467 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 19241599 | THIN FILM TRANSISTORS FOR CIRCUITS FOR USE IN DISPLAY DEVICES | EDWARDS, MARK | 2624 | Non-Final OA | Jun 18, 2025 |
| 19068301 | PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY | TUROCY, DAVID P | 1718 | Final Rejection | Mar 03, 2025 |
| 19051385 | METAL OXIDE DIRECTIONAL REMOVAL | PHAM, THOMAS T | 1713 | Non-Final OA | Feb 12, 2025 |
| 18984643 | GAS DELIVERY SYSTEM | JELLETT, MATTHEW WILLIAM | 3753 | Non-Final OA | Dec 17, 2024 |
| 18971510 | MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Dec 06, 2024 |
| 18949472 | Novel arc management algorithm of RF generator and Match box for CCP plasma Chambers | LEE, WILSON | 2844 | Non-Final OA | Nov 15, 2024 |
| 18912366 | CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER | KAISER, SYED M | 2831 | Non-Final OA | Oct 10, 2024 |
| 18828801 | METHOD TO DETERMINE LINE ANGLE AND ROTATION OF MULTIPLE PATTERNING | AKANBI, ISIAKA O | 2877 | Non-Final OA | Sep 09, 2024 |
| 18825223 | INSPECTION SYSTEM | DEUBLE, MARK A | 3651 | Non-Final OA | Sep 05, 2024 |
| 18813502 | PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY | GOLDEN, CHINESSA T | 1788 | Non-Final OA | Aug 23, 2024 |
| 18809681 | DUAL MANUFACTURING PROCESS AND CALIBRATION TO ACHIEVE HIGH ACCURACY THERMAL COUPLE SUBSTRATES | MERSHON, JAYNE L | 1721 | Non-Final OA | Aug 20, 2024 |
| 18804592 | LASER DICING GLASS WAFERS USING ADVANCED LASER SOURCES | TENTONI, LEO B | 1742 | Non-Final OA | Aug 14, 2024 |
| 18805150 | IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING | TRAN, JUDY DAO | 2877 | Non-Final OA | Aug 14, 2024 |
| 18802002 | METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMIC COMPONENTS | AMEEN, MOHAMMAD M | 1742 | Non-Final OA | Aug 13, 2024 |
| 18798303 | MULTIDIRECTIONAL ILLUMINATION FOR HYBRID BONDING DEFECT DETECTION | KO, TONY | 2878 | Non-Final OA | Aug 08, 2024 |
| 18790596 | POST-GAP FILL TREATMENT FOR SEAM REDUCTION | CHEN, BRET P | 1718 | Final Rejection | Jul 31, 2024 |
| 18782761 | ELECTROMAGNETIC MAGNETIC SENSOR ASSEMBLY | PRETLOW, DEMETRIUS R | 2858 | Non-Final OA | Jul 24, 2024 |
| 18781131 | FLUID AERATOR TO REDUCE SPLASHING | BERGNER, ERIN FLANAGAN | 1713 | Non-Final OA | Jul 23, 2024 |
| 18779953 | ENDPOINT DETECTION IN LOW OPEN AREA AND/OR HIGH ASPECT RATIO ETCH APPLICATIONS | AHMED, SHAMIM | 1713 | Non-Final OA | Jul 22, 2024 |
| 18775420 | DIGITAL LITHOGRAPHY APPARATUS WITH IMAGING DEVICE POSITIONED TO MITIGATE MOIRE EFFECT | NGUYEN, HUNG | 2882 | Non-Final OA | Jul 17, 2024 |
| 18773943 | BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE | CHAN, LAUREEN | 1716 | Non-Final OA | Jul 16, 2024 |
| 18764038 | HIGH PERFORMANCE HEAT EXCHANGER | ROJOHN III, CLAIRE E | 3763 | Non-Final OA | Jul 03, 2024 |
| 18762865 | HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND ELECTRODES | BOWMAN, ANDREW J | 1717 | Non-Final OA | Jul 03, 2024 |
| 18760824 | SUBSTRATE SUPPORT ASSEMBLY HAVING AN INTEGRATED SPRING PRESSURE PLATE | BAUER, SCOTT ALLEN | 2838 | Non-Final OA | Jul 01, 2024 |
| 18753682 | OFF-AXIS MOTION CHARACTERIZATION OF A LINEAR ACTUATOR | TON, TRI T | 2877 | Non-Final OA | Jun 25, 2024 |
| 18748845 | REACTION CHAMBER WITH MULTI PHASE PRECURSOR DELIVERY | MURPHY, KEVIN F | 3753 | Final Rejection | Jun 20, 2024 |
| 18749288 | DYNAMIC CORRECTION FOR LEAKAGE CURRENT AND BACKGROUND RADIATION | ARTMAN, THOMAS R | 2884 | Non-Final OA | Jun 20, 2024 |
| 18746413 | HIGH RESOLUTION ADVANCED OLED SUB-PIXEL CIRCUIT AND PATTERNING METHOD | OJEH, NDUKA E | 2892 | Non-Final OA | Jun 18, 2024 |
| 18747307 | AUTOMATED TORQUE DRIVER SOLUTION | OSTROW, ALAN LINDSAY | 3657 | Non-Final OA | Jun 18, 2024 |
| 18740009 | SYSTEM AND METHOD FOR CHAMBER MATCHING USING PHASE-BASED SCORING | WILLOUGHBY, ALICIA M | 2156 | Non-Final OA | Jun 11, 2024 |
| 18717165 | COOLING FRAME FOR DIFFUSER | DUONG, THO V | 3763 | Non-Final OA | Jun 06, 2024 |
| 18731943 | LOWER K AND HIGHER HARDNESS WITH IMPROVED PLASMA INDUCED DAMAGE (PID) DIELECTRIC FILM DEPOSITION | MAYY, MOHAMMAD | 1718 | Final Rejection | Jun 03, 2024 |
| 18732080 | SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS | CAMPBELL, NATASHA N. | 1714 | Non-Final OA | Jun 03, 2024 |
| 18732468 | IDENTIFYING AND WEIGHING CARRIERS IN A SUBSTRATE PROCESSING SYSTEM | FORTICH, ALVARO E | 2858 | Non-Final OA | Jun 03, 2024 |
| 18731195 | POLARIZED IMAGING REFLECTOMETER | MAUPIN, HUGH H | 2884 | Non-Final OA | May 31, 2024 |
| 18715317 | GENERATE 3D PHOTORESIST PROFILES USING DIGITAL LITHOGRAPHY | WHITESELL, STEVEN H | 1759 | Final Rejection | May 31, 2024 |
| 18677103 | ELECTROPLATING WAFER SEAL APEX CLEANING TOOL | KARLS, SHAY LYNN | 3723 | Non-Final OA | May 29, 2024 |
| 18675404 | FULL-FIELD METROLOGY TOOL FOR WAVEGUIDE COMBINERS AND META-SURFACES | PARK, SANGHYUK | 2623 | Non-Final OA | May 28, 2024 |
| 18668480 | PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL | PHAM, THOMAS T | 1713 | Final Rejection | May 20, 2024 |
| 18667082 | BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | May 17, 2024 |
| 18665683 | HEATER ASSEMBLY WITH PROCESS GAP CONTROL FOR BATCH PROCESSING CHAMBERS | CHOU, JIMMY | 3761 | Final Rejection | May 16, 2024 |
| 18665239 | CHAMBER WITH ENHANCEMENT LINER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT | WELLS, KENNETH B | 2842 | Final Rejection | May 15, 2024 |
| 18663821 | IMAGE CLASSIFICATION AND OUTLIER DETECTION USING MULTI-LAYER LOSSES | GARCIA, SANTIAGO | 2673 | Non-Final OA | May 14, 2024 |
| 18661346 | MAGNETIC SENSOR ASSEMBLY | SCHINDLER, DAVID M | 2858 | Non-Final OA | May 10, 2024 |
| 18656805 | MULTI-LAYER WET-DRY HARDCOATS FOR FLEXIBLE COVER LENS | FISCHER, JUSTIN R | 1749 | Non-Final OA | May 07, 2024 |
| 18655185 | Methods and Apparatus for Chucking a Bowed Substrate | SREEVATSA, SREEYA | 2838 | Non-Final OA | May 03, 2024 |
| 18653097 | FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN | BENNETT, CHARLEE | 1718 | Non-Final OA | May 02, 2024 |
| 18651146 | SEMICONDUCTOR PROCESS EQUIPMENT | BURKMAN, JESSICA LYNN | 3653 | Non-Final OA | Apr 30, 2024 |
| 18636461 | METHODS FOR IMPROVING THROUGHPUT AND GAPFILL QUALITY FOR METAL DEPOSITION | GAMBETTA, KELLY M | 1718 | Non-Final OA | Apr 16, 2024 |
| 18635639 | SEMICONDUCTOR DEVICE PATTERNING METHODS | TUROCY, DAVID P | 1718 | Non-Final OA | Apr 15, 2024 |
| 18631989 | METHOD FOR ETCHING RUTHENIUM | AHMED, SHAMIM | 1713 | Non-Final OA | Apr 10, 2024 |
| 18632200 | AUTOMATED OPTICAL INSPECTION TOOL | TON, TRI T | 2877 | Final Rejection | Apr 10, 2024 |
| 18630696 | BIPOLAR ESC TO PREVENT SUBSTRATE BACKSIDE DISCHARGING | JACKSON, STEPHEN W | 2838 | Non-Final OA | Apr 09, 2024 |
| 18627544 | METHODS FOR ENCAPSULATING SILVER MIRRORS ON OPTICAL STRUCTURES | PLESZCZYNSKA, JOANNA | 1783 | Non-Final OA | Apr 05, 2024 |
| 18627283 | ION IMPLANTER AND LINEAR ACCELERATOR HAVING POLYGONAL BACKBONE | LUQUE, RENAN | 2896 | Non-Final OA | Apr 04, 2024 |
| 18619752 | SIDE BLOCKS FOR GAS ACTIVATION, AND RELATED PROCESSING CHAMBERS, PROCESS KITS, AND METHODS | KACKAR, RAM N | 1716 | Final Rejection | Mar 28, 2024 |
| 18615617 | SEALED AXIAL FLUX MOTORS FOR VACUUM ROBOTS | MACARTHUR, VICTOR L | 3618 | Non-Final OA | Mar 25, 2024 |
| 18613671 | METHOD FOR COATING PHARMACEUTICAL SUBSTRATES | ARNOLD, ERNST V | 1613 | Non-Final OA | Mar 22, 2024 |
| 18606627 | MODELING SUBSTRATE TEMPERATURES | FAUBERT, SAMANTHA LYNETTE | 2838 | Non-Final OA | Mar 15, 2024 |
| 18603646 | ADVANCED THERMAL MANAGEMENT SYSTEM (ATM) FOR PEDESTAL TEMPERATURE CONTROL IN HIGH POWER PECVD CHAMBER | WELLS, KENNETH B | 2842 | Final Rejection | Mar 13, 2024 |
| 18602099 | CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIAL FILM APPLICATIONS | SWEELY, KURT D | 1718 | Non-Final OA | Mar 12, 2024 |
| 18595951 | SUBTRACTIVE METALS AND SUBTRACTIVE METAL SEMICONDUCTOR STRUCTURES | SLUTSKER, JULIA | 2891 | Final Rejection | Mar 05, 2024 |
| 18593610 | SACRIFICIAL LINER FOR COPPER INTERCONNECT | DAGENAIS, KRISTEN A | 1717 | Non-Final OA | Mar 01, 2024 |
| 18593014 | SELECTIVE ETCHING OF ALTERNATING LAYERS OF SILICON OXIDE AND SILICON NITRIDE FOR HIGH ASPECT RATIO CONTACTS | CARTER, JONATHAN LANGDON | 1713 | Non-Final OA | Mar 01, 2024 |
| 18590141 | LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS | MILLER, JR, JOSEPH ALBERT | 1712 | Final Rejection | Feb 28, 2024 |
| 18590572 | LOW TEMPERATURE ATMOSPHERIC EPITAXIAL PROCESS | SONG, MATTHEW J | 1714 | Non-Final OA | Feb 28, 2024 |
| 18589629 | ENABLING THICK MOSI GROWTH | TADAYYON ESLAMI, TABASSOM | 1718 | Non-Final OA | Feb 28, 2024 |
| 18586090 | SAMPLE THICKNESS METROLOGY USING FOCUSED BEAM INTERFERENCE | HANSEN, JONATHAN M | 2877 | Final Rejection | Feb 23, 2024 |
| 18584540 | DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Feb 22, 2024 |
| 18442681 | SYSTEMS AND METHODS FOR NANOHOLE WET CLEANS | CARTER, JONATHAN LANGDON | 1713 | Non-Final OA | Feb 15, 2024 |
| 18438222 | PHASE MASKING FOR POLARIZATION AND OPTICAL SIGNAL CONTROL IN OPTICAL INSPECTION SYSTEMS | CARLSON, JOSHUA MICHAEL | 2877 | Final Rejection | Feb 09, 2024 |
| 18436499 | DEFORMABLE SUBSTRATE CHUCK | ZAWORSKI, JONATHAN R | 3723 | Non-Final OA | Feb 08, 2024 |
| 18435853 | DEPOSITION AND ETCHING FOR SELECTIVE REMOVAL OF DEPOSITED DIELECTRIC FILM FROM TOPS OF FINS | TRAN, BINH X | 1713 | Non-Final OA | Feb 07, 2024 |
| 18432525 | COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM | JARRETT, RYAN A | 2116 | Non-Final OA | Feb 05, 2024 |
| 18424470 | SYSTEMS AND METHODS FOR HIGH-THROUGHPUT ANGLED ION PROCESSING | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Jan 26, 2024 |
| 18423636 | Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving Substrate | MOORE, KARLA A | 1716 | Final Rejection | Jan 26, 2024 |
| 18418930 | METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER | BAND, MICHAEL A | 1794 | Final Rejection | Jan 22, 2024 |
| 18417304 | APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL | CHANG, SUKWOO JAMES | 3723 | Final Rejection | Jan 19, 2024 |
| 18417124 | POLISHING HEAD WITH RETAINING RING WEAR SENSING | DION, MARCEL T | 3723 | Non-Final OA | Jan 19, 2024 |
| 18415506 | RF FILTER TOPOLOGY FOR SUBSTRATE SUPPORT ASSEMBLY | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | Final Rejection | Jan 17, 2024 |
| 18412430 | METHODS AND SYSTEMS FOR CLEANING PROCESS SEQUENCE MANAGEMENT | HEDRICK, TYLER DEAN | 2115 | Final Rejection | Jan 12, 2024 |
| 18411294 | Universal Optical Waveguide Trays | KIANNI, KAVEH C | 2874 | Non-Final OA | Jan 12, 2024 |
| 18409979 | SYSTEMS AND METHODS FOR VISUAL INSPECTION OF PHARMACEUTICAL CONTAINERS | ESQUINO, CALEB LOGAN | 2677 | Non-Final OA | Jan 11, 2024 |
| 18409564 | COMPACT FACEPLATE LOADING PLATFORM | NEJAD, MAHDI H | 3723 | Non-Final OA | Jan 10, 2024 |
| 18407033 | Substrate Lift Pins and Substrate Supports and Process Chambers Incorporating Same | NEJAD, MAHDI H | 3723 | Non-Final OA | Jan 08, 2024 |
| 18401306 | APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY | PRUITT, JUSTIN A | 3745 | Non-Final OA | Dec 29, 2023 |
| 18400319 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | AYALEW, TINSAE B | 1711 | Non-Final OA | Dec 29, 2023 |
| 18400393 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | CHAUDHRI, OMAIR | 1711 | Non-Final OA | Dec 29, 2023 |
| 18400138 | SELECTIVE DEPOSITION OF CAPPING LAYER | DAGENAIS, KRISTEN A | 1717 | Non-Final OA | Dec 29, 2023 |
| 18398723 | INTEGRATED OPTICAL SENSOR CONTROLLER FOR DEVICEMANUFACTURING MACHINES | LAPAGE, MICHAEL P | 2877 | Non-Final OA | Dec 28, 2023 |
| 18398532 | Interfacial Layer for Anneal Capping Layer | ALBRECHT, PETER M | 2811 | Non-Final OA | Dec 28, 2023 |
| 18397885 | MULTIMODE DOSE COMPENSATION SYSTEM | WANG, JING | 2881 | Non-Final OA | Dec 27, 2023 |
| 18394352 | ISOLATION FORMATION METHOD IN HIGH-ASPECT RATIO CMOS STACKED DEVICES | VU, VU A | 2897 | Non-Final OA | Dec 22, 2023 |
| 18395343 | HEAT REFLECTION ASSEMBLY FOR SUBSTRATE TEMPERATURE UNIFORMITY | ANDERSON II, STEVEN S | 3762 | Non-Final OA | Dec 22, 2023 |
| 18392534 | MULTI-STEP PROCESS FOR FLOWABLE GAP-FILL FILM | DANIELS, MATTHEW J | 1742 | Non-Final OA | Dec 21, 2023 |
| 18392785 | ATOMIC LAYER ETCHING OF SILICON OXIDE AT CRYOGENIC TEMPERATURE | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Dec 21, 2023 |
| 18391056 | METALLIC SOURCE/DRAIN WITH STRESS FOR ADVANCED LOGIC TRANSISTORS | JAHAN, BILKIS | 2817 | Non-Final OA | Dec 20, 2023 |
| 18391503 | HIGH-PRECISION IN-SITU VERIFICATION AND CORRECTION OF WAFER POSITION AND ORIENTATION FOR ION IMPLANT | WINTERS, SEAN AYERS | 2892 | Non-Final OA | Dec 20, 2023 |
| 18544812 | CONTACT RESISTANCE REDUCTION BY INTEGRATION OF MOLYBDENUM WITH TITANIUM | SARKAR, ASOK K | 2891 | Non-Final OA | Dec 19, 2023 |
| 18545643 | SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING | CRANDALL, JOEL DILLON | 3723 | Non-Final OA | Dec 19, 2023 |
| 18543302 | ESC DESIGN WITH ENHANCED TUNABILITY FOR WAFER FAR EDGE PLASMA PROFILE CONTROL | CROWELL, ANNA M | 1716 | Non-Final OA | Dec 18, 2023 |
| 18542158 | CONTROLLED PH RINSE TO LIMIT CROSS-CONTAMINATION IN ELECTROPLATING BATHS | BERGNER, ERIN FLANAGAN | 1713 | Final Rejection | Dec 15, 2023 |
| 18542562 | DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING | PATEL, JIGNESHKUMAR C | 2116 | Non-Final OA | Dec 15, 2023 |
| 18541019 | Radiation Heating to Dry Moisture from Air Bearing Shaft | NGUYEN, KIET TUAN | 2881 | Non-Final OA | Dec 15, 2023 |
| 18541018 | Radiation Heating to Clean Deposits from Air Bearing Shaft | NGUYEN, KIET TUAN | 2881 | Non-Final OA | Dec 15, 2023 |
| 18539892 | ETCHING SUBSTRATES USING VAPOR ADSORPTION | DUCLAIR, STEPHANIE P. | 1713 | Final Rejection | Dec 14, 2023 |
| 18537234 | METAL OXY-FLUORIDE COATING FOR CHAMBER COMPONENTS AND METHOD OF COATING THEREOF | WIECZOREK, MICHAEL P | 1712 | Non-Final OA | Dec 12, 2023 |
| 18568993 | DIGITAL LITHOGRAPHY EXPOSURE UNIT BOUNDARY SMOOTHING | KIM, PETER B | 2882 | Final Rejection | Dec 11, 2023 |
| 18534071 | HIGH-TEMPERATURE IMPLANT FOR GATE-ALL-AROUND DEVICES | LEE, KYOUNG | 2817 | Non-Final OA | Dec 08, 2023 |
| 18532381 | METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER | SWANSON, ANDREW L | 1745 | Non-Final OA | Dec 07, 2023 |
| 18526976 | PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RELATED APPARATUS AND METHODS | YUSHIN, NIKOLAY K | 2893 | Non-Final OA | Dec 01, 2023 |
| 18525660 | FAULT EVENT RECOVERY IN MULTI-SLOT PROCESSING CHAMBERS | TANG, MICHAEL XUEFEI | 2115 | Non-Final OA | Nov 30, 2023 |
| 18525198 | WORDLINE CONTACT FORMATION FOR NAND DEVICE | HENRY, CALEB E | 2818 | Non-Final OA | Nov 30, 2023 |
| 18525471 | COOLING STATION | PHAN, AN BACH | 3763 | Non-Final OA | Nov 30, 2023 |
| 18525633 | 3D MEMORY INCLUDING HOLLOW EPITAXIAL CHANNELS | ABEL, GARY ROBERT | 2897 | Non-Final OA | Nov 30, 2023 |
| 18523455 | OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING | CUNNINGHAM, KIERAN MURRAY | 2893 | Non-Final OA | Nov 29, 2023 |
| 18523394 | SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION | CHEN, KEATH T | 1716 | Final Rejection | Nov 29, 2023 |
| 18521853 | IMPRINT COMPOSITIONS WITH PASSIVATED NANOPARTICLES AND MATERIALS AND PROCESSES FOR MAKING THE SAME | PAK, HANNAH J | 1764 | Non-Final OA | Nov 28, 2023 |
| 18519164 | EXCURSION SCREENING MODELS FOR IMPROVING ACCURACY OF EXCURSION DETECTION WITHIN MANUFACTURING SYSTEMS | CARTER, CHRISTOPHER W | 2117 | Non-Final OA | Nov 27, 2023 |
| 18518943 | THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRUCTURES | LEE, EUGENE | 2815 | Non-Final OA | Nov 24, 2023 |
| 18515593 | SHIELDED APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES | SMITH, DAVID E | 2881 | Non-Final OA | Nov 21, 2023 |
| 18511661 | ASYMMETRY CORRECTION VIA ORIENTED WAFER LOADING | GREEN, TELLY D | 2898 | Non-Final OA | Nov 16, 2023 |
| 18510336 | COLD PLATE FOR TRAPPING ETCHING AND DEPOSITION BYPRODUCTS | ZERVIGON, RUDY | 1716 | Non-Final OA | Nov 15, 2023 |
| 18508056 | POROUS CHAMBER COMPONENT COATING AUGMENTED WITH COLLOIDS | LEONG, NATHAN T | 1718 | Non-Final OA | Nov 13, 2023 |
| 18504452 | OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING | YU, YUECHUAN | 1718 | Non-Final OA | Nov 08, 2023 |
| 18558817 | NOZZLE FOR A DISTRIBUTOR OF A MATERIAL DEPOSITION SOURCE, MATERIAL DEPOSITION SOURCE, VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL | ZERVIGON, RUDY | 1716 | Non-Final OA | Nov 03, 2023 |
| 18500707 | MULTI-FLOW METHODS, AND RELATED APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Nov 02, 2023 |
| 18385945 | HOLE-TYPE SADP FOR 2D DRAM CAPACITOR | FREY, KIMBERLY NEWMAN | 2817 | Non-Final OA | Nov 01, 2023 |
| 18498239 | WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LITHIUM DEPOSITION | SWEELY, KURT D | 1718 | Final Rejection | Oct 31, 2023 |
| 18494319 | REAL-TIME PLASMA MEASUREMENT AND CONTROL | SHAFAYET, MOHAMMED | 2116 | Non-Final OA | Oct 25, 2023 |
| 18382114 | CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPITAXIAL DEPOSITION OPERATIONS | ZERVIGON, RUDY | 1716 | Non-Final OA | Oct 20, 2023 |
| 18382421 | LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KITS, FOR PROCESSING CHAMBERS | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Oct 20, 2023 |
| 18489528 | PREDICTIVE MODELING OF A MANUFACTURING PROCESS USING A SET OF TRAINED INVERTED MODELS | SKRZYCKI, JONATHAN MICHAEL | 2116 | Non-Final OA | Oct 18, 2023 |
| 18381331 | LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS | ASSOUMAN, HERVE-LOUIS Y | 2812 | Non-Final OA | Oct 18, 2023 |
| 18555896 | DIGITAL LITHOGRAPHY APPARATUS WITH AUTOFOCUS POSITION CONTROL AND METHODS OF USE THEREOF | WHITESELL, STEVEN H | 1759 | Non-Final OA | Oct 18, 2023 |
| 18380832 | MULTI-WAVELENGTH PYROMETER FOR CHAMBER MONITORING | JANG, BO BIN | 2818 | Non-Final OA | Oct 17, 2023 |
| 18555342 | METHODS AND APPLICATIONS OF NOVEL AMORPHOUS HIGH-K METAL-OXIDE DIELECTRICS BY SUPER-CYCLE ATOMIC LAYER DEPOSITION | SRINIVASAN, SESHA SAIRAMAN | 2817 | Non-Final OA | Oct 16, 2023 |
| 18380448 | ION SOURCE WITH WIRE FORM METAL DOPANT | KALISZEWSKI, ALINA ROSE | 2881 | Final Rejection | Oct 16, 2023 |
| 18486726 | SYSTEMS AND METHODS FOR DIGITAL LITHOGRAPHY SCAN SEQUENCING | PERSAUD, DEORAM | 2882 | Non-Final OA | Oct 13, 2023 |
| 18486291 | PROCESS CHAMBER GAS FLOW IMPROVEMENT | LEE, AIDEN Y | 1718 | Non-Final OA | Oct 13, 2023 |
| 18379928 | INTERFACIAL LAYER SCALING PROCESSES FOR SEMICONDUCTOR DEVICES | AHMADI, MOHSEN | 2896 | Non-Final OA | Oct 13, 2023 |
| 18379915 | SHOWERHEAD DESIGN FOR PLASMA-ENHANCED DEPOSITION | BENNETT, CHARLEE | 1718 | Non-Final OA | Oct 13, 2023 |
| 18486576 | THREE-DIMENSIONAL MEMORY DEVICE WORDLINES WITH REDUCED BLOCKING LAYER DAMAGE | GHYKA, ALEXANDER G | 2812 | Non-Final OA | Oct 13, 2023 |
| 18486072 | LOW TEMPERATURE ELECTROSTATIC CHUCK | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | Non-Final OA | Oct 12, 2023 |
| 18378850 | SACRIFICIAL SOURCE/DRAIN FOR METALLIC SOURCE/DRAIN HORIZONTAL GATE ALL AROUND ARCHITECTURE | COLLINS, HAMNER FITZHUGH | 2818 | Non-Final OA | Oct 11, 2023 |
| 18484767 | GAS FLOW IMPROVEMENT FOR PROCESS CHAMBER | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Oct 11, 2023 |
| 18483971 | HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE | MARTIN, KEEGAN THOMAS | 3723 | Non-Final OA | Oct 10, 2023 |
| 18484379 | MICROWAVE HIGH-DENSITY PLASMA FOR SELECTIVE ETCH | CARTER, JONATHAN LANGDON | 1713 | Non-Final OA | Oct 10, 2023 |
| 18378425 | METHODS FOR DEPOSITING MOLYBDENUM SULFIDE | GARCES, NELSON Y | 2814 | Non-Final OA | Oct 10, 2023 |
| 18484352 | RESISTANT COATINGS INCLUDING POLYMER SEALANT AND RESISTANT PARTICLES | CHAN, LAUREEN | 1716 | Final Rejection | Oct 10, 2023 |
| 18484232 | CERAMIC RF RETURN KIT DESIGN | CHEN, KEATH T | 1716 | Non-Final OA | Oct 10, 2023 |
| 18484016 | SCALING FOR DIE-LAST ADVANCED IC PACKAGING | ALAWDI, ANWER AHMED | 2851 | Non-Final OA | Oct 10, 2023 |
| 18483994 | ANNEAL CHAMBER | HO, ANTHONY | 2817 | Non-Final OA | Oct 10, 2023 |
| 18377599 | RETAINING RING FOR EDGE COMPENSATION BY SLURRY FLOW CONTROL | SAENZ, ALBERTO | 3723 | Non-Final OA | Oct 06, 2023 |
| 18377572 | COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYSTEMS | KEENAN, JAMES W | 3655 | Non-Final OA | Oct 06, 2023 |
| 18377615 | GROOVES FOR EDGE AND HOT SPOT COMPENSATION IN CHEMICAL MECHANICAL POLISHING | REMAVEGE, CHRISTOPHER | 1713 | Non-Final OA | Oct 06, 2023 |
| 18482658 | SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY | BOWMAN, ANDREW J | 1717 | Non-Final OA | Oct 06, 2023 |
| 18481513 | INDIVIDUALLY ROTATABLE PLATENS AND CONTROL OF CARRIER HEAD SWEEP | ZAWORSKI, JONATHAN R | 3723 | Non-Final OA | Oct 05, 2023 |
| 18377138 | COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM | BUI, DUNG H | 1773 | Non-Final OA | Oct 05, 2023 |
| 18481576 | CMP WITH INDIVIDUALLY ROTATABLE PLATENS | SHUM, KENT N | 3723 | Non-Final OA | Oct 05, 2023 |
| 18481904 | SELECTIVE HARDMASK ETCH FOR SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 1713 | Final Rejection | Oct 05, 2023 |
| 18376282 | POLISHING HEAD WITH DECOUPLED MEMBRANE POSITION CONTROL | NEIBAUR, ROBERT F | 3723 | Non-Final OA | Oct 03, 2023 |
| 18376287 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND ENHANCED ELECTRICAL PROPERTIES | MOTT, ADAM JOSEPH | 2817 | Non-Final OA | Oct 03, 2023 |
| 18376356 | POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER | HOLIZNA, CALEB ANDREW | 3723 | Non-Final OA | Oct 03, 2023 |
| 18480060 | ADVANCED POLISHING PADS AND RELATED POLISHING PAD MANUFACTURING METHODS | CHANG, SUKWOO JAMES | 3723 | Non-Final OA | Oct 03, 2023 |
| 18376057 | SEAM-FREE SINGLE OPERATION AMORPHOUS SILICON GAP FILL | DAGENAIS, KRISTEN A | 1717 | Non-Final OA | Oct 03, 2023 |
| 18375409 | SUBSTRATE PROCESSING SYSTEM CARRIER | SAENZ, ALBERTO | 3723 | Non-Final OA | Sep 29, 2023 |
| 18477444 | DIFFUSE OPTICAL IMAGING/TOMOGRAPHY USING META-OPTICS | FERNANDEZ, KATHERINE L | 3798 | Final Rejection | Sep 28, 2023 |
| 18374531 | INVERTING IMPLANTER PROCESS MODEL FOR PARAMETER GENERATION | OSENBAUGH-STEWART, ELIZA W | 2881 | Non-Final OA | Sep 28, 2023 |
| 18372792 | Selective Deposition of Thin Films with Improved Stability | CHEN, BRET P | 1718 | Final Rejection | Sep 26, 2023 |
| 18471005 | METHOD FOR INTEGRATION OF OPTICAL DEVICE FABRICATION WITH SUBSTRATE THICKNESS ENGINEERING | JUNG, JONATHAN Y | 2871 | Final Rejection | Sep 20, 2023 |
| 18370536 | IN-SITU SIDEWALL PASSIVATION TOWARD THE BOTTOM OF HIGH ASPECT RATIO FEATURES | TAHIR, NOOR MOHAMMAD ISM | 2893 | Non-Final OA | Sep 20, 2023 |
| 18368311 | METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING | VINCENT, DAVID ROBERT | 2123 | Non-Final OA | Sep 14, 2023 |
| 18464926 | METHOD AND MATERIAL SYSTEM FOR TUNABLE HYBRID BOND INTERCONNECT RESISTANCE | JUNG, MICHAEL YOO LIM | 2817 | Non-Final OA | Sep 11, 2023 |
| 18244199 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | Non-Final OA | Sep 08, 2023 |
| 18244104 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | Non-Final OA | Sep 08, 2023 |
| 18244197 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | Final Rejection | Sep 08, 2023 |
| 18244113 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | Non-Final OA | Sep 08, 2023 |
| 18463457 | TARGETED GAS DELIVERY VIA SIDE GAS INJECTION | SHAMSUZZAMAN, MOHAMMED | 2897 | Non-Final OA | Sep 08, 2023 |
| 18242812 | CORRECTION OF GLOBAL CURVATURE DURING STRESS MANAGEMENT | NGUYEN, THANH T | 2893 | Non-Final OA | Sep 06, 2023 |
| 18242629 | DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE | ROBERTS, HERBERT K | 2855 | Non-Final OA | Sep 06, 2023 |
| 18462242 | CHANNEL UNIFORMITY HORIZONTAL GATE ALL AROUND DEVICE | WEGNER, AARON MICHAEL | 2897 | Non-Final OA | Sep 06, 2023 |
| 18242943 | CONTACT RESISTANCE REDUCTION FOR DIRECT BACKSIDE CONTACT | PATEL, REEMA | 2812 | Non-Final OA | Sep 06, 2023 |
| 18461274 | POLISHING CARRIER HEAD WITH MULTIPLE ZONES | FULL, SIDNEY DANIELLE | 3723 | Final Rejection | Sep 05, 2023 |
| 18460174 | METHOD AND MATERIAL SYSTEM FOR HIGH STRENGTH SELECTIVE DIELECTRIC IN HYBRID BONDING | RUCKER, BASEEMAH QADEER | 2817 | Non-Final OA | Sep 01, 2023 |
| 18460154 | METHODS AND STRUCTURES FOR HIGH STRENGTH DIELECTRIC IN HYBRID BONDING | RAHMAN, MOHAMMAD A | 2898 | Non-Final OA | Sep 01, 2023 |
| 18459524 | SELECTIVE CAPPING FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS | KIELIN, ERIK J | 2814 | Non-Final OA | Sep 01, 2023 |
| 18239929 | RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD | FRANCISCO, TRISHA JOY UTULO | 3723 | Non-Final OA | Aug 30, 2023 |
| 18239988 | In-Vacuum Rotatable RF Component | FORD, NATHAN K | 1716 | Non-Final OA | Aug 30, 2023 |
| 18457471 | SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION | RANDAZZO, THOMAS | 3655 | Non-Final OA | Aug 29, 2023 |
| 18239676 | SECURED CRYPTO PROCESSOR FOR CHIPLET SECURITY USING ARTIFICIAL INTELLIGENCE | KONG, ALAN LINGQIAN | 2494 | Final Rejection | Aug 29, 2023 |
| 18238810 | METHOD AND APPARATUS FOR GAS DELIVERY IN A PROCESSING CHAMBER | YU, YUECHUAN | 1718 | Non-Final OA | Aug 28, 2023 |
| 18456836 | SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Aug 28, 2023 |
| 18238954 | SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN 3D NAND MEMORY DEVICE | FAN, SU JYA | 2818 | Non-Final OA | Aug 28, 2023 |
| 18238107 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND HIGH MECHANICAL STRENGTH | RODRIGUEZ, MICHAEL P | 1712 | Non-Final OA | Aug 25, 2023 |
| 18237669 | SYSTEM FOR NON RADIAL TEMPERATURE CONTROL FOR ROTATING SUBSTRATES | CAMPBELL, THOR S | 3761 | Non-Final OA | Aug 24, 2023 |
| 18455508 | SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL | DAGENAIS, KRISTEN A | 1717 | Final Rejection | Aug 24, 2023 |
| 18237641 | HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE | HAWKINS, JASON KHALIL | 3723 | Final Rejection | Aug 24, 2023 |
| 18236922 | SINGLE GATE THREE-DIMENSIONAL (3D) DYNAMIC RANDOM-ACCESS MEMORY (DRAM) DEVICES | FERNANDES, ERROL V | 2893 | Non-Final OA | Aug 22, 2023 |
| 18236115 | SUSCEPTOR HEIGHT ADJUSTMENT | PAN, YONGJIA | 2118 | Non-Final OA | Aug 21, 2023 |
| 18236042 | METHODS OF ETCHING SILICON-AND-OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES | CULBERT, ROBERTS P | 1716 | Non-Final OA | Aug 21, 2023 |
| 18452426 | ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING | SHUM, KENT N | 3723 | Non-Final OA | Aug 18, 2023 |
| 18235249 | TREATMENTS FOR THIN FILMS USED IN PHOTOLITHOGRAPHY | ANGEBRANNDT, MARTIN J | 1737 | Non-Final OA | Aug 17, 2023 |
| 18234723 | DIGITAL TWIN FOR LASER MATERIAL PROCESSING | MEADE, LORNE EDWARD | 3741 | Non-Final OA | Aug 16, 2023 |
| 18234453 | OPERATIONS OF ROBOT APPARATUSES WITHIN RECTANGULAR MAINFRAMES | BURKMAN, JESSICA LYNN | 3653 | Non-Final OA | Aug 16, 2023 |
| 18234685 | PLASMA ETCHING IN SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 1713 | Final Rejection | Aug 16, 2023 |
| 18450466 | DIE BACKSIDE PROFILE for SEMICONDUCTOR DEVICES | YECHURI, SITARAMARAO S | 2893 | Non-Final OA | Aug 16, 2023 |
| 18233984 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND INCREASED DENSITY | GAMBETTA, KELLY M | 1718 | Final Rejection | Aug 15, 2023 |
| 18234169 | METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA | LEE, WILSON | 2844 | Non-Final OA | Aug 15, 2023 |
| 18232985 | METHODS OF ETCHING CARBON-CONTAINING FEATURES AT LOW TEMPERATURES | TRAN, BINH X | 1713 | Non-Final OA | Aug 11, 2023 |
| 18232631 | METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS | MURATA, AUSTIN | 1712 | Final Rejection | Aug 10, 2023 |
| 18232133 | ADHESION IMPROVEMENTS IN METAL-CONTAINING HARDMASKS | CHOUDHRY, MOHAMMAD M | 2899 | Non-Final OA | Aug 09, 2023 |
| 18231655 | Electrostatic Chuck with High Cooling Efficiency | YU, YUECHUAN | 1718 | Non-Final OA | Aug 08, 2023 |
| 18366433 | CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Aug 07, 2023 |
| 18365520 | PAD CONDITIONING DISK GIMBALING CONTROL | HOLIZNA, CALEB ANDREW | 3723 | Non-Final OA | Aug 04, 2023 |
| 18364507 | NEUTRAL STRESS DIAMOND-LIKE CARBON | GHYKA, ALEXANDER G | 2812 | Non-Final OA | Aug 03, 2023 |
| 18364233 | INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION | WEDDLE, ALEXANDER MARION | 1712 | Final Rejection | Aug 02, 2023 |
| 18364249 | DOPED DIAMOND-LIKE CARBON | LU, JIONG-PING | 1713 | Final Rejection | Aug 02, 2023 |
| 18363545 | PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU PAD CONDITIONING | HOLIZNA, CALEB ANDREW | 3723 | Non-Final OA | Aug 01, 2023 |
| 18227128 | LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AND METHODS | LOPEZ, JORGE ANDRES | 2897 | Non-Final OA | Jul 27, 2023 |
| 18227226 | CHAMBER FOR SUBSTRATE BACKSIDE AND BEVEL DEPOSITION | CHAN, LAUREEN | 1716 | Non-Final OA | Jul 27, 2023 |
| 18360074 | METHOD AND SYSTEM FOR AUTOMATIC IHC MARKER-HER2 SCORE | TAYLOR, MEREDITH IREENE DUPAI | 2671 | Non-Final OA | Jul 27, 2023 |
| 18226554 | METHODS AND MECHANISMS TO IMPROVE MONITORING CAPABILITIES USING RATE OF CHANGE OF SENSOR VALUES | CHANG, VINCENT WEN-LIANG | 2119 | Non-Final OA | Jul 26, 2023 |
| 18226007 | METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CRYSTALLINE STRUCTURES | BRATLAND JR, KENNETH A | 1714 | Final Rejection | Jul 25, 2023 |
| 18225007 | METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS, FOR SEMICONDUCTOR MANUFACTURING | LEONG, NATHAN T | 1718 | Non-Final OA | Jul 21, 2023 |
| 18223977 | METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM | SHABMAN, MARK A | 2855 | Non-Final OA | Jul 19, 2023 |
| 18223183 | SINGLE PIECE OR TWO PIECE SUSCEPTOR | FORD, NATHAN K | 1716 | Non-Final OA | Jul 18, 2023 |
| 18223184 | SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY | SWEELY, KURT D | 1718 | Non-Final OA | Jul 18, 2023 |
| 18352446 | MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER | TEIXEIRA MOFFAT, JONATHAN CHARLES | 3700 | Non-Final OA | Jul 14, 2023 |
| 18221505 | CYCLIC ETCH OF SILICON OXIDE AND SILICON NITRIDE | LU, JIONG-PING | 1713 | Final Rejection | Jul 13, 2023 |
| 18220020 | WIRELESS DATA COMMUNICATION IN PLASMA PROCESS CHAMBER THROUGH VI SENSOR AND RF GENERATOR | YU, YUECHUAN | 1718 | Non-Final OA | Jul 10, 2023 |
| 18349006 | ELECTROSTATIC CHUCK COVER PIECE TO ENABLE PROCESSING OF DIELECTRIC SUBSTRATES | SNYDER, ALAN W | 3722 | Non-Final OA | Jul 07, 2023 |
| 18216138 | Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF) Plasma | WINTERS, SEAN AYERS | 2892 | Non-Final OA | Jun 29, 2023 |
| 18215267 | SUBSTRATE POLISH EDGE UNIFORMITY CONTROL WITH SECONDARY FLUID DISPENSE | GUMP, MICHAEL ANTHONY | 3723 | Non-Final OA | Jun 28, 2023 |
| 18214456 | CONTROL OF PLATEN SHAPE IN CHEMICAL MECHANICAL POLISHING | SHUM, KENT N | 3723 | Non-Final OA | Jun 26, 2023 |
| 18341650 | INTEGRATED HYBRID PREDICTIVE MONITORING OF MANUFACTURING SYSTEMS | LEE, SANGKYUNG | 2858 | Final Rejection | Jun 26, 2023 |
| 18337294 | FORMING OPTICAL DEVICE USING MIXED-PARTICLE LAYER | ROLLAND, ALEX A | 1759 | Final Rejection | Jun 19, 2023 |
| 18336036 | EVAPORATION DEVICE AND EVAPORATION METHOD | MOORE, KARLA A | 1716 | Non-Final OA | Jun 16, 2023 |
| 18210328 | ELECTROSTATIC SUBSTRATE SUPPORT | PATEL, DHARTI HARIDAS | 2838 | Non-Final OA | Jun 15, 2023 |
| 18209719 | SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELECTRIC CONSTANT MATERIALS | FOX, BRANDON C | 2818 | Final Rejection | Jun 14, 2023 |
| 18209716 | SEMICONDUCTOR MANUFACTURING PROCESS CHAMBER COOLING FLANGE FOR REMOTE PLASMA SOURCE SUPPLY | ZERVIGON, RUDY | 1716 | Non-Final OA | Jun 14, 2023 |
| 18209700 | NESTED-LOOP PLASMA ENHANCED ATOMIC LAYER DEPOSITION | JEFFERSON, QUOVAUNDA | 2899 | Final Rejection | Jun 14, 2023 |
| 18209711 | IN-SITU ETCH AND INHIBITION IN PLASMA ENHANCED ATOMIC LAYER DEPOSITION | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Jun 14, 2023 |
| 18207457 | SHOWERHEAD HEATED BY CIRCULAR ARRAY | PENCE, JETHRO M | 1717 | Non-Final OA | Jun 08, 2023 |
| 18330687 | METHODS AND APPARATUS FOR RPS-RF PLASMA CLEAN AND ACTIVATION FOR ADVANCED SEMICONDUCTOR PACKAGING | YU, YUECHUAN | 1718 | Non-Final OA | Jun 07, 2023 |
| 18207042 | HIGH TEMPERATURE BIASABLE HEATER WITH ADVANCED FAR EDGE ELECTRODE, ELECTROSTATIC CHUCK, AND EMBEDDED GROUND ELECTRODE | CHAN, LAUREEN | 1716 | Non-Final OA | Jun 07, 2023 |
| 18206847 | CCP GAS DELIVERY NOZZLE | KACKAR, RAM N | 1716 | Non-Final OA | Jun 07, 2023 |
| 18206367 | METHOD AND APPARATUS TO CLEAN SUBSTRATE WITH ATOMIZING NOZZLE | ORTA, LAUREN GRACE | 1711 | Final Rejection | Jun 06, 2023 |
| 18205668 | RNA retrieval process for preparing formalin-fixed, paraffin-embedded (FFPE) tissue samples for in situ hybridization | PRIEST, AARON A | 1681 | Non-Final OA | Jun 05, 2023 |
| 18204490 | FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS | EVERETT, CHRISTOPHER E | 2117 | Non-Final OA | Jun 01, 2023 |
| 18204774 | UV CURABLE PRINTABLE FORMULATIONS FOR HIGH PERFORMANCE 3D PRINTED CMP PADS | MCCLENDON, SANZA L | 1765 | Non-Final OA | Jun 01, 2023 |
| 18324711 | STRESS INCORPORATION IN SEMICONDUCTOR DEVICES | GONDARENKO, NATALIA A | 2891 | Final Rejection | May 26, 2023 |
| 18201921 | GENERATING SYNTHETIC MICROSPY IMAGES OF SUBSTRATES | EDWARDS, ETHAN WESLEY | 2857 | Non-Final OA | May 25, 2023 |
| 18322928 | CHEMICAL MECHANICAL POLISH PAD CONDITIONER WITH MULTIPLE DISKS | ZAWORSKI, JONATHAN R | 3723 | Non-Final OA | May 24, 2023 |
| 18038441 | ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES | COLLINS, GARY | 2115 | Non-Final OA | May 23, 2023 |
| 18200539 | METHOD AND APPARATUS FOR SUBSTRATE CLEANING IN STACK-DIE HYBRID BONDING PROCESS | CARRILLO, BIBI SHARIDAN | 1711 | Non-Final OA | May 22, 2023 |
| 18199625 | OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS | MITCHELL, EDWIN COLEMAN | 1619 | Final Rejection | May 19, 2023 |
| 18199614 | DRUG COMPOSITIONS AND METHODS OF PREPARING THE SAME | TCHERKASSKAYA, OLGA V | 1615 | Final Rejection | May 19, 2023 |
| 18320683 | PITCH AND ORIENTATION UNIFORMITY FOR NANOIMPRINT STAMP FORMATION | ZIMMERMAN, JOSHUA D | 2853 | Final Rejection | May 19, 2023 |
| 18319876 | EPITAXIAL SILICON CHANNEL GROWTH | STEPHENSON, KENNETH STEPHEN | 2898 | Non-Final OA | May 18, 2023 |
| 18199183 | Three-Dimensional Vertical Interconnect Architecture and Methods For Forming | GREEN, TELLY D | 2898 | Non-Final OA | May 18, 2023 |
| 18198043 | MEMORY DEVICE WITH HIGH-MOBILITY OXIDE SEMICONDUCTOR CHANNEL AND METHODS FOR FORMING THE SAME | GREWAL, HEIM KIRIN | 2812 | Non-Final OA | May 16, 2023 |
| 18198123 | SENSOR FOR MEASUREMENT OF RADICALS | CHEN, KEATH T | 1716 | Final Rejection | May 16, 2023 |
| 18197545 | FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK APPLICATIONS | PRIDEMORE, NATHAN ANDREW | 2898 | Final Rejection | May 15, 2023 |
| 18197528 | FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK APPLICATIONS | SLUTSKER, JULIA | 2891 | Final Rejection | May 15, 2023 |
| 18196187 | Ohmic Contact for Semiconductor Structures | KIM, JAY C | 2815 | Non-Final OA | May 11, 2023 |
| 18314481 | IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE | LEE, ALEXANDER N | 1737 | Non-Final OA | May 09, 2023 |
| 18144832 | DOSE MAPPING USING SUBSTRATE CURVATURE TO COMPENSATE FOR OUT-OF-PLANE DISTORTION | ALAM, MOHAMMED | 2851 | Non-Final OA | May 08, 2023 |
| 18144745 | MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | May 08, 2023 |
| 18144747 | HIGH EFFICIENCY MICROWAVE PLASMA APPLICATOR | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | May 08, 2023 |
| 18313733 | ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION | VAUGHAN, JASON L | 3726 | Non-Final OA | May 08, 2023 |
| 18142654 | LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS | KACKAR, RAM N | 1716 | Non-Final OA | May 03, 2023 |
| 18141557 | SELF-ALIGNED VERTICAL BITLINE FOR THREE-DIMENSIONAL (3D) DYNAMIC RANDOM-ACCESS MEMORY (DRAM) DEVICES | WEGNER, AARON MICHAEL | 2897 | Final Rejection | May 01, 2023 |
| 18140900 | DUMMY DIE MATERIAL SELECTION AND POSITIONING FOR BONDING PROCESSES | SEHAR, FAKEHA | 2893 | Non-Final OA | Apr 28, 2023 |
| 18309314 | SUBSTRATE CLEANING IMPROVEMENT | POON, DANA LEE | 3723 | Non-Final OA | Apr 28, 2023 |
| 18309669 | LOW-ENERGY UNDERLAYER FOR ROOM TEMPERATURE PHYSICAL VAPOR DEPOSITION OF ELECTRICALLY CONDUCTIVE FEATURES | SLUTSKER, JULIA | 2891 | Non-Final OA | Apr 28, 2023 |
| 18140155 | METHODS AND MECHANISMS FOR DAMPING VIBRATIONS IN SUBSTRATE TRANSFER SYSTEMS | MARU, TEMESGEN MALLEDE | 3655 | Non-Final OA | Apr 27, 2023 |
| 18140508 | GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND RELATED APPARATUS AND METHODS | NUCKOLS, TIFFANY Z | 1716 | Final Rejection | Apr 27, 2023 |
| 18140179 | LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATERIALS WITH IMPROVED RESISTIVITY | NGUYEN, DUY T V | 2818 | Final Rejection | Apr 27, 2023 |
| 18139057 | ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION | MACARTHUR, SYLVIA | 1716 | Final Rejection | Apr 25, 2023 |
| 18139121 | HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION | VETERE, ROBERT A | 1712 | Final Rejection | Apr 25, 2023 |
| 18138629 | UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE | LEE, WILSON | 2844 | Non-Final OA | Apr 24, 2023 |
| 18138733 | MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Apr 24, 2023 |
| 18306187 | METHOD OF METROLOGY ON PATTERN WAFER USING REFLECTOMETRY | WEGNER, AARON MICHAEL | 2897 | Non-Final OA | Apr 24, 2023 |
| 18138730 | MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING | WELLS, KENNETH B | 2842 | Non-Final OA | Apr 24, 2023 |
| 18305852 | HIGH-DENSITY MICRO-LED ARRAYS WITH REFLECTIVE SIDEWALLS | MUSE, ISMAIL A | 2812 | Final Rejection | Apr 24, 2023 |
| 18304626 | PROCESS FOR THIN ELECTROLESS DEPOSITION | SMITH, BRADLEY | 2817 | Non-Final OA | Apr 21, 2023 |
| 18136970 | HYBRID MOLYBDENUM FILL SCHEME FOR LOW RESISTIVITY SEMICONDUCTOR APPLICATIONS | PARKER, JOHN M | 2899 | Non-Final OA | Apr 20, 2023 |
| 18303391 | SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE | BERMAN, JASON | 1794 | Non-Final OA | Apr 19, 2023 |
| 18303370 | GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE | TANDY, LAURA ELOISE | 2881 | Non-Final OA | Apr 19, 2023 |
| 18303318 | PROCESSING KIT SHIELD | BRAYTON, JOHN JOSEPH | 1794 | Final Rejection | Apr 19, 2023 |
| 18135434 | COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTAINING MATERIALS | MAYY, MOHAMMAD | 1718 | Non-Final OA | Apr 17, 2023 |
| 18131212 | HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION | MOORE, KARLA A | 1716 | Non-Final OA | Apr 05, 2023 |
| 18128389 | GRADIENT OXIDATION AND ETCH OF PVD MOLYBDENUM FOR BOTTOM UP GAP FILL | SLUTSKER, JULIA | 2891 | Non-Final OA | Mar 30, 2023 |
| 18128496 | AUTOMATION METHOD FOR DEFECT CHARACTERIZATION FOR HYBRID BONDING APPLICATION | SCHNEE, HAL W | 2129 | Non-Final OA | Mar 30, 2023 |
| 18128484 | ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING MATERIALS | KAO, SOPHIA WEI-CHUN | 2817 | Final Rejection | Mar 30, 2023 |
| 18192557 | METHODS TO IMPROVE QUALITY SILICON-CONTAINING MATERIALS | STEVENSON, ANDRE C | 2899 | Final Rejection | Mar 29, 2023 |
| 18192573 | DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHANICAL, AND ETCH CHARACTERISTICS | JEFFERSON, QUOVAUNDA | 2899 | Final Rejection | Mar 29, 2023 |
| 18126701 | MICRO-LED STRUCTURES AND PHOTOLUMINESCENT MATERIALS HAVING UV LIGHT FILTERS | GEBREMARIAM, SAMUEL A | 2811 | Non-Final OA | Mar 27, 2023 |
| 18123085 | RESIST MODELING METHOD FOR ANGLED GRATINGS | LIN, ARIC | 2851 | Non-Final OA | Mar 17, 2023 |
| 18123090 | RADIATION SEPARATION SYSTEM | PAIK, SANG YEOP | 3761 | Non-Final OA | Mar 17, 2023 |
| 18185638 | TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING ANGLED ION BEAMS | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Mar 17, 2023 |
| 18122530 | PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOELECTRIC GENERATORS FOR ENERGY HARNESSING | SWEELY, KURT D | 1718 | Final Rejection | Mar 16, 2023 |
| 18185242 | SEMICONDUCTOR DEVICES CONTAINING BI-METALLIC SILICIDE WITH REDUCED CONTACT RESISTIVITY | AHMADI, MOHSEN | 2896 | Non-Final OA | Mar 16, 2023 |
| 18122484 | INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED METHODS FOR GAS FLOW IN BATCH PROCESSING OF SEMICONDUCTOR MANUFACTURING | BENNETT, CHARLEE | 1718 | Non-Final OA | Mar 16, 2023 |
| 18183273 | LOW COST FABRICATION OF OPTICAL DEVICE USING DISCRETE GRATING MODULE ASSEMBLY | STANFORD, CHRISTOPHER J | 2872 | Final Rejection | Mar 14, 2023 |
| 18182856 | DISPLAY PIXELS MADE FROM STACKED MICRO-LED STRUCTURES AND PHOTOLUMINESCENT MATERIALS | HAN, JONATHAN | 2818 | Non-Final OA | Mar 13, 2023 |
| 18118017 | HYDROGEN PLASMA TREATMENT FOR FORMING LOGIC DEVICES | SIPLING, KENNETH MARK | 2818 | Final Rejection | Mar 06, 2023 |
| 18175538 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | LINDSAY, BERNARD G | 2119 | Final Rejection | Feb 28, 2023 |
| 18115309 | METHODS AND MECHANISMS FOR MODIFYING MACHINE-LEARNING MODELS FOR NEW SEMICONDUCTOR PROCESSING EQUIPMENT | ALAM, MOHAMMED | 2851 | Non-Final OA | Feb 28, 2023 |
| 18174534 | DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERATURE SURFACES | JOERGER, KAITLIN S | 3655 | Final Rejection | Feb 24, 2023 |
| 18172149 | LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT | TUROCY, DAVID P | 1718 | Final Rejection | Feb 21, 2023 |
| 18171119 | SILICON SUPER JUNCTION STRUCTURES FOR INCREASED THROUGHPUT | RAHIM, NILUFA | 2893 | Final Rejection | Feb 17, 2023 |
| 18170335 | PHYSICAL LAYOUT SYNTHESIS FOR STANDARD CELLS USING SLICE LAYOUTS | GARBOWSKI, LEIGH M | 2851 | Non-Final OA | Feb 16, 2023 |
| 18168168 | PROCESSING SYSTEM AND METHODS TO CO-STRIKE PLASMA TO ENHANCE TUNGSTEN GROWTH INCUBATION DELAY | FORD, NATHAN K | 1716 | Non-Final OA | Feb 13, 2023 |
| 18108719 | DIPOLE FORMATION PROCESSES | FAYETTE, NATHALIE RENEE | 2812 | Final Rejection | Feb 13, 2023 |
| 18108427 | In-situ gasket formation | LEE, GILBERT Y | 3675 | Non-Final OA | Feb 10, 2023 |
| 18108432 | TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFERRING SUBSTRATES | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Feb 10, 2023 |
| 18108407 | OVERLAPPING SUBSTRATE SUPPORTS AND PRE-HEAT RINGS, AND RELATED PROCESS KITS, PROCESSING CHAMBERS, METHODS, AND COMPONENTS | BENNETT, CHARLEE | 1718 | Non-Final OA | Feb 10, 2023 |
| 18107819 | System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter | TANDY, LAURA ELOISE | 2881 | Non-Final OA | Feb 09, 2023 |
| 18107326 | LOW STRESS TUNGSTEN LAYER DEPOSITION | KIELIN, ERIK J | 2814 | Non-Final OA | Feb 08, 2023 |
| 18107487 | PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS | LOPEZ, JORGE ANDRES | 2897 | Non-Final OA | Feb 08, 2023 |
| 18107157 | Electrostatic Chuck | CHAN, LAUREEN | 1716 | Final Rejection | Feb 08, 2023 |
| 18163766 | HIGH-PRECISION AND HIGH-THROUGHPUT MEASUREMENT OF PERCENTAGE LIGHT LOSS OF OPTICAL DEVICES | AMARA, MOHAMED K | 2877 | Non-Final OA | Feb 02, 2023 |
| 18104437 | SUBSTRATE CARRIER TO CONTROL TEMPERATURE OF SUBSTRATE | NEJAD, MAHDI H | 3723 | Final Rejection | Feb 01, 2023 |
| 18162074 | SUBSTRATE PROCESSING FOR AlN AND GaN POLARITY CONTROL | CHUNG, ANDREW | 2898 | Non-Final OA | Jan 31, 2023 |
| 18103600 | Electrostatic Chuck Having Extended Lifetime | CADUGAN, ERICA E | 3722 | Final Rejection | Jan 31, 2023 |
| 18102055 | RF GROUNDING CONFIGURATION FOR PEDESTALS | KACKAR, RAM N | 1716 | Final Rejection | Jan 26, 2023 |
| 18101932 | SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL | LAOBAK, ANDREW KEELAN | 1713 | Final Rejection | Jan 26, 2023 |
| 18160274 | METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMBER PLACEMENT VIA IMAGING | XING, CHRISTINA ILONA | 2877 | Non-Final OA | Jan 26, 2023 |
| 18101523 | PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND RELATED METHODS | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Jan 25, 2023 |
| 18100289 | DRAM Transistor Including Pillars Formed Using Low-Temperature Ion Implant | ANDERSON, WILLIAM H | 2817 | Non-Final OA | Jan 23, 2023 |
| 18100568 | METHOD OF FORMING AN AQUEOUS POLYMER COMPOSITION | NILAND, PATRICK DENNIS | 1762 | Non-Final OA | Jan 23, 2023 |
| 18099277 | COMPOSITE PVD TARGETS | MCDONALD, RODNEY GLENN | 1794 | Final Rejection | Jan 20, 2023 |
| 18099846 | FORMATION OF METALLIC FILMS ON ELECTROLESS METAL PLATING OF SURFACES | CROWELL, ANNA M | 1716 | Final Rejection | Jan 20, 2023 |
| 18098791 | DRY ETCH OF BORON-CONTAINING MATERIAL | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Jan 19, 2023 |
| 18096207 | PHOTOLITHOGRAPHY ENHANCEMENT TECHNIQUES | TRAN, BINH X | 1713 | Non-Final OA | Jan 12, 2023 |
| 18093121 | CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS | CHACKO DAVIS, DABORAH | 1737 | Non-Final OA | Jan 04, 2023 |
| 18093156 | PLASMA-ENHANCED MOLYBDENUM DEPOSITION | ROLLAND, ALEX A | 1759 | Final Rejection | Jan 04, 2023 |
| 18065742 | Gas Distribution Apparatuses | ZERVIGON, RUDY | 1716 | Final Rejection | Dec 14, 2022 |
| 18077812 | TWO STEP IMPLANT TO CONTROL TIP-TO-TIP DISTANCE BETWEEN TRENCHES | BERRY, PAUL ANTHONY | 2898 | Final Rejection | Dec 08, 2022 |
| 18077138 | CORROSION RESISTANT POLYMER COATINGS FOR MANUFACTURING EQUIPMENT COMPONENTS | YAGER, JAMES C | 1782 | Final Rejection | Dec 07, 2022 |
| 18076234 | THERMAL CHOKE PLATE | BENNETT, CHARLEE | 1718 | Non-Final OA | Dec 06, 2022 |
| 18075216 | SEMICONDUCTOR FILM THICKNESS PREDICTION USING MACHINE-LEARNING | BAKER, EZRA JAMES | 2126 | Final Rejection | Dec 05, 2022 |
| 17994592 | NH RADICAL THERMAL NITRIDATION TO FORM METAL SILICON NITRIDE FILMS | STEVENSON, ANDRE C | 2899 | Final Rejection | Nov 28, 2022 |
| 18070010 | GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | Final Rejection | Nov 28, 2022 |
| 18070114 | MONITORING OF DEPOSITED OR ETCHED FILM THICKNESS USING IMAGE-BASED MASS DISTRIBUTION METROLOGY | CAMMARATA, MICHAEL ROBERT | 2667 | Non-Final OA | Nov 28, 2022 |
| 17991651 | PLASMA GENERATOR FOR EDGE UNIFORMITY | CHAN, LAUREEN | 1716 | Final Rejection | Nov 21, 2022 |
| 17991540 | TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFERRING SUBSTRATES | MCCLAIN, GERALD | 3652 | Non-Final OA | Nov 21, 2022 |
| 17989961 | CHEMICAL INK FLOW STOPPER | ROLLAND, ALEX A | 1759 | Final Rejection | Nov 18, 2022 |
| 18054798 | SURFACE DEPASSIVATION WITH THERMAL ETCH AFTER NITROGEN RADICAL TREATMENT | LUKE, DANIEL M | 2896 | Non-Final OA | Nov 11, 2022 |
| 17984201 | WAFER PROFILING FOR ETCHING SYSTEM | KACKAR, RAM N | 1716 | Non-Final OA | Nov 09, 2022 |
| 17981278 | MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS | WEDDLE, ALEXANDER MARION | 1712 | Non-Final OA | Nov 04, 2022 |
| 17977411 | Buffer Layer for Dielectric Protection in Physical Vapor Deposition Metal Liner Applications | SHAMSUZZAMAN, MOHAMMED | 2897 | Non-Final OA | Oct 31, 2022 |
| 17975016 | TEMPERATURE CONTROLLED ELECTRODE TO LIMIT DEPOSITION RATES AND DISTORTION | TSAI, HSIEN C | 2881 | Non-Final OA | Oct 27, 2022 |
| 17975195 | EPI OVERLAPPING DISK AND RING | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Oct 27, 2022 |
| 17974385 | PIXEL DEFINING ENCAPSULATING BARRIER FOR RGB COLOR PATTERNING | MANDALA, MICHELLE | 2893 | Final Rejection | Oct 26, 2022 |
| 17971494 | PROCESS CHAMBER WITH REFLECTOR | NUCKOLS, TIFFANY Z | 1716 | Final Rejection | Oct 21, 2022 |
| 17970451 | PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDGE SHEATH CONTROL | BENNETT, CHARLEE | 1718 | Final Rejection | Oct 20, 2022 |
| 17919896 | WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Oct 19, 2022 |
| 17968454 | ENHANCED CHAMBER CLEAN AND RECOVERY WITH DUAL FLOW PATH | MARKOFF, ALEXANDER | 1711 | Final Rejection | Oct 18, 2022 |
| 18046872 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | Non-Final OA | Oct 14, 2022 |
| 17964684 | ELECTROSTATIC CHUCK WITH DETACHABLE SHAFT | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Oct 12, 2022 |
| 17961214 | LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COOLING OR HEATING | NUCKOLS, TIFFANY Z | 1716 | Final Rejection | Oct 06, 2022 |
| 17961516 | ACOUSTIC MONITORING OF CMP RETAINING RING | SOTO, CHRISTOPHER ASHLEY | 3723 | Non-Final OA | Oct 06, 2022 |
| 17959189 | CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPITAXIAL DEPOSITION OPERATIONS | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Oct 03, 2022 |
| 17954565 | MOLECULAR LAYER DEPOSITION CARBON MASKS FOR DIRECT SELECTIVE DEPOSITION OF SILICON-CONTAINING MATERIALS | STEVENSON, ANDRE C | 2899 | Final Rejection | Sep 28, 2022 |
| 17954085 | MULTILAYER TRANSMISSION STRUCTURES FOR WAVEGUIDE DISPLAY | CHIEM, DINH D | 2874 | Non-Final OA | Sep 27, 2022 |
| 17954100 | PARTIALLY METALLIZED GRATING AS HIGH-PERFORMANCE WAVEGUIDE INCOUPLER | TRAN, HOANG Q | 2874 | Final Rejection | Sep 27, 2022 |
| 17952059 | ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING | LESLIE, MICHAEL S | 3745 | Non-Final OA | Sep 23, 2022 |
| 17950012 | GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS | SHAMS, NAZMUN NAHAR | 1738 | Final Rejection | Sep 21, 2022 |
| 17949526 | METALLIZED HIGH-INDEX BLAZE GRATING INCOUPLER | THOMASON, DARBY MARGARET | 2874 | Non-Final OA | Sep 21, 2022 |
| 17945861 | SINGULATION OF OPTICAL DEVICES FROM OPTICAL DEVICE SUBSTRATES VIA LASER ABLATION | THONG, YEONG JUEN | 3761 | Non-Final OA | Sep 15, 2022 |
| 17941347 | FLUORINE-DOPED SILICON-CONTAINING MATERIALS | STEVENSON, ANDRE C | 2899 | Non-Final OA | Sep 09, 2022 |
| 17941976 | SOLID STATE VARIABLE IMPEDANCE DEVICE AND SYSTEM | GLENN, KIMBERLY E | 2843 | Non-Final OA | Sep 09, 2022 |
| 17903916 | ROBOT ARM TRAJECTORY CONTROL | SINGH, ESVINDER | 3657 | Final Rejection | Sep 06, 2022 |
| 17900386 | FDSOI DEVICE INCLUDING SELF-ALIGNED DIFFUSION BREAK | PRIDEMORE, NATHAN ANDREW | 2898 | Final Rejection | Aug 31, 2022 |
| 17896716 | ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS | SLUTSKER, JULIA | 2891 | Non-Final OA | Aug 26, 2022 |
| 17896223 | SOURCE DRAIN FORMATION IN GATE ALL AROUND TRANSISTOR | NIELSEN, DEREK LANG | 2899 | Final Rejection | Aug 26, 2022 |
| 17822009 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | Non-Final OA | Aug 24, 2022 |
| 17893430 | CLAMPED DUAL-CHANNEL SHOWERHEAD | KLUNK, MARGARET D | 1716 | Non-Final OA | Aug 23, 2022 |
| 17893018 | GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH | KACKAR, RAM N | 1716 | Non-Final OA | Aug 22, 2022 |
| 17891753 | CONFORMAL MOLYBDENUM DEPOSITION | LOUIE, MANDY C | 1718 | Non-Final OA | Aug 19, 2022 |
| 17891923 | INTEGRATED DIPOLE REGION FOR TRANSISTOR | WILCZEWSKI, MARY A | 2898 | Final Rejection | Aug 19, 2022 |
| 17886353 | ON WAFER DIMENSIONALITY REDUCTION | HICKS, AUSTIN JAMES | 2142 | Non-Final OA | Aug 11, 2022 |
| 17880335 | SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Aug 03, 2022 |
| 17880310 | SINGLE PROCESS GAS FEED LINE ARCHITECTURE | MOORE, KARLA A | 1716 | Non-Final OA | Aug 03, 2022 |
| 17879091 | SELECTIVE SILICIDE DEPOSITION FOR 3-D DRAM | PARENDO, KEVIN A | 2896 | Non-Final OA | Aug 02, 2022 |
| 17879097 | SELECTION GATE STRUCTURE AND FABRICATION METHOD FOR 3D MEMORY | PIZARRO CRESPO, MARCOS D | 2814 | Non-Final OA | Aug 02, 2022 |
| 17875535 | PATTERNING SCHEME TO IMPROVE EUV RESIST AND HARD MASK SELECTIVITY | BERRY, PAUL ANTHONY | 2898 | Non-Final OA | Jul 28, 2022 |
| 17874627 | MINIMIZING SUBSTRATE BOW DURING POLISHING | HUANG, STEVEN | 3723 | Final Rejection | Jul 27, 2022 |
| 17874873 | SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS | KLUNK, MARGARET D | 1716 | Final Rejection | Jul 27, 2022 |
| 17874105 | GENERATING INDICATIONS OF LEARNING OF MODELS FOR SEMICONDUCTOR PROCESSING | BONSHOCK, DENNIS G | 3992 | Final Rejection | Jul 26, 2022 |
| 17759257 | METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS | TALBOT, BRIAN K | 1712 | Final Rejection | Jul 21, 2022 |
| 17864552 | Metal Surface Blocking Molecules for Selective Deposition | MICHAUD, NICHOLAS BRIAN | 2818 | Final Rejection | Jul 14, 2022 |
| 17863656 | CONDUCTIVE OXIDE SILICIDES FOR RELIABLE LOW CONTACT RESISTANCE | LEE, DA WEI | 2817 | Final Rejection | Jul 13, 2022 |
| 17862138 | APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Jul 11, 2022 |
| 17857999 | ACOUSTIC WINDOW IN PAD BACKING LAYER FOR CHEMICAL MECHANICAL POLISHING | SHUM, KENT N | 3723 | Final Rejection | Jul 05, 2022 |
| 17858006 | ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL POLISHING AND METHODS OF FORMING PADS | ZAWORSKI, JONATHAN R | 3723 | Final Rejection | Jul 05, 2022 |
| 17810466 | MULTI STACK OPTICAL ELEMENTS USING TEMPORARY AND PERMANENT BONDING | LI, MEIYA | 2811 | Non-Final OA | Jul 01, 2022 |
| 17855524 | DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MECHANICAL POLISHING | HOLIZNA, CALEB ANDREW | 3723 | Non-Final OA | Jun 30, 2022 |
| 17855520 | COUPLING OF ACOUSTIC SENSOR FOR CHEMICAL MECHANICAL POLISHING | MCFARLAND, TYLER JAMES | 3723 | Final Rejection | Jun 30, 2022 |
| 17847454 | DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS | TURNER, BRIAN | 2818 | Final Rejection | Jun 23, 2022 |
| 17844346 | DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL | KUMAR, SRILAKSHMI K | 1700 | Final Rejection | Jun 20, 2022 |
| 17786520 | SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Jun 16, 2022 |
| 17835730 | HIGH-EFFICIENCY RF REMOTE PLASMA SOURCE APPARATUS | SWEELY, KURT D | 1718 | Final Rejection | Jun 08, 2022 |
| 17831781 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING | KLUNK, MARGARET D | 1716 | Non-Final OA | Jun 03, 2022 |
| 17663695 | HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR FILM PROCESSING | ZERVIGON, RUDY | 1716 | Final Rejection | May 17, 2022 |
| 17735623 | WAFER FILM FRAME CARRIER | SOTO, CHRISTOPHER ASHLEY | 3723 | Final Rejection | May 03, 2022 |
| 17735830 | PROCESS INTEGRATION TO REDUCE CONTACT RESISTANCE IN SEMICONDUCTOR DEVICE | CHEEK, EDWARD RHETT | 2813 | Final Rejection | May 03, 2022 |
| 17735674 | POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL | MCFARLAND, TYLER JAMES | 3723 | Final Rejection | May 03, 2022 |
| 17770237 | MAGNETIC LEVITATION SYSTEM, PROCESSING SYSTEM, AND METHOD OF TRANSPORTING A CARRIER | JONES, JAMES WILLIAM | 3615 | Non-Final OA | Apr 19, 2022 |
| 17768918 | METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRATE AND SPUTTER DEPOSITION APPARATUS | OTT, PATRICK S | 1794 | Non-Final OA | Apr 14, 2022 |
| 17713350 | COATINGS WITH DIFFUSION BARRIERS FOR CORROSION AND CONTAMINATION PROTECTION | WELLINGTON, ANDREA L | 2800 | Non-Final OA | Apr 05, 2022 |
| 17698769 | UTILIZATION OF SPARCE CODEBOOK IN MULTIPLEXED FLUORESCENT IN-SITU HYBRIDIZATION IMAGING | PLAYER, ROBERT AUSTIN | 1686 | Non-Final OA | Mar 18, 2022 |
| 17696447 | SUBSTRATE PROCESSING FOR GaN GROWTH | SMITH, BRADLEY | 2817 | Final Rejection | Mar 16, 2022 |
| 17693037 | SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING | CHEN, KEATH T | 1716 | Non-Final OA | Mar 11, 2022 |
| 17690193 | Integrated CMOS Source Drain Formation With Advanced Control | FORD, NATHAN K | 1716 | Non-Final OA | Mar 09, 2022 |
| 17641365 | HIGH DENSITY PLASMA CVD FOR DISPLAY ENCAPSULATION APPLICATION | TYNES JR., LAWRENCE C | 2899 | Final Rejection | Mar 08, 2022 |
| 17688650 | GENERATING AND UTILIZING SYNTHETIC TIME SERIES DATA FOR IMPOVING SUBSTRATE MANUFACTURING | SMITH, KEVIN LEE | 2122 | Non-Final OA | Mar 07, 2022 |
| 17687157 | COIL FOR IMPROVED PROCESS CHAMBER DEPOSITION AND ETCH UNIFORMITY | BAND, MICHAEL A | 1794 | Final Rejection | Mar 04, 2022 |
| 17685272 | BIASABLE ROTATING PEDESTAL | OTT, PATRICK S | 1794 | Non-Final OA | Mar 02, 2022 |
| 17673511 | CONTROLLED PROFILE POLISHING PLATEN | MCFARLAND, TYLER JAMES | 3723 | Non-Final OA | Feb 16, 2022 |
| 17673538 | OPTICAL DEVICE FILM WITH TUNABLE REFRACTIVE INDEX | BOURQUINE, MACKENZI TATE | 2872 | Final Rejection | Feb 16, 2022 |
| 17672520 | ELECTROSTATIC CHUCK WITH METAL SHAFT | ZERVIGON, RUDY | 1716 | Non-Final OA | Feb 15, 2022 |
| 17571370 | PROCESSING CHAMBER CALIBRATION | DARWISH, AMIR ELSAYED | 2199 | Non-Final OA | Jan 07, 2022 |
| 17571320 | PREDICTIVE MODELING FOR CHAMBER CONDITION MONITORING | HONORE, EVEL NMN | 2142 | Final Rejection | Jan 07, 2022 |
| 17566584 | UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION | SWEELY, KURT D | 1718 | Final Rejection | Dec 30, 2021 |
| 17561085 | BASE PLATE FOR HEATER PEDESTAL | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Dec 23, 2021 |
| 17554596 | ADAPTIVE SLURRY DISPENSE SYSTEM | SHECHTMAN, SEAN P | 2896 | Final Rejection | Dec 17, 2021 |
| 17549703 | METHOD TO MEASURE RADICAL ION FLUX USING A MODIFIED PIRANI VACUUM GAUGE ARCHITECTURE | SWEELY, KURT D | 1718 | Final Rejection | Dec 13, 2021 |
| 17545781 | RECIPE OPTIMIZATION THROUGH MACHINE LEARNING | ALAWDI, ANWER AHMED | 2851 | Non-Final OA | Dec 08, 2021 |
| 17541702 | METHODS FOR SEAMLESS GAP FILLING USING GRADIENT OXIDATION | CULLEN, PATRICK LAWRENCE | 2899 | Non-Final OA | Dec 03, 2021 |
| 17457597 | APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT RESISTANCE | BAUMAN, SCOTT E | 2815 | Final Rejection | Dec 03, 2021 |
| 17537314 | METHOD AND APPARATUS FOR REALTIME WAFER POTENTIAL MEASUREMENT IN A PLASMA PROCESSING CHAMBER | MOORE, KARLA A | 1716 | Final Rejection | Nov 29, 2021 |
| 17456507 | METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL LAYER STACKING STRUCTURE | CHANG, AUDREY Y | 2872 | Final Rejection | Nov 24, 2021 |
| 17510111 | HORIZONTAL BUFFING MODULE | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Oct 25, 2021 |
| 17496242 | METHODS AND APPARATUS FOR CELL AND GENE THERAPY AT POINT-OF-CARE LOCATION | TRAN, JULIE THI | 3791 | Non-Final OA | Oct 07, 2021 |
| 17495140 | TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM | MIRABITO, MICHAEL PAUL | 2187 | Final Rejection | Oct 06, 2021 |
| 17476200 | UNIFORM PLASMA LINEAR ION SOURCE | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Sep 15, 2021 |
| 17463966 | INTEGRATED EPITAXY AND PRECLEAN SYSTEM | SWEELY, KURT D | 1718 | Final Rejection | Sep 01, 2021 |
| 17380788 | FACE-UP WAFER EDGE POLISHING APPARATUS | KLUNK, MARGARET D | 1716 | Non-Final OA | Jul 20, 2021 |
| 17379707 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | Non-Final OA | Jul 19, 2021 |
| 17374558 | APPARATUS DESIGN FOR PHOTORESIST DEPOSITION | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Jul 13, 2021 |
| 17370619 | SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS | CROWELL, ANNA M | 1716 | Final Rejection | Jul 08, 2021 |
| 17368997 | COATED SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE PROCESSING | NUCKOLS, TIFFANY Z | 1716 | Final Rejection | Jul 07, 2021 |
| 17351530 | SEMITRANSPARENT SUBSTRATE SUPPORT FOR MICROWAVE DEGAS CHAMBER | WARD, THOMAS JOHN | 3761 | Final Rejection | Jun 18, 2021 |
| 17344788 | OBTAINING SUBSTRATE METROLOGY MEASUREMENT VALUES USING MACHINE LEARNING | TRIEU, EM N | 2128 | Final Rejection | Jun 10, 2021 |
| 17318166 | HIGH MOBILITY SEMICONDUCTOR CHANNEL BASED THIN-FILM TRANSISTORS AND MANUFACTURING METHODS | WIEGAND, TYLER J | 2812 | Non-Final OA | May 12, 2021 |
| 17244752 | SUBSTRATE SUPPORT APPARATUS, METHODS, AND SYSTEMS HAVING ELEVATED SURFACES FOR HEAT TRANSFER | SWEELY, KURT D | 1718 | Final Rejection | Apr 29, 2021 |
| 17223351 | STACK FOR 3D-NAND MEMORY CELL | BELL, LAUREN R | 2896 | Non-Final OA | Apr 06, 2021 |
| 17192355 | SYSTEMS AND METHODS FOR PROCESS CHAMBER HEALTH MONITORING AND DIAGNOSTICS USING VIRTUAL MODEL | ZAYKOVA-FELDMAN, LYUDMILA | 2857 | Non-Final OA | Mar 04, 2021 |
| 17186594 | SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES | LUND, JEFFRIE ROBERT | 1716 | Final Rejection | Feb 26, 2021 |
| 17156957 | METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Jan 25, 2021 |
| 17142641 | DOPED SILICON NITRIDE FOR 3D NAND | STEVENSON, ANDRE C | 2899 | Non-Final OA | Jan 06, 2021 |
| 17099454 | APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION | QI, HUA | 1714 | Final Rejection | Nov 16, 2020 |
| 17089047 | PMOS High-K Metal Gates | PIZARRO CRESPO, MARCOS D | 2814 | Final Rejection | Nov 04, 2020 |
| 17046975 | EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL | CHEN, KEATH T | 1716 | Non-Final OA | Oct 12, 2020 |
| 17063824 | LOW CURRENT HIGH ION ENERGY PLASMA CONTROL SYSTEM | ALEJANDRO MULERO, LUZ L | 1716 | Final Rejection | Oct 06, 2020 |
| 17062286 | NOVEL METHOD FOR GATE INTERFACE ENGINEERING | KIELIN, ERIK J | 2814 | Final Rejection | Oct 02, 2020 |
| 17023186 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING MODULATED CROSS-FLOW | CHAN, LAUREEN | 1716 | Non-Final OA | Sep 16, 2020 |
| 17003622 | PROCESSING SYSTEM AND METHOD OF CONTROLLING CONDUCTANCE IN A PROCESSING SYSTEM | KURPLE, KARL | 1717 | Final Rejection | Aug 26, 2020 |
| 16922931 | MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM | MOORE, KARLA A | 1716 | Non-Final OA | Jul 07, 2020 |
| 16831664 | SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING | DION, MARCEL T | 3723 | Final Rejection | Mar 26, 2020 |
| 16525465 | METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT | WARD, THOMAS JOHN | 3761 | Non-Final OA | Jul 29, 2019 |
| 16134200 | SYSTEMS AND PROCESSES FOR PLASMA TUNING | CROWELL, ANNA M | 1716 | Final Rejection | Sep 18, 2018 |
| 16047641 | METAL BONDED ELECTROSTATIC CHUCK FOR HIGH POWER APPLICATION | GATES, ERIC ANDREW | 3722 | Non-Final OA | Jul 27, 2018 |
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