Prosecution Insights
Last updated: April 19, 2026
Application No. 18/999,059

Electrolyte and Deposition of a Copper Barrier Layer in a Damascene Process

Non-Final OA §103
Filed
Dec 23, 2024
Examiner
HASKE, WOJCIECH
Art Unit
1794
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Element Solutions Inc.
OA Round
1 (Non-Final)
73%
Grant Probability
Favorable
1-2
OA Rounds
2y 6m
To Grant
91%
With Interview

Examiner Intelligence

Grants 73% — above average
73%
Career Allow Rate
417 granted / 571 resolved
+8.0% vs TC avg
Strong +18% interview lift
Without
With
+17.6%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
39 currently pending
Career history
610
Total Applications
across all art units

Statute-Specific Performance

§101
1.1%
-38.9% vs TC avg
§103
45.9%
+5.9% vs TC avg
§102
27.0%
-13.0% vs TC avg
§112
17.1%
-22.9% vs TC avg
Black line = Tech Center average estimate • Based on career data from 571 resolved cases

Office Action

§103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Claim Rejections - 35 USC § 103 Claim(s) 1-5 is/are rejected under 35 U.S.C. 103 as being unpatentable over Oba et al. (JP 2009127099 A) in view of Lopatin et al. (US 6811671 B1). Considering claims 1-5, Oba discloses an electrolyte for the electrodeposition of an alloy comprising copper and zinc comprising in solution in water: copper (II) ions (atomic mass = 64g/mole) at a concentration of 2-40 g/L (30-600 mM) (page 3, 3rd paragraph), which overlaps the claimed range of 1-120 mM; complexing agent (ethylenediamine, d=0.9g/mL, MW=60 g/mole) at a concentration of 0.6-24 g/L (9-360 mM) (page 3, 2nd paragraph), the concentration ratio of complexing agent to copper (II) ions encompasses the claimed range of 1:1 to 3:1; zinc ions (atomic mass = 65) at a concentration of 0.5-30 g/L (8-640 mM) (page 3, 3rd paragraph), the concentration ratio of copper (II) ions to zinc ions encompasses the claimed range of 1:10 to 10:1; the electrolyte is substantially free of a surfactant (whole document). Oba is silent about pH. However, Lopatin discloses that electrolyte of Cu-Zn alloy plating bath can also have a pH adjuster to keep the solution pH in the range of approximately 7 to approximately 14 (col. 6, lines 18-21). Furthermore, Lopatin teaches that increasing the pH decreases cathodic efficiency with respect to Zn and thereby decreases Zn-doping (col. 7, lines 51-57). It would have been obvious to one of ordinary skill in the art before the effective filing date of the claimed invention to adjust the pH of the Cu-Zn plating bath of Oba, because Oba is silent about the pH of the electroplating bath and Lopatin discloses that electrolyte of Cu-Zn alloy plating bath can also have a pH adjuster to keep the solution pH in the range of approximately 7 to approximately 14 where the expected result is increased cathodic efficiency with respect to Zn for lower pH values. It would have been obvious to one of ordinary skill in the art before the effective filing date of the claimed invention to have the recited range because a prima facie case of obviousness exists in the case where the claimed ranges “overlap or lie inside ranges disclosed by the prior art”. In re Wertheim, 541 F.2d 257, 191 USPQ 90 (CCPA 1976); In re Woodruff, 919 F.2d 1575, 16 USPQ2d 1934 (Fed. Cir. 1990). Furthermore, "[ A ] prior art reference that discloses a range encompassing a somewhat narrower claimed range is sufficient to establish a prima facie case of obviousness." In re Peterson, 315 F.3d 1325, 1330, 65 USPQ2d 1379, 1382-83 (Fed. Cir. 2003). See MPEP 2144.05. Allowable Subject Matter Claims 6-17 are allowed. The following is an examiner’s statement of reasons for allowance: the closest prior art (Zhang et al. CN 106011958 B) discloses an electrolyte for the electrodeposition of an alloy comprising copper and manganese comprising in water: copper (II) ions at a concentration of 0.1 M (100 mM) (page 10); chelating (complexing) agent at a concentration of 0.1 M (100 mM), the concentration ratio of complexing agent to copper (II) ions is 1:1 (page 10); wherein the chelating agent is ethylenediamine tetraacetate (substituted polyamine); manganese ions at a concentration of 0.25 M (250 mM), the concentration ratio of copper (II) ions to manganese ions is 1:2.5 (page 10); pH is 7 (page 10). Zhang requires the copper chloride and zinc chloride, however the independent claim 12 requires that the electrolyte is free of chloride ions. Radisic et al. (ECS Transactions, 3 ‘21’ 69-76 ‘2007’) discloses an electroplating solution without chloride ions, comprising 0.59M MnSO4, 1M (NH4)2SO4, 20 mM CuSO4 and pH of 6.6. However, the independent claim 12 requires the complexing agent is an aliphatic polyamine, and the ratio of Mn to Cu ions is from 1:10 to 10:1. Tsurtsumia et al. (J. Chem. Chem. Eng. 1 ‘2016’ 13-27) discloses an electroplating solution without chloride ions, comprising 0.3M Mn2+, 0.2M EDTA, 0.005M Cu2+ and pH of 6.5. However, the independent claim 12 requires the complexing agent is at a ratio of 1:1 to 3:1 with respect to Cu2+, and the ratio of Mn to Cu ions is from 1:10 to 10:1. The prior art of record does not disclose nor suggest the instantly claimed invention as a whole. Any comments considered necessary by applicant must be submitted no later than the payment of the issue fee and, to avoid processing delays, should preferably accompany the issue fee. Such submissions should be clearly labeled “Comments on Statement of Reasons for Allowance.” Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to Wojciech Haske whose telephone number is (571)272-5666. The examiner can normally be reached M-F: 9:30 am - 6:00 pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, James Lin can be reached at 571-272-8902. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /WOJCIECH HASKE/Examiner, Art Unit 1794
Read full office action

Prosecution Timeline

Dec 23, 2024
Application Filed
Dec 19, 2025
Non-Final Rejection — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
73%
Grant Probability
91%
With Interview (+17.6%)
2y 6m
Median Time to Grant
Low
PTA Risk
Based on 571 resolved cases by this examiner. Grant probability derived from career allow rate.

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