The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Applicant’s election without traverse of Group II (claims 40-43, 45-47, 49 and 50) in the reply filed on 9/05/25 is acknowledged. New claims 81-87 will be examined as being drawn to the elected invention. Cancellation of non-elected claims 1-6, 8, 9, 11, 12 and 70 is acknowledged.
The disclosure is objected to because of the following informalities: in par. [0078], the reference to the second arm “160” should be --180--.
Appropriate correction is required.
The lengthy specification has not been checked to the extent necessary to determine the presence of all possible minor errors. Applicant’s cooperation is requested in correcting any errors of which applicant may become aware in the specification.
Claims 83, 84 and 87 are objected to because of the following informalities:
claim 83, line 12, “aa” should be --a--;
and in the last line of claims 84 and 87, “direction” should be plural.
Appropriate correction is required.
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 82, 85 and 86 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Claim 85, line 4, the recitation “second stack” should apparently be --third stack-- in accordance with the written description.
Claims 85 and 86, the recitations “wherein removing … comprises: moving the second arm …; moving the elevator assembly …; and moving the second arm …” and “wherein transferring … comprises: moving the first arm …; moving the elevator assembly …; and moving the first arm …”, respectively, are written in method terminology (i.e., method steps) and as such are not understood in the context of an apparatus claim. An apparatus is defined by what it is, not by what it does it does or how it operates. The claim limitations should be rewritten in functional terminology such as capable of, configured to, or similar language.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
(a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention.
Claims 40-43, 45-47, 49, 50, and 81-87 are rejected under 35 U.S.C. 102(a)(1) and/or (a)(2) as being anticipated by Krupyshev et al (US 12,142,511, or corresponding US 2015/0013910 or WO 2013/120054). Citations will refer to the US Patent.
Krupyshev shows several different embodiments and variations of a semiconductor processing system comprising:
a first stack of process modules (such as but not limited to 140S2 in at least Figs. 1 and 4A, noting that the processing stations 140 in any embodiment may be vertically stacked as in Figs. 11A and 11C; see col. 5:55-59, col. 8:23-27, col. 19:59 to col. 20:17, col. 25:14-21, and col. 26:41-45) and a third stack of process modules (such as but not limited to 140S4 in at least Figs. 1 and 4A), the first stack of process modules being spaced apart from the third stack of process modules by a first portion of an aisle 125 or 126;
a first robot apparatus 130 at least partially located within the first portion of the aisle, the first robot apparatus comprising:
a first arm 211 having a first end effector EE1 at a first end thereof and a second end effector EE2 at a second end thereof (Figs. 2A and 4A; also note double-ended substrate holder 3030S2 in Fig. 31C as detailed in col. 35:49-52); and
a second arm (e.g., see at least Figs. 2A, 2D, 2F and 7A) having a first end effector at a first end thereof and a second end effector at a second end thereof (not explicitly shown but either or both arms may include any of the disclosed end effectors; see col. 7:1-36, col. 11:55-61, col. 18:6-13, and col. 35:42 to col. 36:5), the second arm being spaced vertically from the first arm;
wherein the first robot apparatus is configured to:
maneuver the first arm so that the first end effector of the first arm interacts with one of the process modules of the first stack or the second end effector of the first arm interacts with one of the process modules of the third stack; and maneuver the second arm so that the first end effector of the second arm interacts with one of the process modules of the first stack or the second end effector of the second arm interacts with one of the process modules of the third stack (not explicitly stated as such but it is readily apparent from at least Figs. 1 and 4A that if the process modules 140 were in a stacked configuration and the robot apparatus included a two arm configuration with each arm having a double-ended end effector, in accordance with the disclosures noted in the passages above, the first and second arms would clearly be configured to maneuver so that the first end effectors of each of the arms would interact with one of the process modules of the first stack or the second end effectors of each of the arms would interact with one of the process modules of the third stack). In particular, col. 11:59-67 discloses that the maneuvering can be performed without rotation of the double-ended end effector, although it is noted that the rotational movement of the end effector, as also disclosed, is not precluded by the claim language.
Re claim 41, when configured with two arms each having a double-ended end effector as noted above, maneuvering the first and second arms to interact with the one of the process modules of the first stack would clearly comprise moving the first and second arms in a first direction, and maneuvering the first and second arms to interact with the one of the process modules of the third stack would comprise moving the first and second arms in a second direction that is opposite the first direction (e.g., see Fig. 4A and above-noted col. 11:59-67), wherein the first and second arms are configured to move in the first and second directions independently of one another (col. 23:45-51).
Re claim 42, the first robot apparatus is further configured to move the first and second arms in first and second vertical directions (see arrow 299), and wherein when moving the first and second arms in the first and second vertical directions the first and second arms move simultaneously so as to maintain a constant spacing distance between the first and second arms (i.e., Z-drive 203 vertically moves transfer arm section 210 as a unit and thus simultaneously moves the first and second arms attached thereto while maintaining a constant spacing therebetween; see at least Figs. 2B, 2D and 2F).
Re claim 43, the first robot apparatus comprises:
a support structure 201/202 and an elevator assembly 210/220 that is coupled to the support structure, each of the first and second arms being coupled to the elevator assembly;
a first drive mechanism 270 operably coupled to the first arm and configured to move the first arm in first and second horizontal directions relative to the elevator assembly;
a second drive mechanism 271 operably coupled to the second arm and configured to move the second arm in the first and second horizontal directions relative to the elevator assembly independently of the movement of the first arm; and
a third drive mechanism 203 operably coupled to the elevator assembly to simultaneously move the elevator assembly and the first and second arms in a vertical direction.
Re claim 45, the system further comprises a second stack of process modules (e.g., 140A or 140E) and a fourth stack of process modules (e.g., 140C or 140D), the second and fourth stacks of process modules being spaced apart by a second portion of the aisle; and
a second robot apparatus (e.g., Fig. 2G) at least partially located within the second portion of the aisle, wherein the second robot apparatus is configured to interact with the second and fourth stacks of process modules. Note col. 6:35-67 and col. 20:48 to col 21:4. Also note at least the Figs. 5B-D, 10B-D, 14, 19 and 24A-B embodiments.
Re claim 46, the second robot apparatus could clearly be configured in the same manner as the first robot apparatus described above such that it would comprise: a first arm having a first end effector at a first end thereof and a second end effector at a second end thereof; and a second arm having a first end effector at a first end thereof and a second end effector at a second end thereof, the second arm being spaced vertically from the first arm; such that the second robot apparatus would be configured to: maneuver the first arm so that the first end effector of the first arm would interact with one of the process modules of the second stack; maneuver the second arm so that the first end effector of the second arm would interact with one of the process modules of the second stack; maneuver the first arm so that the second end effector of the first arm would interact with one of the process modules of the fourth stack; and maneuver the second arm so that the second end effector of the second arm would interact with one of the process modules of the fourth stack, in the same manner set forth above with respect to the first robot apparatus.
Re claim 47 (note: for this claim the first and second process module stacks are considered to be modules 102a and 102b, as shown in at least Figs. 1 and 4A, while the third and fourth process module stacks could be any of the modules 140, such as but not limited to 140S2 or 140S4; as will be explained below, nothing in the claim language, including intervening claim 45, precludes such an interpretation), the system further comprises:
a first transport assembly 113 comprising a first support member configured to support at least one substrate (not separately identified but readily apparent in at least Fig. 1; note col. 5:22-32), the first support member being movable between a first position wherein the first support member is aligned with the first stack of process modules 102A and a second position wherein the first support member is aligned with the second stack of process modules 102B (noting that nothing precludes load locks 102 from being considered “process modules”, as nominally recited, wherein the load locks may be provided in a stacked configuration, as shown in Figs. 11A-B); and
wherein when the first support member is in the first position (at least) the first robot apparatus is configured to “interact with” (as broadly recited) the first support member and when the first support member is in the second position (at least) the second robot apparatus is configured to interact with the first support member.
Re claim 49, the first arm of the first robot apparatus comprises a first plate (not separately identified but readily apparent in at least Figs. 1, 2A, 4A, 5A-D, 6, 9A, 10A-D and 31C) comprising a first central portion having a first end and a second end, a first pair of support arms extending from the first end of the first central portion to form the first end effector of the first arm, and a second pair of support arms extending from the second end of the first central portion to form the second end effector of the first arm; and, when configured as a double-ended end effector in the manner noted above, the second arm of the first robot apparatus would comprise a second plate comprising a second central portion having a first end and a second end, a third pair of support arms extending from the first end of the second central portion to form the first end effector of the second arm, and a fourth pair of support arms extending from the second end of the second central portion to form the second end effector of the second arm.
Re claim 50, as noted above, a vertical distance between the first and second arms of the first robot apparatus is constant.
Re claim 81, the system further comprises:
a second stack of process modules (such as but not limited to 140E in Fig. 1) and a fourth stack of process modules (such as but not limited to 140D), the second and fourth stacks of process modules being spaced apart by a second portion of the aisle; and the first robot apparatus is configured to move between the first and second portions of the aisle so that the first robot apparatus can interact with the first and third stacks of process modules when located within the first portion of the aisle (as in Figs. 1 and 4A) and the first robot apparatus can interact with the second and fourth stacks of process modules when located within the second portion of the aisle (Figs. 3B and 5A).
Re claim 82, in col. 14:25-30 and col. 18:50-55, it is disclosed that in a single elongated transfer chamber embodiment such as shown in Figs. 1 and 5A or Figs. 6 and 10A, a mini-environment (EFEM) 106A, 106B, each having a transport assembly 113 therein, as described above with respect to claim 47, may be disposed at each end of the transfer chamber, in a manner similar to that shown in Figs. 5D and 10D, respectively. In such embodiments, the third and fourth process module stacks are considered to be the unlabeled second pair of load lock modules of EFEM 106B (again, assuming an embodiment in which the modules are vertically stacked, there is a second robot apparatus, and at least the first robot apparatus has first and second arms each having first and second end effectors, in accordance with claims 40, 45 and 47 outlined above), and the system would further comprise:
a second transport assembly (i.e., the unlabeled robot assembly in EFEM 106B) comprising a second support member (not separately identified but consistent with the description of the first transport assembly noted above with respect to claim 47) configured to support at least one substrate, the second support member being movable between a first position wherein the second support member is aligned with the [second] third stack of process modules and a second position wherein the second support member is aligned with the fourth stack of process modules; and
wherein when the second support member is in the first position (at least) the first robot apparatus is configured to interact with the second support member and when the second support member is in the second position (at least) the second robot apparatus is configured to interact with the second support member.
Re claim 83, Krupyshev discloses a semiconductor processing system comprising (when configured in the manner described above with respect to claim 40, i.e., with stacked process modules and a two-armed robot apparatus with each arm having a double-ended end effector):
a first stack of process modules (such as but not limited to 140S2);
a third stack of process modules (such as but not limited to 140S4) spaced apart from the first stack of process modules;
a first robot apparatus 130 located between the first and third stacks of process modules, the first robot apparatus configured to: (1) support a first pre-processed substrate on a first end effector EE1 of a first arm 211 of the first robot apparatus; (2) remove a first post-processed substrate from one of the process modules of the first stack with a first end effector (not shown but analogous to EE1) of a second arm of the first robot apparatus; (3) transfer the first pre-processed substrate from the first end effector of the first arm of the first robot apparatus to the one of the process modules of the first stack; (4) support a second pre-processed substrate on a second end effector EE2 of the first arm of the first robot apparatus; (5) remove a second post-processed substrate from one of the process modules of the third stack with [a]a second end effector (not shown but analogous to EE2) of the second arm of the first robot apparatus; and (6) transfer the second pre-processed substrate from the second end effector of the first arm of the first robot apparatus to the one of the process modules of the third stack.
Re claim 84, the first robot apparatus comprises an elevator assembly 210/220 having a longitudinal axis, the elevator assembly is configured to move in upward and downward directions that are perpendicular to the longitudinal axis, the first and second arms are coupled to the elevator assembly and are vertically spaced apart from one another by a fixed distance (see at least Figs. 2B, 2D and 2F, each of the first and second arms are configured to move relative to the elevator assembly in a direction of the longitudinal axis (Fig. 4A and col. 11:61-67) and are configured to move along with the elevator assembly when the elevator assembly moves in the upward and downward direction.
Re claim 85 (as best understood in light of the rejection under 35 U.S.C. set forth above in par. 7), when configured in the manner described above, [removing] the first post-processed substrate can be removed from the one of the process modules of the first stack [comprises] via:
[moving] a movement of the second arm of the first robot apparatus in a first direction towards the one of the process modules of the first stack to position the first end effector of the second arm below the first post-processed substrate;
[moving] a movement of the elevator assembly in the upward direction so that the first end effector of the second arm supports the first post-processed substrate and lifts the first post-processed substrate away from a support structure of the one of the process modules; and
[moving] a movement of the second arm of the first robot apparatus in a second direction that is opposite the first direction and away from the one of the process modules of the first stack.
Re claim 86, in a similar manner, [transferring] the at least one first pre-processed substrate can be transferred from the first end effector of the first arm of the first robot apparatus to the one of the process modules of the first stack [comprises] via:
[moving] a movement of the first arm of the first robot apparatus in the first direction to position the first pre-processed substrate supported on the first end effector of the first arm above the support structure of the one of the process modules;
[moving] a movement of the elevator assembly in the downward direction so that the first end effector moves downwardly until the first pre-processed substrate is supported by the support structure of the one of the process modules; and
[moving] a movement of the first arm of the first robot apparatus in the second direction.
Re claim 87, as noted above with respect to substantially equivalent claim 84, the first robot apparatus comprises an elevator assembly having a longitudinal axis, the elevator assembly is configured to move in upward and downward directions that are perpendicular to the longitudinal axis, the first and second arms are coupled to the elevator assembly and are vertically spaced apart from one another by a fixed distance, each of the first and second arms are configured to move relative to the elevator assembly in a direction of the longitudinal axis and are configured to move along with the elevator assembly when the elevator assembly moves in the upward and downward direction to maintain the fixed distance.
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to James Keenan whose telephone number is (571)272-6925. The examiner can normally be reached Mon. - Thurs.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Saul Rodriguez can be reached at 571-272-7097. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
/James Keenan/
Primary Examiner
Art Unit 3652
9/23/25