Prosecution Insights
Last updated: April 19, 2026
Application No. 17/759,257

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS

Final Rejection §103
Filed
Jul 21, 2022
Examiner
TALBOT, BRIAN K
Art Unit
1712
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Applied Materials, Inc.
OA Round
4 (Final)
59%
Grant Probability
Moderate
5-6
OA Rounds
3y 4m
To Grant
90%
With Interview

Examiner Intelligence

Grants 59% of resolved cases
59%
Career Allow Rate
680 granted / 1151 resolved
-5.9% vs TC avg
Strong +31% interview lift
Without
With
+31.2%
Interview Lift
resolved cases with interview
Typical timeline
3y 4m
Avg Prosecution
58 currently pending
Career history
1209
Total Applications
across all art units

Statute-Specific Performance

§101
0.1%
-39.9% vs TC avg
§103
62.0%
+22.0% vs TC avg
§102
12.3%
-27.7% vs TC avg
§112
21.6%
-18.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1151 resolved cases

Office Action

§103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . The amendment filed 6/30/25 has been considered and entered. Claim 13 has been canceled. Claims 1-12 and 14-20 remain in the application with claims 15-20 having been withdrawn. Therefore, claims 1-12 and 14 remain active in the application for prosecution thereof. The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action. Considering the amendment filed 6/30/25, the 35 USC 102 rejection has been withdrawn, however, the following rejection has been necessitated by the amendment. Claim Rejections - 35 USC § 103 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Claims 1-6 and 8-12 are rejected under 35 U.S.C. 103 as being unpatentable Sun et al. (2013/0288037) (a) alone or (b) in combination with Xu et al. (9,469,918). Sun et al. (2013/0288037) teaches a plasma spray coating process and enhancement for critical chamber components. Sun et al. (2013/0288037) teaches ceramic coatings to include SiC and ceramic coating materials including YAG, YAM, YSZ and combinations thereof [0038]. The substrate includes metals, ceramics and metal alloys [0044]. Sun et al. (2013/0288037) teaches the parameters of the plasma spray coating to include plasma power of 90kW, gas flow rate of 120-130L/min, powder feed rate of 10g/min, distance of nozzle to substrate of 100 mm and gun current of 150A [0053]. Sun et al. (2013/0288037) teaches the coating can be stripped from the substrate without affecting the dimensions of the substrate that are coated [0040] this would meet the claimed “obtain the bulk silicon carbide part”. Sun et al. (2013/0288037) fails to specifically teach the claimed the at least 5mm thickness. (a)Sun et al. (2013/0288037) teaches thicknesses of 10-40 mils which is about 1mm and teaches multiple passes of about 30-45 passes which would equate to 4.5mm (100 um x 45 passes) which is less than the claimed greater than 5mm (as argued by Applicant). The Examiner takes the position that the thickness is a matter of design choice by one skilled in the art and hence would be within the skill of one practicing in the art to suggest enough passes to produce the claimed greater than 5mm thickness as desired absent a showing of criticality thereof the claimed thickness. It would have been obvious to one having ordinary skill in the art to have determined the optimum values of the relevant process parameters through routine experimentation in the absence of a showing of criticality. In re Aller, USPQ 233 (CCPA 1955). (b) Xu et al. (9,469,918) teaches forming a diamond layer including SiC by spray plasma (col. 4, lines 39-45) whereby the coating can be separated from the substrate to form a free-standing film (claimed bulk part) (col. 3, lines 19-22) having a thin or thick coating thickness whereby the thick film coating thickness of 5 mm (col. 8, lines 59-67). Therefore it would have been obvious for one skilled in the art before the effective filing date of the claimed inventio to have modified Sun et al. (2013/0288037) process to form a film thickness of 5mm as evidenced by Xu et al. (9,469,918) with the expectation of producing free-standing films by spray plasma and separating from a substrate. Regarding claims 2-3, Sun et al. (2013/0288037) teaches silicon carbide and one or more ceramics, and the ceramics would meet the claimed dopants. Regarding claim 4-6,10-12, Sun et al. (2013/0288037) teaches the claimed dopants such as YAG, YAM, YSZ, etc. as well as one or more metals (Al, Nd, Zr, Si, Er, etc.) [00[0038],[0046,[0049]. Regarding claims 8-9, the coating would include both SiC and one or more ceramic dopants. Claims 7 and 14 are rejected under 35 U.S.C. 103 as being unpatentable Sun et al. (2013/0288037) (a) alone or (b) in combination with Xu et al. (9,469,918) (a) or (b) further in combination with Mubarok et al. “Suspension Plasma Spraying of sub-micron Silicon Carbide composite coatings”. Features detailed above concerning the teachings of Sun et al. (2013/0288037) (a) alone or (b) in combination with Xu et al. (9,469,918) are incorporated here. Sun et al. (2013/0288037) (a) alone or (b) in combination with Xu et al. (9,469,918) fails to teach the claimed dopants being ceramics and the materials of the ceramics including the metals recited. Mubarok et al. “Suspension Plasma Spraying of sub-micron Silicon Carbide composite coatings” teaches thermal spraying of silicon carbide materials whereby ceramics and metal binders (claimed dopants) are necessary to facilitate the bonding of the SiC particles allowing formation of SiC composite coatings to be formed (abstract). Mubarok et al. “Suspension Plasma Spraying of sub-micron Silicon Carbide composite coatings” teaches a ceramic oxide binder of YAG prepared from Al(NO3)-9H2O and Y(NO3)3-6H2O (p. 818). Mubarok et al. “Suspension Plasma Spraying of sub-micron Silicon Carbide composite coatings” teaches the metal salt precursor in the amount of 30 wt% oxide binder which would leave 70 wt% for the SiC (p. 818). Therefore, it would have been obvious for one skilled in the art before the effective filing date of the claimed invention to have modified Sun et al. (2013/0288037) (a) alone or (b) in combination with Xu et al. (9,469,918) process to include ceramics as a binder to improve the bonding of the SiC coating as evidenced by Mubarok et al. “Suspension Plasma Spraying of sub-micron Silicon Carbide composite coatings”. Response to Arguments Applicant’s arguments with respect to claims 1-12 and 14 have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument. Applicant argued Sun et al. (2013/0288037) teaches at most a thickness of 4.5mm as each pass forms a coating thickness of 100 um and teaches 30-45 passes which would at the most teach 45 x 100 um = 4.5mm. The Examiner agrees in part. The Examiner takes the position that the thickness is a matter of design choice by one skilled in the art and hence would be within the skill of one practicing in the art to suggest enough passes to produce the claimed greater than 5mm thickness as desired absent a showing of criticality thereof the claimed thickness. It would have been obvious to one having ordinary skill in the art to have determined the optimum values of the relevant process parameters through routine experimentation in the absence of a showing of criticality. In re Aller, USPQ 233 (CCPA 1955). Furthermore, Xu et al. (9,469,918) teaches the claimed thickness of 5mm formed by spray plasma of SiC and diamond coatings which are separated from a substrate Applicant argued Sun et al. (2013/0288037) teaching of “stripping” does not disclose removing the bulk material from the substrate to form a bulk part. The Examiner agrees in part. However, the stripping would indeed meet the claimed “removing” as the coating is separated from the substrate and does not teach destroying the coating when doing so and hence would produce the claimed “bulk material”. Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Any inquiry concerning this communication or earlier communications from the examiner should be directed to BRIAN K TALBOT whose telephone number is (571)272-1428. The examiner can normally be reached Mon-Thurs 6:30-5PM - Fri OFF. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Gordon Baldwin can be reached on 571-272-5166. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /BRIAN K TALBOT/ Primary Examiner, Art Unit 1715
Read full office action

Prosecution Timeline

Jul 21, 2022
Application Filed
Jul 29, 2024
Non-Final Rejection — §103
Nov 01, 2024
Response Filed
Jan 31, 2025
Final Rejection — §103
Mar 25, 2025
Interview Requested
Apr 01, 2025
Examiner Interview Summary
Apr 01, 2025
Applicant Interview (Telephonic)
Apr 30, 2025
Request for Continued Examination
May 05, 2025
Response after Non-Final Action
May 20, 2025
Non-Final Rejection — §103
Jun 16, 2025
Interview Requested
Jun 24, 2025
Applicant Interview (Telephonic)
Jun 24, 2025
Examiner Interview Summary
Jun 30, 2025
Response Filed
Sep 29, 2025
Final Rejection — §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12597658
SECONDARY BATTERY, BATTERY PACK, AND AUTOMOBILE
2y 5m to grant Granted Apr 07, 2026
Patent 12595564
METHOD OF FORMING SURFACE TREATMENT FILM
2y 5m to grant Granted Apr 07, 2026
Patent 12582976
DEVICES AND METHODS FOR RADIALLY-ZONED CATALYST COATING
2y 5m to grant Granted Mar 24, 2026
Patent 12586846
SECONDARY BATTERY
2y 5m to grant Granted Mar 24, 2026
Patent 12583016
METHOD FOR MANUFACTURING ELECTRODE, CLASSIFICATION SYSTEM, AND, ELECTRODE MATERIAL
2y 5m to grant Granted Mar 24, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

AI Strategy Recommendation

Get an AI-powered prosecution strategy using examiner precedents, rejection analysis, and claim mapping.
Powered by AI — typically takes 5-10 seconds

Prosecution Projections

5-6
Expected OA Rounds
59%
Grant Probability
90%
With Interview (+31.2%)
3y 4m
Median Time to Grant
High
PTA Risk
Based on 1151 resolved cases by this examiner. Grant probability derived from career allow rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month