DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Continued Examination Under 37 CFR 1.114
A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 10 June 2026 has been entered.
Claim Rejections - 35 USC § 103
Claim(s) 1-3, 8-11, and 17-18 is/are rejected under 35 U.S.C. 103 as being unpatentable over KO MYUNG SU (KR 20070102221 A) (“Ko”) in view of Dan et al. (US 2021/0339393) (“Dan”). Ko discloses:
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Claim 1: an elevator (29) configured to elevate a vehicle (vehicle holding 21 in figure 2) containing a plurality of semiconductor device carriers (plurality over time) to position the vehicle at each of a plurality of process floors (C/D);
a plurality of storages (47X/UX/RX), wherein at least one of the plurality of storages is provided at each of the plurality of process floors, and each of the plurality of storages is configured to store at least one of the plurality of semiconductor device carriers;
a plurality of first robots (27X), wherein at least one of the plurality of first robots is provided at each of the plurality of process floors, and each of the plurality of first robots is configured to transfer the vehicle between the elevator and a respective one of the plurality of process floors (figure 2); and
a plurality of second robots (47X and/or 53 and/or 55), wherein at least one of the plurality of second robots is provided at each of the plurality of process floors, and each of the plurality of second robots is configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 2: wherein the plurality of semiconductor device carriers are loaded into the vehicle in at least one of a horizontal direction or a vertical direction (figure 2);
Claim 3: wherein each of the plurality of storages comprises a plurality of shelves configured to store the plurality of semiconductor device carriers in at least one of the horizontal direction or the vertical direction (figure 2);
Claim 8: wherein a first one of the plurality of second robots is provided at a first side of one of the plurality of first robots,
wherein a second one of the plurality of second robots is provided at a second side of the one of the plurality of first robots, and
wherein a pair of storages of the plurality of storages are adjacent to the first one of the plurality of second robots and the second one of the plurality of second robots (figure 2; at 47a/47b and/or at 47c/47d);
Claim 9: a controller configured to control operations of the elevator, the plurality of storages, the plurality of first robots and the plurality of second robots (“A controller with a built-in program to control the flow is installed, and its operation is controlled by the controller.” (English translation));
Claim 10: an elevator (29) configured to elevate a vehicle (vehicle holding 21 in figure 2) containing a plurality of semiconductor device carriers (plurality over time) to position the vehicle at each of a plurality of process floors (C/D);
a plurality of storages (47X/UX/RX), wherein at least one of the plurality of storages is provided at each of the plurality of process floors, and each of the plurality of storages comprises a plurality of shelves configured to store the plurality of semiconductor device carriers;
a plurality of first robots (27X), wherein at least one of the plurality of first robots is provided at each of the plurality of process floors, and each of the plurality of first robots is configured to transfer the vehicle between the elevator and a respective one of the plurality of process floors;
a plurality of second robots (47X and/or 53 and/or 55), wherein a pair of second robots of the plurality of second robots is provided at each of the plurality of process floors (figure 2), a first one of the pair of second robots is provided at a first side of one of the plurality of first robots, a second one of the pair of second robots is provided at a second side of the one of the plurality of first robots, and each of the plurality of second robots is configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages (figure 2); and
a controller configured to control operations of the elevator, the plurality of storages, the plurality of first robots, and the plurality of second robots (“A controller with a built-in program to control the flow is installed, and its operation is controlled by the controller.” (English translation));
Claim 11: wherein the plurality of semiconductor device carriers are loaded into the vehicle in at least one of a horizontal direction or a vertical direction, and wherein the plurality of shelves are configured to store the plurality of semiconductor device carriers in at least one of the horizontal direction or the vertical direction (figure 2);
Claim 17: a pair of storages of the plurality of storages provided adjacent to one of the plurality of second robots (figure 2; at 47a/47b and/or at 47c/47d);
Claim 18: an elevator (29) configured to elevate a vehicle (vehicle holding 21 in figure 2), into which a plurality of semiconductor device carriers are loaded (plurality over time), in a horizontal direction and a vertical direction to position the vehicle at each of a plurality of process floors (C/D);
a plurality of storages (47X/UX/RX), wherein a pair of storages of the plurality of storages is provided at each of the plurality of process floors, each of the pair of storages comprises a plurality of shelves configured to store semiconductor device carriers of the plurality of semiconductor device carriers in the horizontal direction and the vertical direction;
a plurality of first robots (27X), wherein at least one of the plurality of first robots is provided at each of the plurality of process floors, and each of the plurality of first robots is configured to transfer the vehicle between the elevator and a respective one of the plurality of process floors;
a plurality of second robots (47X and/or 53 and/or 55), wherein a pair of second robots the plurality of second robots is provided at each of the plurality of process floors between one of the plurality of first robots and one of the plurality of storages (figure 2), and each of the plurality of second robots is configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages (figure 2); and
a controller configured to control operations of the elevator, the plurality of storages, the plurality of first robots and the plurality of second robots (“A controller with a built-in program to control the flow is installed, and its operation is controlled by the controller.” (English translation)).
Ko does not directly show:
Claim 1: a vehicle containing a plurality of semiconductor device carriers at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time;
Claim 10: a vehicle containing a plurality of semiconductor device carriers at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time;
Claim 18: a vehicle, into which a plurality of semiconductor device carriers are loaded at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle into which the plurality of semiconductor device carriers are loaded at a time.
Dan shows a similar device having:
Claim 1: a vehicle containing a plurality of semiconductor device carriers at a time (FIG. 4 shows plurality of semiconductor device carriers 400 within 200 such that plurality of semiconductor device carriers 400 are loaded/carried/etc. at a time);
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (foup box);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time (FIG. 21);
Claim 10: a vehicle containing a plurality of semiconductor device carriers at a time (FIG. 4 shows plurality of semiconductor device carriers 400 within 200 such that plurality of semiconductor device carriers 400 are loaded/carried/etc. at a time);
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (foup box);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time (FIG. 21);
Claim 18: a vehicle, into which a plurality of semiconductor device carriers are loaded at a time (FIG. 4 shows plurality of semiconductor device carriers 400 within 200 such that plurality of semiconductor device carriers 400 are loaded/carried/etc. at a time);
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (foup box);
each of the plurality of first robots is configured to transfer the vehicle into which the plurality of semiconductor device carriers are loaded at a time (FIG. 21);
with a reasonable expectation of success for the purpose of effectively improving the Takt time and working efficiency (para. [0006]). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Ko as taught by Dan and include Dan’s similar device having:
Claim 1: a vehicle containing a plurality of semiconductor device carriers at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time;
Claim 10: a vehicle containing a plurality of semiconductor device carriers at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle containing the plurality of semiconductor device carriers at a time;
Claim 18: a vehicle, into which a plurality of semiconductor device carriers are loaded at a time;
wherein each of the plurality of semiconductor device carriers comprises a Front Opening Unified Pod (FOUP);
each of the plurality of first robots is configured to transfer the vehicle into which the plurality of semiconductor device carriers are loaded at a time;
with a reasonable expectation of success for the purpose of effectively improving the Takt time and working efficiency.
Claim(s) 4, 12, and 19 is/are rejected under 35 U.S.C. 103 as being unpatentable over Ko in view of Dan and Dan et al. (CN 108406730 A) (“Dan”). Ko discloses all the limitations of the claims as discussed above.
Ko does not directly show:
Claims 4, 12, and 19: wherein each of the plurality of first robots comprises a sensor configured to detect a bottom surface of the elevator.
Dan shows a similar device having:
Claims 4, 12, and 19: wherein each of the plurality of first robots comprises a sensor configured to detect a bottom surface of the elevator (Dan suggests sensor 7 detects the robot bottom at 8);
with a reasonable expectation of success for the purpose of helping the robot carry the carrier better such that the carrier is not damaged (“The robot for transporting has the advantage of preventing the article from being detached from the middle of the side arm and carrying the article better when the object is transported, and the use of the omnidirectional wheel allows the robot for transporting to travel and rotate at an arbitrary angle, and the article is convenient.” (English translation)). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Ko and Dan as taught by Dan and include Dan’s similar device having:
Claims 4, 12, and 19: wherein each of the plurality of first robots comprises a sensor configured to detect a bottom surface of the elevator;
with a reasonable expectation of success for the purpose of helping the robot carry the carrier better such that the carrier is not damaged.
Claim(s) 5-7, 13-16, and 20 is/are rejected under 35 U.S.C. 103 as being unpatentable over Ko in view of Dan and Kim et al. (KR 101331368 B1) (“Kim”). Ko discloses all the limitations of the claims as discussed above.
Ko does not directly show:
Claim 5: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
at least one fork connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 6: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction
Claim 7: wherein the at least one fork comprises a plurality of forks separated by a gap in a vertical direction.;
Claim 13: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 14: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction;
Claim 15: wherein the controller is configured to independently control operations of the transfer shafts;
Claim 16: wherein the plurality of forks are separated by a gap in a vertical direction;
Claim 20: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages.
Kim shows a similar device having:
Claim 5: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
at least one fork connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 6: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction
Claim 7: wherein the at least one fork comprises a plurality of forks separated by a gap in a vertical direction.;
Claim 13: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 14: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction;
Claim 15: wherein the controller is configured to independently control operations of the transfer shafts;
Claim 16: wherein the plurality of forks are separated by a gap in a vertical direction;
Claim 20: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
(For claims above: figure 1; “The robot arm includes a plurality of forks(101), a plurality of arm members(102,103), and a plurality of robot arm shafts(111,112,113).” (English translation); the meandering correction implies independent control of transfer shafts 111-113)
with a reasonable expectation of success for the purpose of providing a robot with a meandering correcting function and a meandering correcting method are provided to improve productivity by enhancing the linear performance of a robot (“PURPOSE: A substrate transferring robot with a meandering correcting function and a meandering correcting method are provided to improve productivity by enhancing the linear performance of a robot arm.” (English translation)). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Ko and Dan as taught by Kim and include Kim’s similar device having:
Claim 5: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
at least one fork connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 6: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction
Claim 7: wherein the at least one fork comprises a plurality of forks separated by a gap in a vertical direction.;
Claim 13: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
Claim 14: wherein the transfer shaft comprises a plurality of shafts provided in a horizontal direction;
Claim 15: wherein the controller is configured to independently control operations of the transfer shafts;
Claim 16: wherein the plurality of forks are separated by a gap in a vertical direction;
Claim 20: wherein each of the plurality of second robots comprises:
a transfer shaft configured to rotate about a vertical axis; and
a plurality of forks connected to the transfer shaft and configured to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages;
with a reasonable expectation of success for the purpose of providing a robot with a meandering correcting function and a meandering correcting method are provided to improve productivity by enhancing the linear performance of a robot.
Response to Arguments
Applicant’s arguments, see pp. 8-13, filed 10 June 2026, with respect to the rejection(s) of claim(s) 1-20 under Ko et al. have been fully considered and are persuasive. Therefore, the rejection has been withdrawn. However, upon further consideration, a new ground(s) of rejection is made in view of Ko and Dan et al.
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Gerald McClain whose telephone number is (571)272-7803. The examiner can normally be reached Monday through Friday from 8:30 a.m. to 5:00 p.m. and at gerald.mcclain@uspto.gov (see MPEP 502.03 (II)).
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Saul Rodriguez can be reached at (571) 272-7097. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/Gerald McClain/Primary Examiner, Art Unit 3652
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