DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Priority
Receipt is acknowledged of certified copies of papers required by 37 CFR 1.55.
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claim(s) 1-2 and 4-5 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Riichi Kano (JP H085555 Y2) (“Kano”).
Claim 1: a fixed hand (3) and a plurality of movable hands (1,2,4,5) which support semiconductor wafers (13a-13e);
a fixed frame of which one end is coupled to the fixed hand to support the fixed hand (7 of 3);
a plurality of movable frames of which one ends are coupled to the movable hands to vertically move the movable hands (7’s of 1,2,4,5);
a pair of first sliders (19a,19e) which are coupled to the other ends of a pair of movable frames among the movable frames (other ends on top and bottom of figure 2) and vertically move the pair of movable frames according to rotation of a first ball screw (8a,8e); and
a pair of second sliders (19b,19d) which are coupled to the other ends of another pair of movable frames among the movable frames and vertically move the another pair of movable frames according to rotation of a second ball screw (8b,8d);
Claim 2: wherein:
the fixed hand is positioned at a middle of the movable hands; and
the fixed frame is positioned at a middle of the movable frames (figure 2);
Claim 4: wherein:
the first sliders move in opposite directions each other according to the rotation of the first ball screw; and
the second sliders move in opposite directions each other according to the rotation of the second ball screw (figure 2);
Claim 5: wherein:
the pair of movable frames coupled to the first sliders are a first movable frame positioned at an uppermost side and a last movable frame positioned at a lowermost side; and
the another pair of movable frames coupled to the second sliders are two movable frames positioned between the first movable frame and the last movable frame (figure 2).
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
Claim(s) 3 is/are rejected under 35 U.S.C. 103 as being unpatentable over Kano in view of Ono (US 5273244). Kano discloses all the limitations of the claims as discussed above.
Kano does not directly show:
Claim 3: wherein:
rotational speeds of the first ball screw and the second ball screw are different; and
movement speeds of the first sliders and the second sliders are different.
Ono shows a similar device having:
Claim 3: wherein:
rotational speeds of the first ball screw and the second ball screw are different; and
movement speeds of the first sliders and the second sliders are different (Ono suggests this at 11/12 and 31/32 for ultimately different movement speeds);
with a reasonable expectation of success for the purpose of keeping the hands at equal intervals (column 7, lines 53-60). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Kano as taught by Ono and include Ono’s similar device having:
Claim 3: wherein:
rotational speeds of the first ball screw and the second ball screw are different; and
movement speeds of the first sliders and the second sliders are different;
with a reasonable expectation of success for the purpose of keeping the hands at equal intervals.
Claim(s) 6-7, 9, and 14-15 is/are rejected under 35 U.S.C. 103 as being unpatentable over Kano in view of Akaha (JP 2010-179419) (“D1”) and Goto et al. (KR 10-2157427 B1) (“D2”). Kano discloses all the limitations of the claims as discussed above; and
Claim 14: a plurality of movable hands (1,2,4,5) which support semiconductor wafers (13a-13e);
a plurality of movable frames (7’s of 1,2,4,5) of which one ends are coupled to the movable hands to vertically move the movable hands;
a pair of first sliders (19a,19e) which are coupled to the other ends of a pair of movable frames among the movable frames and vertically move the pair of movable frames according to rotation of a first ball screw (8a,8e);
a pair of second sliders (19b,19d) which are coupled to the other ends of another pair of movable frames among the movable frames and vertically move the another pair of movable frames according to rotation of a second ball screw (8b,8d).
Kano does not directly show:
Claim 6: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a guide block which provides vertical movement passages of the movable cylinders;
Claim 7: wherein the movable cylinders vertically move according to the movement of the movable frames;
Claim 9: wherein the fixed frame and the movable frames each have a hollow to accommodate the guide block therein;
Claim 14: a plurality of stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to the stoppers;
Claim 15: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a guide block which provides vertical movement passages of the movable cylinders.
D1 shows a similar device having:
Claim 6: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a guide block which provides vertical movement passages of the movable cylinders;
(wherein a gripping mechanism (24) includes an air cylinder (83) for driving a moving member (82) for moving gripping portions (80) for gripping the substrates (2) (see paragraphs [0097]-[0110] and figures 16-18));
Claim 9: wherein the fixed frame and the movable frames each have a hollow to accommodate the guide block therein;
(wherein: the shaft retaining portions (37b, 40b, 43b, 46b) of connecting members (37, 40, 43, 46) and the shaft retaining portion (47b) of the fixing member (47) have two insertion holes (37c, 40c, 43c, 46c, 47c) penetrating therethrough forward and backward; and shaft members (87) are inserted into the insertion holes (37c, 40c, 43c, 46c, 47c) so as to slide forward and backward (see paragraphs [0102]-[0104] and figures 5, 10, and 17-19));
Claim 14: a plurality of stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to the stoppers;
(wherein when a motor (65) rotates, a linear motion member (68) rises along a male screw member (66) connected to the motor (65), a connecting plate (70) and an engaging member (77) connected to the linear motion member (68) also rise, and thus the rise of the fixing members (35, 38) connected to the connecting plate (70) causes the hands (18, 19) to rise, and the fixing members (41, 44) connected to the engaging member (77) fall so that the hands (20, 21) fall (see paragraphs [0085]-[0093] and figures 4-13).);
Claim 15: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a guide block which provides vertical movement passages of the movable cylinders;
(wherein a gripping mechanism (24) includes an air cylinder (83) for driving a moving member (82) for moving gripping portions (80) for gripping the substrates (2) (see paragraphs [0097]-[0110] and figures 16-18));
with a reasonable expectation of success for the purpose of miniaturizing the transporting apparatus even when a pitch changing mechanism that changes the pitch between a plurality of mounting portions on which a semiconductor wafer is mounted is provided (para. [0010]). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Kano as taught by D1 and include D1’s similar device having:
Claim 6: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a guide block which provides vertical movement passages of the movable cylinders;
Claim 9: wherein the fixed frame and the movable frames each have a hollow to accommodate the guide block therein;
Claim 14: a plurality of stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to the stoppers;
Claim 15: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a guide block which provides vertical movement passages of the movable cylinders;
with a reasonable expectation of success for the purpose of miniaturizing the transporting apparatus even when a pitch changing mechanism that changes the pitch between a plurality of mounting portions on which a semiconductor wafer is mounted is provided.
D2 shows a similar device having:
Claim 6: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a guide block which provides vertical movement passages of the movable cylinders;
(wherein: an upper pressure air cylinder (29) for driving a movable gripping portion (31) for gripping a substrate (S), and a lower pressure air cylinder (30) for driving a movable gripping portion (31) for pressing the substrate (S) so as to grip the substrate (S) together with fixed gripping portions (27) are included; and in conjunction with the lifting motion of an upper blade member (25) and a lower blade member (26), each movable gripping portion (31) rise and fall (see paragraphs [0038]-[0047] and figures 1-3));
Claim 7: wherein the movable cylinders vertically move according to the movement of the movable frames;
(wherein the upper pressure air cylinder (29) and the lower pressure air cylinder (30) are provided on an upper lifting member (23) and a lower lifting member (24), respectively, and thus in conjunction with the lifting motion of an upper blade member (25) and a lower blade member (26), each movable gripping portion (31) rises and falls (see paragraph [0047] and figures 1-3));
Claim 14: a plurality of stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to the stoppers;
(wherein: an upper pressure air cylinder (29) for driving a movable gripping portion (31) for gripping a substrate (S), and a lower pressure air cylinder (30) for driving a movable gripping portion (31) for pressing the substrate (S) so as to grip the substrate (S) together with fixed gripping portions (27) are included; and in conjunction with the lifting motion of an upper blade member (25) and a lower blade member (26), the each movable gripping portion (31) rises and falls (see paragraphs [0038]-[0047] and figures 1-3));
Claim 15: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a guide block which provides vertical movement passages of the movable cylinders;
with a reasonable expectation of success for the purpose of providing hands with decreased thickness compared with other apparatuses for decreasing the moment of the hand that decreases the load on the actuators (para. [0097]-[0098]). Therefore, it would have been obvious to a person having ordinary skill in the art before the effective filing date of the claimed invention to modify Kano as taught by D2 and include D2’s similar device having:
Claim 6: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a guide block which provides vertical movement passages of the movable cylinders;
Claim 7: wherein the movable cylinders vertically move according to the movement of the movable frames;
Claim 14: a plurality of stoppers positioned at one sides of the movable hands to adjust positions of the semiconductor wafers on the movable hands;
a plurality of movable cylinders which vertically move according to the movement of the movable frames and provide power to the stoppers;
Claim 15: a fixed cylinder which provides power to a stopper positioned at one side of the fixed hand to adjust a position of the semiconductor wafer on the fixed hand;
a guide block which provides vertical movement passages of the movable cylinders;
with a reasonable expectation of success for the purpose of providing hands with decreased thickness compared with other apparatuses for decreasing the moment of the hand that decreases the load on the actuators.
Allowable Subject Matter
Claims 8, 10-13, and 16 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims.
The following is a statement of reasons for the indication of allowable subject matter: the prior art does not disclose the following.
Claim 8: wherein the guide block includes:
a sidewall coupled to the fixed cylinder;
a first guide rail vertically formed and coupled to some movable cylinders among the movable cylinders; and
a second guide rail vertically formed and coupled to the remaining movable cylinders among the movable cylinders;
Claim 10: a plurality of connectors connected between the fixed cylinder and the stopper and connected between the movable cylinders and the stoppers;
Claim 11: wherein the connectors move through openings formed at one ends of the fixed frame and the movable frames;
Claim 12: wherein each of the connectors includes a pair of latching hooks formed on one surface thereof to limit a movement range of the stopper;
Claim 13: a first pully coupled to the first ball screw;
a second pully coupled to the second ball screw; and
a driving part which drives the first pully and the second pully,
wherein rotational ratios of the first pully and the second pully are differently set in consideration of movement speeds and movement distances of the movable frames;
Claim 16: wherein the guide block includes:
a sidewall coupled to the fixed cylinder;
a first guide rail vertically formed and coupled to some movable cylinders among the movable cylinders;
a second guide rail vertically formed and coupled to the remaining movable cylinders among the movable cylinders.
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US 2005/0123383 discloses hands 41 (FIG. 6-8B).
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Gerald McClain whose telephone number is (571)272-7803. The examiner can normally be reached Monday through Friday from 8:30 a.m. to 5:00 p.m. and at gerald.mcclain@uspto.gov (see MPEP 502.03 (II)).
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Saul Rodriguez can be reached at (571) 272-7097. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/Gerald McClain/Primary Examiner, Art Unit 3652