Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
The preliminary amendment filed on 5/18/2022 has been fully considered and made of record in this application.
Election/Restrictions
Applicant’s election of claims 1-29 and 42 in the reply filed on 5/19/2025 is acknowledged. Because applicant did not distinctly and specifically point out the supposed errors in the restriction requirement, the election has been treated as an election without traverse (MPEP § 818.01(a)).
Claims 29 and 42 are withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected species claim, there being no allowable generic or linking claim. Election was made without traverse in the reply filed on 5/19/2025.
Information Disclosure Statement
The information disclosure statement (IDS) submitted on 5/19/2025 and 9/15/2025 was filed after the mailing date of the Non-final rejection on 10/31/2025. The submission is in compliance with the provisions of 37 CFR 1.97. Accordingly, the information disclosure statement is being considered by the examiner.
Specification
The title of the invention is not descriptive. A new title is required that is clearly indicative of the invention to which the claims are directed.
The following title is suggested: “METHOD OF FABRICATING MEMORY ARRAY HAVING STRINGS OF MEMORY CELLS ”.
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 10, 14, and 26 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
In claims 10, 14, and 26, the phrase “ the metal oxide and the metal material are everywhere separated by insulator material ” is vague and indefinite since it is not clear from the claim if the separation of the oxide and metal layers are separated everywhere on the side, bottom, or upper surface of the metal oxide layer.
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
Claims 20-24 and 26 are rejected under 35 U.S.C. 102(a)(2) as being clearly anticipated by Hopkins et al. (US 11,282,847). .
The applied reference has a common assignee with the instant application. Based upon the earlier effectively filed date of the reference, it constitutes prior art under 35 U.S.C. 102(a)(2). This rejection under 35 U.S.C. 102(a)(2) might be overcome by: (1) a showing under 37 CFR 1.130(a) that the subject matter disclosed in the reference was obtained directly or indirectly from the inventor or a joint inventor of this application and is thus not prior art in accordance with 35 U.S.C. 102(b)(2)(A); (2) a showing under 37 CFR 1.130(b) of a prior public disclosure under 35 U.S.C. 102(b)(2)(B) if the same invention is not being claimed; or (3) a statement pursuant to 35 U.S.C. 102(b)(2)(C) establishing that, not later than the effective filing date of the claimed invention, the subject matter disclosed in the reference and the claimed invention were either owned by the same person or subject to an obligation of assignment to the same person or subject to a joint research agreement.
With respect to Claims 20-24, Hopkins teaches forming a memory array comprising strings of memory cells. Forming a lower portion 18L of a stack that will comprise vertically-alternating first tiers and second tiers on a substrate 11. The stack comprising laterally-spaced memory-block regions 58, wherein the lower portion 18L comprising rails 15 that are individually between immediately-laterally-adjacent of the memory-block regions 58. The rails 15 comprising sacrificial material 47 that comprises metal oxide directly above metal material 44 or 61 (i.e. WSix or silicon dioxide). The metal oxide and the metal material comprising different compositions relative one another. Forming the vertically-alternating first tiers 20 and second tiers 22 of an upper portion of the stack directly above the lower portion 18L. Material of the first tiers being of different composition from material of the second tiers. Forming trenches 40, 79 into the upper portion to the rails 15 and removing the sacrificial material of the rails through the trenches 40, 79. Forming channel-material strings 37, 38 that extend through the first tiers and the second tiers in the memory-block regions (see col. 3 lines 10-15, col. 4 lines 35-38, col. 5 lines 1-67, col. 6 lines 1-67, and col. 7 lines 1-67; Figs. 15-25).
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows:
1. Determining the scope and contents of the prior art.
2. Ascertaining the differences between the prior art and the claims at issue.
3. Resolving the level of ordinary skill in the pertinent art.
4. Considering objective evidence present in the application indicating obviousness or nonobviousness.
Claims 25 is rejected under 35 U.S.C. 103 as being unpatentable over Hopkins et al. (US 11,282,847) as applied to claims 20 and 24 above, and further in view of Yang et al. (US 2002/0036313).
Hopkins discloses the claimed invention except for the metal oxide comprises aluminum oxide. However, Yang discloses a memory cell having a dielectric layer made of a metal oxide comprises aluminum oxide which can be used instead of tungsten oxide (see claim 81). Thus, Hopkins and Yang have substantially the same environment of a substrate supporting a memory array. Therefore, one skilled in the art before the effective filing date of the claimed invention would readily recognize substituting aluminum oxide for the tungsten oxide of Hopkins, since the aluminum oxide would facilitate in reliable dielectric material for isolating metal layers in a memory cell as taught by Yang.
Allowable Subject Matter
Claims 1-9, 11-13, 15, 16, and 19 are allowed.
Claims 27 and 28 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims.
The following is a statement of reasons for the indication of allowance subject matter: none of the prior art of record does not teach or suggest the combination of the plugs comprising sacrificial material that comprises metal oxide directly above metal material. Forming the vertically alternating first tiers and second tiers of an upper portion of the stack directly above the lower portion. Forming channel openings into the upper portion to the plugs. Removing the sacrificial material of the plugs through the channel openings and thereafter forming a channel material string in individual of the channel openings along with the other limitations of claim 1.
Forming a second vertical stack aside the first vertical stack, the second vertical stack comprising an upper portion directly above a lower portion. The upper portion in the second vertical stack comprising vertically-alternating tiers that are of different composition relative one another. The lower portion 18L in the second vertical stack comprising dummy plugs that comprise the metal oxide directly above the metal material, the dummy plugs remaining in a finished circuitry construction that comprises the memory array in claim 27.
A first vertical stack, and further comprising forming a second vertical stack aside the first vertical stack, the second vertical stack comprising an upper portion directly above a lower portion. The upper portion in the second vertical stack comprising vertically-alternating tiers that are of different composition relative one another. The lower portion in the second vertical stack comprising dummy rails comprising the metal oxide directly above the metal material. The dummy rails remaining in a finished circuitry construction that comprises the memory array in claim 28.
The prior art made of record and not relied upon is cited primarily to show the
product of the instant invention.
Conclusion
18. Any inquiry concerning the communication or earlier communications from the examiner should be directed to Alonzo Chambliss whose telephone number is (571) 272-1927.
If attempts to reach the examiner by telephone are unsuccessful, the examiner's supervisor, Jacob Y. Choi can be reached on (469) 270-9060. The fax phone number for the organization where this application or proceeding is assigned is 571 - 273- 8300.
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AC/November 1, 2025 /Alonzo Chambliss/ Primary Examiner, Art Unit 2897