Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
DETAILED ACTION
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1-20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor, or for pre-AIA the applicant regards as the invention.
Claim 1 recites the limitation:
"the substrate"
in
Line 2.
There is insufficient antecedent basis for this limitation in the claim.
Claim 10 recites the limitation:
"the substrate"
in
Line 2.
There is insufficient antecedent basis for this limitation in the claim.
Claim 10 recites the limitation:
"the substrate"
in
Line 6.
There is insufficient antecedent basis for this limitation in the claim.
Claim 19 recites the limitation:
"the substrate"
in
Line 2.
There is insufficient antecedent basis for this limitation in the claim.
Regarding Claims 2-9, 11-18, and 20:
the claims are rejected for depending from a rejected claim
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale or otherwise available to the public before the effective filing date of the claimed invention.
(a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention.
Claim(s) 1-9 and 19-20 is/are rejected under 35 U.S.C. 102(a)(1) as being Anticipated by Ide et al. (US 20220270912 A1).
Regarding Claim 1, Ide discloses:
Substrate transfer equipment comprising:
a transfer robot (4B) transferring the substrate (W); and
a vertical actuating unit (40 & 41 & 42 & 43 & 44 & 51 & 91) moving the transfer robot in an up-down direction [0063], the vertical actuating unit comprises:
a vertical frame (40 & 41 & 42) having a slit (96) formed with a longitudinal direction thereof provided in the up-down direction (Fig. 4), and having a vertical space formed therein (Fig. 9);
an exhaust duct (51A) having an exhaust space connected with the vertical space and provided on a side of the vertical frame (Fig. 4 & Fig. 5 & Fig. 6); and
an actuating member (51B & 91 & 92 & 93 & 94) positioned in the vertical space (Fig. 9) and moving a supporting unit in the up-down direction [0037 & 0041 & 0045 & 0047 & 0063 & 0065 &0069],
wherein the exhaust duct is provided such that a first side is open toward the vertical space (Fig. 6).
Regarding Claim 2, Ide discloses:
the transfer robot comprises:
a robot body (61 & 62) having handles (81 & 82) supporting the substrate [0037];
a base (51 & 52) supporting the robot body (Fig. 6), having a Z-axial actuating unit (53 & 56 & 57 & 58) rotating the robot body about a vertical axis (Fig. 6), and having a first exhaust passage (59) for discharging particles produced in a process of actuating the robot body to the outside [0046 & 0047 & 0052]; and
a mover (51B) connected to a first end of the base (Fig. 3 & Fig. 6), coupled to the actuating member through the slit (Fig. 4 & Fig. 9), and having a second exhaust passage (54) connected with the first exhaust passage (Fig. 6).
Regarding Claim 3, Ide discloses:
the base further comprises a first exhaust fan (55) installed in the first exhaust passage to generate airflow moving from the first exhaust passage to the second exhaust passage [0047 & 0052 & 0064].
Regarding Claim 4, Ide discloses:
the mover is configured such that an outlet of the second exhaust passage faces a second side that is opposite to the open first side of the exhaust duct (Fig. 4 & Fig. 6) [0047].
Regarding Claim 5, Ide discloses:
the mover further comprises a momentum reduction member provided to reduce momentum of particles that are discharged through the outlet of the second exhaust passage [0047 & 0087].
Regarding Claim 6, Ide discloses:
the momentum reduction member comprises a porous member or a perforated plate [0047 & 0087].
Regarding Claim 7, Ide discloses:
the vertical frame further comprises an airflow block member (134) preventing airflow, which is exhausted through the second exhaust passage and collides with the second side of the exhaust duct, from leaking to the outside through the slit [0091].
Regarding Claim 8, Ide discloses:
the airflow block member comprises a projection protruding from an inner surface of the vertical frame [0091 & 0093 & 0094].
Regarding Claim 9, Ide discloses:
the exhaust duct further comprises a second exhaust fan exhausting airflow in the exhaust space to the outside [0047].
Regarding Claim 19, Ide discloses:
Substrate transfer equipment comprising:
a transfer robot (4B) transferring the substrate (W); and
a vertical actuating unit (40 & 41 & 42 & 43 & 44 & 51 & 91) moving the transfer robot in an up-down direction [0063], the vertical actuating unit comprises:
a vertical frame (40 & 41 & 42) having a slit (96) formed with a longitudinal direction thereof provided in the up-down direction (Fig. 4), and having a vertical space formed therein (Fig. 9);
an exhaust duct (51A) having an exhaust space connected with the vertical space, provided on a side of the vertical frame, and being open on a first side being in contact with the vertical space (Fig. 4 & Fig. 5 & Fig. 6); and
an actuating member (51B & 91 & 92 & 93 & 94) positioned in the vertical space (Fig. 9) and moving a supporting unit in the up-down direction [0037 & 0041 & 0045 & 0047 & 0063 & 0065 &0069],
wherein the transfer robot comprises:
a robot body (61 & 62) having handles (81 & 82) supporting the substrate [0037];
a base (51 & 52) supporting the robot body (Fig. 6), having a Z-axial actuating unit (53 & 56 & 57 & 58) rotating the robot body about a vertical axis (Fig. 6), and having a first exhaust passage (59) for discharging particles produced in a process of actuating the robot body to the outside [0046 & 0047 & 0052]; and
a mover (51B) connected to a first end of the base (Fig. 3 & Fig. 6), coupled to the actuating member through the slit (Fig. 4 & Fig. 9), and having a second exhaust passage (54) connected with the first exhaust passage (Fig. 6).
a first exhaust fan (55) installed in the first exhaust passage and providing airflow moving from the first exhaust passage to the second exhaust passage [0047 & 0052 & 0064],
wherein the mover is configured such that an outlet of the second exhaust passage faces a second side that is opposite to the open first side of the exhaust duct and comprises a momentum reduction member provided to reduce momentum of particles that are discharged through the outlet of the second exhaust passage (Fig. 4 & Fig. 6) [0047],
wherein the vertical frame comprises an airflow block member (134) preventing airflow, which is exhausted through the second exhaust passage and collides with the second side of the exhaust duct, from leaking to the outside through the slit [0091 & 0093 & 0094].
wherein the exhaust duct is provided such that a first side is open toward the vertical space (Fig. 6).
Regarding Claim 20, Ide discloses:
the momentum reduction member comprises a porous member or a perforated plate [0047],
the airflow block member comprises a projection protruding from an inner surface of the vertical frame [0047], and
the exhaust duct further comprises a second exhaust fan exhausting airflow in the exhaust space to the outside [0047].
Claim Rejections - 35 USC § 103
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102 of this title, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
Claim(s) 10-18 is/are rejected under 35 U.S.C. 103 as being unpatentable over Ide et al. (US 20220270912 A1) in view of Rice et al. (US 20060182535 A1).
Regarding Claim 10, Ide teaches:
A substrate processing apparatus for processing a substrate, comprising:
a process chamber (31) processing the substrate (W); and
a transfer chamber (33) provided adjacent to the process chamber and having a substrate transfer equipment transferring the substrate to the process chamber (Fig. 3), wherein the transfer chamber comprises:
a transfer robot (4B) transferring the substrate; and
a pair of vertical actuating units (40 & 41 & 42 & 43 & 44 & 51 & 91), supporting the transfer robot on both sides (Fig. 4), and moving the transfer robot in an up-down direction [0063],
wherein the vertical actuating unit comprises:
a vertical frame (40 & 41 & 42) having a slit (96) formed with a longitudinal direction thereof provided in the up-down direction (Fig. 4), and having a vertical space formed therein (Fig. 9);
an exhaust duct (51A) having an exhaust space connected with the vertical space and provided on a side of the vertical frame (Fig. 4 & Fig. 5 & Fig. 6A); and
an actuating member (51B & 91 & 92 & 93 & 94) positioned in the vertical space and moving a supporting unit in the up-down direction [0037 & 0041 & 0045 & 0047 & 0063 & 0065 &0069],
wherein the exhaust duct is provided such that a first side is open toward the vertical space (Fig. 6).
Ide does not teach:
the pair of vertical actuating units configured to horizontally move along a guide rail.
Rice teaches:
A substrate processing apparatus for processing a substrate, comprising:
a process chamber (60 & 80) processing the substrate; and
a transfer chamber (Fig. 8A & Fig. 8C) provided adjacent to the process chamber and having a substrate transfer equipment transferring the substrate to the process chamber (Fig. 8A & Fig. 8C), wherein the transfer chamber comprises:
a transfer robot (11A & 11B & 11C) transferring the substrate (9A & 9B & 9C); and
a pair of vertical actuating units (560) (Fig. 15A) configured to horizontally move along a guide rail (90), supporting the transfer robot on both sides (Fig. 15A), and moving the transfer robot in an up-down direction [0133 & 0136 & 0159 & 0170],
wherein the vertical actuating unit comprises:
a vertical frame (590) having a slit (592) formed with a longitudinal direction thereof provided in the up-down direction (Fig. 15A), and having a vertical space formed therein (Fig. 13A & Fig. 13B);
an exhaust duct (581) having an exhaust space (584) connected with the vertical space (585) and provided on a side of the vertical frame (Fig. 13A) [0160]; and
an actuating member (576) positioned in the vertical space and moving a supporting unit (577) in the up-down direction [0161 & 0162],
wherein the exhaust duct is provided such that a first side is open toward the vertical space (Fig. 13A).
It would have been obvious to one of ordinary skill in the art before the effective filing date of the claimed invention to modify the transfer robot with vertical actuating units taught by Ide with the transfer robot with vertical actuating units configured to horizontally move along a guide rail taught by Rice in order to provide a transfer robot with greater range of travel to increase the throughput of the system without increasing the number of robots.
Regarding Claim 11, Ide teaches:
the transfer robot comprises:
a robot body (61 & 62) having handles (81 & 82) supporting the substrate [0037];
a base (51 & 52) supporting the robot body (Fig. 6), having a Z-axial actuating unit (53 & 56 & 57 & 58) rotating the robot body about a vertical axis (Fig. 6), and having a first exhaust passage (59) for discharging particles produced in a process of actuating the robot body to the outside [0046 & 0047 & 0052]; and
a mover (51B) connected to a first end of the base (Fig. 3 & Fig. 6), coupled to the actuating member through the slit (Fig. 4 & Fig. 9), and having a second exhaust passage (54) connected with the first exhaust passage (Fig. 6).
Regarding Claim 12, Ide teaches:
the base further comprises a first exhaust fan (55) installed in the first exhaust passage to generate airflow moving from the first exhaust passage to the second exhaust passage [0047 & 0052 & 0064].
Regarding Claim 13, Ide teaches:
the mover is configured such that an outlet of the second exhaust passage faces a second side that is opposite to the open first side of the exhaust duct (Fig. 4 & Fig. 6) [0047].
Regarding Claim 14, Ide teaches:
the mover further comprises a momentum reduction member provided to reduce momentum of particles that are discharged through the outlet of the second exhaust passage [0047 & 0087].
Regarding Claim 15, Ide teaches:
the momentum reduction member comprises a porous member or a perforated plate [0047 & 0087].
Regarding Claim 16, Ide teaches:
the vertical frame further comprises an airflow block member (134) preventing airflow, which is exhausted through the second exhaust passage and collides with the second side of the exhaust duct, from leaking to the outside through the slit [0091].
Regarding Claim 17, Ide teaches:
the airflow block member comprises a projection protruding from an inner surface of the vertical frame [0091 & 0093 & 0094].
Regarding Claim 18, Ide teaches:
the exhaust duct further comprises a second exhaust fan exhausting airflow in the exhaust space to the outside [0047].
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Patent publications US 20130323002 A1, US 20080166208 A1, US 20070147976 A1, US 20220059395 A1, US 20130078059 A1, US 20070147982 A1, US 20060182536 A1, US 20080166210 A1, and US 7357842 B2 have been cited by the examiner as pertinent to the applicant’s disclosure because they teach: transfer robots having bodily incorporated ventilation systems.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to BRENDAN P TIGHE whose telephone number is 571-272-4872. The Examiner can normally be reached on Monday-Thursday, 7:00-5:30 EST
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, SAUL RODRIGUEZ can be reached on 571-272-7097. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://pair-direct.uspto.gov. Should you have questions on access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative or access to the automated information system, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000.
/BRENDAN P TIGHE/Examiner, Art Unit 3652
/SAUL RODRIGUEZ/Supervisory Patent Examiner, Art Unit 3652
Prosecution Insights