Prosecution Insights
Last updated: August 06, 2026
Application No. 18/816,531

SYSTEMS AND METHODS FOR RECOVERING ORGANIC CONTAMINANTS FROM SEMICONDUCTING WAFERS

Non-Final OA §DP
Filed
Aug 27, 2024
Priority
Sep 01, 2023 — provisional 63/536,194 +3 more
Examiner
CARRILLO, BIBI SHARIDAN
Art Unit
1711
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Elemental Scientific Inc.
OA Round
1 (Non-Final)
62%
Grant Probability
Moderate
1-2
OA Rounds
7m
Est. Remaining
46%
With Interview

Examiner Intelligence

Grants 62% of resolved cases
62%
Career Allowance Rate
484 granted / 780 resolved
-2.9% vs TC avg
Minimal -16% lift
Without
With
+-16.2%
Interview Lift
resolved cases with interview
Typical timeline
2y 7m
Avg Prosecution
44 currently pending
Career history
821
Total Applications
across all art units

Statute-Specific Performance

§101
0.3%
-39.7% vs TC avg
§103
44.2%
+4.2% vs TC avg
§102
17.1%
-22.9% vs TC avg
§112
34.5%
-5.5% vs TC avg
Black line = Tech Center average estimate • Based on career data from 780 resolved cases

Office Action

§DP
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Group II, claims 11-20 in the reply filed on 6/9/2026 is acknowledged. Double Patenting The nonstatutory double patenting rejection is based on a judicially created doctrine grounded in public policy (a policy reflected in the statute) so as to prevent the unjustified or improper timewise extension of the “right to exclude” granted by a patent and to prevent possible harassment by multiple assignees. A nonstatutory double patenting rejection is appropriate where the conflicting claims are not identical, but at least one examined application claim is not patentably distinct from the reference claim(s) because the examined application claim is either anticipated by, or would have been obvious over, the reference claim(s). See, e.g., In re Berg, 140 F.3d 1428, 46 USPQ2d 1226 (Fed. Cir. 1998); In re Goodman, 11 F.3d 1046, 29 USPQ2d 2010 (Fed. Cir. 1993); In re Longi, 759 F.2d 887, 225 USPQ 645 (Fed. Cir. 1985); In re Van Ornum, 686 F.2d 937, 214 USPQ 761 (CCPA 1982); In re Vogel, 422 F.2d 438, 164 USPQ 619 (CCPA 1970); In re Thorington, 418 F.2d 528, 163 USPQ 644 (CCPA 1969). A timely filed terminal disclaimer in compliance with 37 CFR 1.321(c) or 1.321(d) may be used to overcome an actual or provisional rejection based on nonstatutory double patenting provided the reference application or patent either is shown to be commonly owned with the examined application, or claims an invention made as a result of activities undertaken within the scope of a joint research agreement. See MPEP § 717.02 for applications subject to examination under the first inventor to file provisions of the AIA as explained in MPEP § 2159. See MPEP § 2146 et seq. for applications not subject to examination under the first inventor to file provisions of the AIA . A terminal disclaimer must be signed in compliance with 37 CFR 1.321(b). The filing of a terminal disclaimer by itself is not a complete reply to a nonstatutory double patenting (NSDP) rejection. A complete reply requires that the terminal disclaimer be accompanied by a reply requesting reconsideration of the prior Office action. Even where the NSDP rejection is provisional the reply must be complete. See MPEP § 804, subsection I.B.1. For a reply to a non-final Office action, see 37 CFR 1.111(a). For a reply to final Office action, see 37 CFR 1.113(c). A request for reconsideration while not provided for in 37 CFR 1.113(c) may be filed after final for consideration. See MPEP §§ 706.07(e) and 714.13. The USPTO Internet website contains terminal disclaimer forms which may be used. Please visit www.uspto.gov/patent/patents-forms. The actual filing date of the application in which the form is filed determines what form (e.g., PTO/SB/25, PTO/SB/26, PTO/AIA /25, or PTO/AIA /26) should be used. A web-based eTerminal Disclaimer may be filled out completely online using web-screens. An eTerminal Disclaimer that meets all requirements is auto-processed and approved immediately upon submission. For more information about eTerminal Disclaimers, refer to www.uspto.gov/patents/apply/applying-online/eterminal-disclaimer. Claims 11 and 17-18 are provisionally rejected on the ground of nonstatutory double patenting as being unpatentable over claims 1-3 and 10 of copending Application No. 18/816488 (reference application). Although the claims at issue are not identical, they are not patentably distinct from each other because claims 11 of the instant application and claims 1 and 10 of the '488 copending application are directed to directing a first scan fluid on the surface of the wafer, removing the first scan fluid and transferring the first scan fluid into a collection vessel, directing a second scan fluid onto the wafer surface, removing the second scan fluid from the wafer and introducing the second scan fluid into the collection vessel to permit mixing with the first scan fluid to thereby form a combined scan sample. Similarly, claims 17-18 of the instant applicant and claims 2-3 of the '488 copending application are directed to the first and second scan fluids having the same or different compositions. This is a provisional nonstatutory double patenting rejection because the patentably indistinct claims have not in fact been patented. Claims 12-16 and 19-20 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Unnerstall et al. teach the recovery of organic contaminants from wafers. Any inquiry concerning this communication or earlier communications from the examiner should be directed to Sharidan Carrillo whose telephone number is (571)272-1297. The examiner can normally be reached M-F, 7:00am-4:00pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael Barr can be reached at 571-272-1414. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. Sharidan Carrillo Primary Examiner Art Unit 1711 /Sharidan Carrillo/Primary Examiner, Art Unit 1711 bsc
Read full office action

Prosecution Timeline

Aug 27, 2024
Application Filed
Jul 28, 2026
Non-Final Rejection mailed — §DP (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12699391
CLEANING METHOD AND APPARATUS, AND COMPUTER STORAGE MEDIUM
2y 12m to grant Granted Aug 04, 2026
Patent 12680160
Nozzle Cleaning Method, Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
4y 4m to grant Granted Jul 14, 2026
Patent 12672750
METHOD FOR CONTROLLING ROBOT CLEANER, ELECTRONIC DEVICE AND ROBOT CLEANER
2y 6m to grant Granted Jul 07, 2026
Patent 12667867
PROCESSING CHAMBER CLEANING METHOD, CLEANING ATTACHMENT AND SUBSTRATE PROCESSING SYSTEM
2y 7m to grant Granted Jun 30, 2026
Patent 12654207
WORKPIECE CLEANING METHOD AND CLEANING DEVICE
2y 5m to grant Granted Jun 16, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2
Expected OA Rounds
62%
Grant Probability
46%
With Interview (-16.2%)
2y 7m (~7m remaining)
Median Time to Grant
Low
PTA Risk
Based on 780 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month