit communicates with at least one of the container transport unit and the load port unit (FIG. 5D);
Claim 13: wherein the at least one of the container transport unit and the load port unit determines whether the container relay unit is able to relay the containers, based on a result of the communication with the container relay unit (physical communication between structures at least in FIG. 5D; 570);
Claim 14: wherein if the container relay unit is determined as not being able to relay the containers, the container transport unit delivers the containers directly to the load port unit (via another route via FIG. 5D; 570);
Claim 16: a control unit controlling operations of the container transport unit, the container relay unit, the load port unit, and the semiconductor fabrication equipment (570);
Claim 17: wherein the container unit determines whether the container relay unit is able to relay the containers, based on a result of communication with at least one of the container transport unit and the load port unit (at least physical communication between structures at least in FIG. 5D; ability based on presence of 553’s therein; 570);
Claim 18: a container transport unit (FIG. 5D) installed in a semiconductor fabrication plant (Fig. 5D), the container transport unit transporting containers loaded with semiconductor substrates (FOUP 553 has semiconductor substrates);
a load port unit (573) where the containers are loaded or unloaded;
semiconductor fabrication equipment (“FIGS. 5A, 5B, 5C, 5D and 5E describe, in a side component view, an embodiment of the present invention wherein an operator present on floor of the semiconductor manufacturing and processing facility operates its ceiling mounted storage and processing system.”) connected to the load port unit,
the semiconductor fabrication equipment processing the semiconductor substrates loaded in the container (Fig. 5D);
a container relay unit (563) relaying the containers between the container transport unit and the load port unit,
wherein the container relay unit includes a robot arm (533; circle is robot), which picks up the containers from the container transport unit, a storage module (“ceiling mounted storage”), which temporarily stores the containers, and a lift module (“As shown, a FOUP 583 may be moved from the floor mounted station 574 to a ceiling mounted station 563” via lift module), which delivers the containers to the load port unit,
the container relay unit is installed on the same level as a moving path of the container transport unit, on a level above the load port unit (via 513/etc.),
the container relay unit communicates with at least one of the container transport unit and the load port unit (physical communication between structures at least in Fig. 5D),
if the container relay unit is able to relay the containers, the container transport unit delivers the containers directly to the load port unit (physical communication between structures at least in Fig. 5D; via another route via FIG. 5D; 570);
the container relay unit is configured not to be movable in a horizontal direction or along a rail installed in the semiconductor fabrication plant and to transport the container in a vertical direction (FIG. 5D);
Claim 19: container relay unit (563) relaying containers between a container transport unit (FIG. 5D),
which transports containers loaded with semiconductor substrates (), in a semiconductor fabrication plant (Fig. 5D), and a load port unit (573) where the containers are loaded or unloaded, the container relay unit comprising: a robot arm (533; circle is robot) picking up the containers from the container transport unit;
a storage module (“ceiling mounted storage”) temporarily storing the containers;
a lift module (“As shown, a FOUP 583 may be moved from the floor mounted station 574 to a ceiling mounted station 563” via lift module) delivering the containers to the load port unit;
wherein the container relay unit is configured not to be movable in a horizontal direction or along a rail installed in the semiconductor fabrication plant and to transport the container in a vertical direction (FIG. 5D);
Claim 20: wherein the container relay unit is installed on the same level as a moving path of the container transport unit (via 513/etc.), on a level above the load port unit (physical communication between structures at least in Fig. 5D).
Dovids5D does not directly show:
Claim 1: wherein the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit;
Claim 18: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit;
Claim 19: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit.
Dovids7B shows a similar device having:
Claim 1: wherein the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit (container transport unit is on the left of FIG. 7B that exits and is separate from the upper dark rectangle; the load port unit is inside the lower dark rectangle; there is direct transfer between the upper dark rectangle and the lower dark rectangle via the squares within each on the right as shown with the dotted vertical line between them that signifies direct transfer between them; there is implied transference of a container between container transport unit and the upper dark rectangle in FIG. 7B);
Claim 18: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit (container transport unit is on the left of FIG. 7B that exits and is separate from the upper dark rectangle; the load port unit is inside the lower dark rectangle; there is direct transfer between the upper dark rectangle and the lower dark rectangle via the squares within each on the right as shown with the dotted vertical line between them that signifies direct transfer between them; there is implied transference of a container between container transport unit and the upper dark rectangle in FIG. 7B);
Claim 19: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit (container transport unit is on the left of FIG. 7B that exits and is separate from the upper dark rectangle; the load port unit is inside the lower dark rectangle; there is direct transfer between the upper dark rectangle and the lower dark rectangle via the squares within each on the right as shown with the dotted vertical line between them that signifies direct transfer between them; there is implied transference of a container between container transport unit and the upper dark rectangle in FIG. 7B);
with a reasonable expectation of success for the purpose of expanding connections between the ceiling components and the floor components to increase transfer efficiency and variability (col. 11, lines 24-33; col. 2, lines 4-10). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Dovids5D as taught by Dovids7B and include Dovids7B’s similar device having:
Claim 1: wherein the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit;
Claim 18: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit;
Claim 19: the container relay unit is separate from both the container transport unit and the load port unit, and
wherein, when the container relay unit is used to relay the containers, the container transport unit passes the container directly to the container relay unit and the container relay unit subsequently passes the container received from the container transport unit directly to the load port unit;
with a reasonable expectation of success for the purpose of expanding connections between the ceiling components and the floor components to increase transfer efficiency and variability.
Claim(s) 15 is/are rejected under 35 U.S.C. 103 as being unpatentable over Dovids5D in view of Dovids7B and Wang et al. (US 2011/0106300) (“Wang”). Dovids5D discloses all the limitations of the claims as discussed above.
Dovids5D does not directly show:
Claim 15: wherein the container relay unit communicates with the at least one of the container transport unit and the load port unit in a parallel input/output (PIO) method.
Wang shows a similar device having:
Claim 15: wherein the container relay unit communicates with the at least one of the container transport unit and the load port unit in a parallel input/output (PIO) method (para. [0027]-[0034]);
with a reasonable expectation of success for the purpose of improving the lean manufacturing capability of the manufacturing facility and increasing the cost effectiveness of faster facility processing of semiconductor substrates (para. [0004]). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Dovids5D and Dovids7B as taught by Wang and include Wang’s similar device having:
Claim 15: wherein the container relay unit communicates with the at least one of the container transport unit and the load port unit in a parallel input/output (PIO) method;
with a reasonable expectation of success for the purpose of improving the lean manufacturing capability of the manufacturing facility and increasing the cost effectiveness of faster facility processing of semiconductor substrates.
Conclusion
Applicant's arguments filed 3 February 2026 have been fully considered but they are not persuasive re. Iwasaki.
Re. Iwasaki, the passing from 36 to 32 is directly done at least by 38 in FIG. 1.
Applicant’s arguments, see pp. 9-10, filed 3 February 2026, with respect to the rejection(s) of claim(s) 1-6, 12-14, and 16-20 under Dovids and the objection have been fully considered and are persuasive. Therefore, the rejection and objection have been withdrawn. However, upon further consideration, a new ground(s) of rejection is made in view of Dovids5D and Dovids7B.
Re. Dovids, container transport unit is on the left of FIG. 7B that exits and is separate from the upper dark rectangle. The load port unit is inside the lower dark rectangle. There is direct transfer between the upper dark rectangle and the lower dark rectangle via the squares within each on the right as shown with the dotted vertical line between them that signifies direct transfer between them. There is implied transference of a container between container transport unit and the upper dark rectangle in FIG. 7B.
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Gerald McClain whose telephone number is (571)272-7803. The examiner can normally be reached Monday through Friday from 8:30 a.m. to 5:00 p.m. and at gerald.mcclain@uspto.gov (see MPEP 502.03 (II)).
Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Saul Rodriguez can be reached at (571) 272-7097. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/Gerald McClain/Primary Examiner, Art Unit 3652