DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Drawings
The drawings are objected to because in Figs. 4 and 10, the recitation of “ATTITUDE” appears to be a typographical error (see indefinite rejection below). Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1-6 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
In claim 1, line 11, the recitation of “a plurality of substrates” is indefinite because it is unclear whether or not the recitation is directed to the prior “a plurality of substrates” in lines 2-3 or the same “plurality of substrates”. Clarification and correction with proper antecedent basis is required.
Similarly, claim 1, lines 19, 22-23, 45-46, 56, 66-67, and 72 also recite “a plurality of substrates” and are indefinite for reasons of same above.
Claims 2 and 3 are replete with additional recitations of “a plurality of substrates” which are indefinite for reasons of same above.
Claims 1-3 are replete with recitations of “attitude”, such as “horizontal attitude” and “vertical attitude”, which are indefinite because it is unclear what Applicant intends. What is meant by the components having “attitude”? Did Applicant intend to recite “altitude” or some other recitation? Clarification and correction on what is meant by the terminology “attitude” in the claimed apparatus and how it relates to the structural components therein.
Claim 5 recites “a substrate” in lines 3 and 4-5. However, it is unclear if the substrate is one of “a plurality of substrates” already recited in claim 1 or a completely different substrate. Clarification and correction are required.
Claim 6 recites “a substrate” in lines 3 and 4-5. However, it is unclear if the substrate is one of “a plurality of substrates” already recited in claim 1 or a completely different substrate. Clarification and correction are required.
Allowable Subject Matter
Claims 1-6 would be allowable if rewritten or amended to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action.
Conclusion
The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US 2022/0172966 to Choi et al, which discloses a substrate processing system for performing batch processing and single-wafer processing.
Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOSEPH L PERRIN whose telephone number is (571)272-1305. The examiner can normally be reached M-F 7:30-4:00.
Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice.
If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael E. Barr can be reached at 571-272-1414. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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Joseph L. Perrin, Ph.D.
Primary Examiner
Art Unit 1711
/Joseph L. Perrin/Primary Examiner, Art Unit 1711
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