Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Notice to Applicant
Claims 1- 11 and 20 have been examined in this application. This communication is the first action on the merits. Information Disclosure Statement (IDS) filed 8/1/2024, 1/16/2025 and 7/2/2026 are acknowledged.
Claim Rejections - 35 USC § 103
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
Claims 1-11 and 20 are rejected under 35 U.S.C. 103 as being unpatentable over Goto, JP Publication No. 2019147231A, [hereinafter Goto], in view of Jang, KR Publication No. 20150125117A, [hereinafter Jang].
Regarding Claim 1,
Goto teaches
A device for processing a substrate, the device comprising: a support unit …and a driver providing rotational force to the rotation shaft (Goto Fig. 1; Pg -5-6 and related text–“The processing apparatus according to the present invention includes a first determination unit that determines an abnormality of the first rotating body based on a detection state of the first detector, and a first determination unit that is based on the detection state of the second detector. A second determination unit that determines abnormality of the two-rotor, a third determination unit that determines abnormality of the axial drive unit based on a detection state of the third detector, the first and second rotation members, At least one operation of the first and second rotating bodies and the axial drive unit is changed based on at least one determination result of the control unit that controls the axial drive unit and the first to third determination units. And a changing unit to be provided.”) ;
and a determination unit for determining whether the rotation shaft is defective, wherein the determination unit determines whether the rotation shaft is defective based on a current value applied to the driver while the rotation shaft is rotating. (Goto Pg. 5-6 and related text-“ Not only the tool rotation drive motor 46 but also the other motors 32, 48, and 53 monitor the motor load (current value) during grinding in the same manner as the tool rotation drive motor 46, and the values are less than normal values. For example, when the value rises by 20%, the decision unit 74 decides that it is a caution (recoverable), notifies an alert, and when the value rises by, for example, 30% from the normal value, an abnormality (recovery) occurs. It may be determined that the error is not possible and an error is notified.”)
Goto discloses the rotating shaft and the feature is expounded upon by Jang:
including a spin chuck supporting a substrate, a rotation shaft supporting the spin chuck ( Jang Pg. 1-2-The support unit 340 is disposed within the housing 320. The support unit 340 supports the substrate and rotates the substrate during the process. The support unit 340 has a spin head 342, a support pin 334, a chuck pin 346, a support shaft 348, a motor 349, a vibration sensor 390, and a controller 395. The spin head 342 has a top surface that is generally circular when viewed from the top. On the spin head 342, a plurality of support pins 334 are provided. The support pin 334 is spaced apart from the edge of the upper surface of the spin head 342 by a predetermined distance and protrudes upward from the spin head 342. The support pins 334 are arranged so as to have a generally annular ring shape in combination with each other. The support pin 334 supports the rear edge of the substrate such that the substrate is spaced a distance from the top surface of the spin head 342. A plurality of chuck pins 346 are provided. The chuck pin 346 is disposed farther away from the center of the spin head 342 than the support pin 334. The chuck pin 346 is provided to protrude upward from the spin head 342. The chuck pin 346 supports the side of the substrate such that the substrate is not laterally displaced in place when the spin head 340 is rotated. The chuck pin 346 is provided so as to be movable linearly between the standby position and the support position along the radial direction of the spin head 342. The standby position is a position far from the center of the spin head 342 as compared to the support position. When the substrate is loaded or unloaded onto the spin head 340, the chuck pin 346 is positioned in the standby position and the chuck pin 346 is positioned in the support position when the substrate is being processed. At the support position, the chuck pin 346 contacts the side of the substrate.”)
Goto and Jang are directed to substrate processing. It would have been obvious for one of ordinary skill in the art before the effective filing date of the claimed invention to have improve upon processing of Goto, as taught by Jang, by utilizing additional component analysis with a reasonable expectation of success of arriving at the claimed invention. One of ordinary skill in the art would have been motivated to make the modification to the teachings of Goto with the motivation of improving vibration analysis (Jang Abstract).
Regarding Claim 2,
The device of claim 1, wherein the determination unit includes an abnormality diagnosis model in which a relationship between the current value and a state of the rotation shaft is preset, and whether the rotation shaft is defective is determined by the abnormality diagnosis model (Goto Pg. 4-6 and related text- According to the above configuration, the first detector detects at least one of shaft blurring and vibration of the rotating shaft of the first rotating body, and a load of the motor that rotationally drives the first rotating body, and the second detector The third detector detects at least one of shaft shake and vibration of the rotating shaft of the second rotating body and a load of the motor that rotationally drives the second rotating body, and the third detector detects vibration of the axial driving unit and the axial driving unit. Detects rotational drive. For this reason, it is possible to effectively detect an abnormality in a behavior that is easily connected to a defect in work processing. Moreover, damage to the processing apparatus due to abnormal behavior can be effectively suppressed. ; “The determination unit 74 determines abnormality based on detection states of the vibration acceleration sensor 61 and the displacement sensor 62 provided in the processing device 10. Specifically, the determination unit 74 determines abnormality of the feed screw 45 and the axial drive motor 48 based on the detection state of the vibration acceleration sensor 61a. Moreover, the determination part 74 determines the abnormality of the tool spindle 42 based on the detection state of the vibration acceleration sensors 61b and 61c. The determination unit 74 determines an abnormality on the upper end side of the tool spindle 42 based on the detection state of the vibration acceleration sensor 61b, and determines an abnormality on the lower end side of the tool spindle 42 based on the detection state of the vibration acceleration sensor 61c. The determination unit 74 determines whether the spindle 311 is abnormal based on the detection state of the vibration acceleration sensor 61d.”).
Regarding Claim 3,
The device of claim 2, wherein the abnormality diagnosis model has a correlation between the current value and the state of the rotation shaft as data based on a correlation between vibration of the rotation shaft and the state of the rotation shaft and a correlation between the vibration of the rotation shaft and the current value, and determines whether the rotation shaft is defective based on the current value in the data. (Goto Pg. 10 and related text- Further, the processing apparatus 10 includes a plurality of vibration acceleration sensors 61a to 61d and displacement sensors 62a to 62d. The vibration acceleration sensor 61a is provided in the vicinity of the upper plate 41a of the gantry 41 where the axial drive motor 48 is attached, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61b is provided in the vicinity of the upper end side of the tool spindle 42, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61c is provided in the vicinity of the lower end side of the tool spindle 42, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61b and the vibration acceleration sensor 61c are preferably provided at positions facing each other across the tool spindle 42 in a plan view (a surface perpendicular to the Z axis). The vibration acceleration sensor 61d is provided on a bearing 312 that rotatably holds the spindle 311. The vibration acceleration sensor 61d detects vibration, converts the vibration state into an electric signal, and outputs the electric signal
Regarding Claim 4,
The device of claim 3, wherein the data includes current abnormality patterns formed in a form of a DB. (Goto Pg. 8 and related text- According to the above configuration, the detection results detected by the first to third detectors are acquired from a plurality of processing devices and stored for each processing device. Therefore, the database is constructed by accumulating the detection results of each processing device. be able to. For this reason, the analysis result can be fed back to another processing apparatus by analyzing the behavior of each processing apparatus based on the accumulated database. In addition, by comparing the behavior of each processing device, a processing device that exhibits a behavior different from that of other processing devices can be detected at an early stage, and the occurrence of defects can be prevented in advance.”)
Regarding Claim 5,
The device of claim 3, wherein the support unit further includes a bearing connected to the rotation shaft, and the defect in the rotation shaft includes a defect due to wear with the bearing. (Goto Pg. 3-4 and related text- The vibration acceleration sensor 61d is provided on a bearing 312 that rotatably holds the spindle 311. The vibration acceleration sensor 61d detects vibration, converts the vibration state into an electric signal, and outputs the electric signal.”)
Regarding Claim 6,
The device of claim 1, wherein the driver includes a motor, and the determination unit detects a torque value of the motor, converts the torque value to a current value, and determines whether the rotation shaft is defective. (Goto Pg. 7 and related text-The load monitor unit 73 monitors the current value (load) output from the motors 32, 46, and 48. The load monitor unit 73 stores the monitored loads (current values) of the motors 32, 46, and 48 in the data storage unit 76. When storing the data in the data storage unit 76, the load monitor unit 73 associates each motor with the data, in other words, stores the data for each motor. By monitoring the current values output from the servo motors 32, 46, and 48, the load on the motors 32, 46, and 48 can be monitored. It is possible to determine the danger and the like.; Next, the example shown in FIG. 8 will be described. Normally, when grinding a workpiece W made of a uniform material at a constant feed rate, the flatness and surface roughness of the ground surface (machined surface) may be adversely affected by the vibration state of the tool spindle 42 during grinding. When the vibration state of the tool spindle 42 is not detected as shown in FIG. 8A, the torque of the axial drive motor 48 that feeds the grindstone G despite the fact that the vibration state of the tool spindle 42 has greatly changed during grinding. If the (current value) is kept constant without changing, the applied pressure (working pressure) of the grindstone G during grinding remains constant and vibration is not suppressed, so the flatness of the grinding surface (working surface) And surface roughness deteriorates.”)
Regarding Claim 7,
The device of claim 2, wherein the abnormality diagnosis model detects a time point at which a defect of the rotation shaft occurs by vibration measurement, and recognizes a change pattern of the current value from the detected time point as an abnormality pattern to determine whether the rotation shaft is defective. (Goto Pg.5-7 and related text- In step S103, data of the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d acquired by the data acquisition unit 72 are stored in the data storage unit 76 in time series. In step S103, load (current value) data of the motors 32, 46, and 48 monitored by the load monitoring unit 73 is accumulated in the data accumulation unit 76 in time series. “)
Regarding Claim 8,
The device of claim 7, wherein a vibration value measured when measuring the vibration is measured by an acceleration for vibration of the support unit. (Goto Pg.5-7 and related text- In step S102, the load monitor unit 73 starts monitoring the loads (current values) of the motors 32, 46, and 48. In step S102, the determination unit 74 determines whether there is an abnormality in the values output from the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d. The abnormality detection process in step S102 will be described in detail with reference to FIG. In step S103, data of the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d acquired by the data acquisition unit 72 are stored in the data storage unit 76 in time series. In step S103, load (current value) data of the motors 32, 46, and 48 monitored by the load monitoring unit 73 is accumulated in the data accumulation unit 76 in time series. “)
Regarding Claim 9,
The device of claim 7, wherein a vibration value measured when measuring the vibration is measured by the amount of displacement for vibration of the support unit. (Goto Pg.5-7 and related text- (Abnormality detection processing) FIG. 5 is a flowchart showing an abnormality detection process of the processing apparatus according to the first embodiment. In step S301, monitoring of the processing apparatus 10 is started. Specifically, the load monitor unit 73 starts monitoring the loads (current values) of the motors 32, 46, and 48. Further, the determination unit 74 starts monitoring values output from the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d. In step S <b> 302, the determination unit 74 determines whether or not the values of the monitoring results obtained by the various sensors 61 and 62 and the load monitor unit 73 are out of the first range (first reference value range) set in advance. . Specifically, the determination unit 74 determines whether or not the values output from the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d are out of a preset first range (first reference value range). judge. Further, the determination unit 74 determines whether or not the value (current value) of the monitoring result in the load monitoring unit 73 is out of a first range (first reference value range) set in advance.”)
Regarding Claim 10,
The device of claim 7, wherein a vibration value measured when measuring the vibration is measured by a sound generated by the vibration of the support unit. (Goto Pg.5-7 and related text- ( Further, the processing apparatus 10 includes a plurality of vibration acceleration sensors 61a to 61d and displacement sensors 62a to 62d. The vibration acceleration sensor 61a is provided in the vicinity of the upper plate 41a of the gantry 41 where the axial drive motor 48 is attached, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal… The increase in the amount of displacement is the size of the shaft shake, which corresponds to the amplitude when the change transition of the electric signal of the displacement sensor is replaced with a waveform, and detects an increase in the absolute value of the amount of displacement. The length of the displacement cycle is the number of shaft shakes per unit time (for example, within one rotation of the shaft), which corresponds to the waveform or frequency when the change of the electrical signal from the displacement sensor is replaced with a waveform.”)
Regarding Claim 11,
The device of claim 1, wherein the determination unit includes: a vibration detection unit installed on the support unit to measure a vibration value of the support unit; a current detection unit electrically connected with the support unit to detect a current value applied to a motor rotating the support unit; and an inspection unit that receives the vibration value and the current value from the vibration detection unit and the current detection unit as inputs, determines an error in rotation of the support unit based on the vibration value, and determines an abnormality in rotation of the substrate by applying an abnormality diagnosis model to the current value from a time point at which the error in rotation of the support unit is determined.. (Goto Pg.5-7 and related text- (FIG. 5 is a flowchart showing an abnormality detection process of the processing apparatus according to the first embodiment. In step S301, monitoring of the processing apparatus 10 is started. Specifically, the load monitor unit 73 starts monitoring the loads (current values) of the motors 32, 46, and 48. Further, the determination unit 74 starts monitoring values output from the vibration acceleration sensors 61a to 61d and the displacement sensors 62a to 62d…. When it is outside the second range (the range of the second reference value) in step S305 (YES), the determination unit 74 determines that there is an abnormality. In step S306, the control part 78 alert | reports an error, if the determination part 74 determines with abnormality. This error notification is displayed on the monitor of the processing apparatus 10 and is also output as a buzzer sound from a speaker provided in the processing apparatus 10. In step S307, the control unit 78 stops the processing of the processing device 10 because an unrecoverable error has occurred.”)
Regarding Claim 20,
A substrate processing device for processing a substrate by rotating the substrate, the substrate processing device comprising: a determination unit, wherein the determination unit includes: a chamber having a processing space (Goto Pg. 1- The processing apparatus according to the present invention includes a first determination unit that determines an abnormality of the first rotating body based on a detection state of the first detector, and a first determination unit that is based on the detection state of the second detector. A second determination unit that determines abnormality of the two-rotor, a third determination unit that determines abnormality of the axial drive unit based on a detection state of the third detector, the first and second rotation members, At least one operation of the first and second rotating bodies and the axial drive unit is changed based on at least one determination result of the control unit that controls the axial drive unit and the first to third determination units. And a changing unit to be provided.”);
a plurality of support units for supporting a substrate in the processing space, and supporting the substrate by rotating the substrate (Goto Pg. 4- When the workpiece W is attracted to the rotary stage 313, it is often mounted on a support substrate (solvent welding, adhesion, etc.) in order to prevent deformation and scratches, and the workpiece W is caused by the hysteresis between the support substrate and the workpiece W surface. Can be converted to the thickness of When the support substrate and the workpiece W are the same size, the hysteresis difference between the support substrate and the support substrate is determined based on the defective portion of the workpiece W) ;
a liquid discharge unit for discharging a chemical liquid in a liquid phase onto a substrate supported on each of the plurality of support units (Goto- Pg. 5- The storage unit 77 stores various recipes that are procedures for grinding the workpiece W. In the recipe, for example, the rotation speed (rpm) and rotation direction of the workpiece W, the rotation speed and rotation direction of the grindstone, the grinding amount (thickness of the target workpiece W), the feeding speed of the grindstone, and the oscillation (reciprocating motion during grinding) ) And the discharge amount of the grinding fluid are set. In addition, in the storage unit 77, the first and second ranges of the vibration acceleration sensors 61a to 61d, the displacement sensors 62a to 62d, and the motors 32, 46, and 48 are set for each recipe. The first range and the second range of the vibration acceleration sensors 61a to 61d, the displacement sensors 62a to 62d, and the motors 32, 46, and 48 may be set for each step of each recipe.”) ;
a vibration detection unit installed on any one of the plurality of support units and measuring a vibration value for the one of the support units (Goto Pg. 5-6- Further, the processing apparatus 10 includes a plurality of vibration acceleration sensors 61a to 61d and displacement sensors 62a to 62d. The vibration acceleration sensor 61a is provided in the vicinity of the upper plate 41a of the gantry 41 where the axial drive motor 48 is attached, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61b is provided in the vicinity of the upper end side of the tool spindle 42, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61c is provided in the vicinity of the lower end side of the tool spindle 42, detects vibration, converts the vibration state into an electric signal, and outputs the electric signal. The vibration acceleration sensor 61b and the vibration acceleration sensor 61c are preferably provided at positions facing each other across the tool spindle 42 in a plan view (a surface perpendicular to the Z axis). The vibration acceleration sensor 61d is provided on a bearing 312 that rotatably holds the spindle 311. The vibration acceleration sensor 61d detects vibration, converts the vibration state into an electric signal, and outputs the electric signal.”);
a current detection unit installed in each of the plurality of support units and detecting a current value that rotates the substrate (Goto Pg 5-7- The load monitor unit 73 monitors the current value (load) output from the motors 32, 46, and 48. The load monitor unit 73 stores the monitored loads (current values) of the motors 32, 46, and 48 in the data storage unit 76. When storing the data in the data storage unit 76, the load monitor unit 73 associates each motor with the data, in other words, stores the data for each motor. By monitoring the current values output from the servo motors 32, 46, and 48, the load on the motors 32, 46, and 48 can be monitored. It is possible to determine the danger and the like”);
and an inspection unit for receiving the vibration value and the current value in conjunction with the vibration detection unit and the current detection unit, applying a vibration abnormality diagnosis model to the vibration value to determine an abnormality of rotation of the substrate, and applying an abnormality diagnosis model to the current value from a time point of abnormality at which the abnormality is determined to determine an abnormality of the rotation of the substrate, and the inspection unit detects a time point at which a defect of the rotation shaft occurs by vibration measurement of the vibration detection unit, and recognizes a change pattern of the current value from the detected time point as an abnormality pattern to determine whether the rotation shaft is defective, and the abnormality diagnosis model is applied to each of the plurality of support units to determine the abnormality of each of the rotation shafts. (Goto Pg. 4-7-“ As shown in FIG. 2, the control device 70 includes a communication unit 71, a data acquisition unit 72, a load monitor unit 73, a determination unit 74, a recipe change unit 75, a data storage unit 76, and a storage unit 77. A control unit 78, a profile calculation unit 79, and the like. The communication unit 71 transmits a control signal for controlling the motor included in the processing device 10. The communication unit 71 communicates with a server (not shown) and transmits / receives data, control signals, and the like. The data acquisition unit 72 acquires data (electrical signals) output from the various sensors 61 and 62 via the communication unit 71 and stores the data in the data storage unit 76. When data is stored in the data storage unit 76, the data acquisition unit 72 associates each sensor with the data, in other words, stores the data for each sensor. The load monitor unit 73 monitors the current value (load) output from the motors 32, 46, and 48. The load monitor unit 73 stores the monitored loads (current values) of the motors 32, 46, and 48 in the data storage unit 76. When storing the data in the data storage unit 76, the load monitor unit 73 associates each motor with the data, in other words, stores the data for each motor. By monitoring the current values output from the servo motors 32, 46, and 48, the load on the motors 32, 46, and 48 can be monitored. It is possible to determine the danger and the like”)
Goto discloses the rotating shaft and the feature is expounded upon by Jang:
a liquid supply unit for supplying the chemical liquid to the liquid discharge unit (Jang Pg. 1- A substrate processing apparatus according to an embodiment of the present invention includes a housing, a support unit disposed inside the housing, for supporting the substrate, and a nozzle unit for supplying a liquid to the substrate placed on the support unit, A spin head, a motor for rotating the spin head, a vibration sensor installed in the motor for measuring vibration of the motor, And a controller for receiving data measured by the vibration sensor and controlling the support unit, wherein the controller receives the first data and the second data from the vibration sensor, and then transmits the first data and the second data So that the vibration can be analyzed.”) ;
including a spin chuck supporting a substrate, a rotation shaft supporting the spin chuck ( Jang Pg. 1-2-The support unit 340 is disposed within the housing 320. The support unit 340 supports the substrate and rotates the substrate during the process. The support unit 340 has a spin head 342, a support pin 334, a chuck pin 346, a support shaft 348, a motor 349, a vibration sensor 390, and a controller 395. The spin head 342 has a top surface that is generally circular when viewed from the top. On the spin head 342, a plurality of support pins 334 are provided. The support pin 334 is spaced apart from the edge of the upper surface of the spin head 342 by a predetermined distance and protrudes upward from the spin head 342. The support pins 334 are arranged so as to have a generally annular ring shape in combination with each other. The support pin 334 supports the rear edge of the substrate such that the substrate is spaced a distance from the top surface of the spin head 342. A plurality of chuck pins 346 are provided. The chuck pin 346 is disposed farther away from the center of the spin head 342 than the support pin 334. The chuck pin 346 is provided to protrude upward from the spin head 342. The chuck pin 346 supports the side of the substrate such that the substrate is not laterally displaced in place when the spin head 340 is rotated. The chuck pin 346 is provided so as to be movable linearly between the standby position and the support position along the radial direction of the spin head 342. The standby position is a position far from the center of the spin head 342 as compared to the support position. When the substrate is loaded or unloaded onto the spin head 340, the chuck pin 346 is positioned in the standby position and the chuck pin 346 is positioned in the support position when the substrate is being processed. At the support position, the chuck pin 346 contacts the side of the substrate.”)
Goto and Jang are directed to substrate processing. It would have been obvious for one of ordinary skill in the art before the effective filing date of the claimed invention to have improve upon processing of Goto, as taught by Jang, by utilizing additional component analysis with a reasonable expectation of success of arriving at the claimed invention. One of ordinary skill in the art would have been motivated to make the modification to the teachings of Goto with the motivation of improving vibration analysis (Jang Abstract).
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure: US Publication No. 20160054719A1 to Takimoto- Abstract-“ Disclosed is substrate processing apparatus including a plurality of processing units, each of which processes a substrate, and a controller that causes each of the processing units to execute a substrate processing. The controller is configured to cause a processing unit with a detected abnormality to execute an improvement processing based on abnormality detection information including a content of abnormality detected by a substrate surface measurement after causing the substrate processing to be performed in each of the processing units. The improvement processing is specified from improvement processing information in which the content of abnormality and the improvement processing are correlated with each other.”
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Chesiree Walton, whose telephone number is (571) 272-5219. The examiner can normally be reached from Monday to Friday between 8 AM and 5 PM. If any attempt to reach the examiner by telephone is unsuccessful, the examiner’s supervisor, Patricia Munson, can be reached at (571) 270-5396. The fax telephone numbers for this group are either (571) 273-8300 or (703) 872-9326 (for official communications including After Final communications labeled “Box AF”).
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Sincerely,
/CHESIREE A WALTON/ Examiner, Art Unit 3624
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