Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
Claim(s) 1-20 is/are rejected under 35 U.S.C. 103 as being unpatentable over Hamaya (US 20140057078).
Hamaya (US 20140057078) teaches a spray material comprising rare earth element oxyfluoride particles having an aspect ratio of up to 2, an average particle size of 10 to 100 .mu.m, and a bulk density of 0.8 to 2 g/cm.sup.3, and containing not more than 0.5% by weight of carbon and 3 to 15% by weight of oxygen (see claims 1).
The spray material wherein the rare earth element is one or more elements selected from the group consisting of Y and Group 3A elements from La to Lu or wherein the rare earth element is selected from the group consisting of Y, Gd and Er forming oxides such as Y-O-F (see claims).
Regarding claim 9, Hamaya (US 20140057078) teachings are considered to encompass claim1 which by definition encompass claim 9 which depends from claim 9, and thus would be obvious to provide absent a teaching of unexpected results.
The art teaches a fluorine doped and overlapping carbon content yttrium oxide meeting the limitations of claims 1-2 at least.
The coating can be a PVD coating, or thermal plasma spray (See [0004]).
Regarding claim 10, the coating can be multilayer coating as claimed (See [0020-0024]).
The sprayed coating has a high corrosion resistance to plasma etching and a long lifetime (See abstract, [0002]).
Hamaya (US 20140057078) teaches that the process of depositing the coating in a chamber can be adjusted, including adjusting particle size or chemical polishing, to get desirable properties including reduced peak height and surface roughness (Ra) (see column 25). Therefore, it would have been obvious to one of ordinary skill in the art at the time of filing to provide the claimed surface roughness in a film of the same composition for providing desirable protective film in a chamber wall or component (see figures).
Noted relevant art: Kobrin (US 20080206539).
Kobrin (US 20080206539) teaches the present invention is related to carbon-doped metal oxide films. The carbon-doped metal oxide films provide a low coefficient of friction, for example ranging from about 0.05 to about 0.4. In addition, the carbon-doped metal oxide films applied over a silicon substrate, for example, provide anti-stiction properties, where the measured work of adhesion for a MEMS device cantilever beam coated with the carbon-doped metal oxide film is less than 10 .mu.J/m.sup.2. In addition, the carbon-doped metal oxide films provide unexpectedly good water vapor transmission properties. The carbon content in the carbon-doped metal oxide films ranges from about 5 atomic % to about 20 atomic % (see abstract).
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to DANIEL H MILLER whose telephone number is (571)272-1534. The examiner can normally be reached M-TH 9-6.
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/DANIEL H MILLER/