Prosecution Insights
Prosecution Insights
550 pending office actions • 95 art units • 350 examiners • 0 of 550 (0%) have an AI response strategy ready • 792 patents granted in the last 365 days
Based on the USPTO statutory response window for each pending office action. 174 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 174 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 3 (1%) |
| §103 only | 395 (72%) |
| §102 only | 24 (4%) |
| §112 only | 22 (4%) |
| Double-patenting only | 12 (2%) |
| Double-patenting + other | 2 (0%) |
| No statute on record | 92 (17%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| SWEELY, KURT D | 9 | 52.9% | +35.0% |
| CHEN, KEATH T | 8 | 30.3% | +24.6% |
| BENNETT, CHARLEE | 8 | 58.0% | +36.1% |
| OTT, PATRICK S | 7 | 67.7% | +21.1% |
| ZERVIGON, RUDY | 7 | 66.6% | -6.1% |
| REYES, JOSHUA NATHANIEL PI | 7 | 42.4% | +51.0% |
| MACARTHUR, SYLVIA | 6 | 65.3% | +26.0% |
| MILLER, JR, JOSEPH ALBERT | 6 | 68.2% | +16.4% |
| MAYY, MOHAMMAD | 5 | 48.2% | +23.7% |
| KLUNK, MARGARET D | 5 | 43.8% | +31.1% |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 3 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18464926 | METHOD AND MATERIAL SYSTEM FOR TUNABLE HYBRID BOND INTERCONNECT RESISTANCE | JUNG, MICHAEL YOO LIM | 22d |
| 18732468 | IDENTIFYING AND WEIGHING CARRIERS IN A SUBSTRATE PROCESSING SYSTEM | FORTICH, ALVARO E | — |
| 18707737 | METHOD FOR PREPARING A CARRIER SUBSTRATE PROVIDED WITH A CHARGE-TRAPPING LAYER | ESKRIDGE, CORY W | — |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17046975 | EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL | CHEN, KEATH T | 86d overdue |
| 18139057 | ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION | MACARTHUR, SYLVIA | 79d overdue |
| 17019061 | ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS | KLUNK, MARGARET D | 58d overdue |
| 17693037 | SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING | CHEN, KEATH T | 30d overdue |
| 18223184 | SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY | SWEELY, KURT D | 28d overdue |
| 18135434 | COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTAINING MATERIALS | MAYY, MOHAMMAD | 2d overdue |
| 18382421 | LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KITS, FOR PROCESSING CHAMBERS | MACARTHUR, SYLVIA | 8d |
| 17566584 | UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION | SWEELY, KURT D | 8d |
| Art Unit | Apps |
|---|---|
| 1716 | 51 |
| 1718 | 47 |
| 3723 | 39 |
| 1713 | 30 |
| 1717 | 17 |
| 2898 | 16 |
| 2893 | 14 |
| 2817 | 12 |
| 2899 | 12 |
| 1794 | 11 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19241599 | THIN FILM TRANSISTORS FOR CIRCUITS FOR USE IN DISPLAY DEVICES | EDWARDS, MARK | 2624 | §103 | Final Rejection | — | Pending | Jun 18, 2025 |
| 19232808 | REMOTE CAPACITIVELY COUPLED PLASMA DEPOSITION OF AMORPHOUS SILICON | MAYY, MOHAMMAD | 1718 | DP | Non-Final OA | — | Pending | Jun 09, 2025 |
| 19225033 | LITHOGRAPHY PROCESSES FOR DUAL DAMASCENE STRUCTURES | ROBINSON, CHANCEITY N | 1737 | §103 | Non-Final OA | 47d | Pending | Jun 02, 2025 |
| 19219522 | METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS | MAYY, MOHAMMAD | 1718 | — | Non-Final OA | — | Pending | May 27, 2025 |
| 19206441 | METHOD OF COATING A SUBSTRATE INCLUDING A MULTI-LAYER COATING | HERNANDEZ-KENNEY, JOSE | 1717 | — | Non-Final OA | — | Pending | May 13, 2025 |
| 19198780 | GAS FLOW VALVE AND METHODS OF OPERATING THEREOF | MURPHY, KEVIN F | — | — | Non-Final OA | — | Pending | May 05, 2025 |
| 19173421 | PRECURSOR, GAS MIXTURE, AND METHOD FOR DEPOSITING A LOW K DIELECTRIC FILM | WALTERS JR, ROBERT S | 1717 | — | Non-Final OA | — | Pending | Apr 08, 2025 |
| 19087939 | METHOD OF DEPOSITING METAL FILMS | LEONG, NATHAN T | 1718 | §103 | Non-Final OA | — | Pending | Mar 24, 2025 |
| 19088759 | PHOTORESIST DEPOSITION USING INDEPENDENT MULTICHANNEL SHOWERHEAD | RODRIGUEZ, MICHAEL P | — | §103 | Non-Final OA | — | Pending | Mar 24, 2025 |
| 19077807 | MOLYBDENUM PHYSICAL VAPOR DEPOSITION TARGET | OTT, PATRICK S | 1794 | — | Non-Final OA | — | Pending | Mar 12, 2025 |
| 19075466 | REMOTE PLASMA SOURCES | PHAM, THAI N | — | — | Non-Final OA | — | Pending | Mar 10, 2025 |
| 19071301 | MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS | NORTON, JENNIFER L | 2117 | — | Non-Final OA | — | Pending | Mar 05, 2025 |
| 19053566 | AUTOMATIC BLIND HAND-OFF TO CENTER WAFER REFERRING TO HEATER POCKET | LE, TIEN MINH | 3656 | — | Non-Final OA | — | Pending | Feb 14, 2025 |
| 19037542 | UNIFORMITY CONTROL FOR PLASMA PROCESSING | CHOI, ALICIA M | 2117 | — | Non-Final OA | — | Pending | Jan 27, 2025 |
| 19024459 | METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANUFACTURING MACHINES | STOCK JR, GORDON J | — | §103 | Non-Final OA | — | Pending | Jan 16, 2025 |
| 18995474 | PROCESSING APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHODS THEREFOR | ZHANG, HAI Y | 1717 | §103 | Non-Final OA | — | Pending | Jan 16, 2025 |
| 19005943 | SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER | THOMAS, LUCY M | — | §103 | Non-Final OA | — | Pending | Dec 30, 2024 |
| 18991285 | RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE | LUU, PHO M | — | DP | Non-Final OA | — | Pending | Dec 20, 2024 |
| 18979512 | GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROCESSING CHAMBER | THOMAS, LUCY M | — | §103 | Non-Final OA | — | Pending | Dec 12, 2024 |
| 18975419 | RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES | KENDALL, BENJAMIN R | 2896 | — | Non-Final OA | — | Pending | Dec 10, 2024 |
| 18973504 | RADICAL SPECIES RECOMBINATION IN SUBSTRATE PROCESSING SYSTEMS | MURATA, AUSTIN | 1712 | §103 | Non-Final OA | — | Pending | Dec 09, 2024 |
| 18968275 | COPPER, INDIUM, GALLIUM, SELENIUM (CIGS) FILMS WITH IMPROVED QUANTUM EFFICIENCY | WHITE, SADIE | 1721 | §103 | Non-Final OA | 61d | Pending | Dec 04, 2024 |
| 18871557 | METHOD FOR TESTING A PACKAGING SUBSTRATE, AND APPARATUS FOR TESTING A PACKAGING SUBSTRATE | LE, THANG XUAN | — | §103 | Non-Final OA | — | Pending | Dec 04, 2024 |
| 18967465 | FLEETWIDE IMPEDANCE TUNING PERFORMANCE OPTIMIZATION | TRAN, MINH | 2844 | — | Non-Final OA | — | Pending | Dec 03, 2024 |
| 18958006 | NANOCRYSTALLINE DIAMOND AND ULTRA-NANOCRYSTALLINE DIAMOND FILMS BY CATALYTIC CVD | PROCTOR, CACHET I | 1712 | §103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18946807 | MULTILAYER COATING FOR CORROSION RESISTANCE | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | — | Pending | Nov 13, 2024 |
| 18942941 | GRAY TONE UNIFORMITY CONTROL OVER SUBSTRATE TOPOGRAPHY | PERSAUD, DEORAM | 2882 | §103 | Non-Final OA | — | Pending | Nov 11, 2024 |
| 18939220 | DUAL COLLIMATOR PHYSICAL VAPOR DEPOSITIONS PROCESSING CHAMBER | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Nov 06, 2024 |
| 18930188 | OPTICAL RESOLUTION MEASUREMENT METHOD FOR OPTICAL DEVICES | SETH, MANAV | — | DP | Non-Final OA | — | Pending | Oct 29, 2024 |
| 18920604 | INTEGRATED EPITAXY AND PRECLEAN SYSTEM | SONG, MATTHEW J | — | DP | Non-Final OA | — | Pending | Oct 18, 2024 |
| 18916977 | FLUID DELIVERY MOUNTING PANEL AND SYSTEM | ARUNDALE, ROBERT K | 3753 | §102 | Non-Final OA | — | Pending | Oct 16, 2024 |
| 18903907 | EPITAXIAL FILM DEFECT DETERMINATION | BROUGHTON, KATHLEEN M | — | §103 | Non-Final OA | — | Pending | Oct 01, 2024 |
| 18898943 | IMAGE STABILIZATION FOR DIGITAL LITHOGRAPHY | ASFAW, MESFIN T | 2882 | Other | Non-Final OA | — | Pending | Sep 27, 2024 |
| 18883149 | FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS | MACARTHUR, SYLVIA | 1716 | — | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18825091 | METHOD OF MANUFACTURING A PLURALITY OF OPTICAL DEVICES AND OPTICAL DEVICE | DUDEK, JAMES A | — | — | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18820919 | TEMPERATURE OFFSET AND ZONE CONTROL TUNING | WOLFORD, KURT JOSEPH | 3762 | — | Non-Final OA | — | Pending | Aug 30, 2024 |
| 18817652 | DEFECT DETECTION IN PACKAGING APPLICATION | STOCK JR, GORDON J | 2877 | §112 | Non-Final OA | — | Pending | Aug 28, 2024 |
| 18817646 | METAL-CONTAINING HARDMASK OPENING METHODS USING BORON-AND-HALOGEN-CONTAINING PRECURSORS | LAOBAK, ANDREW KEELAN | — | §103 | Non-Final OA | — | Pending | Aug 28, 2024 |
| 18813840 | SUSCEPTOR FOR A SILICON CARBIDE SUBSTRATE | WILSON, LEE D | 3723 | — | Non-Final OA | — | Pending | Aug 23, 2024 |
| 18812828 | ANTI-REFLECTIVE EDGE COATING | SWANSON, ALAINA MARIE | 2872 | — | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18809681 | DUAL MANUFACTURING PROCESS AND CALIBRATION TO ACHIEVE HIGH ACCURACY THERMAL COUPLE SUBSTRATES | MERSHON, JAYNE L | 1721 | §103 | Non-Final OA | 45d overdue | Pending | Aug 20, 2024 |
| 18839597 | METHODS AND APPARATUSES FOR TESTING ELECTRICAL CONNECTIONS OF A SUBSTRATE | NGUYEN, TUNG X | 2858 | — | Non-Final OA | — | Pending | Aug 19, 2024 |
| 18805790 | SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL | WEN, XIN | 1713 | §103 | Non-Final OA | — | Pending | Aug 15, 2024 |
| 18805150 | IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING | TRAN, JUDY DAO | 2877 | §103 | Non-Final OA | 35d overdue | Pending | Aug 14, 2024 |
| 18802665 | CHEMICAL MECHANICAL POLISHING SYSTEM CLEANING MODULE | OSTERHOUT, BENJAMIN LEE | 1711 | §103 | Non-Final OA | — | Pending | Aug 13, 2024 |
| 18803041 | MIRROR FOLDED ILLUMINATION FOR COMPACT OPTICAL METROLOGY SYSTEM | NGUYEN, SANG H | 2877 | §103 | Non-Final OA | — | Pending | Aug 13, 2024 |
| 18797716 | ASYMMETRIC METROLOGY TOOL FOR REFLECTIVE WAVEGUIDE | TON, TRI T | 2877 | §103 | Non-Final OA | 50d | Pending | Aug 08, 2024 |
| 18798303 | MULTIDIRECTIONAL ILLUMINATION FOR HYBRID BONDING DEFECT DETECTION | KO, TONY | 2878 | §102 | Final Rejection | — | Pending | Aug 08, 2024 |
| 18793576 | ION PROBE WITH COUPLING TO PLASMA | NGUYEN, KIET TUAN | — | §112 | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18793389 | OPTICAL PRISM FOR AUGMENTED REALITY WAVEGUIDE WRAPPING ANGLE | WILSON, PAISLEY L | 2871 | — | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18784593 | SWAPPER FOR A CLUSTER TOOL | LOWE, MICHAEL S | — | §103 | Non-Final OA | — | Pending | Jul 25, 2024 |
| 18782812 | ELECTROMAGNETIC MAGNETIC SENSOR ASSEMBLY | NGUYEN, TRUNG Q | 2858 | §103 | Non-Final OA | — | Pending | Jul 24, 2024 |
| 18779927 | TEMPERATURE AND FILM ADJUSTMENTS FOR PROCESS CHAMBERS, AND RELATED SYSTEMS AND METHODS | KUNEMUND, ROBERT M | 1714 | §103 | Non-Final OA | — | Pending | Jul 22, 2024 |
| 18773943 | BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 28d | Pending | Jul 16, 2024 |
| 18769595 | DISPERSION COMPENSATION IN DIFFRACTIVE AUGMENTED REALITY SYSTEMS | SUN, HAI TAO | 2616 | §103 | Non-Final OA | — | Pending | Jul 11, 2024 |
| 18768326 | METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE | SATHIRAJU, SRINIVAS | 2844 | §103 | Final Rejection | — | Pending | Jul 10, 2024 |
| 18763328 | PROJECTOR COMPENSATION WITH INCOUPLER GRATING LINE OFFSET | BEATTY, COLLIN X | 2872 | — | Non-Final OA | — | Pending | Jul 03, 2024 |
| 18762865 | HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND ELECTRODES | BOWMAN, ANDREW J | 1717 | §103 | Final Rejection | — | Pending | Jul 03, 2024 |
| 18758099 | METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18751591 | POLISHING HEAD WITH MEMBRANE POSITION CONTROL | HOLIZNA, CALEB ANDREW | — | §103 | Non-Final OA | — | Pending | Jun 24, 2024 |
| 18750718 | HYBRID VACUUM ELECTROSTATIC CHUCK | RAMOS, NICOLE N | 3722 | §103 | Final Rejection | 36d | Pending | Jun 21, 2024 |
| 18749297 | EMBEDDED SENSOR RESPONSE LINEARIZATION METHOD | KEFAYATI, SOORENA | 2884 | §103 | Non-Final OA | 46d | Pending | Jun 20, 2024 |
| 18746413 | HIGH RESOLUTION ADVANCED OLED SUB-PIXEL CIRCUIT AND PATTERNING METHOD | OJEH, NDUKA E | 2892 | Other | Non-Final OA | 34d | Pending | Jun 18, 2024 |
| 18746856 | EPI CHAMBER WITH FULL WAFER LASER HEATING | ECKARDT, ADAM MICHAEL | 3761 | §103 | Non-Final OA | 35d | Pending | Jun 18, 2024 |
| 18746195 | TAPERED ANTI-REFLECTION COATING THAT PRESERVES IMAGE SHARPNESS IN WAVEGUIDE COMBINERS | BLEVINS, JERRY M | — | — | Non-Final OA | — | Pending | Jun 18, 2024 |
| 18747307 | AUTOMATED TORQUE DRIVER SOLUTION | OSTROW, ALAN LINDSAY | 3657 | §103 | Final Rejection | 43d overdue | Pending | Jun 18, 2024 |
| 18745494 | Heated Process Kit for Substrate Processing | LUND, JEFFRIE ROBERT | 1716 | §103 | Non-Final OA | — | Pending | Jun 17, 2024 |
| 18719540 | IMPROVED ADHESION LAYER IN FLEXIBLE COVERLENS | BOUTSIKARIS, LEONIDAS | 2872 | — | Non-Final OA | — | Pending | Jun 13, 2024 |
| 18737275 | SUBSTRATE SUPPORTS INCLUDING MEASUREMENT ASSEMBLIES, AND RELATED APPARATUS, METHODS, AND PROCESSING CHAMBERS | HENSON, KATINA N | 3723 | — | Non-Final OA | — | Pending | Jun 07, 2024 |
| 18736157 | PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES | SMITH, BRADLEY | — | DP | Non-Final OA | — | Pending | Jun 06, 2024 |
| 18734312 | RAPID SEAL LEAK TEST USING HE OR CO2 GAS DETECTION | GRAVES, TIMOTHY P | 2855 | — | Non-Final OA | — | Pending | Jun 05, 2024 |
| 18732468 | IDENTIFYING AND WEIGHING CARRIERS IN A SUBSTRATE PROCESSING SYSTEM | FORTICH, ALVARO E | 2858 | §101 | Final Rejection | — | Pending | Jun 03, 2024 |
| 18732353 | NESTED-LOOP ATOMIC LAYER DEPOSITION WITH INHIBITION AND/OR ETCH | DUCLAIR, STEPHANIE P. | 1713 | — | Non-Final OA | — | Pending | Jun 03, 2024 |
| 18731943 | LOWER K AND HIGHER HARDNESS WITH IMPROVED PLASMA INDUCED DAMAGE (PID) DIELECTRIC FILM DEPOSITION | MAYY, MOHAMMAD | 1718 | §103 | Final Rejection | 33d | Pending | Jun 03, 2024 |
| 18731436 | DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PLATFORMS | OSTERHOUT, BENJAMIN LEE | 1711 | §112 | Non-Final OA | — | Pending | Jun 03, 2024 |
| 18678002 | HIGH REFRACTIVE INDEX IMPRINT COMPOSITIONS AND MATERIALS AND PROCESSES FOR MAKING THE SAME | SONG, INJA | 1744 | §103 | Final Rejection | — | Pending | May 30, 2024 |
| 18677103 | ELECTROPLATING WAFER SEAL APEX CLEANING TOOL | KARLS, SHAY LYNN | 3723 | §103 | Final Rejection | — | Pending | May 29, 2024 |
| 18674113 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | REPSHER III, JOHN T | 2119 | — | Non-Final OA | — | Pending | May 24, 2024 |
| 18674096 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | LINDSAY, BERNARD G | 2119 | §103 | Non-Final OA | — | Pending | May 24, 2024 |
| 18672951 | DUMMY FEATURES FOR DISSIPATING HEAT IN PACKAGES INCLUDING ADVANCED SEMICONDUCTOR CHIPS | HOQUE, MOHAMMAD M | — | §103 | Non-Final OA | — | Pending | May 23, 2024 |
| 18671417 | CRYOGENIC ETCHING OF SILICON-CONTAINING MATERIALS | CARTER, JONATHAN LANGDON | 1713 | — | Non-Final OA | — | Pending | May 22, 2024 |
| 18671184 | FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER | CULBERT, ROBERTS P | 1716 | — | Non-Final OA | — | Pending | May 22, 2024 |
| 18669718 | INCREASED LIFE SUBSTRATE SUPPORT ASSEMBLY | CHAN, WEI | — | — | Non-Final OA | — | Pending | May 21, 2024 |
| 18669659 | CHEMICAL MECHANICAL POLISHING METHOD USING FOAMED SLURRY AND APPARATUS FOR FOAMED SLURRY GENERATION | GUMP, MICHAEL ANTHONY | 1713 | §103 | Non-Final OA | — | Pending | May 21, 2024 |
| 18668480 | PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 79d overdue | Pending | May 20, 2024 |
| 18667148 | MICROWAVE PLASMA-ENHANCED DEPOSITION OF SILICON OXIDE | CHIN, EDWARD | — | §103 | Non-Final OA | — | Pending | May 17, 2024 |
| 18667515 | METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH | BERGNER, ERIN FLANAGAN | 1713 | Other | Non-Final OA | — | Pending | May 17, 2024 |
| 18663897 | MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS | CROWELL, ANNA M | 1716 | §103 | Final Rejection | — | Pending | May 14, 2024 |
| 18663463 | SELECTIVE PERIODIC EDGE DEPOSITION AND ETCH | CHEN, KEATH T | 1713 | §103 | Non-Final OA | — | Pending | May 14, 2024 |
| 18662748 | METHOD OF IN SITU LEAK MONITORING IN FLUID CIRCUITS | SPLIT, JAMES GERALD | 4100 | §103 | Non-Final OA | — | Pending | May 13, 2024 |
| 18662017 | METHODS AND APPARATUS THAT USE INDUCTIVELY COUPLED PLASMA RESONATOR SOURCES | BERMAN, JASON | — | §102 | Non-Final OA | — | Pending | May 13, 2024 |
| 18659362 | THERMALLY OPTIMIZED ARC CHAMBER | IPPOLITO, NICOLE MARIE | 2881 | — | Non-Final OA | — | Pending | May 09, 2024 |
| 18660048 | MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION | COLGAN, LAUREN ROBINSON | 1784 | Other | Non-Final OA | 50d | Pending | May 09, 2024 |
| 18656805 | MULTI-LAYER WET-DRY HARDCOATS FOR FLEXIBLE COVER LENS | FISCHER, JUSTIN R | 1749 | §103 | Non-Final OA | 6d | Pending | May 07, 2024 |
| 18707737 | METHOD FOR PREPARING A CARRIER SUBSTRATE PROVIDED WITH A CHARGE-TRAPPING LAYER | ESKRIDGE, CORY W | — | §101 | Non-Final OA | — | Pending | May 06, 2024 |
| 18654221 | HIGH-THROUGHPUT PLASMA LID FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBERS | MILLER, JR, JOSEPH ALBERT | — | — | Non-Final OA | — | Pending | May 03, 2024 |
| 18652612 | PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION | ZERVIGON, RUDY | 1713 | §103 | Non-Final OA | — | Pending | May 01, 2024 |
| 18652311 | VOLUME REDUCTION IN SEMICONDUCTOR PROCESSING CHAMBER | VAUGHAN, JASON L | 3726 | — | Non-Final OA | — | Pending | May 01, 2024 |
| 18651117 | 3D DRAM Access Transistor | HARRISTON, WILLIAM A | — | Other | Non-Final OA | — | Pending | Apr 30, 2024 |
| 18650831 | METHOD AND MATERIAL SYSTEM FOR BACKSIDE POWER DELIVERY NETWORK IN STATIC RANDOM-ACCESS MEMORY DEVICES | KLEIN, JORDAN M | — | — | Non-Final OA | — | Pending | Apr 30, 2024 |
| 18649723 | FABRICATING SOLAR CELL DEVICES TO REDUCE ACTIVE LAYER DAMAGE | REAMES, MATTHEW L | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18648153 | WIRELESS CHAMBER SENSOR | IPPOLITO, NICOLE MARIE | 2881 | — | Non-Final OA | — | Pending | Apr 26, 2024 |
| 18648144 | WIRELESS CHAMBER INTERIOR SENSOR | HAMADYK, ANNA N | 2881 | §103 | Non-Final OA | — | Pending | Apr 26, 2024 |
| 18647537 | ARCHITECTURE TO ENHANCE IMAGE SHARPNESS OF WAVEGUIDE DISPLAYS | DOAN, JENNIFER | 2874 | — | Non-Final OA | — | Pending | Apr 26, 2024 |
| 18647587 | PROCESSING MODULE HAVING A PRIMING SYSTEM | CAMPBELL, NATASHA N. | 1714 | §103 | Final Rejection | — | Pending | Apr 26, 2024 |
| 18647819 | MICROWAVE PRECLEAN APPARATUS AND PROCESSING METHOD FOR IMPURITY REMOVAL | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 83d | Pending | Apr 26, 2024 |
| 18645741 | FLUX GRADIENT MOLYBDENUM GROWTH PROCESS | VU, VU A | — | — | Non-Final OA | — | Pending | Apr 25, 2024 |
| 18643462 | VOLUMETRIC EXPANSION DEPOSITION OF SILICON BASED DIELECTRIC FILM | LAW, NGA LEUNG V | — | §103 | Non-Final OA | — | Pending | Apr 23, 2024 |
| 18643079 | SYSTEM TO ASSIST VACUUM CHUCKING OF A SUBSTRATE | WILSON, LEE D | 3723 | — | Non-Final OA | — | Pending | Apr 23, 2024 |
| 18643100 | SELF-LIMITED ETCHING OF LOW-K MATERIALS | ALBRECHT, PETER M | — | §103 | Non-Final OA | — | Pending | Apr 23, 2024 |
| 18640194 | AUTOMATED MACHINE LEARNING WAFERLESS CHAMBER CONDITIONING PROCESS FOR THERMAL SEMICONDUCTOR PROCESS CHAMBERS | YANCHUS III, PAUL B | 2115 | §102 | Non-Final OA | — | Pending | Apr 19, 2024 |
| 18639882 | COMMON CO-PIXEL OLED DEVICE | CHAMBLISS, ALONZO | — | — | Non-Final OA | — | Pending | Apr 18, 2024 |
| 18639108 | CHEMICAL SEPARATION FOR FLUORINE RECIRCULATION | LANGEL, WAYNE A | 1736 | §103 | Non-Final OA | — | Pending | Apr 18, 2024 |
| 18637574 | MICROWAVE APPARATUS FOR DUAL MODE OPERATION AND METHODS OF USE | TRICE III, WILLIAM CLARENCE | — | §103 | Non-Final OA | — | Pending | Apr 17, 2024 |
| 18635639 | SEMICONDUCTOR DEVICE PATTERNING METHODS | TUROCY, DAVID P | 1718 | DP | Final Rejection | — | Pending | Apr 15, 2024 |
| 18634659 | OPTIMUM MATERIAL STACKS FOR SEMICONDUCTOR CONTACTS | ANDERSON, ERIK ARTHUR | — | §103 | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18632450 | CONTACT CLEANING UNITS IN CMP POLISHER | CRANDALL, JOEL DILLON | 3723 | — | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18632899 | COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER | MACARTHUR, SYLVIA | — | §103 | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18631989 | METHOD FOR ETCHING RUTHENIUM | AHMED, SHAMIM | 1713 | §103 | Final Rejection | 9d overdue | Pending | Apr 10, 2024 |
| 18631810 | METHODS FOR BONDING SEMICONDUCTOR SUBSTRATES | TRAPANESE, WILLIAM C | — | §103 | Non-Final OA | — | Pending | Apr 10, 2024 |
| 18632200 | AUTOMATED OPTICAL INSPECTION TOOL | TON, TRI T | 2877 | §103 | Non-Final OA | — | Pending | Apr 10, 2024 |
| 18630450 | CLEANING DEVICE FOR SEMICONDUCTOR AND FLAT PANEL DISPLAY PROCESSING TOOLS | GOLIGHTLY, ERIC WAYNE | 1714 | §103 | Final Rejection | — | Pending | Apr 09, 2024 |
| 18630325 | MULTI-SUBSTRATE PROCESSING SYSTEM | MATTHEWS, TERRELL HOWARD | 3653 | — | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18626965 | WAVEFORM SIGNAL PACKAGING FOR DATA ANALYSIS AND PROCESS CONTROL | CHARIOUI, MOHAMED | — | §103 | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18626895 | Semiconductor Processing System with Horizontal Scan | CHANG, HANWAY | 2878 | — | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18627065 | PLASMA SHOWERHEAD ASSEMBLY | CHEN, KEATH T | — | — | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18626738 | DELIVERY OF PULSED VOLTAGE WAVEFORMS TO IMPROVE STEP COVERAGE AND DAMAGE CONTROL | BRAYTON, JOHN JOSEPH | — | §103 | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18625979 | LOW REFRACTIVE INDEX MATERIALS ON THE GRATINGS TO IMPROVE THE WAVEGUIDE EFFICIENCY | TRAN, HOANG Q | 2874 | — | Non-Final OA | — | Pending | Apr 03, 2024 |
| 18623546 | METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY H-RADICAL ASSISTED PROCESSES | ARMAND, MARC ANTHONY | — | — | Non-Final OA | — | Pending | Apr 01, 2024 |
| 18618937 | NON-AXISYMMETRIC GAS DIFFUSER FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION | MCDONALD, RODNEY GLENN | — | — | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18618993 | LIFT PIN SYSTEMS AND METHODS | SNELTING, JONATHAN D | 3652 | — | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18619083 | SILICON ETCH BYPRODUCT REMOVAL | KLUNK, MARGARET D | 1713 | §103 | Non-Final OA | 70d | Pending | Mar 27, 2024 |
| 18616996 | In-Line Validation of Substrate Bonding Surface | RAIMUND, CHRISTOPHER W | 4100 | — | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18617027 | Source-Drain Isolation for Complementary Field Effect Transistors | OJEH, NDUKA E | 4100 | — | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18614816 | SUBSTRATE SUPPORT ASSEMBLY HAVING AN EDGE VOLTAGE DELIVERY SYSTEM | REYES, JOSHUA NATHANIEL PI | — | §103 | Non-Final OA | — | Pending | Mar 25, 2024 |
| 18615421 | CRYOGENIC MOISTURE TRAP FOR IMPROVED ETCH AND PARTICLE REDUCTION | MILLER, JR, JOSEPH ALBERT | — | — | Non-Final OA | — | Pending | Mar 25, 2024 |
| 18613998 | PROTECTIVE CAPPING LAYER FOR AREA SELECTIVE DEPOSITION | MAYY, MOHAMMAD | — | — | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18613671 | METHOD FOR COATING PHARMACEUTICAL SUBSTRATES | ARNOLD, ERNST V | 1613 | Other | Non-Final OA | 12d | Pending | Mar 22, 2024 |
| 18612006 | ATOMIC OXYGEN AND OZONE CLEANING DEVICE HAVING A TEMPERATURE CONTROL APPARATUS | TALBERT, ERIC MICHAEL | 1758 | — | Non-Final OA | — | Pending | Mar 21, 2024 |
| 18611430 | PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING | SOTO, CHRISTOPHER ASHLEY | 3723 | — | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18611531 | ON-THE-FLY MEASUREMENT OF SUBSTRATE STRUCTURES | NORTON, JENNIFER L | 4100 | §103 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18609267 | PROCESSING SYSTEMS FOR METAL PRECURSOR SYNTHESIS AND DEPOSITION | PENCE, JETHRO M | 1717 | §103 | Final Rejection | — | Pending | Mar 19, 2024 |
| 18606739 | FABRICATION OF HIGH ASPECT RATIO ELECTRONIC DEVICES WITH MINIMAL SIDEWALL SPACER LOSS | VU, VU A | 4100 | — | Non-Final OA | — | Pending | Mar 15, 2024 |
| 18606358 | SHIELDING FOR IMMERSED PLASMA SOURCE | TRAN, MINH | 2881 | — | Non-Final OA | — | Pending | Mar 15, 2024 |
| 18603360 | SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18603646 | ADVANCED THERMAL MANAGEMENT SYSTEM (ATM) FOR PEDESTAL TEMPERATURE CONTROL IN HIGH POWER PECVD CHAMBER | WELLS, KENNETH B | 2842 | §103 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18602986 | PRIME STEP FOR METAL ETCH IN HIGH ASPECT-RATIO FEATURES | LU, JIONG-PING | 1713 | §102 | Non-Final OA | 42d | Pending | Mar 12, 2024 |
| 18601566 | OLED PANEL WITH SEPARATE OVERHANGS | SPRENGER, JAIME LYNN | 2893 | §102 | Non-Final OA | — | Pending | Mar 11, 2024 |
| 18599819 | Doped Aluminum Oxide Bonding Layer for Hybrid Bonding | KLEIN, JORDAN M | 2893 | §103 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18597956 | DEPOSITION DEVICE AND DEPOSITION METHOD | THOMAS, BINU | — | — | Non-Final OA | — | Pending | Mar 07, 2024 |
| 18597210 | Heated Dynamic Seal Rotary Union for Delivery of Cryogenic Fluid | SMITH, DAVID E | — | — | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18597543 | SYSTEMS AND METHODS FOR HIGH-THROUGHPUT ANGLED ION PROCESSING | BENNETT, CHARLEE | 1718 | DP | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18593014 | SELECTIVE ETCHING OF ALTERNATING LAYERS OF SILICON OXIDE AND SILICON NITRIDE FOR HIGH ASPECT RATIO CONTACTS | CARTER, JONATHAN LANGDON | 1713 | §103 | Final Rejection | — | Pending | Mar 01, 2024 |
| 18593610 | SACRIFICIAL LINER FOR COPPER INTERCONNECT | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | 46d overdue | Pending | Mar 01, 2024 |
| 18591976 | DIETHYL ZINC AND METAL HALIDE PRECURSORS FOR DEPOSITION OF METAL FILMS ON SEMICONDUCTOR SUBSTRATES | STARK, JARRETT J | 2898 | — | Non-Final OA | — | Pending | Feb 29, 2024 |
| 18590478 | GAS INJECTOR ASSEMBLY WITH IMPROVED GAS MIXING | SWEELY, KURT D | — | — | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18590111 | MICROWAVE ASSISTED PASSIVATION LAYER REMOVAL | PARK, SAMUEL | 2818 | §103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18590752 | ELECTRICAL CONNECTION FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD | HENSON, KATINA N | 3723 | §102 | Non-Final OA | 71d | Pending | Feb 28, 2024 |
| 18590069 | MODELING SUBSTRATE CHARACTERISTICS FROM MANUFACTURING SENSOR DATA | SATANOVSKY, ALEXANDER | — | — | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589251 | LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | — | §112 | Non-Final OA | 76d | Pending | Feb 27, 2024 |
| 18589392 | BIASED OR FLOATING PROCESS SHIELD TO REDUCE ION LOSS TO CONTROL FILM DEPOSITION AND IMPROVE STEP COVERAGE | MILLER, JR, JOSEPH ALBERT | — | — | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18584540 | DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 29d | Pending | Feb 22, 2024 |
| 18582977 | METHODS FOR FORMING LOW RESISTIVITY CONTACTS | MCCALL SHEPARD, SONYA D | 2898 | — | Non-Final OA | — | Pending | Feb 21, 2024 |
| 18442234 | METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES | LEE, DOUGLAS | 1714 | §103 | Final Rejection | 76d | Pending | Feb 15, 2024 |
| 18441352 | SILICON CHANNEL FOR BONDED 3D NAND DEVICES | HRNJIC, ADIN | 2817 | — | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18441483 | THERMOELECTRIC CONTROL FOR A CRUCIBLE FOR USE WITH AN ION SOURCE | TANDY, LAURA ELOISE | 2881 | §103 | Non-Final OA | 75d | Pending | Feb 14, 2024 |
| 18440490 | Generation of Starting Thickness Profile Using In-SITU Monitoring System | LARSON, JOHN MICHAEL | 3723 | — | Non-Final OA | — | Pending | Feb 13, 2024 |
| 18440311 | ENDPOINT CONTROL FOR INCONSISTENT UNDERLAYER | MARTIN, KEEGAN THOMAS | 3723 | — | Non-Final OA | — | Pending | Feb 13, 2024 |
| 18438621 | SUSCEPTOR FOR A SILICON CARBIDE SUBSTRATE | WILSON, LEE D | 3723 | — | Non-Final OA | — | Pending | Feb 12, 2024 |
| 18439305 | METHODS OF MANUFACTURING INTERCONNECT STRUCTURES | YAP, DOUGLAS ANTHONY | 2899 | §103 | Non-Final OA | — | Pending | Feb 12, 2024 |
| 18437569 | DISTINGUISHED FLIP CHIP PACKAGING FOR STRESS RELAXATION AND ENHANCED EM PROTECTION | GOODLING, DEVIN KIRK | 2898 | §103 | Non-Final OA | — | Pending | Feb 09, 2024 |
| 18437619 | INDEX POLISHING FOR PROCESS CONTROL SIGNAL AND WAFER UNIFORMITY | LARSON, JOHN MICHAEL | 3723 | — | Non-Final OA | — | Pending | Feb 09, 2024 |
| 18438222 | PHASE MASKING FOR POLARIZATION AND OPTICAL SIGNAL CONTROL IN OPTICAL INSPECTION SYSTEMS | CARLSON, JOSHUA MICHAEL | 2877 | §103 | Non-Final OA | — | Pending | Feb 09, 2024 |
| 18436499 | DEFORMABLE SUBSTRATE CHUCK | ZAWORSKI, JONATHAN R | 3723 | §103 | Final Rejection | — | Pending | Feb 08, 2024 |
| 18435853 | DEPOSITION AND ETCHING FOR SELECTIVE REMOVAL OF DEPOSITED DIELECTRIC FILM FROM TOPS OF FINS | TRAN, BINH X | 1713 | §103 | Non-Final OA | 43d | Pending | Feb 07, 2024 |
| 18433210 | DRY DEPOSITION OF EXTREME ULTRAVIOLET (EUV) UNDERLAYER FOR LITHOGRAPHY AND PATTERNING | OH, JAEHWAN | 2899 | — | Non-Final OA | — | Pending | Feb 05, 2024 |
| 18431834 | OPTIMIZED FILM DEPOSITION AND ION IMPLANTATION FOR MITIGATION OF STRESS AND DEFORMATION IN SUBSTRATES | BARBEE, MANUEL L | 2898 | DP | Non-Final OA | — | Pending | Feb 02, 2024 |
| 18431860 | STRESS MANAGEMENT FOR PRECISE SUBSTRATE -TO- SUBSTRATE BONDING | SEVEN, EVREN | 2812 | — | Non-Final OA | — | Pending | Feb 02, 2024 |
| 18423636 | Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving Substrate | MOORE, KARLA A | 1716 | Other | Final Rejection | 35d overdue | Pending | Jan 26, 2024 |
| 18422727 | CHOKE PLATES FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBERS | KLUNK, MARGARET D | 1716 | — | Non-Final OA | — | Pending | Jan 25, 2024 |
| 18422304 | MAGNETIC LEVITATION SYSTEM FOR SUBSTRATE SUPPORT DEVICE | MATES, ROBERT E | 1742 | — | Non-Final OA | — | Pending | Jan 25, 2024 |
| 18421937 | AUTOMATIC ROBOT CALIBRATION FOR MULTI-JOINT ROBOTS | VISCARRA, RICARDO I | 3657 | §103 | Final Rejection | 42d | Pending | Jan 24, 2024 |
| 18418786 | METHODS OF FORMING INTERCONNECT STRUCTURES | PALANISWAMY, KRISHNA JAYANTHI | 2899 | — | Non-Final OA | — | Pending | Jan 22, 2024 |
| 18418531 | REFLECTOR FOR PROCESS CHAMBER | CHAN, WEI | 2844 | — | Non-Final OA | — | Pending | Jan 22, 2024 |
| 18417304 | APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL | CHANG, SUKWOO JAMES | 3723 | §103 | Non-Final OA | 78d | Pending | Jan 19, 2024 |
| 18418206 | SWITCHING CIRCUIT FOR MULTILEVEL PLASMA IMPEDANCE MATCHING | LUONG, HENRY T | 2843 | — | Non-Final OA | — | Pending | Jan 19, 2024 |
| 18415506 | RF FILTER TOPOLOGY FOR SUBSTRATE SUPPORT ASSEMBLY | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | §103 | Final Rejection | 8d | Pending | Jan 17, 2024 |
| 18409979 | SYSTEMS AND METHODS FOR VISUAL INSPECTION OF PHARMACEUTICAL CONTAINERS | ESQUINO, CALEB LOGAN | 2677 | §103 | Non-Final OA | 22d overdue | Pending | Jan 11, 2024 |
| 18408666 | ENHANCED DEUTERIUM MIGRATION | PETERSON, ERIK T | 2898 | — | Non-Final OA | — | Pending | Jan 10, 2024 |
| 18409564 | COMPACT FACEPLATE LOADING PLATFORM | NEJAD, MAHDI H | 3723 | §112 | Non-Final OA | 29d | Pending | Jan 10, 2024 |
| 18409549 | CONFORMAL AND SELECTIVE SIN DEPOSITION | CHOU, SHIH TSUN A | 2811 | — | Non-Final OA | — | Pending | Jan 10, 2024 |
| 18408313 | DYNAMIC PRESSURE CONTROL FOR PROCESSING CHAMBERS IMPLEMENTING REAL-TIME LEARNING | DESTA, ELIAS | 2117 | — | Non-Final OA | — | Pending | Jan 09, 2024 |
| 18408439 | CAUSALITY-BASED FLEET MATCHING | BARBEE, MANUEL L | 2857 | — | Non-Final OA | — | Pending | Jan 09, 2024 |
| 18405726 | APPARATUS AND METHOD FOR MODULATING IONS AND RADICAL SPECIES IN PLASMAS | CHAN, LAUREEN | 1716 | §103 | Final Rejection | — | Pending | Jan 05, 2024 |
| 18403930 | 3-D DRAM WORDLINE PARTITION AND STAIRCASE CONTACTS | TORNOW, MARK W | 2891 | §102 | Non-Final OA | — | Pending | Jan 04, 2024 |
| 18403247 | DUAL CHANNEL SHOWERHEAD CONDUCTANCE OPTIMIZATION FOR UNIFORM RADIAL FLOW DISTRIBUTION | CHAN, WEI | 3752 | §103 | Non-Final OA | — | Pending | Jan 03, 2024 |
| 18400393 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | CHAUDHRI, OMAIR | 1711 | §103 | Final Rejection | 43d overdue | Pending | Dec 29, 2023 |
| 18401306 | APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY | PRUITT, JUSTIN A | 3745 | §103 | Final Rejection | — | Pending | Dec 29, 2023 |
| 18400319 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | AYALEW, TINSAE B | 1711 | §103 | Non-Final OA | 23d overdue | Pending | Dec 29, 2023 |
| 18396003 | ELECTROLESS PLATING WITH A FLOATING POTENTIAL | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | — | Pending | Dec 26, 2023 |
| 18395440 | Electron-Stimulated Etching of Silicon | CULBERT, ROBERTS P | 1716 | §103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18392246 | Workpiece Support For Backside Processing Using Edge Grip | VAUGHAN, JASON L | 1717 | — | Non-Final OA | — | Pending | Dec 21, 2023 |
| 18392785 | ATOMIC LAYER ETCHING OF SILICON OXIDE AT CRYOGENIC TEMPERATURE | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Dec 21, 2023 |
| 18391176 | ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Dec 20, 2023 |
| 18391541 | LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS | SUN, MICHAEL BRENNAN | 2892 | §103 | Non-Final OA | 71d | Pending | Dec 20, 2023 |
| 18391015 | BOTTOM-UP DIELECTRIC GAP-FILL FOR DEVICE ISOLATION DURING SOURCE/DRAIN EPITAXY IN CFET | CHANG, JAY C | 2817 | §112 | Non-Final OA | — | Pending | Dec 20, 2023 |
| 18391423 | Electrode and Coil Configurations For Processing Chambers and Related Chamber Kits, Apparatus, and Methods For Semiconductor Manufacturing | CHEN, PATRICK C | 2842 | §103 | Final Rejection | — | Pending | Dec 20, 2023 |
| 18389664 | RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING REPLACEABLE CHAMBER PORTS | MATTHEWS, TERRELL HOWARD | 3653 | §103 | Non-Final OA | — | Pending | Dec 19, 2023 |
| 18389591 | High Conformal Coating on Textured Surface of Processing Chamber Component | OTT, PATRICK S | 1794 | §103 | Non-Final OA | 47d | Pending | Dec 19, 2023 |
| 18545691 | MACHINE LEARNING MODELS FOR TUNING AN ION IMPLANTER | CASANOVA, JORGE A | — | — | Non-Final OA | — | Pending | Dec 19, 2023 |
| 18542905 | Natural Frequency Adjuster For Extraction Electrodes | WANG, JING | 2881 | §103 | Non-Final OA | — | Pending | Dec 18, 2023 |
| 18542093 | SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING | HAWKINS, JASON KHALIL | 3723 | §103 | Non-Final OA | — | Pending | Dec 15, 2023 |
| 18540680 | GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | — | Pending | Dec 14, 2023 |
| 18538100 | CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 55d | Pending | Dec 13, 2023 |
| 18538267 | INNER SPACER LINER FOR GATE-ALL-AROUND DEVICE | ELLIOTT, DANIEL KURT | 2899 | §103 | Non-Final OA | — | Pending | Dec 13, 2023 |
| 18534061 | UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING GEOMETRIES | PHAM, THOMAS T | 1713 | §103 | Final Rejection | — | Pending | Dec 08, 2023 |
| 18530640 | FLOW-THROUGH EDGE SHIELD TO LESSEN CURRENT CROWDING EFFECTS DURING WAFER ELECTROPLATING | RUFO, LOUIS J | — | §103 | Non-Final OA | — | Pending | Dec 06, 2023 |
| 18525633 | 3D MEMORY INCLUDING HOLLOW EPITAXIAL CHANNELS | ABEL, GARY ROBERT | 2897 | §103 | Final Rejection | 16d overdue | Pending | Nov 30, 2023 |
| 18523401 | WORDLINE CONTACT FORMATION FOR NAND DEVICE | COLLINS, HAMNER FITZHUGH | 2818 | §103 | Non-Final OA | — | Pending | Nov 29, 2023 |
| 18523394 | SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 14d | Pending | Nov 29, 2023 |
| 18521948 | PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL | PHAM, THOMAS T | 1713 | §103 | Final Rejection | — | Pending | Nov 28, 2023 |
| 18520369 | IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM | VONCH, JEFFREY A | 1781 | §103 | Non-Final OA | 84d | Pending | Nov 27, 2023 |
| 18517791 | CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTRATE CARRIER | CHARIOUI, MOHAMED | 2857 | §103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18516728 | LOW TEMPERATURE EPI CHAMBER | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | 70d | Pending | Nov 21, 2023 |
| 18516849 | MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT | BESLER, CHRISTOPHER JAMES | 3726 | §112 | Non-Final OA | 41d | Pending | Nov 21, 2023 |
| 18513930 | METHODS AND MECHANISMS TO PERFORM AUTOMATED CLASSIFICATIONS OF ANOMALOUS TRACE SHAPES | NAULT, VICTOR ADELARD | — | §103 | Non-Final OA | — | Pending | Nov 20, 2023 |
| 18512894 | LOW RESISTIVITY GAPFILL | BERRY, PAUL ANTHONY | 2898 | §103 | Non-Final OA | 72d | Pending | Nov 17, 2023 |
| 18511021 | SURFACE ROUGHNESS AND EMISSIVITY DETERMINATION | TON, TRI T | 2877 | Other | Non-Final OA | — | Pending | Nov 16, 2023 |
| 18510630 | SELECTIVE FEATURE MODIFICATION USING DIRECTIONAL DEPOSITION | TAHIR, NOOR MOHAMMAD ISM | 2893 | §103 | Non-Final OA | — | Pending | Nov 15, 2023 |
| 18510157 | SUBSTRATE HOT SPOT CORRECTION FOR A CHEMICAL MECHANICAL POLISHING PROCESSS | WIEHE, NATHANIEL EDWARD | 3745 | §103 | Non-Final OA | — | Pending | Nov 15, 2023 |
| 18388250 | CONICAL IMPEDANCE TRANSFORMER FOR MICROWAVE PLASMA PROCESSING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Nov 09, 2023 |
| 18388211 | Oxidation-Reduction Adjustable Plasma | REMAVEGE, CHRISTOPHER | 1713 | §112 | Final Rejection | — | Pending | Nov 09, 2023 |
| 18388490 | ION ANGLE SENSOR | GASSEN, CHRISTOPHER J | 2881 | §103 | Final Rejection | — | Pending | Nov 09, 2023 |
| 18504452 | OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 20d | Pending | Nov 08, 2023 |
| 18387987 | XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER | LOGIE, MICHAEL J | 2881 | §103 | Non-Final OA | — | Pending | Nov 08, 2023 |
| 18500724 | MULTI-FLOW CHAMBER KITS, PROCESSING CHAMBERS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING | YU, YUECHUAN | 1718 | — | Non-Final OA | — | Pending | Nov 02, 2023 |
| 18500707 | MULTI-FLOW METHODS, AND RELATED APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | — | Pending | Nov 02, 2023 |
| 18498813 | MULTI-PARAMETER IMPLANTATION FOR MANAGING WAFER DISTORTION | KARIMY, TIMOR | 2818 | §103 | Non-Final OA | — | Pending | Oct 31, 2023 |
| 18497096 | VIA SHAPING BETWEEN METAL LAYERS FOR CONTROLLED RESISTANCE | WOLDEGEORGIS, ERMIAS T | 2893 | §103 | Non-Final OA | — | Pending | Oct 30, 2023 |
| 18557675 | PROCESSING SYSTEM AND METHODS FOR FORMING VOID-FREE AND SEAM-FREE TUNGSTEN FEATURES | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Non-Final OA | — | Pending | Oct 27, 2023 |
| 18384688 | METHOD OF BLOCKING DIELECTRIC SURFACES USING BLOCKING MOLECULES TO ENABLE SELECTIVE EPI DEPOSITION | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | — | Pending | Oct 27, 2023 |
| 18384810 | DIO3 SPRAY TANK FOR POST CMP SUBSTRATE CLEANING | WIBLIN, MATTHEW | 3745 | §103 | Non-Final OA | 42d | Pending | Oct 27, 2023 |
| 18495330 | DEPOSITION OF CARBON GAPFILL MATERIALS | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | — | Pending | Oct 26, 2023 |
| 18494632 | CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE | SEHN, MICHAEL L | 3745 | §103 | Non-Final OA | 71d | Pending | Oct 25, 2023 |
| 18383411 | VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL | GRAY, PAUL J | 3753 | §103 | Non-Final OA | 42d | Pending | Oct 24, 2023 |
| 18383100 | SURFACE MODIFIERS FOR ENHANCED EPITAXIAL NUCLEATION AND WETTING | STARK, JARRETT J | 2898 | §103 | Non-Final OA | — | Pending | Oct 24, 2023 |
| 18382429 | AUXILIARY FLOW PLATE FOR THICKNESS AND CONCENTRATION UNIFORMITY ADJUSTABILITY | SONG, MATTHEW J | 1714 | §103 | Final Rejection | 60d overdue | Pending | Oct 20, 2023 |
| 18490847 | U-DISPLAY STRUCTURE WITH QD COLOR CONVERSION AND METHODS OF MANUFACTURE | KHALIFA, MOATAZ | 2817 | §103 | Non-Final OA | — | Pending | Oct 20, 2023 |
| 18382421 | LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KITS, FOR PROCESSING CHAMBERS | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | 8d | Pending | Oct 20, 2023 |
| 18491584 | METHODS AND APPARATUS FOR ANISOTROPIC FILM GROWTH, AND RELATED DEVICES | ANDERSON, WILLIAM H | 2817 | §103 | Non-Final OA | — | Pending | Oct 20, 2023 |
| 18489528 | PREDICTIVE MODELING OF A MANUFACTURING PROCESS USING A SET OF TRAINED INVERTED MODELS | SKRZYCKI, JONATHAN MICHAEL | 2116 | §103 | Final Rejection | 82d | Pending | Oct 18, 2023 |
| 18489214 | ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERATURE CONTROL | TURNER, BRIAN | 2818 | §103 | Non-Final OA | 34d | Pending | Oct 18, 2023 |
| 18555342 | METHODS AND APPLICATIONS OF NOVEL AMORPHOUS HIGH-K METAL-OXIDE DIELECTRICS BY SUPER-CYCLE ATOMIC LAYER DEPOSITION | SRINIVASAN, SESHA SAIRAMAN | 2817 | §103 | Final Rejection | 37d overdue | Pending | Oct 16, 2023 |
| 18486291 | PROCESS CHAMBER GAS FLOW IMPROVEMENT | LEE, AIDEN Y | 1718 | §103 | Non-Final OA | 46d overdue | Pending | Oct 13, 2023 |
| 18486094 | POLISHING ARTICLES FOR HYBRID BONDING APPLICATIONS | BEEBE, JOSHUA R | 3745 | §102 | Non-Final OA | — | Pending | Oct 12, 2023 |
| 18378828 | OLIGOMER FILM FOR BOTTOM-UP GAP FILL PROCESSES | ROLLAND, ALEX A | 2893 | §103 | Non-Final OA | — | Pending | Oct 11, 2023 |
| 18379102 | DESIGN, CONTROL, AND OPTIMIZATION OF PHOTOSENSITIVITY MODULATION ALONG PHOTORESIST FILM DEPTH | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Oct 11, 2023 |
| 18378850 | SACRIFICIAL SOURCE/DRAIN FOR METALLIC SOURCE/DRAIN HORIZONTAL GATE ALL AROUND ARCHITECTURE | PARK, SAMUEL | 2818 | §103 | Final Rejection | 28d overdue | Pending | Oct 11, 2023 |
| 18484232 | CERAMIC RF RETURN KIT DESIGN | CHEN, KEATH T | 1716 | §103 | Final Rejection | — | Pending | Oct 10, 2023 |
| 18483971 | HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE | MARTIN, KEEGAN THOMAS | 3723 | §103 | Non-Final OA | 29d | Pending | Oct 10, 2023 |
| 18484016 | SCALING FOR DIE-LAST ADVANCED IC PACKAGING | ALAWDI, ANWER AHMED | 2851 | §103 | Non-Final OA | 23d | Pending | Oct 10, 2023 |
| 18484379 | MICROWAVE HIGH-DENSITY PLASMA FOR SELECTIVE ETCH | CARTER, JONATHAN LANGDON | 1713 | §103 | Final Rejection | 12d | Pending | Oct 10, 2023 |
| 18483973 | RETAINING-RING-LESS CMP PROCESS | HOLIZNA, CALEB ANDREW | 3723 | §103 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18483994 | ANNEAL CHAMBER | HO, ANTHONY | 2817 | §102 | Non-Final OA | 37d overdue | Pending | Oct 10, 2023 |
| 18483352 | CURABLE FORMULATIONS FOR POLISHING PADS | REDDY, KARUNA P | 1764 | — | Non-Final OA | — | Pending | Oct 09, 2023 |
| 18482658 | SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY | BOWMAN, ANDREW J | 1717 | §103 | Non-Final OA | 13d | Pending | Oct 06, 2023 |
| 18376885 | INTEGRATED LITHIUM DEPOSITION WITH PROTECTIVE LAYER TOOL | COLTON, JENNA XIANXIAN | 1782 | §103 | Non-Final OA | — | Pending | Oct 05, 2023 |
| 18481513 | INDIVIDUALLY ROTATABLE PLATENS AND CONTROL OF CARRIER HEAD SWEEP | ZAWORSKI, JONATHAN R | 3723 | §103 | Non-Final OA | 70d overdue | Pending | Oct 05, 2023 |
| 18481171 | PRECISION TIMING OF PROCESSING ACTIONS IN MANUFACTURING SYSTEMS | TRAN, VINCENT HUY | 2115 | §103 | Non-Final OA | — | Pending | Oct 04, 2023 |
| 18480060 | ADVANCED POLISHING PADS AND RELATED POLISHING PAD MANUFACTURING METHODS | CHANG, SUKWOO JAMES | 3723 | §103 | Non-Final OA | 26d overdue | Pending | Oct 03, 2023 |
| 18478649 | FINDING SUBSTRATE NOTCH ON SUBSTRATE BETWEEN PLATENS IN CHEMICAL MECHANICAL POLISHING | HAWKINS, JASON KHALIL | 3723 | §112 | Non-Final OA | — | Pending | Sep 29, 2023 |
| 18478723 | TEMPERATURE AND SLURRY FLOW RATE CONTROL IN CMP | RIVERA, CARLOS A | 3723 | §103 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18375339 | METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOGENIC SERVICE | ZERVIGON, RUDY | 1716 | §112 | Non-Final OA | — | Pending | Sep 29, 2023 |
| 18477159 | CHEMICAL MECHANICAL POLISHING EDGE CONTROL WITH PAD RECESSES | CRANDALL, JOEL DILLON | 3723 | §103 | Final Rejection | — | Pending | Sep 28, 2023 |
| 18372811 | LARGE DIAMETER POROUS PLUG FOR ARGON DELIVERY | BALLMAN, CHRISTOPHER D | 3753 | §103 | Non-Final OA | — | Pending | Sep 26, 2023 |
| 18372792 | Selective Deposition of Thin Films with Improved Stability | CHEN, BRET P | 1718 | §103 | Final Rejection | 44d overdue | Pending | Sep 26, 2023 |
| 18371179 | LOW RESISTIVITY METAL STACKS AND METHODS OF DEPOSITING THE SAME | ZARNEKE, DAVID A | 2891 | §103 | Non-Final OA | — | Pending | Sep 21, 2023 |
| 18471472 | MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION | CHOU, SHIH TSUN A | 2811 | §112 | Non-Final OA | 41d | Pending | Sep 21, 2023 |
| 18370190 | METHODS AND APPARATUS FOR PHOTOMASK PROCESSING | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 93d overdue | Pending | Sep 19, 2023 |
| 18370155 | PLASMA SOURCE WITH MULTIPLE EXTRACTION APERTURES | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Sep 19, 2023 |
| 18468091 | LIGHT EMITTING DIODE WITH INCREASED LIGHT CONVERSION EFFICIENCY | SANTIAGO, MARICELI | 2896 | §103 | Non-Final OA | — | Pending | Sep 15, 2023 |
| 18282509 | PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS | RIDDLE, CHRISTINA A | 2882 | — | Non-Final OA | — | Pending | Sep 15, 2023 |
| 18468632 | MASK SYSTEM FOR CPAP OR BIPAP THERAPY | DALE, ABIGAYLE ANN | 3785 | §103 | Final Rejection | — | Pending | Sep 15, 2023 |
| 18467211 | PLASMA PROCESSING CHAMBER LID COOLING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Sep 14, 2023 |
| 18367321 | MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Non-Final OA | — | Pending | Sep 12, 2023 |
| 18465519 | CONTROL OF STEAM GENERATION FOR CHEMICAL MECHANICAL POLISHING | MARKMAN, MAKENA | 3762 | §103 | Non-Final OA | — | Pending | Sep 12, 2023 |
| 18367136 | METHODS OF FORMING SILICON NITRIDE FILMS | KIELIN, ERIK J | 2814 | §103 | Final Rejection | 60d | Pending | Sep 12, 2023 |
| 18244787 | GENERATION AND UTILIZATION OF VIRTUAL FEATURES FOR PROCESS MODELING | PARIHAR, SUCHIN | — | §102 | Non-Final OA | — | Pending | Sep 11, 2023 |
| 18464926 | METHOD AND MATERIAL SYSTEM FOR TUNABLE HYBRID BOND INTERCONNECT RESISTANCE | JUNG, MICHAEL YOO LIM | 2817 | §101 | Non-Final OA | 22d | Pending | Sep 11, 2023 |
| 18244197 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Non-Final OA | 29d | Pending | Sep 08, 2023 |
| 18244199 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Final Rejection | 56d overdue | Pending | Sep 08, 2023 |
| 18244104 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | §103 | Non-Final OA | 20d | Pending | Sep 08, 2023 |
| 18244113 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | §103 | Non-Final OA | 60d overdue | Pending | Sep 08, 2023 |
| 18243266 | SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL | HOQUE, SHAHEDA SHABNAM | 3658 | §103 | Non-Final OA | — | Pending | Sep 07, 2023 |
| 18242629 | DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE | ROBERTS, HERBERT K | 2855 | §103 | Final Rejection | — | Pending | Sep 06, 2023 |
| 18242886 | METHODS AND MECHANISMS FOR VIBRATION MONITORING | BALSECA, FRANKLIN D | 2688 | §103 | Final Rejection | — | Pending | Sep 06, 2023 |
| 18243085 | INTEGRATION APPROACH FOR INCREASE OF THE MOBILITY AND ON-CURRENT IN 3D NAND CELLS | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18242184 | Laser Cleaning Used Component of Substrate Processing Chamber | HARRINGTON, ALYSON JOAN | 3741 | §103 | Non-Final OA | — | Pending | Sep 05, 2023 |
| 18460154 | METHODS AND STRUCTURES FOR HIGH STRENGTH DIELECTRIC IN HYBRID BONDING | RAHMAN, MOHAMMAD A | 2898 | §103 | Non-Final OA | 39d | Pending | Sep 01, 2023 |
| 18460189 | METHODS AND STRUCTURES FOR HIGH STRENGTH ASYMMETRIC DIELECTRIC IN HYBRID BONDING | MALEK, MALIHEH | 2813 | §103 | Non-Final OA | 84d | Pending | Sep 01, 2023 |
| 18239783 | Mobile Cart for Commissioning Semiconductor Processing Tool | SHAFAYET, MOHAMMED | 2116 | §103 | Final Rejection | — | Pending | Aug 30, 2023 |
| 18239414 | Opaque Thermal Layer for Silicon Carbide Substrates | MILLER, MICHAEL G | 1712 | §103 | Non-Final OA | — | Pending | Aug 29, 2023 |
| 18237641 | HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE | HAWKINS, JASON KHALIL | 3723 | §103 | Non-Final OA | 28d | Pending | Aug 24, 2023 |
| 18455508 | SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | 10d overdue | Pending | Aug 24, 2023 |
| 18237639 | ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Final Rejection | — | Pending | Aug 24, 2023 |
| 18455505 | ADAPTIVE WAFER BOW MANAGEMENT | JARRETT, RYAN A | 2813 | §103 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18237648 | ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME | COSGROVE, JAYSON D | 1737 | §103 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18236554 | INTEGRATED SUBSTRATE PROCESSING SYSTEM WITH ADVANCED SUBSTRATE HANDLING ROBOT | MATTHEWS, TERRELL HOWARD | 3653 | §103 | Final Rejection | — | Pending | Aug 22, 2023 |
| 18235249 | TREATMENTS FOR THIN FILMS USED IN PHOTOLITHOGRAPHY | ANGEBRANNDT, MARTIN J | 1737 | §103 | Final Rejection | — | Pending | Aug 17, 2023 |
| 18450466 | DIE BACKSIDE PROFILE for SEMICONDUCTOR DEVICES | YECHURI, SITARAMARAO S | 2893 | §103 | Final Rejection | 42d overdue | Pending | Aug 16, 2023 |
| 18233984 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND INCREASED DENSITY | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | — | Pending | Aug 15, 2023 |
| 18232991 | METHODS OF ETCHING OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES | CULBERT, ROBERTS P | 1716 | §103 | Non-Final OA | 41d | Pending | Aug 11, 2023 |
| 18232668 | SHOWERHEAD FOR FAST DELIVERY OF INCOMPATABLE PRECURSORS | SWEELY, KURT D | 1718 | §103 | Non-Final OA | — | Pending | Aug 10, 2023 |
| 18232631 | METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS | MURATA, AUSTIN | 1712 | §103 | Non-Final OA | 33d | Pending | Aug 10, 2023 |
| 18366433 | CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Aug 07, 2023 |
| 18365867 | MULTI-FOCAL-PLANE SCANNING USING TIME DELAY INTEGRATION IMAGING | KASS, BENJAMIN JOSEPH | 1758 | §103 | Non-Final OA | — | Pending | Aug 04, 2023 |
| 18365520 | PAD CONDITIONING DISK GIMBALING CONTROL | HOLIZNA, CALEB ANDREW | 3723 | §102 | Final Rejection | 29d overdue | Pending | Aug 04, 2023 |
| 18365482 | CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN | XU, PETER | 3723 | §103 | Non-Final OA | — | Pending | Aug 04, 2023 |
| 18365261 | PLASMA PROCESSING ASSEMBLY FOR RF AND PVT INTEGRATION | HASSANZADEH, PARVIZ | 1716 | §103 | Non-Final OA | — | Pending | Aug 04, 2023 |
| 18228393 | CLUSTER PROCESSING SYSTEM FOR FORMING A METAL CONTAINING MATERIAL | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | — | Pending | Jul 31, 2023 |
| 18361326 | GROWTH CHAMBER SMART SEASONING | OGG, DAVID EARL | 2119 | §103 | Non-Final OA | 56d | Pending | Jul 28, 2023 |
| 18274991 | POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRATE PROCESSING | RIVERA, CARLOS A | 3723 | §103 | Final Rejection | 54d | Pending | Jul 28, 2023 |
| 18227767 | PROCESS STACK FOR CVD PLASMA TREATMENT | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | — | Pending | Jul 28, 2023 |
| 18227286 | SiC TRENCH BOTTOM CORNER ROUNDING | BARZYKIN, VICTOR V | 2893 | §103 | Final Rejection | — | Pending | Jul 27, 2023 |
| 18226579 | METHODS OF FORMING ABRUPT INTERFACES BETWEEN SILICON-AND-CARBON-CONTAINING MATERIALS AND SILICON-AND-OXYGEN-CONTAINING MATERIALS | VLCEK, JACOB ALEXANDER | 2817 | §103 | Non-Final OA | 53d | Pending | Jul 26, 2023 |
| 18224996 | METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS, FOR SEMICONDUCTOR MANUFACTURING | CHOUDHRY, MOHAMMAD M | 2899 | §103 | Non-Final OA | 56d | Pending | Jul 21, 2023 |
| 18224861 | SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS | PHAM, THANHHA S | 2812 | §103 | Final Rejection | — | Pending | Jul 21, 2023 |
| 18224455 | METHOD OF DEPOSITING SILICON BASED DIELECTRIC FILM | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | — | Pending | Jul 20, 2023 |
| 18223184 | SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY | SWEELY, KURT D | 1718 | §103 | Non-Final OA | 28d overdue | Pending | Jul 18, 2023 |
| 18222897 | INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST | CHACKO DAVIS, DABORAH | 1737 | §102 | Non-Final OA | — | Pending | Jul 17, 2023 |
| 18222671 | SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES | LEE, AIDEN Y | 1718 | §103 | Non-Final OA | — | Pending | Jul 17, 2023 |
| 18222979 | Lamp Housing Braze Improvement for Semiconductor Rapid Thermal Processing (RTP) Chamber | THONG, YEONG JUEN | 3761 | §103 | Non-Final OA | — | Pending | Jul 17, 2023 |
| 18353447 | METHODS FOR FORMING MULTI-TIER TUNGSTEN FEATURES | PARKER, JOHN M | 2899 | Other | Non-Final OA | — | Pending | Jul 17, 2023 |
| 18221301 | INTERACTIVE DATA LABELING FOR SUBSTRATE GENERATION PROCESSES | KARTHOLY, REJI P | 2143 | §103 | Non-Final OA | — | Pending | Jul 12, 2023 |
| 18219993 | INTEGRATING STRAIN SiGe CHANNEL PMOS FOR GAA CMOS TECHNOLOGY | NIX, NORA TAYLOR | 2891 | §103 | Non-Final OA | 56d | Pending | Jul 10, 2023 |
| 18218794 | Finger Electrostatic Chuck for High Resistance Substrate Chucking | ADDISU, SARA | 3722 | §103 | Non-Final OA | — | Pending | Jul 06, 2023 |
| 18343351 | INTERFACE TUNING FOR EROSION AND CORROSION RESISTANT COATINGS FOR SEMICONDUCTOR COMPONENTS | WASHVILLE, JEFFREY D | 1766 | §103 | Non-Final OA | — | Pending | Jun 28, 2023 |
| 18215267 | SUBSTRATE POLISH EDGE UNIFORMITY CONTROL WITH SECONDARY FLUID DISPENSE | GUMP, MICHAEL ANTHONY | 3723 | Other | Final Rejection | — | Pending | Jun 28, 2023 |
| 18214745 | Remote Plasma Source and Plasma Processing Chamber Having Same | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Jun 27, 2023 |
| 18214290 | CONTROL OF PLATEN SHAPE IN CHEMICAL MECHANICAL POLISHING | HAWKINS, JASON KHALIL | 3723 | §103 | Final Rejection | — | Pending | Jun 26, 2023 |
| 18212672 | ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Jun 21, 2023 |
| 18212314 | INCREASED ETCH RATES OF SILICON-CONTAINING MATERIALS | CULBERT, ROBERTS P | 1716 | §103 | Final Rejection | — | Pending | Jun 21, 2023 |
| 18336157 | METHOD FOR FORMATION OF CONFORMAL ALD SIO2 FILMS | ROLLAND, ALEX A | 1759 | §103 | Non-Final OA | — | Pending | Jun 16, 2023 |
| 18336036 | EVAPORATION DEVICE AND EVAPORATION METHOD | MOORE, KARLA A | 1716 | §103 | Final Rejection | — | Pending | Jun 16, 2023 |
| 18209649 | SUBSTRATE SUPPORT | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | — | Pending | Jun 14, 2023 |
| 18209348 | IMMERSED PLASMA SOURCE AND PROCESS CHAMBER FOR LARGE AREA SUBSTRATES | OTT, PATRICK S | 1794 | §102 | Non-Final OA | 61d | Pending | Jun 13, 2023 |
| 18209064 | MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING | GUMP, MICHAEL ANTHONY | 3723 | DP | Final Rejection | — | Pending | Jun 13, 2023 |
| 18208685 | SELECTIVE WAVEGUIDE ION IMPLANTATION TO ADJUST LOCAL REFRACTIVE INDEX FOR PHOTONICS | EMPIE, NATHAN H | 1712 | §103 | Non-Final OA | — | Pending | Jun 12, 2023 |
| 18208010 | Integrated Pressure Sensor for Process Chamber Assemblies | HOTCHKISS, MICHAEL WAYNE | 1716 | §103 | Non-Final OA | 83d | Pending | Jun 09, 2023 |
| 18206443 | DIFFERENTIAL SUBSTRATE BACKSIDE COOLING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Jun 06, 2023 |
| 18205262 | MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE | FORDJOUR, SARAH AKYAA | 3723 | §103 | Final Rejection | — | Pending | Jun 02, 2023 |
| 18204805 | METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESISTIVE MATERIALS | EOFF, ANCA | 1722 | §103 | Non-Final OA | — | Pending | Jun 01, 2023 |
| 18327051 | IMPLANT SCHEME TO IMPROVE HIGH ELECTRON MOBILITY TRANSISTOR CONTACT RESISTANCE | KIM, JAY C | 2815 | §112 | Non-Final OA | 42d | Pending | May 31, 2023 |
| 18202335 | MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT | OTT, PATRICK S | 1794 | §103 | Final Rejection | — | Pending | May 26, 2023 |
| 18201921 | GENERATING SYNTHETIC MICROSPY IMAGES OF SUBSTRATES | EDWARDS, ETHAN WESLEY | 2857 | §103 | Final Rejection | — | Pending | May 25, 2023 |
| 18201698 | EDGE RING OR PROCESS KIT FOR SEMICONDUCTOR PROCESS MODULE | KACKAR, RAM N | 1716 | §103 | Final Rejection | — | Pending | May 24, 2023 |
| 18200921 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Non-Final OA | 41d | Pending | May 23, 2023 |
| 18321895 | IN-TOOL AUDIO AND VISUAL BEHAVIOR MONITORING FOR PROCESS CONTROL | CHU, RANDOLPH I | 2667 | §103 | Final Rejection | — | Pending | May 23, 2023 |
| 18320683 | PITCH AND ORIENTATION UNIFORMITY FOR NANOIMPRINT STAMP FORMATION | ZIMMERMAN, JOSHUA D | 2853 | §103 | Non-Final OA | 70d | Pending | May 19, 2023 |
| 18319876 | EPITAXIAL SILICON CHANNEL GROWTH | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Non-Final OA | 46d overdue | Pending | May 18, 2023 |
| 18199183 | Three-Dimensional Vertical Interconnect Architecture and Methods For Forming | GREEN, TELLY D | 2898 | §103 | Non-Final OA | — | Pending | May 18, 2023 |
| 18198123 | SENSOR FOR MEASUREMENT OF RADICALS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | May 16, 2023 |
| 18198043 | MEMORY DEVICE WITH HIGH-MOBILITY OXIDE SEMICONDUCTOR CHANNEL AND METHODS FOR FORMING THE SAME | GREWAL, HEIM KIRIN | 2812 | §103 | Final Rejection | 29d | Pending | May 16, 2023 |
| 18144836 | DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL WITH IMPROVED RESOLUTION | OSENBAUGH-STEWART, ELIZA W | 2881 | §103 | Non-Final OA | — | Pending | May 08, 2023 |
| 18142654 | LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS | KACKAR, RAM N | 1716 | Other | Non-Final OA | 41d | Pending | May 03, 2023 |
| 18141177 | HYBRID WAFER DICING APPROACH USING A RECTANGULAR LASER SPOT-BASED LASER SCRIBING PROCESS AND PLASMA ETCH PROCESS | OZDEN, ILKER NMN | 2812 | §103 | Non-Final OA | — | Pending | Apr 28, 2023 |
| 18309314 | SUBSTRATE CLEANING IMPROVEMENT | POON, DANA LEE | 3723 | §103 | Final Rejection | — | Pending | Apr 28, 2023 |
| 18308776 | EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS | LUND, JEFFRIE ROBERT | 1716 | §103 | Non-Final OA | — | Pending | Apr 28, 2023 |
| 18309669 | LOW-ENERGY UNDERLAYER FOR ROOM TEMPERATURE PHYSICAL VAPOR DEPOSITION OF ELECTRICALLY CONDUCTIVE FEATURES | SLUTSKER, JULIA | 2891 | §112 | Final Rejection | — | Pending | Apr 28, 2023 |
| 18140155 | METHODS AND MECHANISMS FOR DAMPING VIBRATIONS IN SUBSTRATE TRANSFER SYSTEMS | MARU, TEMESGEN MALLEDE | 3655 | §102 | Final Rejection | 117d overdue | Pending | Apr 27, 2023 |
| 18140508 | GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND RELATED APPARATUS AND METHODS | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 27d | Pending | Apr 27, 2023 |
| 18140207 | EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH RATE AND UNIFORMITY | QI, HUA | 1714 | §103 | Non-Final OA | 41d | Pending | Apr 27, 2023 |
| 18139699 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS | ANDREWS, FELIX BRYAN | 2812 | §103 | Final Rejection | 170d overdue | Pending | Apr 26, 2023 |
| 18139121 | HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | 30d overdue | Pending | Apr 25, 2023 |
| 18139057 | ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | 79d overdue | Pending | Apr 25, 2023 |
| 18305852 | HIGH-DENSITY MICRO-LED ARRAYS WITH REFLECTIVE SIDEWALLS | MUSE, ISMAIL A | 2812 | §103 | Final Rejection | 15d | Pending | Apr 24, 2023 |
| 18138396 | Elastomer Bonded Door For Vacuum Systems | LEE, GILBERT Y | 3675 | §103 | Final Rejection | — | Pending | Apr 24, 2023 |
| 18304626 | PROCESS FOR THIN ELECTROLESS DEPOSITION | SMITH, BRADLEY | 2817 | §103 | Final Rejection | — | Pending | Apr 21, 2023 |
| 18136970 | HYBRID MOLYBDENUM FILL SCHEME FOR LOW RESISTIVITY SEMICONDUCTOR APPLICATIONS | PARKER, JOHN M | 2899 | §103 | Final Rejection | 73d overdue | Pending | Apr 20, 2023 |
| 18303318 | PROCESSING KIT SHIELD | BRAYTON, JOHN JOSEPH | 1794 | §103 | Non-Final OA | 12d | Pending | Apr 19, 2023 |
| 18135434 | COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTAINING MATERIALS | MAYY, MOHAMMAD | 1718 | DP | Non-Final OA | 2d overdue | Pending | Apr 17, 2023 |
| 18300280 | METHODS FOR FORMING MULTI-TIER TUNGSTEN FEATURES | TRAN, TONY | 2893 | §103 | Non-Final OA | — | Pending | Apr 13, 2023 |
| 18298223 | PLATING SEAL WITH IMPROVED SURFACE | WITTENBERG, STEFANIE S | 1795 | §103 | Final Rejection | — | Pending | Apr 10, 2023 |
| 18131534 | ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS | BENNETT, CHARLEE | 1718 | §103 | Final Rejection | — | Pending | Apr 06, 2023 |
| 18130491 | USING DEEP REINFORCEMENT LEARNING FOR TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM | MONTES, NARCISO EDUARDO | — | §102 | Non-Final OA | — | Pending | Apr 04, 2023 |
| 18128124 | CERAMIC SYNTHESIS THROUGH SURFACE COATING OF POWDERS | GAMBETTA, KELLY M | 1718 | §103 | Final Rejection | — | Pending | Mar 29, 2023 |
| 18192573 | DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHANICAL, AND ETCH CHARACTERISTICS | JEFFERSON, QUOVAUNDA | 2899 | §102 | Non-Final OA | 9d | Pending | Mar 29, 2023 |
| 18190970 | THERMAL PROCESSING CHAMBER STATE BASED ON THERMAL SENSOR READINGS | LAZO, THOMAS E | 3745 | §103 | Non-Final OA | — | Pending | Mar 28, 2023 |
| 18191710 | DIGITAL SIMULATION FOR SEMICONDUCTOR MANUFACTURING PROCESSES | TAN, ALVIN H | 2118 | §103 | Non-Final OA | — | Pending | Mar 28, 2023 |
| 18125215 | SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPROVEMENT | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | — | Pending | Mar 23, 2023 |
| 18124674 | MULTI-VT INTEGRATION SCHEME FOR SEMICONDUCTOR DEVICES | LINDSEY, COLE LEON | 2812 | §103 | Final Rejection | — | Pending | Mar 22, 2023 |
| 18185638 | TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING ANGLED ION BEAMS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Mar 17, 2023 |
| 18186091 | MEMORY STRUCTURE WITH 4F2 OPTIMIZED CELL LAYOUT | QUINTO, KEVIN V | 2893 | §103 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18123085 | RESIST MODELING METHOD FOR ANGLED GRATINGS | LIN, ARIC | 2851 | §112 | Non-Final OA | 2d overdue | Pending | Mar 17, 2023 |
| 18122530 | PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOELECTRIC GENERATORS FOR ENERGY HARNESSING | SWEELY, KURT D | 1718 | §103 | Final Rejection | 27d | Pending | Mar 16, 2023 |
| 18119080 | METHODS OF FORMING METAL LINER FOR INTERCONNECT STRUCTURES | JUNG, MICHAEL YOO LIM | 2800 | §112 | Final Rejection | — | Pending | Mar 08, 2023 |
| 18175538 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | LINDSAY, BERNARD G | 2119 | §103 | Non-Final OA | 6d | Pending | Feb 28, 2023 |
| 18115561 | SELECTIVE VIA-FILL WITH CONFORMAL SIDEWALL COVERAGE | LUKE, DANIEL M | 2896 | §103 | Final Rejection | — | Pending | Feb 28, 2023 |
| 18115269 | PROCESSING METHODS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS | ALANKO, ANITA KAREN | 1713 | DP | Final Rejection | — | Pending | Feb 28, 2023 |
| 18175344 | TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL | RODRIGUEZ, JOSEPH C | 3653 | §103 | Non-Final OA | — | Pending | Feb 27, 2023 |
| 18174534 | DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERATURE SURFACES | JOERGER, KAITLIN S | 3655 | §103 | Final Rejection | 34d | Pending | Feb 24, 2023 |
| 18173683 | METHODS OF REDUCING OR ELIMINATING DEPOSITS IN AN ELECTROPLATING SYSTEM | WITTENBERG, STEFANIE S | 1795 | §103 | Final Rejection | — | Pending | Feb 23, 2023 |
| 18112252 | TREATMENTS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS | ALANKO, ANITA KAREN | 1713 | DP | Final Rejection | — | Pending | Feb 21, 2023 |
| 18171119 | SILICON SUPER JUNCTION STRUCTURES FOR INCREASED THROUGHPUT | RAHIM, NILUFA | 2893 | §103 | Final Rejection | 21d | Pending | Feb 17, 2023 |
| 18170335 | PHYSICAL LAYOUT SYNTHESIS FOR STANDARD CELLS USING SLICE LAYOUTS | GARBOWSKI, LEIGH M | 2851 | §103 | Final Rejection | 24d overdue | Pending | Feb 16, 2023 |
| 18169065 | APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS | OTT, PATRICK S | 1794 | §103 | Final Rejection | — | Pending | Feb 14, 2023 |
| 18108427 | In-situ gasket formation | LEE, GILBERT Y | 3675 | §103 | Non-Final OA | 27d | Pending | Feb 10, 2023 |
| 18107819 | System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter | TANDY, LAURA ELOISE | 2881 | §103 | Final Rejection | 43d overdue | Pending | Feb 09, 2023 |
| 18106981 | PLASMA PROCESSING IMPROVEMENT | ALEJANDRO MULERO, LUZ L | 1716 | §102 | Non-Final OA | — | Pending | Feb 07, 2023 |
| 18163766 | HIGH-PRECISION AND HIGH-THROUGHPUT MEASUREMENT OF PERCENTAGE LIGHT LOSS OF OPTICAL DEVICES | AMARA, MOHAMED K | 2877 | §103 | Non-Final OA | 2d overdue | Pending | Feb 02, 2023 |
| 18103850 | SCALED LINER LAYER FOR ISOLATION STRUCTURE | FREY, KIMBERLY NEWMAN | 2817 | §103 | Non-Final OA | — | Pending | Jan 31, 2023 |
| 18019054 | TOOL DRIFT COMPENSATION WITH MACHINE LEARNING | PARK, HYUN D | 2857 | §103 | Final Rejection | — | Pending | Jan 31, 2023 |
| 18162074 | SUBSTRATE PROCESSING FOR AlN AND GaN POLARITY CONTROL | CHUNG, ANDREW | 2898 | §103 | Final Rejection | 50d overdue | Pending | Jan 31, 2023 |
| 18101932 | SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 30d overdue | Pending | Jan 26, 2023 |
| 18160274 | METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMBER PLACEMENT VIA IMAGING | XING, CHRISTINA ILONA | 2877 | §103 | Final Rejection | 91d overdue | Pending | Jan 26, 2023 |
| 18160109 | SURGING FLOW FOR BUBBLE CLEARING IN ELECTROPLATING SYSTEMS | WITTENBERG, STEFANIE S | 1795 | §103 | Final Rejection | — | Pending | Jan 26, 2023 |
| 18159222 | APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS | NGUYEN, LAUREN | 2871 | §103 | Final Rejection | 40d | Pending | Jan 25, 2023 |
| 18159208 | APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS | OLIVA, STEPHANIE RENEE | 3761 | §103 | Non-Final OA | — | Pending | Jan 25, 2023 |
| 18100978 | METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITAXIAL PROCESS | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | — | Pending | Jan 24, 2023 |
| 18100326 | ADJUSTABLE CROSS-FLOW PROCESS CHAMBER LID | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Jan 23, 2023 |
| 18006259 | METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOGRAPHY WITH AUXILIARY FEATURES | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | — | Pending | Jan 20, 2023 |
| 18157714 | DIFFUSION BONDING OF PURE METAL BODIES | GAMINO, CARLOS J | 1735 | §103 | Non-Final OA | — | Pending | Jan 20, 2023 |
| 18098791 | DRY ETCH OF BORON-CONTAINING MATERIAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 29d | Pending | Jan 19, 2023 |
| 18099210 | SUBSTRATE SUPPORT CARRIER HAVING MULTIPLE CERAMIC DISCS | ADDISU, SARA | 3722 | §103 | Non-Final OA | 83d | Pending | Jan 19, 2023 |
| 18098547 | SUBSTRATE MODIFICATION FOR SUPERLATTICE CRITICAL THICKNESS IMPROVEMENT | RONO, VINCENT KIPKEMOI | 2891 | §103 | Final Rejection | 61d | Pending | Jan 18, 2023 |
| 18096533 | PROCESS CHAMBER HAVING SHUTTER COVER FOR SUBSTRATE UNIFORMITY AND PREVENTION OF UNINTENDED DEPOSITION | KURPLE, KARL | 1717 | §103 | Final Rejection | — | Pending | Jan 12, 2023 |
| 18094765 | CHAMBERS, METHODS, AND APPARATUS FOR GENERATING ATOMIC RADICALS USING UV LIGHT | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 55d | Pending | Jan 09, 2023 |
| 18093648 | HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS | TURNER, BRIAN | 2818 | §103 | Non-Final OA | 84d | Pending | Jan 05, 2023 |
| 18093121 | CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 24d overdue | Pending | Jan 04, 2023 |
| 18091552 | Methods and Apparatus for Processing a Substrate | OTT, PATRICK S | 1794 | §103 | Final Rejection | — | Pending | Dec 30, 2022 |
| 18091525 | STAMP TREATMENT TO GUIDE SOLVENT REMOVAL DIRECTION AND MAINTAIN CRITICAL DIMENSION | MALIK, VIPUL | 1754 | §103 | Non-Final OA | 33d | Pending | Dec 30, 2022 |
| 18088889 | TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING | LAW, NGA LEUNG V | 1717 | §103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18088417 | Metallic Shield For Stable Tape-Frame Substrate Processing | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Dec 23, 2022 |
| 18087255 | SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION | WARD, THOMAS JOHN | 3761 | §103 | Non-Final OA | — | Pending | Dec 22, 2022 |
| 18087641 | MACHINE AND DEEP LEARNING TECHNIQUES FOR PREDICTING ECOLOGICAL EFFICIENCY IN SUBSTRATE PROCESSING | TRAN, VI N | 2117 | §103 | Non-Final OA | — | Pending | Dec 22, 2022 |
| 18083372 | FAST GAS SWITCHING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Dec 16, 2022 |
| 18065742 | Gas Distribution Apparatuses | ZERVIGON, RUDY | 1716 | §102 | Non-Final OA | 22d | Pending | Dec 14, 2022 |
| 18080884 | SEMICONDUCTOR CHAMBER COATINGS AND PROCESSES | ZHANG, HAI Y | 1717 | §103 | Final Rejection | — | Pending | Dec 14, 2022 |
| 18077809 | TWO STEP IMPLANT TO IMPROVE LINE EDGE ROUGHNESS AND LINE WIDTH ROUGHNESS | OTT, PATRICK S | 1794 | DPOther | Final Rejection | — | Pending | Dec 08, 2022 |
| 18077087 | REDUCTION OF BR2 AND CL2 IN SEMICONDUCTOR PROCESSES | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | — | Pending | Dec 07, 2022 |
| 18075216 | SEMICONDUCTOR FILM THICKNESS PREDICTION USING MACHINE-LEARNING | BAKER, EZRA JAMES | 2126 | §103 | Final Rejection | 16d | Pending | Dec 05, 2022 |
| 18074385 | Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Dec 02, 2022 |
| 18074197 | MULTI-PULSE DEPOSITION PROCESSES | GATES, BRADFORD M | 1713 | §103 | Final Rejection | — | Pending | Dec 02, 2022 |
| 18070010 | GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | 70d | Pending | Nov 28, 2022 |
| 17989767 | METHODS OF REMOVING METAL OXIDE USING CLEANING PLASMA | WEDDLE, ALEXANDER MARION | 1712 | §103 | Non-Final OA | — | Pending | Nov 18, 2022 |
| 17989961 | CHEMICAL INK FLOW STOPPER | ROLLAND, ALEX A | 1759 | §103 | Non-Final OA | — | Pending | Nov 18, 2022 |
| 17990536 | SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE | BAND, MICHAEL A | 1794 | §103 | Final Rejection | 56d | Pending | Nov 18, 2022 |
| 17988083 | METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | — | Pending | Nov 16, 2022 |
| 17980900 | MULTIPROCESS SUBSTRATE TREATMENT FOR ENHANCED SUBSTRATE DOPING | GREWAL, HEIM KIRIN | 2812 | §103 | Non-Final OA | — | Pending | Nov 04, 2022 |
| 17980850 | METHODS TO FORM METAL LINERS FOR INTERCONNECTS | LUKE, DANIEL M | 2896 | §112 | Final Rejection | — | Pending | Nov 04, 2022 |
| 17980905 | PLASMA ASSISTED DAMAGE ENGINEERING DURING ION IMPLANTATION | CHEN, JACK S J | 2893 | §103 | Non-Final OA | — | Pending | Nov 04, 2022 |
| 17977019 | METHOD FOR FABRICATING CHAMBER PARTS | RUMMEL, JULIA L | 1784 | §112 | Final Rejection | — | Pending | Oct 31, 2022 |
| 17975195 | EPI OVERLAPPING DISK AND RING | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 17d overdue | Pending | Oct 27, 2022 |
| 17974385 | PIXEL DEFINING ENCAPSULATING BARRIER FOR RGB COLOR PATTERNING | MANDALA, MICHELLE | 2893 | §102 | Final Rejection | 42d | Pending | Oct 26, 2022 |
| 17973927 | OXIDATION ENHANCED DOPING | JEFFERSON, QUOVAUNDA | 2899 | §103 | Final Rejection | 72d | Pending | Oct 26, 2022 |
| 17971338 | HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY | TRAN-LE, THAO UYEN | 3761 | §103 | Final Rejection | — | Pending | Oct 21, 2022 |
| 18046872 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103 | Non-Final OA | 28d | Pending | Oct 14, 2022 |
| 17961516 | ACOUSTIC MONITORING OF CMP RETAINING RING | SOTO, CHRISTOPHER ASHLEY | 3723 | §103 | Non-Final OA | 22d | Pending | Oct 06, 2022 |
| 17961153 | METHODS FOR REMOVING MOLYBDENUM OXIDES FROM SUBSTRATES | CAMPBELL, NATASHA N. | 1714 | §103 | Final Rejection | — | Pending | Oct 06, 2022 |
| 17955185 | MULTILAYER METASURFACE ARCHITECTURES WITH IMPEDANCE MATCHING | RAKOWSKI, CARA E | 2872 | §103 | Non-Final OA | — | Pending | Sep 28, 2022 |
| 17954100 | PARTIALLY METALLIZED GRATING AS HIGH-PERFORMANCE WAVEGUIDE INCOUPLER | TRAN, HOANG Q | 2874 | §103 | Final Rejection | 15d | Pending | Sep 27, 2022 |
| 17953630 | METHODS AND MATERIALS FOR MAKING ELASTOMER RESISTANT TO DEGRADATION BY ULTRAVIOLET RADIATION AND PLASMA | LEE JR, WOODY A | 3761 | §103 | Non-Final OA | — | Pending | Sep 27, 2022 |
| 17950946 | PLASMA-ENHANCED MOLYBDENUM DEPOSITION | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | — | Pending | Sep 22, 2022 |
| 17949292 | RAINBOW FREE WAVEGUIDE COMBINER | SANZ, GABRIEL A | 2872 | §103 | Final Rejection | — | Pending | Sep 21, 2022 |
| 17946947 | BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Sep 16, 2022 |
| 17943759 | HEXAGONAL BORON NITRIDE DEPOSITION | LOUIE, MANDY C | 1718 | §103 | Final Rejection | — | Pending | Sep 13, 2022 |
| 17941347 | FLUORINE-DOPED SILICON-CONTAINING MATERIALS | STEVENSON, ANDRE C | 2899 | §103 | Final Rejection | — | Pending | Sep 09, 2022 |
| 17903892 | CONTROLLED DELIVERY OF LOW-VAPOR-PRESSURE PRECURSOR INTO A CHAMBER | LOUIE, MANDY C | 1718 | §103 | Final Rejection | — | Pending | Sep 06, 2022 |
| 17903916 | ROBOT ARM TRAJECTORY CONTROL | SINGH, ESVINDER | 3657 | §103 | Final Rejection | 8d overdue | Pending | Sep 06, 2022 |
| 17902551 | SiC MOSFET Including Trench with Rounded Corners | DEGRASSE, IAN ISAAC | 2818 | §103 | Final Rejection | — | Pending | Sep 02, 2022 |
| 17896716 | ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS | SLUTSKER, JULIA | 2891 | §103 | Final Rejection | 6d | Pending | Aug 26, 2022 |
| 17822009 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Final Rejection | 13d | Pending | Aug 24, 2022 |
| 17801818 | PROCESSES FOR IMPROVING THIN-FILM ENCAPSULATION | SENGDARA, VONGSAVANH | 2893 | §103 | Non-Final OA | — | Pending | Aug 24, 2022 |
| 17893018 | GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 4d overdue | Pending | Aug 22, 2022 |
| 17891923 | INTEGRATED DIPOLE REGION FOR TRANSISTOR | WILCZEWSKI, MARY A | 2898 | §112 | Non-Final OA | 11d overdue | Pending | Aug 19, 2022 |
| 17886353 | ON WAFER DIMENSIONALITY REDUCTION | HICKS, AUSTIN JAMES | 2142 | §103 | Final Rejection | 2d overdue | Pending | Aug 11, 2022 |
| 17886102 | STIFFENER FRAME FOR SEMICONDUCTOR DEVICE PACKAGES | PETERSON, ERIK T | 2898 | §103 | Non-Final OA | — | Pending | Aug 11, 2022 |
| 17884462 | PIECEWISE FUNCTIONAL FITTING OF SUBSTRATE PROFILES FOR PROCESS LEARNING | TSENG, KYLE HWA-KAI | 2189 | §103 | Final Rejection | — | Pending | Aug 09, 2022 |
| 17880335 | SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 26d | Pending | Aug 03, 2022 |
| 17874627 | MINIMIZING SUBSTRATE BOW DURING POLISHING | HUANG, STEVEN | 3723 | §103 | Final Rejection | 6d | Pending | Jul 27, 2022 |
| 17873284 | METHODS AND APPARATUS FOR MINIMIZING VOIDS FOR CHIP ON WAFER COMPONENTS | WINTERS, SEAN AYERS | 2892 | §103 | Final Rejection | — | Pending | Jul 26, 2022 |
| 17873842 | ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL | EVANGELISTA, THEODORE JUSTINE | 3761 | §103 | Final Rejection | — | Pending | Jul 26, 2022 |
| 17866399 | FULLY SELF ALIGNED VIA INTEGRATION PROCESSES | LEE, DA WEI | 2817 | §103 | Non-Final OA | — | Pending | Jul 15, 2022 |
| 17863647 | SILICIDES, ALLOYS AND INTERMETALLICS TO MINIMIZE RESISTANCE | KHALIFA, MOATAZ | 2815 | §103 | Final Rejection | — | Pending | Jul 13, 2022 |
| 17858006 | ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL POLISHING AND METHODS OF FORMING PADS | ZAWORSKI, JONATHAN R | 3723 | §103 | Final Rejection | 42d overdue | Pending | Jul 05, 2022 |
| 17810466 | MULTI STACK OPTICAL ELEMENTS USING TEMPORARY AND PERMANENT BONDING | LI, MEIYA | 2811 | §103 | Non-Final OA | 29d | Pending | Jul 01, 2022 |
| 17855520 | COUPLING OF ACOUSTIC SENSOR FOR CHEMICAL MECHANICAL POLISHING | MCFARLAND, TYLER JAMES | 3723 | §103 | Non-Final OA | — | Pending | Jun 30, 2022 |
| 17854456 | CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS | BAUMAN, SCOTT E | 2815 | §103 | Final Rejection | — | Pending | Jun 30, 2022 |
| 17845356 | DOPED TANTALUM-CONTAINING BARRIER FILMS | OH, JIYOUNG | 2818 | §103 | Final Rejection | — | Pending | Jun 21, 2022 |
| 17842666 | STACKABLE PLASMA SOURCE FOR PLASMA PROCESSING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Jun 16, 2022 |
| 17835730 | HIGH-EFFICIENCY RF REMOTE PLASMA SOURCE APPARATUS | SWEELY, KURT D | 1718 | §103 | Non-Final OA | — | Pending | Jun 08, 2022 |
| 17831781 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | — | Pending | Jun 03, 2022 |
| 17751955 | MODEL-BASED PARAMETER ADJUSTMENTS FOR DEPOSITION PROCESSES | RUFO, LOUIS J | 1795 | §103 | Final Rejection | — | Pending | May 24, 2022 |
| 17750295 | TEMPERATURE TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK | PAIK, SANG YEOP | 3761 | §103 | Final Rejection | — | Pending | May 20, 2022 |
| 17747978 | BARRIER LAYER FOR PREVENTING ALUMINUM DIFFUSION | SEHAR, FAKEHA | 2893 | §103 | Final Rejection | — | Pending | May 18, 2022 |
| 17737665 | AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES | RETEBO, METASEBIA T | 2842 | §103 | Non-Final OA | 28d overdue | Pending | May 05, 2022 |
| 17736843 | DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES | JUNG, MICHAEL YOO LIM | 2817 | §103 | Non-Final OA | — | Pending | May 04, 2022 |
| 17735830 | PROCESS INTEGRATION TO REDUCE CONTACT RESISTANCE IN SEMICONDUCTOR DEVICE | CHEEK, EDWARD RHETT | 2813 | §103 | Non-Final OA | — | Pending | May 03, 2022 |
| 17735021 | Chemical Mechanical Polishing With Die-Based Modification | POON, DANA LEE | 3723 | §103 | Final Rejection | — | Pending | May 02, 2022 |
| 17768799 | VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CONTROL ASSEMBLY, AND METHOD OF CONTROLLING PARTIAL PRESSURE OF A GAS IN A VACUUM PROCESSING CHAMBER | KITT, STEPHEN A | 1717 | §103 | Non-Final OA | — | Pending | Apr 13, 2022 |
| 17714513 | INTEGRATED CLEANING AND SELECTIVE MOLYBDENUM DEPOSITION PROCESSES | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | — | Pending | Apr 06, 2022 |
| 17700203 | ELECTROSTATIC CHUCK WITH LASER-MACHINED MESAS | KIRKWOOD, SPENCER HAMMETT | 3761 | §103 | Non-Final OA | — | Pending | Mar 21, 2022 |
| 17697058 | NUCLEATION LAYERS FOR GROWTH OF GALLIUM-AND-NITROGEN-CONTAINING REGIONS | SLUTSKER, JULIA | 2891 | §103 | Non-Final OA | — | Pending | Mar 17, 2022 |
| 17695619 | UNIFORM RADIATION HEATING CONTROL ARCHITECTURE | MIRABITO, MICHAEL PAUL | 2187 | §103 | Non-Final OA | 71d | Pending | Mar 15, 2022 |
| 17693037 | SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 30d overdue | Pending | Mar 11, 2022 |
| 17641365 | HIGH DENSITY PLASMA CVD FOR DISPLAY ENCAPSULATION APPLICATION | TYNES JR., LAWRENCE C | 2899 | §112 | Non-Final OA | — | Pending | Mar 08, 2022 |
| 17673511 | CONTROLLED PROFILE POLISHING PLATEN | MCFARLAND, TYLER JAMES | 3723 | §103 | Non-Final OA | 13d | Pending | Feb 16, 2022 |
| 17673538 | OPTICAL DEVICE FILM WITH TUNABLE REFRACTIVE INDEX | BOURQUINE, MACKENZI TATE | 2872 | §103 | Non-Final OA | 30d | Pending | Feb 16, 2022 |
| 17671235 | LED TRANSFER MATERIALS AND PROCESSES | ASSOUMAN, HERVE-LOUIS Y | 2800 | §103 | Final Rejection | — | Pending | Feb 14, 2022 |
| 17630492 | PEDESTAL WITH MULTI-ZONE HEATING | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | — | Pending | Jan 26, 2022 |
| 17566584 | UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION | SWEELY, KURT D | 1718 | §103 | Non-Final OA | 8d | Pending | Dec 30, 2021 |
| 17561085 | BASE PLATE FOR HEATER PEDESTAL | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Dec 23, 2021 |
| 17554596 | ADAPTIVE SLURRY DISPENSE SYSTEM | SHECHTMAN, SEAN P | 2896 | §102 | Non-Final OA | 28d | Pending | Dec 17, 2021 |
| 17549703 | METHOD TO MEASURE RADICAL ION FLUX USING A MODIFIED PIRANI VACUUM GAUGE ARCHITECTURE | SWEELY, KURT D | 1718 | §103 | Non-Final OA | — | Pending | Dec 13, 2021 |
| 17541582 | METHODS FOR FORMING WORK FUNCTION MODULATING LAYERS | ISAAC, STANETTA D | 2898 | §103 | Non-Final OA | — | Pending | Dec 03, 2021 |
| 17457597 | APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT RESISTANCE | BAUMAN, SCOTT E | 2815 | §103 | Final Rejection | 32d overdue | Pending | Dec 03, 2021 |
| 17537314 | METHOD AND APPARATUS FOR REALTIME WAFER POTENTIAL MEASUREMENT IN A PLASMA PROCESSING CHAMBER | MOORE, KARLA A | 1716 | §103 | Final Rejection | 32d overdue | Pending | Nov 29, 2021 |
| 17534287 | VAPOR DEPOSITION OF CARBON-DOPED METAL OXIDES FOR USE AS PHOTORESISTS | WEDDLE, ALEXANDER MARION | 1712 | §103 | Final Rejection | — | Pending | Nov 23, 2021 |
| 17455197 | RING FOR SUBSTRATE EXTREME EDGE PROTECTION | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Nov 16, 2021 |
| 17496242 | METHODS AND APPARATUS FOR CELL AND GENE THERAPY AT POINT-OF-CARE LOCATION | TRAN, JULIE THI | 3791 | §103 | Non-Final OA | 26d | Pending | Oct 07, 2021 |
| 17495140 | TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM | MIRABITO, MICHAEL PAUL | 2187 | §103 | Final Rejection | 27d | Pending | Oct 06, 2021 |
| 17463966 | INTEGRATED EPITAXY AND PRECLEAN SYSTEM | SWEELY, KURT D | 1718 | §103 | Final Rejection | 19d | Pending | Sep 01, 2021 |
| 17380788 | FACE-UP WAFER EDGE POLISHING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 14d | Pending | Jul 20, 2021 |
| 17379707 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103 | Non-Final OA | 28d | Pending | Jul 19, 2021 |
| 17371441 | METHOD FOR DEPOSITION OF DEPTH-VARYING REFRACTIVE INDEX FILMS | SIPES, JOHN CURTIS | 2872 | §102 | Non-Final OA | 55d | Pending | Jul 09, 2021 |
| 17365919 | METHOD OF DEPOSITING METAL FILMS | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | — | Pending | Jul 01, 2021 |
| 17330096 | DYNAMIC ACTIVATION SPARSITY IN NEURAL NETWORKS | BASOM, BLAINE T | 2141 | §103 | Final Rejection | — | Pending | May 25, 2021 |
| 17325364 | FOURIER FILTERING OF SPECTRAL DATA FOR MEASURING LAYER THICKNESS DURING SUBSTRATE PROCESSING | FORDJOUR, SARAH AKYAA | 3723 | §103 | Non-Final OA | — | Pending | May 20, 2021 |
| 17318166 | HIGH MOBILITY SEMICONDUCTOR CHANNEL BASED THIN-FILM TRANSISTORS AND MANUFACTURING METHODS | WIEGAND, TYLER J | 2812 | §103 | Final Rejection | 79d | Pending | May 12, 2021 |
| 17244752 | SUBSTRATE SUPPORT APPARATUS, METHODS, AND SYSTEMS HAVING ELEVATED SURFACES FOR HEAT TRANSFER | SWEELY, KURT D | 1718 | §112 | Non-Final OA | — | Pending | Apr 29, 2021 |
| 17223351 | STACK FOR 3D-NAND MEMORY CELL | BELL, LAUREN R | 2896 | §103 | Final Rejection | — | Pending | Apr 06, 2021 |
| 17204428 | Pedestal Geometry for Fast Gas Exchange | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | — | Pending | Mar 17, 2021 |
| 17186594 | SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES | LUND, JEFFRIE ROBERT | 1716 | §103 | Final Rejection | 38d overdue | Pending | Feb 26, 2021 |
| 17174732 | CHAMBER INTERFACE FOR LINKED PROCESSING TOOLS | KURPLE, KARL | 1717 | §103 | Final Rejection | — | Pending | Feb 12, 2021 |
| 17166965 | HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES | RAMESH, TIRUMALE K | 2121 | §103 | Non-Final OA | — | Pending | Feb 03, 2021 |
| 17142641 | DOPED SILICON NITRIDE FOR 3D NAND | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 12d | Pending | Jan 06, 2021 |
| 17099454 | APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION | QI, HUA | 1714 | §103 | Final Rejection | 12d | Pending | Nov 16, 2020 |
| 17084962 | CRESTED BARRIER DEVICE ENHANCED WITH INTERFACE SWITCHING MODULATION | NGUYEN, TRI T | 2128 | §103 | Final Rejection | — | Pending | Oct 30, 2020 |
| 17081773 | SURFACE ENCASING MATERIAL LAYER | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | 33d | Pending | Oct 27, 2020 |
| 17046975 | EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL | CHEN, KEATH T | 1716 | §103 | Final Rejection | 86d overdue | Pending | Oct 12, 2020 |
| 17064389 | MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | — | Pending | Oct 06, 2020 |
| 17063824 | LOW CURRENT HIGH ION ENERGY PLASMA CONTROL SYSTEM | ALEJANDRO MULERO, LUZ L | 1716 | §112 | Final Rejection | 9d | Pending | Oct 06, 2020 |
| 17063366 | BEVEL BACKSIDE DEPOSITION ELIMINATION | REYES, JOSHUA NATHANIEL PI | 1718 | §102 | Non-Final OA | — | Pending | Oct 05, 2020 |
| 17033201 | METHODS TO FABRICATE 2D WEDGE AND LOCALIZED ENCAPSULATION FOR DIFFRACTIVE OPTICS | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 41d | Pending | Sep 25, 2020 |
| 17019061 | ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 58d overdue | Pending | Sep 11, 2020 |
| 16971239 | SYSTEMS AND METHODS OF FORMATION OF A METAL HARDMASK IN DEVICE FABRICATION | MELLOTT, JAMES M | 1759 | §103 | Non-Final OA | 56d | Pending | Aug 19, 2020 |
| 16922931 | MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM | MOORE, KARLA A | 1716 | §112 | Non-Final OA | 28d | Pending | Jul 07, 2020 |
| 16898244 | CLEAN UNIT FOR CHAMBER EXHAUST CLEANING | ALEJANDRO MULERO, LUZ L | 1716 | DPOther | Final Rejection | 70d | Pending | Jun 10, 2020 |
| 16831664 | SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING | DION, MARCEL T | 3723 | §103 | Final Rejection | 38d overdue | Pending | Mar 26, 2020 |
| 16134200 | SYSTEMS AND PROCESSES FOR PLASMA TUNING | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 142d overdue | Pending | Sep 18, 2018 |
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