DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Claims 1-20 are pending. Claims 17-20 are withdrawn.
Continued Examination Under 37 CFR 1.114
A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 9/30/25 has been entered.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 8-16 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
In claim 8, it is unclear in lines 10-17, respectively, which “a laser shot of the plurality of laser shots…”.Specifically, “a first illumination area luminated by a first laser shot of the plurality of laser shots”, then the limitation states, “at least one laser shot, of the plurality of laser shots…” it is unclear as to which of the plurality shots is being referred to. In addition, “illuminates material having a surface roughness” it is unclear as to which material the claim is referring to.
Allowable Subject Matter
Claims 1-7 are allowed over the prior art of record.
The following is an examiner’s statement of reasons for allowance: The closest prior art of record and to the examiner’s knowledge does not suggest or render obvious a method of manufacturing a semiconductor device, particularly characterized by directing second thermal energy to the first surface of the metal silicide layer having the surface roughness to reduce the surface roughness of the first surface of the metal silicide layer, as detailed in claim 1. Claims 2-7 depend from claim 1.
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Conclusion
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/STANETTA D ISAAC/Examiner, Art Unit 2898 February 21, 2026