Prosecution Insights
Last updated: October 02, 2026
Application No. 18/497,324

SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PLACING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CHARGE AMOUNT CONTROL METHOD, AND CHARGE AMOUNT CONTROL PROGRAM

Non-Final OA §102
Filed
Oct 30, 2023
Priority
Nov 02, 2022 — JP 2022-176235
Examiner
SHAHINIAN, LEVON J
Art Unit
3762
Tech Center
3700 — Mechanical Engineering & Manufacturing
Assignee
Ebara Corporation
OA Round
1 (Non-Final)
86%
Grant Probability
Favorable
1-2
OA Rounds
0m
Est. Remaining
79%
With Interview

Examiner Intelligence

Grants 86% — above average
86%
Career Allowance Rate
717 granted / 838 resolved
+15.6% vs TC avg
Minimal -6% lift
Without
With
+-6.5%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
27 currently pending
Career history
861
Total Applications
across all art units

Statute-Specific Performance

§101
0.7%
-39.3% vs TC avg
§103
42.4%
+2.4% vs TC avg
§102
33.1%
-6.9% vs TC avg
§112
20.7%
-19.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 838 resolved cases

Office Action

§102
DETAILED ACTION The communication dated 7/17/2026 has been entered and fully considered. Claims 13-23 were canceled. Claims 1-12 are currently pending. Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Election/Restrictions Applicant’s election without traverse of Group I in the reply filed on 7/17/2026 is acknowledged. Claims 10-12 are withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention, there being no allowable generic or linking claim. Election was made without traverse in the reply filed on 7/17/2026. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claims 1, 6, and 9 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Minoshima et al. U.S. Publication 2018/0294171 (henceforth referred to as Minoshima). As for claim 1, Minoshima teaches a substrate cleaning apparatus (Fig. 2) comprising: a substrate holding and rotating mechanism (Fig. 2: parts 301-304) configured to hold and rotate a substrate (Fig. 2: part W); a cleaning liquid supplier (Fig. 2: parts 315-316) configured to supply a cleaning liquid to the substrate; a cleaning member (Fig. 2: parts 307-308) configured to come into contact with the substrate to clean the substrate; a charge amount adjustment apparatus capable of increasing and decreasing a charge amount of the substrate (paragraph [0063]); a charge amount measuring instrument configured to measure the charge amount of the substrate (paragraph [0055]); and a controller (Fig. 1: part 7) configured to control the charge amount adjustment apparatus according to the charge amount measured by the charge amount measuring instrument (paragraph [0037]). As for claim 6, Minoshima further teaches that the substrate holding and rotating mechanism has a non-conductive holding member that comes into contact with the substrate and holds the substrate (paragraphs [0038]-[0039]; Fig. 2). As for claim 9, Minoshima further teaches that the controller controls the charge amount adjustment apparatus in a state where the cleaning liquid is supplied and the cleaning member is cleaning the substrate (paragraphs [0028]-[0029]). Allowable Subject Matter Claims 2-5 and 7-8 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. The following is a statement of reasons for the indication of allowable subject matter: Minoshima et al. U.S. Publication 2018/0294171, the closest prior art, differs from the instant claims in failing to teach that the controller controls the charge amount adjustment apparatus such that the charge amount measured by the charge amount measuring instrument falls within a target range. Furthermore, it would not have been obvious to one of ordinary skill in the art before the effective filing date of the claimed invention to modify the substrate cleaning apparatus taught by Minoshima as claimed. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to LEVON J SHAHINIAN whose telephone number is (571)270-1384. The examiner can normally be reached M-F: 9:30am-6:00pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael Barr can be reached at (571)272-1414. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /LEVON J SHAHINIAN/Primary Examiner, Art Unit 1711
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Prosecution Timeline

Oct 30, 2023
Application Filed
Aug 26, 2026
Non-Final Rejection mailed — §102 (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
86%
Grant Probability
79%
With Interview (-6.5%)
2y 6m (~0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 838 resolved cases by this examiner. Grant probability derived from career allowance rate.

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