Prosecution Insights
Last updated: April 19, 2026
Application No. 16/826,651

VIAS AND CONDUCTIVE ROUTING LAYERS IN SEMICONDUCTOR SUBSTRATES

Non-Final OA §102
Filed
Mar 23, 2020
Examiner
ISAAC, STANETTA D
Art Unit
2898
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Micron Technology, Inc.
OA Round
9 (Non-Final)
86%
Grant Probability
Favorable
9-10
OA Rounds
2y 7m
To Grant
48%
With Interview

Examiner Intelligence

Grants 86% — above average
86%
Career Allow Rate
811 granted / 948 resolved
+17.5% vs TC avg
Minimal -38% lift
Without
With
+-37.9%
Interview Lift
resolved cases with interview
Typical timeline
2y 7m
Avg Prosecution
57 currently pending
Career history
1005
Total Applications
across all art units

Statute-Specific Performance

§101
0.1%
-39.9% vs TC avg
§103
49.5%
+9.5% vs TC avg
§102
44.6%
+4.6% vs TC avg
§112
5.4%
-34.6% vs TC avg
Black line = Tech Center average estimate • Based on career data from 948 resolved cases

Office Action

§102
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application is being examined under the pre-AIA first to invent provisions. This office action is in response to the amendment filed on 11/21/25. Claims 33-37, 41-43, and 48 are pending. Response to Amendment Applicant's request for reconsideration of the finality of the rejection of the last Office action is persuasive and, therefore, the finality of that action is withdrawn. The indication of allowability set forth in the previous action is withdrawn and prosecution is reopened in view of the following new ground of rejection. Claim Rejections - 35 USC § 102 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of the appropriate paragraphs of pre-AIA 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (b) the invention was patented or described in a printed publication in this or a foreign country or in public use or on sale in this country, more than one year prior to the date of application for patent in the United States. Claim(s) 33-37, 41-43, and 48 is/are rejected under pre-AIA 35 U.S.C. 102(b) as being anticipated by Lu et al. (US PGPub 2017/0047374, hereinafter referred to as “Lu”). Lu discloses the semiconductor device as claimed. See figures 1-14, with emphasis in figure 12, and corresponding text, where Lu teaches, claim 33, a semiconductor device, comprising: a semiconductor substrate (101, 102) having a first substrate surface and a second substrate surface; a dielectric (105, 138, 162) on the semiconductor substrate (101), the dielectric having a first dielectric surface and a second dielectric surface, wherein the second dielectric surface is in contact with the first substrate surface; a depression (1270) formed in the dielectric, the depression extending from the first dielectric surface to the second dielectric surface; an aperture (168) extending through the dielectric (105, 138, 162) and at least a portion of the semiconductor substrate; and a conductive material (164) having a first portion at least partially filling the depression (1270) and forming a trace (164), a second portion at least partially filling the aperture (168), and a third portion (portion between (1270) and (168))positioned within the dielectric (105, 138, 162) and laterally between the first portion and the second portion, wherein a lower surface of the third portion is in contact with the first substrate surface, wherein the first and second portion are electrically coupled by the third portion, and wherein the first, second, and third portions of the conductive material are generally contiguous (figure 12; [0062-0064]). Lu teaches, claim 34, wherein the aperture has a first open end at the first dielectric surface and a second open end at the second substrate surface, and wherein a first cross-sectional area of the aperture at the first open end is generally the same as a second cross-sectional area of the aperture at the second open end (figure 12; [0062-0064]). Lu teaches, claim 35, further comprising: a first passivation layer (222) on the first dielectric surface, wherein the first passivation layer has a first opening generally corresponding to the first open end; and a second passivation layer (222) on the second substrate surface, wherein the second passivation layer has a second opening generally corresponding to the second open end ([0044]). Lu teaches, claim 36, further comprising: a first interconnect component attached to a first surface of the conductive material exposed in the first opening; and a second interconnect component attached to a second surface of the conductive material exposed in the second opening (figure 12; [0062-0064]). Lu teaches, claim 37, wherein the first and third portions of the conductive material are in direct contact, and wherein the second and third portions of the conductive material are in direct contact (figure 12; [0062-0064]). Lu teaches, claim 41, wherein an upper surface of the first portion of the conductive material is coplanar with an upper surface of the second portion of the conductive material (figure 12; [0062-0064]). Lu teaches, claim 42, wherein a lower surface of the first portion of the conductive material is in contact with the first substrate surface (figure 12; [0062-0064]). Lu teaches, claim 43, further comprising a passivation material formed over the dielectric, wherein the passivation material covers an upper surface of the first portion and the third portion of the conductive material, and wherein the passivation material includes an opening corresponding to an upper surface of the second portion of the conductive material (figure 12; [0062-0064]). Lu teaches, claim 48, wherein the conductive material has a planar upper surface across the first portion, the second portion, and the third portion (figure 12; [0062-0064]). Response to Arguments Applicant’s arguments with respect to claim(s) 33-37, 41-43, and 48 have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to STANETTA D ISAAC whose telephone number is (571)272-1671. The examiner can normally be reached M-F 11-8. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Julio Maldonado can be reached at 571-272-1864. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /STANETTA D ISAAC/Examiner, Art Unit 2898 January 6, 2026
Read full office action

Prosecution Timeline

Mar 23, 2020
Application Filed
Mar 27, 2021
Non-Final Rejection — §102
Sep 01, 2021
Response Filed
Dec 01, 2021
Non-Final Rejection — §102
Feb 17, 2022
Response Filed
Jun 03, 2022
Final Rejection — §102
Nov 08, 2022
Request for Continued Examination
Nov 09, 2022
Response after Non-Final Action
Jan 14, 2023
Non-Final Rejection — §102
May 22, 2023
Response Filed
Sep 29, 2023
Non-Final Rejection — §102
Jan 05, 2024
Response Filed
Aug 10, 2024
Final Rejection — §102
Nov 19, 2024
Response after Non-Final Action
Dec 13, 2024
Non-Final Rejection — §102
Apr 15, 2025
Response Filed
Sep 22, 2025
Final Rejection — §102
Nov 21, 2025
Response after Non-Final Action
Jan 06, 2026
Non-Final Rejection — §102 (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

9-10
Expected OA Rounds
86%
Grant Probability
48%
With Interview (-37.9%)
2y 7m
Median Time to Grant
High
PTA Risk
Based on 948 resolved cases by this examiner. Grant probability derived from career allow rate.

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