DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b ) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the appl icant regards as his invention. Claims 13-14 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 13 is construed to be indefinite because the recitations “the gas supply part” and “the gas” (singular form and plural occurrences) lack a positive antecedent basis. Since claim 14 depends upon an indefinite claim, that claim is construed to be indefinite by dependency. Allowable Subject Matter Claims 1-20 are allowable over the prior art of record because the apparatus for processing a substrate with all the independently claimed features including a drying chamber drying two divided substrates and a dryness compensation part is not found in the prior art either singly or in combination. Claims 13-14 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. Claims 13-14 would be allowable if rewritten to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA), 2nd paragraph, set forth in this Office action and to include all of the limitations of the base claim and any intervening claims. Conclusion The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Other prior art references cited with this action, may teach one or more claim features, but do not rise to a level of anticipation, ob viousness, and/or double patenting such that a rejection would be proper and reasonable under current Office practice and procedure . References A, N, O, P, cited with this action are patent publications from the same inventive entity as the current application. References B, C, D, E, F, G, H, I, J, K, L, Q, cited with this action teach drying substrate apparatus. Any inquiry concerning this communication or earlier communications from the examiner should be directed to FILLIN "Examiner name" \* MERGEFORMAT STEPHEN MICHAEL GRAVINI whose telephone number is FILLIN "Phone number" \* MERGEFORMAT (571)272-4875 . The examiner can normally be reached FILLIN "Work Schedule?" \* MERGEFORMAT M-Th 5:30 am to 5:00 (mid day flex) first F 6:00 am t0 11:00 am . Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, FILLIN "SPE Name?" \* MERGEFORMAT Craig Schneider can be reached at FILLIN "SPE Phone?" \* MERGEFORMAT 571 272 3607 . The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /Tuesday, March 24, 2026 STEPHEN M GRAVINI/ Primary Examiner, Art Unit 3753