Prosecution Insights
Prosecution Insights
429 pending office actions • 100 art units • 285 examiners • 0 of 429 (0%) have an AI response strategy ready • 800 patents granted in the last 365 days
Based on the USPTO statutory response window for each pending office action. 418 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 418 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 2 (0%) |
| §103 only | 370 (86%) |
| §102 only | 23 (5%) |
| §112 only | 15 (3%) |
| Double-patenting + other | 1 (0%) |
| No statute on record | 18 (4%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| ZERVIGON, RUDY | 8 | 66.3% | -6.0% |
| CHAN, LAUREEN | 7 | 58.1% | +54.7% |
| NUCKOLS, TIFFANY Z | 7 | 44.0% | +40.0% |
| BENNETT, CHARLEE | 6 | 57.6% | +36.1% |
| KACKAR, RAM N | 6 | 39.4% | +59.0% |
| MOORE, KARLA A | 6 | 43.1% | +14.5% |
| MCDONALD, RODNEY GLENN | 5 | 63.0% | +24.5% |
| BERGNER, ERIN FLANAGAN | 5 | 76.7% | +31.4% |
| KLUNK, MARGARET D | 5 | 43.7% | +30.6% |
| LU, JIONG-PING | 5 | 83.5% | +7.8% |
Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 5 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18481904 | SELECTIVE HARDMASK ETCH FOR SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 15d overdue |
| 18221505 | CYCLIC ETCH OF SILICON OXIDE AND SILICON NITRIDE | LU, JIONG-PING | 21d |
| 18234685 | PLASMA ETCHING IN SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 27d |
| 18364249 | DOPED DIAMOND-LIKE CARBON | LU, JIONG-PING | 34d |
| 18602986 | PRIME STEP FOR METAL ETCH IN HIGH ASPECT-RATIO FEATURES | LU, JIONG-PING | 42d |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 2 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18740009 | SYSTEM AND METHOD FOR CHAMBER MATCHING USING PHASE-BASED SCORING | WILLOUGHBY, ALICIA M | 2d overdue |
| 18464926 | METHOD AND MATERIAL SYSTEM FOR TUNABLE HYBRID BOND INTERCONNECT RESISTANCE | JUNG, MICHAEL YOO LIM | 22d |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 16718029 | SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS | MOORE, KARLA A | 146d overdue |
| 17984201 | WAFER PROFILING FOR ETCHING SYSTEM | KACKAR, RAM N | 97d overdue |
| 18542158 | CONTROLLED PH RINSE TO LIMIT CROSS-CONTAMINATION IN ELECTROPLATING BATHS | BERGNER, ERIN FLANAGAN | 96d overdue |
| 18370190 | METHODS AND APPARATUS FOR PHOTOMASK PROCESSING | BERGNER, ERIN FLANAGAN | 93d overdue |
| 17874873 | SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS | KLUNK, MARGARET D | 71d overdue |
| 17019061 | ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS | KLUNK, MARGARET D | 58d overdue |
| 18076234 | THERMAL CHOKE PLATE | BENNETT, CHARLEE | 49d overdue |
| 18107157 | Electrostatic Chuck | CHAN, LAUREEN | 43d overdue |
| Art Unit | Apps |
|---|---|
| 1716 | 58 |
| 1718 | 33 |
| 3723 | 30 |
| 1713 | 27 |
| 1794 | 14 |
| 2817 | 10 |
| 2818 | 10 |
| 2877 | 9 |
| 1717 | 9 |
| 2898 | 9 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19225033 | LITHOGRAPHY PROCESSES FOR DUAL DAMASCENE STRUCTURES | ROBINSON, CHANCEITY N | 1737 | §103 | Non-Final OA | 47d | Pending | Jun 02, 2025 |
| 19068301 | PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY | TUROCY, DAVID P | 1718 | §103 | Final Rejection | 91d overdue | Pending | Mar 03, 2025 |
| 19051385 | METAL OXIDE DIRECTIONAL REMOVAL | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 2d overdue | Pending | Feb 12, 2025 |
| 18984643 | GAS DELIVERY SYSTEM | JELLETT, MATTHEW WILLIAM | 3753 | §103 | Non-Final OA | 27d | Pending | Dec 17, 2024 |
| 18971510 | MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | 4d overdue | Pending | Dec 06, 2024 |
| 18968275 | COPPER, INDIUM, GALLIUM, SELENIUM (CIGS) FILMS WITH IMPROVED QUANTUM EFFICIENCY | WHITE, SADIE | 1721 | §103 | Non-Final OA | 61d | Pending | Dec 04, 2024 |
| 18949472 | Novel arc management algorithm of RF generator and Match box for CCP plasma Chambers | LEE, WILSON | 2844 | §103 | Non-Final OA | 15d | Pending | Nov 15, 2024 |
| 18828801 | METHOD TO DETERMINE LINE ANGLE AND ROTATION OF MULTIPLE PATTERNING | AKANBI, ISIAKA O | 2877 | Other | Non-Final OA | 29d overdue | Pending | Sep 09, 2024 |
| 18813502 | PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY | GOLDEN, CHINESSA T | 1788 | §103 | Non-Final OA | 3d overdue | Pending | Aug 23, 2024 |
| 18809681 | DUAL MANUFACTURING PROCESS AND CALIBRATION TO ACHIEVE HIGH ACCURACY THERMAL COUPLE SUBSTRATES | MERSHON, JAYNE L | 1721 | §103 | Non-Final OA | 45d overdue | Pending | Aug 20, 2024 |
| 18805150 | IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING | TRAN, JUDY DAO | 2877 | §103 | Non-Final OA | 35d overdue | Pending | Aug 14, 2024 |
| 18797716 | ASYMMETRIC METROLOGY TOOL FOR REFLECTIVE WAVEGUIDE | TON, TRI T | 2877 | §103 | Non-Final OA | 50d | Pending | Aug 08, 2024 |
| 18790596 | POST-GAP FILL TREATMENT FOR SEAM REDUCTION | CHEN, BRET P | 1718 | §103 | Final Rejection | 5d overdue | Pending | Jul 31, 2024 |
| 18782761 | ELECTROMAGNETIC MAGNETIC SENSOR ASSEMBLY | PRETLOW, DEMETRIUS R | 2858 | §103 | Non-Final OA | 34d | Pending | Jul 24, 2024 |
| 18781131 | FLUID AERATOR TO REDUCE SPLASHING | BERGNER, ERIN FLANAGAN | 1713 | §103 | Non-Final OA | 19d overdue | Pending | Jul 23, 2024 |
| 18773943 | BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 28d | Pending | Jul 16, 2024 |
| 18764038 | HIGH PERFORMANCE HEAT EXCHANGER | ROJOHN III, CLAIRE E | 3763 | §103 | Non-Final OA | 8d overdue | Pending | Jul 03, 2024 |
| 18762536 | PRESCRIPTIVE ANALYTICS IN HIGHLY COLLINEAR RESPONSE SPACE | VU, TUAN A | 2193 | §103 | Non-Final OA | 35d | Pending | Jul 02, 2024 |
| 18760824 | SUBSTRATE SUPPORT ASSEMBLY HAVING AN INTEGRATED SPRING PRESSURE PLATE | BAUER, SCOTT ALLEN | 2838 | §103 | Non-Final OA | 15d | Pending | Jul 01, 2024 |
| 18750718 | HYBRID VACUUM ELECTROSTATIC CHUCK | RAMOS, NICOLE N | 3722 | §103 | Final Rejection | 36d | Pending | Jun 21, 2024 |
| 18749297 | EMBEDDED SENSOR RESPONSE LINEARIZATION METHOD | KEFAYATI, SOORENA | 2884 | §103 | Non-Final OA | 46d | Pending | Jun 20, 2024 |
| 18749288 | DYNAMIC CORRECTION FOR LEAKAGE CURRENT AND BACKGROUND RADIATION | ARTMAN, THOMAS R | 2884 | §103 | Non-Final OA | 12d | Pending | Jun 20, 2024 |
| 18748845 | REACTION CHAMBER WITH MULTI PHASE PRECURSOR DELIVERY | MURPHY, KEVIN F | 3753 | §103 | Final Rejection | 20d | Pending | Jun 20, 2024 |
| 18747307 | AUTOMATED TORQUE DRIVER SOLUTION | OSTROW, ALAN LINDSAY | 3657 | §103 | Non-Final OA | 43d overdue | Pending | Jun 18, 2024 |
| 18746520 | RADIO FREQUENCY MATCHING NETWORK | SATHIRAJU, SRINIVAS | 2844 | §103 | Final Rejection | 70d | Pending | Jun 18, 2024 |
| 18746856 | EPI CHAMBER WITH FULL WAFER LASER HEATING | ECKARDT, ADAM MICHAEL | 3761 | §103 | Non-Final OA | 35d | Pending | Jun 18, 2024 |
| 18746413 | HIGH RESOLUTION ADVANCED OLED SUB-PIXEL CIRCUIT AND PATTERNING METHOD | OJEH, NDUKA E | 2892 | Other | Non-Final OA | 34d | Pending | Jun 18, 2024 |
| 18740009 | SYSTEM AND METHOD FOR CHAMBER MATCHING USING PHASE-BASED SCORING | WILLOUGHBY, ALICIA M | 2156 | §101 | Non-Final OA | 2d overdue | Pending | Jun 11, 2024 |
| 18731943 | LOWER K AND HIGHER HARDNESS WITH IMPROVED PLASMA INDUCED DAMAGE (PID) DIELECTRIC FILM DEPOSITION | MAYY, MOHAMMAD | 1718 | §103 | Final Rejection | 33d | Pending | Jun 03, 2024 |
| 18731195 | POLARIZED IMAGING REFLECTOMETER | MAUPIN, HUGH H | 2884 | §103 | Non-Final OA | 4d overdue | Pending | May 31, 2024 |
| 18715317 | GENERATE 3D PHOTORESIST PROFILES USING DIGITAL LITHOGRAPHY | WHITESELL, STEVEN H | 1759 | §103 | Final Rejection | 33d | Pending | May 31, 2024 |
| 18714792 | LITHOGRAPHY SYSTEM AND RELATED METHODS FOR FORMING STRUCTURES OF DIFFERENT DEPTHS AND SHAPES | KIM, PETER B | 2882 | §103 | Final Rejection | 63d | Pending | May 30, 2024 |
| 18675404 | FULL-FIELD METROLOGY TOOL FOR WAVEGUIDE COMBINERS AND META-SURFACES | PARK, SANGHYUK | 2623 | §103 | Non-Final OA | 36d overdue | Pending | May 28, 2024 |
| 18668480 | PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 79d overdue | Pending | May 20, 2024 |
| 18667515 | METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH | BERGNER, ERIN FLANAGAN | 1713 | Other | Non-Final OA | — | Pending | May 17, 2024 |
| 18667082 | BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 3d overdue | Pending | May 17, 2024 |
| 18663897 | MAGNETIC HOLDING STRUCTURES FOR PLASMA PROCESSING APPLICATIONS | CROWELL, ANNA M | 1716 | Other | Final Rejection | — | Pending | May 14, 2024 |
| 18663821 | IMAGE CLASSIFICATION AND OUTLIER DETECTION USING MULTI-LAYER LOSSES | GARCIA, SANTIAGO | 2673 | §103 | Non-Final OA | 26d | Pending | May 14, 2024 |
| 18660048 | MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION | COLGAN, LAUREN ROBINSON | 1784 | Other | Non-Final OA | 50d | Pending | May 09, 2024 |
| 18656805 | MULTI-LAYER WET-DRY HARDCOATS FOR FLEXIBLE COVER LENS | FISCHER, JUSTIN R | 1749 | §103 | Non-Final OA | 6d | Pending | May 07, 2024 |
| 18653097 | FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN | BENNETT, CHARLEE | 1718 | Other | Non-Final OA | 30d | Pending | May 02, 2024 |
| 18649730 | FABRICATING TANDEM SOLAR CELL DEVICES USING DEVICE-LEVEL ENCAPSULATION | CANNON, RYAN SMITH | 1726 | §103 | Final Rejection | 56d | Pending | Apr 29, 2024 |
| 18647819 | MICROWAVE PRECLEAN APPARATUS AND PROCESSING METHOD FOR IMPURITY REMOVAL | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 83d | Pending | Apr 26, 2024 |
| 18636461 | METHODS FOR IMPROVING THROUGHPUT AND GAPFILL QUALITY FOR METAL DEPOSITION | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | 91d overdue | Pending | Apr 16, 2024 |
| 18631989 | METHOD FOR ETCHING RUTHENIUM | AHMED, SHAMIM | 1713 | §103 | Final Rejection | 9d overdue | Pending | Apr 10, 2024 |
| 18627544 | METHODS FOR ENCAPSULATING SILVER MIRRORS ON OPTICAL STRUCTURES | PLESZCZYNSKA, JOANNA | 1783 | §103 | Non-Final OA | 6d | Pending | Apr 05, 2024 |
| 18619752 | SIDE BLOCKS FOR GAS ACTIVATION, AND RELATED PROCESSING CHAMBERS, PROCESS KITS, AND METHODS | KACKAR, RAM N | 1716 | §103 | Final Rejection | 13d | Pending | Mar 28, 2024 |
| 18619083 | SILICON ETCH BYPRODUCT REMOVAL | KLUNK, MARGARET D | 1713 | §103 | Non-Final OA | 70d | Pending | Mar 27, 2024 |
| 18615617 | SEALED AXIAL FLUX MOTORS FOR VACUUM ROBOTS | MACARTHUR, VICTOR L | 3618 | §103 | Non-Final OA | 18d overdue | Pending | Mar 25, 2024 |
| 18613671 | METHOD FOR COATING PHARMACEUTICAL SUBSTRATES | ARNOLD, ERNST V | 1613 | Other | Non-Final OA | 12d | Pending | Mar 22, 2024 |
| 18602986 | PRIME STEP FOR METAL ETCH IN HIGH ASPECT-RATIO FEATURES | LU, JIONG-PING | 1713 | §102 | Non-Final OA | 42d | Pending | Mar 12, 2024 |
| 18593610 | SACRIFICIAL LINER FOR COPPER INTERCONNECT | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | 46d overdue | Pending | Mar 01, 2024 |
| 18590141 | LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | 120d overdue | Pending | Feb 28, 2024 |
| 18590752 | ELECTRICAL CONNECTION FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD | FRANCISCO, TRISHA JOY UTULO | 3723 | §102 | Non-Final OA | 71d | Pending | Feb 28, 2024 |
| 18589629 | ENABLING THICK MOSI GROWTH | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Non-Final OA | 5d overdue | Pending | Feb 28, 2024 |
| 18589251 | LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | — | §112 | Non-Final OA | 76d | Pending | Feb 27, 2024 |
| 18584540 | DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 29d | Pending | Feb 22, 2024 |
| 18582453 | PROCESSING OF SIGNALS FROM IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 33d | Pending | Feb 20, 2024 |
| 18442234 | METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES | LEE, DOUGLAS | 1714 | §103 | Final Rejection | 76d | Pending | Feb 15, 2024 |
| 18442681 | SYSTEMS AND METHODS FOR NANOHOLE WET CLEANS | CARTER, JONATHAN LANGDON | 1713 | §103 | Non-Final OA | 29d | Pending | Feb 15, 2024 |
| 18441483 | THERMOELECTRIC CONTROL FOR A CRUCIBLE FOR USE WITH AN ION SOURCE | TANDY, LAURA ELOISE | 2881 | §103 | Non-Final OA | 75d | Pending | Feb 14, 2024 |
| 18435853 | DEPOSITION AND ETCHING FOR SELECTIVE REMOVAL OF DEPOSITED DIELECTRIC FILM FROM TOPS OF FINS | TRAN, BINH X | 1713 | §103 | Non-Final OA | 43d | Pending | Feb 07, 2024 |
| 18432525 | COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM | JARRETT, RYAN A | 2116 | §102 | Non-Final OA | 26d | Pending | Feb 05, 2024 |
| 18431051 | TEMPERATURE CONTROL SYSTEM WITH FLAMMABLE HEAT TRANSFER FLUID | RUPPERT, ERIC S | 3763 | §103 | Non-Final OA | 51d overdue | Pending | Feb 02, 2024 |
| 18424470 | SYSTEMS AND METHODS FOR HIGH-THROUGHPUT ANGLED ION PROCESSING | SEOANE, TODD MICHAEL | 1718 | §103 | Non-Final OA | 14d | Pending | Jan 26, 2024 |
| 18423636 | Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving Substrate | MOORE, KARLA A | 1716 | Other | Final Rejection | 35d overdue | Pending | Jan 26, 2024 |
| 18421937 | AUTOMATIC ROBOT CALIBRATION FOR MULTI-JOINT ROBOTS | VISCARRA, RICARDO I | 3657 | §103 | Final Rejection | 42d | Pending | Jan 24, 2024 |
| 18418930 | METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER | BAND, MICHAEL A | 1794 | §103 | Final Rejection | 113d overdue | Pending | Jan 22, 2024 |
| 18417304 | APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL | CHANG, SUKWOO JAMES | 3723 | §103 | Final Rejection | 78d | Pending | Jan 19, 2024 |
| 18417124 | POLISHING HEAD WITH RETAINING RING WEAR SENSING | DION, MARCEL T | 3723 | §103 | Non-Final OA | 31d overdue | Pending | Jan 19, 2024 |
| 18416346 | HOMING METHODS FOR LIFT ASSEMBLIES, AND RELATED APPARATUS AND COMPONENTS, FOR SUBSTRATE PROCESSING CHAMBERS | TAWFIK, SAMEH | 3731 | §103 | Non-Final OA | 48d | Pending | Jan 18, 2024 |
| 18415506 | RF FILTER TOPOLOGY FOR SUBSTRATE SUPPORT ASSEMBLY | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | §103 | Final Rejection | 8d | Pending | Jan 17, 2024 |
| 18412430 | METHODS AND SYSTEMS FOR CLEANING PROCESS SEQUENCE MANAGEMENT | SHAH, KAMINI S | 2115 | §103 | Final Rejection | 16d | Pending | Jan 12, 2024 |
| 18409979 | SYSTEMS AND METHODS FOR VISUAL INSPECTION OF PHARMACEUTICAL CONTAINERS | ESQUINO, CALEB LOGAN | 2677 | §103 | Non-Final OA | 22d overdue | Pending | Jan 11, 2024 |
| 18409564 | COMPACT FACEPLATE LOADING PLATFORM | NEJAD, MAHDI H | 3723 | §112 | Non-Final OA | 29d | Pending | Jan 10, 2024 |
| 18407033 | Substrate Lift Pins and Substrate Supports and Process Chambers Incorporating Same | NEJAD, MAHDI H | 3723 | §103 | Non-Final OA | 34d | Pending | Jan 08, 2024 |
| 18404391 | CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS | CARRILLO, BIBI SHARIDAN | 1711 | §103 | Non-Final OA | 12d | Pending | Jan 04, 2024 |
| 18400393 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | CHAUDHRI, OMAIR | 1711 | §103 | Non-Final OA | 43d overdue | Pending | Dec 29, 2023 |
| 18400319 | SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING | AYALEW, TINSAE B | 1711 | §103 | Non-Final OA | 23d overdue | Pending | Dec 29, 2023 |
| 18398723 | INTEGRATED OPTICAL SENSOR CONTROLLER FOR DEVICEMANUFACTURING MACHINES | LAPAGE, MICHAEL P | 2877 | §103 | Non-Final OA | 23d overdue | Pending | Dec 28, 2023 |
| 18398564 | Implant Hard Mask for Substrates | DEO, DUY VU NGUYEN | 1713 | Other | Final Rejection | 46d | Pending | Dec 28, 2023 |
| 18397265 | CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES | RIDDLE, CHRISTINA A | 2882 | §103 | Final Rejection | 55d | Pending | Dec 27, 2023 |
| 18395343 | HEAT REFLECTION ASSEMBLY FOR SUBSTRATE TEMPERATURE UNIFORMITY | ANDERSON II, STEVEN S | 3762 | §103 | Non-Final OA | 9d | Pending | Dec 22, 2023 |
| 18394352 | ISOLATION FORMATION METHOD IN HIGH-ASPECT RATIO CMOS STACKED DEVICES | VU, VU A | 2897 | §103 | Non-Final OA | 2d overdue | Pending | Dec 22, 2023 |
| 18391056 | METALLIC SOURCE/DRAIN WITH STRESS FOR ADVANCED LOGIC TRANSISTORS | JAHAN, BILKIS | 2817 | §103 | Non-Final OA | 3d overdue | Pending | Dec 20, 2023 |
| 18391176 | ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Dec 20, 2023 |
| 18391541 | LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS | SUN, MICHAEL BRENNAN | 2892 | §103 | Non-Final OA | 71d | Pending | Dec 20, 2023 |
| 18389591 | High Conformal Coating on Textured Surface of Processing Chamber Component | OTT, PATRICK S | 1794 | §103 | Non-Final OA | 47d | Pending | Dec 19, 2023 |
| 18544812 | CONTACT RESISTANCE REDUCTION BY INTEGRATION OF MOLYBDENUM WITH TITANIUM | SARKAR, ASOK K | 2891 | §103 | Non-Final OA | 1d overdue | Pending | Dec 19, 2023 |
| 18545643 | SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING | CRANDALL, JOEL DILLON | 3723 | §103 | Non-Final OA | 15d overdue | Pending | Dec 19, 2023 |
| 18542562 | DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING | PATEL, JIGNESHKUMAR C | 2116 | §103 | Non-Final OA | 16d | Pending | Dec 15, 2023 |
| 18542158 | CONTROLLED PH RINSE TO LIMIT CROSS-CONTAMINATION IN ELECTROPLATING BATHS | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 96d overdue | Pending | Dec 15, 2023 |
| 18539892 | ETCHING SUBSTRATES USING VAPOR ADSORPTION | DUCLAIR, STEPHANIE P. | 1713 | §103 | Final Rejection | 28d | Pending | Dec 14, 2023 |
| 18538100 | CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 55d | Pending | Dec 13, 2023 |
| 18537234 | METAL OXY-FLUORIDE COATING FOR CHAMBER COMPONENTS AND METHOD OF COATING THEREOF | WIECZOREK, MICHAEL P | 1712 | §103 | Non-Final OA | 5d overdue | Pending | Dec 12, 2023 |
| 18568993 | DIGITAL LITHOGRAPHY EXPOSURE UNIT BOUNDARY SMOOTHING | KIM, PETER B | 2882 | §102 | Final Rejection | 15d | Pending | Dec 11, 2023 |
| 18534071 | HIGH-TEMPERATURE IMPLANT FOR GATE-ALL-AROUND DEVICES | LEE, KYOUNG | 2817 | §102 | Non-Final OA | 5d | Pending | Dec 08, 2023 |
| 18532381 | METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER | SWANSON, ANDREW L | 1745 | §103 | Non-Final OA | 9d overdue | Pending | Dec 07, 2023 |
| 18526976 | PHOTO-EMITTING PLASMA FOR ACTIVATION IN PROCESSING CHAMBERS, AND RELATED APPARATUS AND METHODS | YUSHIN, NIKOLAY K | 2893 | §103 | Non-Final OA | 23d overdue | Pending | Dec 01, 2023 |
| 18525633 | 3D MEMORY INCLUDING HOLLOW EPITAXIAL CHANNELS | ABEL, GARY ROBERT | 2897 | §103 | Non-Final OA | 16d overdue | Pending | Nov 30, 2023 |
| 18525198 | WORDLINE CONTACT FORMATION FOR NAND DEVICE | HENRY, CALEB E | 2818 | §102 | Non-Final OA | 15d overdue | Pending | Nov 30, 2023 |
| 18525471 | COOLING STATION | PHAN, AN BACH | 3763 | §103 | Non-Final OA | 27d | Pending | Nov 30, 2023 |
| 18525660 | FAULT EVENT RECOVERY IN MULTI-SLOT PROCESSING CHAMBERS | TANG, MICHAEL XUEFEI | 2115 | §103 | Non-Final OA | 29d | Pending | Nov 30, 2023 |
| 18523394 | SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION | CHEN, KEATH T | 1716 | §103 | Final Rejection | 14d | Pending | Nov 29, 2023 |
| 18520369 | IN-SITU ETCH MATERIAL SELECTIVITY DETECTION SYSTEM | VONCH, JEFFREY A | 1781 | §103 | Non-Final OA | 84d | Pending | Nov 27, 2023 |
| 18519164 | EXCURSION SCREENING MODELS FOR IMPROVING ACCURACY OF EXCURSION DETECTION WITHIN MANUFACTURING SYSTEMS | CARTER, CHRISTOPHER W | 2117 | §103 | Non-Final OA | 31d overdue | Pending | Nov 27, 2023 |
| 18516728 | LOW TEMPERATURE EPI CHAMBER | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | 70d | Pending | Nov 21, 2023 |
| 18516849 | MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT | BESLER, CHRISTOPHER JAMES | 3726 | §112 | Non-Final OA | 41d | Pending | Nov 21, 2023 |
| 18512894 | LOW RESISTIVITY GAPFILL | BERRY, PAUL ANTHONY | 2898 | §103 | Non-Final OA | 72d | Pending | Nov 17, 2023 |
| 18508056 | POROUS CHAMBER COMPONENT COATING AUGMENTED WITH COLLOIDS | LEONG, NATHAN T | 1718 | §103 | Non-Final OA | 50d overdue | Pending | Nov 13, 2023 |
| 18504452 | OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 20d | Pending | Nov 08, 2023 |
| 18558817 | NOZZLE FOR A DISTRIBUTOR OF A MATERIAL DEPOSITION SOURCE, MATERIAL DEPOSITION SOURCE, VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 28d | Pending | Nov 03, 2023 |
| 18498239 | WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LITHIUM DEPOSITION | SWEELY, KURT D | 1718 | §103 | Final Rejection | 78d overdue | Pending | Oct 31, 2023 |
| 18384810 | DIO3 SPRAY TANK FOR POST CMP SUBSTRATE CLEANING | WIBLIN, MATTHEW | 3745 | §103 | Non-Final OA | 42d | Pending | Oct 27, 2023 |
| 18494319 | REAL-TIME PLASMA MEASUREMENT AND CONTROL | SHAFAYET, MOHAMMED | 2116 | §103 | Non-Final OA | 46d overdue | Pending | Oct 25, 2023 |
| 18494632 | CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE | SEHN, MICHAEL L | 3745 | §103 | Non-Final OA | 71d | Pending | Oct 25, 2023 |
| 18383411 | VIRTUAL METROLOGY FOR ENHANCED WINDOW TEMPERATURE CONTROL | GRAY, PAUL J | 3753 | §103 | Non-Final OA | 42d | Pending | Oct 24, 2023 |
| 18382429 | AUXILIARY FLOW PLATE FOR THICKNESS AND CONCENTRATION UNIFORMITY ADJUSTABILITY | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | 60d overdue | Pending | Oct 20, 2023 |
| 18382114 | CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPITAXIAL DEPOSITION OPERATIONS | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 2d overdue | Pending | Oct 20, 2023 |
| 18382421 | LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KITS, FOR PROCESSING CHAMBERS | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | 8d | Pending | Oct 20, 2023 |
| 18489214 | ACTIVELY CONTROLLED WINDOW FOR EPITAXIAL DEPOSITION PROCESS TEMPERATURE CONTROL | TURNER, BRIAN | 2818 | §103 | Non-Final OA | 34d | Pending | Oct 18, 2023 |
| 18381331 | LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS | ASSOUMAN, HERVE-LOUIS Y | 2812 | §103 | Non-Final OA | 28d overdue | Pending | Oct 18, 2023 |
| 18555896 | DIGITAL LITHOGRAPHY APPARATUS WITH AUTOFOCUS POSITION CONTROL AND METHODS OF USE THEREOF | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | 27d | Pending | Oct 18, 2023 |
| 18489528 | PREDICTIVE MODELING OF A MANUFACTURING PROCESS USING A SET OF TRAINED INVERTED MODELS | SKRZYCKI, JONATHAN MICHAEL | 2116 | §103 | Non-Final OA | 82d | Pending | Oct 18, 2023 |
| 18555342 | METHODS AND APPLICATIONS OF NOVEL AMORPHOUS HIGH-K METAL-OXIDE DIELECTRICS BY SUPER-CYCLE ATOMIC LAYER DEPOSITION | SRINIVASAN, SESHA SAIRAMAN | 2817 | §103 | Non-Final OA | 37d overdue | Pending | Oct 16, 2023 |
| 18486291 | PROCESS CHAMBER GAS FLOW IMPROVEMENT | LEE, AIDEN Y | 1718 | §103 | Non-Final OA | 46d overdue | Pending | Oct 13, 2023 |
| 18379928 | INTERFACIAL LAYER SCALING PROCESSES FOR SEMICONDUCTOR DEVICES | AHMADI, MOHSEN | 2896 | §103 | Non-Final OA | 9d | Pending | Oct 13, 2023 |
| 18486576 | THREE-DIMENSIONAL MEMORY DEVICE WORDLINES WITH REDUCED BLOCKING LAYER DAMAGE | GHYKA, ALEXANDER G | 2812 | §102 | Non-Final OA | 21d | Pending | Oct 13, 2023 |
| 18379915 | SHOWERHEAD DESIGN FOR PLASMA-ENHANCED DEPOSITION | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 12d | Pending | Oct 13, 2023 |
| 18486726 | SYSTEMS AND METHODS FOR DIGITAL LITHOGRAPHY SCAN SEQUENCING | PERSAUD, DEORAM | 2882 | §103 | Non-Final OA | 34d | Pending | Oct 13, 2023 |
| 18486072 | LOW TEMPERATURE ELECTROSTATIC CHUCK | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | §103 | Non-Final OA | 16d | Pending | Oct 12, 2023 |
| 18378850 | SACRIFICIAL SOURCE/DRAIN FOR METALLIC SOURCE/DRAIN HORIZONTAL GATE ALL AROUND ARCHITECTURE | COLLINS, HAMNER FITZHUGH | 2818 | §103 | Non-Final OA | 28d overdue | Pending | Oct 11, 2023 |
| 18483971 | HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE | MARTIN, KEEGAN THOMAS | 3723 | §103 | Non-Final OA | 29d | Pending | Oct 10, 2023 |
| 18484352 | RESISTANT COATINGS INCLUDING POLYMER SEALANT AND RESISTANT PARTICLES | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 9d | Pending | Oct 10, 2023 |
| 18484379 | MICROWAVE HIGH-DENSITY PLASMA FOR SELECTIVE ETCH | CARTER, JONATHAN LANGDON | 1713 | §103 | Non-Final OA | 12d | Pending | Oct 10, 2023 |
| 18484016 | SCALING FOR DIE-LAST ADVANCED IC PACKAGING | ALAWDI, ANWER AHMED | 2851 | §103 | Non-Final OA | 23d | Pending | Oct 10, 2023 |
| 18483994 | ANNEAL CHAMBER | HO, ANTHONY | 2817 | §102 | Non-Final OA | 37d overdue | Pending | Oct 10, 2023 |
| 18482658 | SMART FACEPLATE/SHOWERHEAD USING SHAPE MEMORY ALLOY | BOWMAN, ANDREW J | 1717 | §103 | Non-Final OA | 13d | Pending | Oct 06, 2023 |
| 18377572 | COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYSTEMS | KEENAN, JAMES W | 3655 | §103 | Non-Final OA | 12d | Pending | Oct 06, 2023 |
| 18377599 | RETAINING RING FOR EDGE COMPENSATION BY SLURRY FLOW CONTROL | SAENZ, ALBERTO | 3723 | §103 | Non-Final OA | 6d | Pending | Oct 06, 2023 |
| 18481513 | INDIVIDUALLY ROTATABLE PLATENS AND CONTROL OF CARRIER HEAD SWEEP | ZAWORSKI, JONATHAN R | 3723 | §103 | Non-Final OA | 70d overdue | Pending | Oct 05, 2023 |
| 18481904 | SELECTIVE HARDMASK ETCH FOR SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 1713 | §103 | Final Rejection | 15d overdue | Pending | Oct 05, 2023 |
| 18481576 | CMP WITH INDIVIDUALLY ROTATABLE PLATENS | SHUM, KENT N | 3723 | §103 | Non-Final OA | 9d | Pending | Oct 05, 2023 |
| 18377138 | COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM | BUI, DUNG H | 1773 | §103 | Non-Final OA | 18d overdue | Pending | Oct 05, 2023 |
| 18376282 | POLISHING HEAD WITH DECOUPLED MEMBRANE POSITION CONTROL | NEIBAUR, ROBERT F | 3723 | §102 | Non-Final OA | 20d | Pending | Oct 03, 2023 |
| 18480060 | ADVANCED POLISHING PADS AND RELATED POLISHING PAD MANUFACTURING METHODS | CHANG, SUKWOO JAMES | 3723 | §103 | Non-Final OA | 26d overdue | Pending | Oct 03, 2023 |
| 18376287 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND ENHANCED ELECTRICAL PROPERTIES | MOTT, ADAM JOSEPH | 2817 | §112 | Non-Final OA | 13d | Pending | Oct 03, 2023 |
| 18376057 | SEAM-FREE SINGLE OPERATION AMORPHOUS SILICON GAP FILL | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | 28d overdue | Pending | Oct 03, 2023 |
| 18376356 | POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER | HOLIZNA, CALEB ANDREW | 3723 | §103 | Final Rejection | 70d | Pending | Oct 03, 2023 |
| 18478878 | DIRECTIONAL RIE FEATURE RECTANGULARITY | OTT, PATRICK S | 1794 | §103 | Final Rejection | 61d | Pending | Sep 29, 2023 |
| 18477444 | DIFFUSE OPTICAL IMAGING/TOMOGRAPHY USING META-OPTICS | FERNANDEZ, KATHERINE L | 3798 | §103 | Final Rejection | 17d overdue | Pending | Sep 28, 2023 |
| 18374531 | INVERTING IMPLANTER PROCESS MODEL FOR PARAMETER GENERATION | OSENBAUGH-STEWART, ELIZA W | 2881 | §103 | Non-Final OA | 6d | Pending | Sep 28, 2023 |
| 18372792 | Selective Deposition of Thin Films with Improved Stability | CHEN, BRET P | 1718 | §103 | Final Rejection | 44d overdue | Pending | Sep 26, 2023 |
| 18373139 | BREWSTER ANGLE WINDOWS FOR MULTI-PASS ABSORPTION SPECTROSCOPY | STAFIRA, MICHAEL PATRICK | 2877 | §103 | Final Rejection | 43d | Pending | Sep 26, 2023 |
| 18471472 | MIDDLE OF LINE DIELECTRIC LAYER ENGINEERING FOR VIA VOID PREVENTION | CHOU, SHIH TSUN A | 2811 | §112 | Non-Final OA | 41d | Pending | Sep 21, 2023 |
| 18471005 | METHOD FOR INTEGRATION OF OPTICAL DEVICE FABRICATION WITH SUBSTRATE THICKNESS ENGINEERING | JUNG, JONATHAN Y | 2871 | §103 | Final Rejection | 21d | Pending | Sep 20, 2023 |
| 18370536 | IN-SITU SIDEWALL PASSIVATION TOWARD THE BOTTOM OF HIGH ASPECT RATIO FEATURES | TAHIR, NOOR MOHAMMAD ISM | 2893 | §103 | Non-Final OA | 60d overdue | Pending | Sep 20, 2023 |
| 18370190 | METHODS AND APPARATUS FOR PHOTOMASK PROCESSING | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 93d overdue | Pending | Sep 19, 2023 |
| 18367136 | METHODS OF FORMING SILICON NITRIDE FILMS | KIELIN, ERIK J | 2814 | §103 | Final Rejection | 60d | Pending | Sep 12, 2023 |
| 18464926 | METHOD AND MATERIAL SYSTEM FOR TUNABLE HYBRID BOND INTERCONNECT RESISTANCE | JUNG, MICHAEL YOO LIM | 2817 | §101 | Non-Final OA | 22d | Pending | Sep 11, 2023 |
| 18463457 | TARGETED GAS DELIVERY VIA SIDE GAS INJECTION | SHAMSUZZAMAN, MOHAMMED | 2897 | §103 | Non-Final OA | 22d overdue | Pending | Sep 08, 2023 |
| 18244104 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | §103 | Non-Final OA | 20d | Pending | Sep 08, 2023 |
| 18244197 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Final Rejection | 29d | Pending | Sep 08, 2023 |
| 18244113 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | §103 | Non-Final OA | 60d overdue | Pending | Sep 08, 2023 |
| 18244199 | HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Non-Final OA | 56d overdue | Pending | Sep 08, 2023 |
| 18243085 | INTEGRATION APPROACH FOR INCREASE OF THE MOBILITY AND ON-CURRENT IN 3D NAND CELLS | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18460154 | METHODS AND STRUCTURES FOR HIGH STRENGTH DIELECTRIC IN HYBRID BONDING | RAHMAN, MOHAMMAD A | 2898 | §103 | Non-Final OA | 39d | Pending | Sep 01, 2023 |
| 18459524 | SELECTIVE CAPPING FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS | KIELIN, ERIK J | 2814 | §103 | Non-Final OA | 8d overdue | Pending | Sep 01, 2023 |
| 18460189 | METHODS AND STRUCTURES FOR HIGH STRENGTH ASYMMETRIC DIELECTRIC IN HYBRID BONDING | MALEK, MALIHEH | 2813 | §103 | Non-Final OA | 84d | Pending | Sep 01, 2023 |
| 18239988 | In-Vacuum Rotatable RF Component | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 29d | Pending | Aug 30, 2023 |
| 18239929 | RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD | FRANCISCO, TRISHA JOY UTULO | 3723 | §103 | Non-Final OA | 87d overdue | Pending | Aug 30, 2023 |
| 18239676 | SECURED CRYPTO PROCESSOR FOR CHIPLET SECURITY USING ARTIFICIAL INTELLIGENCE | KONG, ALAN LINGQIAN | 2494 | §103 | Final Rejection | 7d | Pending | Aug 29, 2023 |
| 18457471 | SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION | RANDAZZO, THOMAS | 3655 | §102 | Non-Final OA | 5d overdue | Pending | Aug 29, 2023 |
| 18238954 | SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN 3D NAND MEMORY DEVICE | FAN, SU JYA | 2818 | §103 | Non-Final OA | 4d overdue | Pending | Aug 28, 2023 |
| 18456836 | SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Non-Final OA | 33d | Pending | Aug 28, 2023 |
| 18238107 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND HIGH MECHANICAL STRENGTH | RODRIGUEZ, MICHAEL P | 1712 | §103 | Non-Final OA | 42d overdue | Pending | Aug 25, 2023 |
| 18455508 | SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | 10d overdue | Pending | Aug 24, 2023 |
| 18237641 | HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE | HAWKINS, JASON KHALIL | 3723 | §103 | Final Rejection | 28d | Pending | Aug 24, 2023 |
| 18237669 | SYSTEM FOR NON RADIAL TEMPERATURE CONTROL FOR ROTATING SUBSTRATES | CAMPBELL, THOR S | 3761 | Other | Non-Final OA | 9d overdue | Pending | Aug 24, 2023 |
| 18236922 | SINGLE GATE THREE-DIMENSIONAL (3D) DYNAMIC RANDOM-ACCESS MEMORY (DRAM) DEVICES | FERNANDES, ERROL V | 2893 | §103 | Non-Final OA | 12d | Pending | Aug 22, 2023 |
| 18452426 | ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING | SHUM, KENT N | 3723 | §103 | Non-Final OA | 15d | Pending | Aug 18, 2023 |
| 18234453 | OPERATIONS OF ROBOT APPARATUSES WITHIN RECTANGULAR MAINFRAMES | BURKMAN, JESSICA LYNN | 3653 | §103 | Non-Final OA | 36d | Pending | Aug 16, 2023 |
| 18234723 | DIGITAL TWIN FOR LASER MATERIAL PROCESSING | MEADE, LORNE EDWARD | 3741 | §102 | Non-Final OA | 2d overdue | Pending | Aug 16, 2023 |
| 18450466 | DIE BACKSIDE PROFILE for SEMICONDUCTOR DEVICES | YECHURI, SITARAMARAO S | 2893 | §103 | Non-Final OA | 42d overdue | Pending | Aug 16, 2023 |
| 18234685 | PLASMA ETCHING IN SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 1713 | §103 | Final Rejection | 27d | Pending | Aug 16, 2023 |
| 18232991 | METHODS OF ETCHING OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES | CULBERT, ROBERTS P | 1716 | §103 | Non-Final OA | 41d | Pending | Aug 11, 2023 |
| 18232985 | METHODS OF ETCHING CARBON-CONTAINING FEATURES AT LOW TEMPERATURES | TRAN, BINH X | 1713 | §103 | Non-Final OA | 5d | Pending | Aug 11, 2023 |
| 18232631 | METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS | MURATA, AUSTIN | 1712 | §103 | Final Rejection | 33d | Pending | Aug 10, 2023 |
| 18232133 | ADHESION IMPROVEMENTS IN METAL-CONTAINING HARDMASKS | CHOUDHRY, MOHAMMAD M | 2899 | §103 | Non-Final OA | 16d overdue | Pending | Aug 09, 2023 |
| 18231655 | Electrostatic Chuck with High Cooling Efficiency | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 9d | Pending | Aug 08, 2023 |
| 18365520 | PAD CONDITIONING DISK GIMBALING CONTROL | HOLIZNA, CALEB ANDREW | 3723 | §102 | Non-Final OA | 29d overdue | Pending | Aug 04, 2023 |
| 18364507 | NEUTRAL STRESS DIAMOND-LIKE CARBON | GHYKA, ALEXANDER G | 2812 | §103 | Non-Final OA | 11d overdue | Pending | Aug 03, 2023 |
| 18364233 | INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION | WEDDLE, ALEXANDER MARION | 1712 | §103 | Final Rejection | 60d overdue | Pending | Aug 02, 2023 |
| 18364249 | DOPED DIAMOND-LIKE CARBON | LU, JIONG-PING | 1713 | §103 | Final Rejection | 34d | Pending | Aug 02, 2023 |
| 18364260 | DIAMOND-LIKE CARBON GAP FILL | MCCUTCHEON, COLIN RUSSELL | 2892 | §103 | Non-Final OA | 34d | Pending | Aug 02, 2023 |
| 18363545 | PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU PAD CONDITIONING | HOLIZNA, CALEB ANDREW | 3723 | §103 | Non-Final OA | 19d | Pending | Aug 01, 2023 |
| 18361326 | GROWTH CHAMBER SMART SEASONING | OGG, DAVID EARL | 2119 | §103 | Non-Final OA | 56d | Pending | Jul 28, 2023 |
| 18274991 | POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRATE PROCESSING | RIVERA, CARLOS A | 3723 | §103 | Final Rejection | 54d | Pending | Jul 28, 2023 |
| 18227128 | LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AND METHODS | LOPEZ, JORGE ANDRES | 2897 | §103 | Non-Final OA | 15d | Pending | Jul 27, 2023 |
| 18360074 | METHOD AND SYSTEM FOR AUTOMATIC IHC MARKER-HER2 SCORE | TAYLOR, MEREDITH IREENE DUPAI | 2671 | §103 | Non-Final OA | 97d overdue | Pending | Jul 27, 2023 |
| 18227226 | CHAMBER FOR SUBSTRATE BACKSIDE AND BEVEL DEPOSITION | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 9d overdue | Pending | Jul 27, 2023 |
| 18226554 | METHODS AND MECHANISMS TO IMPROVE MONITORING CAPABILITIES USING RATE OF CHANGE OF SENSOR VALUES | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Non-Final OA | 14d | Pending | Jul 26, 2023 |
| 18226579 | METHODS OF FORMING ABRUPT INTERFACES BETWEEN SILICON-AND-CARBON-CONTAINING MATERIALS AND SILICON-AND-OXYGEN-CONTAINING MATERIALS | VLCEK, JACOB ALEXANDER | 2817 | §103 | Non-Final OA | 53d | Pending | Jul 26, 2023 |
| 18226007 | METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CRYSTALLINE STRUCTURES | BRATLAND JR, KENNETH A | 1714 | §103 | Final Rejection | 12d | Pending | Jul 25, 2023 |
| 18225007 | METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS, FOR SEMICONDUCTOR MANUFACTURING | LEONG, NATHAN T | 1718 | §103 | Non-Final OA | 33d | Pending | Jul 21, 2023 |
| 18224996 | METHODS OF ANALYZING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS, FOR SEMICONDUCTOR MANUFACTURING | CHOUDHRY, MOHAMMAD M | 2899 | §103 | Non-Final OA | 56d | Pending | Jul 21, 2023 |
| 18223184 | SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY | SWEELY, KURT D | 1718 | §103 | Non-Final OA | 28d overdue | Pending | Jul 18, 2023 |
| 18352446 | MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER | TEIXEIRA MOFFAT, JONATHAN CHARLES | 3700 | — | Non-Final OA | 175d overdue | Pending | Jul 14, 2023 |
| 18221505 | CYCLIC ETCH OF SILICON OXIDE AND SILICON NITRIDE | LU, JIONG-PING | 1713 | §103 | Final Rejection | 21d | Pending | Jul 13, 2023 |
| 18219993 | INTEGRATING STRAIN SiGe CHANNEL PMOS FOR GAA CMOS TECHNOLOGY | NIX, NORA TAYLOR | 2891 | §103 | Final Rejection | 56d | Pending | Jul 10, 2023 |
| 18220020 | WIRELESS DATA COMMUNICATION IN PLASMA PROCESS CHAMBER THROUGH VI SENSOR AND RF GENERATOR | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 9d overdue | Pending | Jul 10, 2023 |
| 18349006 | ELECTROSTATIC CHUCK COVER PIECE TO ENABLE PROCESSING OF DIELECTRIC SUBSTRATES | SNYDER, ALAN W | 3722 | §103 | Non-Final OA | 16d overdue | Pending | Jul 07, 2023 |
| 18216138 | Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF) Plasma | WINTERS, SEAN AYERS | 2892 | §103 | Non-Final OA | 8d | Pending | Jun 29, 2023 |
| 18341650 | INTEGRATED HYBRID PREDICTIVE MONITORING OF MANUFACTURING SYSTEMS | LEE, SANGKYUNG | 2858 | §103 | Final Rejection | 28d | Pending | Jun 26, 2023 |
| 18214456 | CONTROL OF PLATEN SHAPE IN CHEMICAL MECHANICAL POLISHING | SHUM, KENT N | 3723 | §103 | Non-Final OA | 86d overdue | Pending | Jun 26, 2023 |
| 18209711 | IN-SITU ETCH AND INHIBITION IN PLASMA ENHANCED ATOMIC LAYER DEPOSITION | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 14d | Pending | Jun 14, 2023 |
| 18209716 | SEMICONDUCTOR MANUFACTURING PROCESS CHAMBER COOLING FLANGE FOR REMOTE PLASMA SOURCE SUPPLY | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 17d overdue | Pending | Jun 14, 2023 |
| 18209719 | SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELECTRIC CONSTANT MATERIALS | FOX, BRANDON C | 2818 | §103 | Final Rejection | 27d | Pending | Jun 14, 2023 |
| 18209348 | IMMERSED PLASMA SOURCE AND PROCESS CHAMBER FOR LARGE AREA SUBSTRATES | OTT, PATRICK S | 1794 | §102 | Final Rejection | 61d | Pending | Jun 13, 2023 |
| 18208010 | Integrated Pressure Sensor for Process Chamber Assemblies | HOTCHKISS, MICHAEL WAYNE | 1716 | §103 | Non-Final OA | 83d | Pending | Jun 09, 2023 |
| 18207457 | SHOWERHEAD HEATED BY CIRCULAR ARRAY | PENCE, JETHRO M | 1717 | §103 | Non-Final OA | 30d overdue | Pending | Jun 08, 2023 |
| 18330687 | METHODS AND APPARATUS FOR RPS-RF PLASMA CLEAN AND ACTIVATION FOR ADVANCED SEMICONDUCTOR PACKAGING | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 3d overdue | Pending | Jun 07, 2023 |
| 18206847 | CCP GAS DELIVERY NOZZLE | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 28d | Pending | Jun 07, 2023 |
| 18205262 | MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE | FORDJOUR, SARAH AKYAA | 3723 | §103 | Final Rejection | — | Pending | Jun 02, 2023 |
| 18204774 | UV CURABLE PRINTABLE FORMULATIONS FOR HIGH PERFORMANCE 3D PRINTED CMP PADS | MCCLENDON, SANZA L | 1765 | §103 | Non-Final OA | 49d overdue | Pending | Jun 01, 2023 |
| 18327051 | IMPLANT SCHEME TO IMPROVE HIGH ELECTRON MOBILITY TRANSISTOR CONTACT RESISTANCE | KIM, JAY C | 2815 | §112 | Final Rejection | 42d | Pending | May 31, 2023 |
| 18322928 | CHEMICAL MECHANICAL POLISH PAD CONDITIONER WITH MULTIPLE DISKS | ZAWORSKI, JONATHAN R | 3723 | §103 | Non-Final OA | 19d | Pending | May 24, 2023 |
| 18322484 | DROPLET JET NOZZLE DESIGN | TRAN, LEN | 3763 | §103 | Final Rejection | 43d | Pending | May 23, 2023 |
| 18038441 | ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES | COLLINS, GARY | 2115 | §103 | Non-Final OA | 9d overdue | Pending | May 23, 2023 |
| 18200921 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Final Rejection | 41d | Pending | May 23, 2023 |
| 18200539 | METHOD AND APPARATUS FOR SUBSTRATE CLEANING IN STACK-DIE HYBRID BONDING PROCESS | CARRILLO, BIBI SHARIDAN | 1711 | §103 | Non-Final OA | 77d overdue | Pending | May 22, 2023 |
| 18320683 | PITCH AND ORIENTATION UNIFORMITY FOR NANOIMPRINT STAMP FORMATION | ZIMMERMAN, JOSHUA D | 2853 | §103 | Non-Final OA | 70d | Pending | May 19, 2023 |
| 18199625 | OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS | MITCHELL, EDWIN COLEMAN | 1619 | Other | Final Rejection | 18d overdue | Pending | May 19, 2023 |
| 18199614 | DRUG COMPOSITIONS AND METHODS OF PREPARING THE SAME | TCHERKASSKAYA, OLGA V | 1615 | §103 | Final Rejection | 12d | Pending | May 19, 2023 |
| 18319876 | EPITAXIAL SILICON CHANNEL GROWTH | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Non-Final OA | 46d overdue | Pending | May 18, 2023 |
| 18198043 | MEMORY DEVICE WITH HIGH-MOBILITY OXIDE SEMICONDUCTOR CHANNEL AND METHODS FOR FORMING THE SAME | GREWAL, HEIM KIRIN | 2812 | §103 | Non-Final OA | 29d | Pending | May 16, 2023 |
| 18198123 | SENSOR FOR MEASUREMENT OF RADICALS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | May 16, 2023 |
| 18197528 | FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK APPLICATIONS | SLUTSKER, JULIA | 2891 | §103 | Final Rejection | 25d overdue | Pending | May 15, 2023 |
| 18197545 | FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK APPLICATIONS | PRIDEMORE, NATHAN ANDREW | 2898 | §103 | Final Rejection | 36d overdue | Pending | May 15, 2023 |
| 18196187 | Ohmic Contact for Semiconductor Structures | KIM, JAY C | 2815 | §112 | Non-Final OA | 10d overdue | Pending | May 11, 2023 |
| 18314481 | IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE | LEE, ALEXANDER N | 1737 | §103 | Non-Final OA | 20d | Pending | May 09, 2023 |
| 18313733 | ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION | VAUGHAN, JASON L | 3726 | §103 | Non-Final OA | 14d | Pending | May 08, 2023 |
| 18144747 | HIGH EFFICIENCY MICROWAVE PLASMA APPLICATOR | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | 9d | Pending | May 08, 2023 |
| 18144832 | DOSE MAPPING USING SUBSTRATE CURVATURE TO COMPENSATE FOR OUT-OF-PLANE DISTORTION | ALAM, MOHAMMED | 2851 | §102 | Non-Final OA | 2d overdue | Pending | May 08, 2023 |
| 18142654 | LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS | KACKAR, RAM N | 1716 | Other | Non-Final OA | 41d | Pending | May 03, 2023 |
| 18140768 | DICHROIC MIRROR AND SHORTPASS FILTER FOR IN-SITU REFLECTOMETRY | HANSEN, JONATHAN M | 2877 | §103 | Final Rejection | 30d | Pending | Apr 28, 2023 |
| 18140207 | EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH RATE AND UNIFORMITY | QI, HUA | 1714 | §103 | Non-Final OA | 41d | Pending | Apr 27, 2023 |
| 18140179 | LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATERIALS WITH IMPROVED RESISTIVITY | NGUYEN, DUY T V | 2818 | §103 | Non-Final OA | 29d | Pending | Apr 27, 2023 |
| 18140155 | METHODS AND MECHANISMS FOR DAMPING VIBRATIONS IN SUBSTRATE TRANSFER SYSTEMS | MARU, TEMESGEN MALLEDE | 3655 | §102 | Non-Final OA | 117d overdue | Pending | Apr 27, 2023 |
| 18140508 | GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND RELATED APPARATUS AND METHODS | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | 27d | Pending | Apr 27, 2023 |
| 18139699 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS | ANDREWS, FELIX BRYAN | 2812 | — | Final Rejection | 170d overdue | Pending | Apr 26, 2023 |
| 18139121 | HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION | VETERE, ROBERT A | 1712 | §103 | Final Rejection | 30d overdue | Pending | Apr 25, 2023 |
| 18139057 | ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | 79d overdue | Pending | Apr 25, 2023 |
| 18138811 | METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES | LINDSEY, COLE LEON | 2812 | §103 | Non-Final OA | 34d | Pending | Apr 25, 2023 |
| 18305852 | HIGH-DENSITY MICRO-LED ARRAYS WITH REFLECTIVE SIDEWALLS | MUSE, ISMAIL A | 2812 | §103 | Final Rejection | 15d | Pending | Apr 24, 2023 |
| 18138730 | MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING | WELLS, KENNETH B | 2842 | Other | Non-Final OA | 2d overdue | Pending | Apr 24, 2023 |
| 18306187 | METHOD OF METROLOGY ON PATTERN WAFER USING REFLECTOMETRY | WEGNER, AARON MICHAEL | 2897 | §103 | Non-Final OA | 60d overdue | Pending | Apr 24, 2023 |
| 18138733 | MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 23d overdue | Pending | Apr 24, 2023 |
| 18138629 | UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE | LEE, WILSON | 2844 | §103 | Non-Final OA | 3d overdue | Pending | Apr 24, 2023 |
| 18136970 | HYBRID MOLYBDENUM FILL SCHEME FOR LOW RESISTIVITY SEMICONDUCTOR APPLICATIONS | PARKER, JOHN M | 2899 | §103 | Non-Final OA | 73d overdue | Pending | Apr 20, 2023 |
| 18303391 | SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE | BERMAN, JASON | 1794 | §103 | Non-Final OA | 42d overdue | Pending | Apr 19, 2023 |
| 18303318 | PROCESSING KIT SHIELD | BRAYTON, JOHN JOSEPH | 1794 | §103 | Final Rejection | 12d | Pending | Apr 19, 2023 |
| 18303370 | GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE | TANDY, LAURA ELOISE | 2881 | §103 | Non-Final OA | 20d | Pending | Apr 19, 2023 |
| 18135434 | COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTAINING MATERIALS | MAYY, MOHAMMAD | 1718 | Other | Non-Final OA | 2d overdue | Pending | Apr 17, 2023 |
| 18131212 | HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION | MOORE, KARLA A | 1716 | §103 | Non-Final OA | 1d overdue | Pending | Apr 05, 2023 |
| 18131271 | APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM | CHOI, JAMES J | 2878 | §103 | Final Rejection | 41d | Pending | Apr 05, 2023 |
| 18128484 | ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING MATERIALS | KAO, SOPHIA WEI-CHUN | 2817 | §103 | Final Rejection | 13d | Pending | Mar 30, 2023 |
| 18192557 | METHODS TO IMPROVE QUALITY SILICON-CONTAINING MATERIALS | STEVENSON, ANDRE C | 2899 | §103 | Final Rejection | 26d | Pending | Mar 29, 2023 |
| 18192573 | DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHANICAL, AND ETCH CHARACTERISTICS | JEFFERSON, QUOVAUNDA | 2899 | §103 | Final Rejection | 9d | Pending | Mar 29, 2023 |
| 18124401 | INDIRECT PLASMA HEALTH MONITORING | SUN, XIUQIN | 2857 | §103 | Non-Final OA | 34d | Pending | Mar 21, 2023 |
| 18123085 | RESIST MODELING METHOD FOR ANGLED GRATINGS | LIN, ARIC | 2851 | §112 | Non-Final OA | 2d overdue | Pending | Mar 17, 2023 |
| 18123090 | RADIATION SEPARATION SYSTEM | PAIK, SANG YEOP | 3761 | §103 | Non-Final OA | 53d overdue | Pending | Mar 17, 2023 |
| 18122484 | INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED METHODS FOR GAS FLOW IN BATCH PROCESSING OF SEMICONDUCTOR MANUFACTURING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 30d overdue | Pending | Mar 16, 2023 |
| 18122530 | PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOELECTRIC GENERATORS FOR ENERGY HARNESSING | SWEELY, KURT D | 1718 | §103 | Final Rejection | 27d | Pending | Mar 16, 2023 |
| 18183273 | LOW COST FABRICATION OF OPTICAL DEVICE USING DISCRETE GRATING MODULE ASSEMBLY | STANFORD, CHRISTOPHER J | 2872 | §103 | Final Rejection | 16d | Pending | Mar 14, 2023 |
| 18182856 | DISPLAY PIXELS MADE FROM STACKED MICRO-LED STRUCTURES AND PHOTOLUMINESCENT MATERIALS | HAN, JONATHAN | 2818 | §103 | Non-Final OA | 43d overdue | Pending | Mar 13, 2023 |
| 18118017 | HYDROGEN PLASMA TREATMENT FOR FORMING LOGIC DEVICES | SIPLING, KENNETH MARK | 2818 | §103 | Final Rejection | 1d overdue | Pending | Mar 06, 2023 |
| 18115561 | SELECTIVE VIA-FILL WITH CONFORMAL SIDEWALL COVERAGE | LUKE, DANIEL M | 2896 | §103 | Final Rejection | — | Pending | Feb 28, 2023 |
| 18175538 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | LINDSAY, BERNARD G | 2119 | §103 | Final Rejection | 6d | Pending | Feb 28, 2023 |
| 18174534 | DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERATURE SURFACES | JOERGER, KAITLIN S | 3655 | §103 | Final Rejection | 34d | Pending | Feb 24, 2023 |
| 18173365 | INKJET INKS FOR DEPOSITION AND REMOVAL IN A LASER DICING PROCESS | MELLOTT, JAMES M | 1759 | §102 | Final Rejection | 79d overdue | Pending | Feb 23, 2023 |
| 18172149 | LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT | TUROCY, DAVID P | 1718 | §103 | Final Rejection | 146d overdue | Pending | Feb 21, 2023 |
| 18171119 | SILICON SUPER JUNCTION STRUCTURES FOR INCREASED THROUGHPUT | RAHIM, NILUFA | 2893 | §103 | Final Rejection | 21d | Pending | Feb 17, 2023 |
| 18170335 | PHYSICAL LAYOUT SYNTHESIS FOR STANDARD CELLS USING SLICE LAYOUTS | GARBOWSKI, LEIGH M | 2851 | §103 | Non-Final OA | 24d overdue | Pending | Feb 16, 2023 |
| 18108719 | DIPOLE FORMATION PROCESSES | FAYETTE, NATHALIE RENEE | 2812 | §103 | Final Rejection | 22d | Pending | Feb 13, 2023 |
| 18168168 | PROCESSING SYSTEM AND METHODS TO CO-STRIKE PLASMA TO ENHANCE TUNGSTEN GROWTH INCUBATION DELAY | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 15d | Pending | Feb 13, 2023 |
| 18108407 | OVERLAPPING SUBSTRATE SUPPORTS AND PRE-HEAT RINGS, AND RELATED PROCESS KITS, PROCESSING CHAMBERS, METHODS, AND COMPONENTS | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 10d overdue | Pending | Feb 10, 2023 |
| 18108427 | In-situ gasket formation | LEE, GILBERT Y | 3675 | §103 | Non-Final OA | 27d | Pending | Feb 10, 2023 |
| 18108432 | TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFERRING SUBSTRATES | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | 27d | Pending | Feb 10, 2023 |
| 18107819 | System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter | TANDY, LAURA ELOISE | 2881 | §103 | Non-Final OA | 43d overdue | Pending | Feb 09, 2023 |
| 18107326 | LOW STRESS TUNGSTEN LAYER DEPOSITION | KIELIN, ERIK J | 2814 | §103 | Non-Final OA | 15d | Pending | Feb 08, 2023 |
| 18107157 | Electrostatic Chuck | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 43d overdue | Pending | Feb 08, 2023 |
| 18163766 | HIGH-PRECISION AND HIGH-THROUGHPUT MEASUREMENT OF PERCENTAGE LIGHT LOSS OF OPTICAL DEVICES | AMARA, MOHAMED K | 2877 | §103 | Non-Final OA | 2d overdue | Pending | Feb 02, 2023 |
| 18162074 | SUBSTRATE PROCESSING FOR AlN AND GaN POLARITY CONTROL | CHUNG, ANDREW | 2898 | §103 | Non-Final OA | 50d overdue | Pending | Jan 31, 2023 |
| 18160274 | METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMBER PLACEMENT VIA IMAGING | XING, CHRISTINA ILONA | 2877 | §103 | Non-Final OA | 91d overdue | Pending | Jan 26, 2023 |
| 18102055 | RF GROUNDING CONFIGURATION FOR PEDESTALS | KACKAR, RAM N | 1716 | §103 | Final Rejection | 17d overdue | Pending | Jan 26, 2023 |
| 18160109 | SURGING FLOW FOR BUBBLE CLEARING IN ELECTROPLATING SYSTEMS | WITTENBERG, STEFANIE S | 1795 | §103 | Final Rejection | — | Pending | Jan 26, 2023 |
| 18101932 | SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | 30d overdue | Pending | Jan 26, 2023 |
| 18159222 | APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS | NGUYEN, LAUREN | 2871 | §103 | Final Rejection | 40d | Pending | Jan 25, 2023 |
| 18101523 | PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND RELATED METHODS | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 3d overdue | Pending | Jan 25, 2023 |
| 18100289 | DRAM Transistor Including Pillars Formed Using Low-Temperature Ion Implant | ANDERSON, WILLIAM H | 2817 | §102 | Non-Final OA | 23d | Pending | Jan 23, 2023 |
| 18099846 | FORMATION OF METALLIC FILMS ON ELECTROLESS METAL PLATING OF SURFACES | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 34d | Pending | Jan 20, 2023 |
| 18099277 | COMPOSITE PVD TARGETS | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | 18d overdue | Pending | Jan 20, 2023 |
| 18098791 | DRY ETCH OF BORON-CONTAINING MATERIAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 29d | Pending | Jan 19, 2023 |
| 18099210 | SUBSTRATE SUPPORT CARRIER HAVING MULTIPLE CERAMIC DISCS | ADDISU, SARA | 3722 | §103 | Non-Final OA | 83d | Pending | Jan 19, 2023 |
| 18098547 | SUBSTRATE MODIFICATION FOR SUPERLATTICE CRITICAL THICKNESS IMPROVEMENT | RONO, VINCENT KIPKEMOI | 2891 | §103 | Final Rejection | 61d | Pending | Jan 18, 2023 |
| 18096207 | PHOTOLITHOGRAPHY ENHANCEMENT TECHNIQUES | TRAN, BINH X | 1713 | §103 | Non-Final OA | 19d | Pending | Jan 12, 2023 |
| 18094765 | CHAMBERS, METHODS, AND APPARATUS FOR GENERATING ATOMIC RADICALS USING UV LIGHT | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 55d | Pending | Jan 09, 2023 |
| 18093648 | HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS | TURNER, BRIAN | 2818 | §103 | Non-Final OA | 84d | Pending | Jan 05, 2023 |
| 18093121 | CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 24d overdue | Pending | Jan 04, 2023 |
| 18093156 | PLASMA-ENHANCED MOLYBDENUM DEPOSITION | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | 42d overdue | Pending | Jan 04, 2023 |
| 18091525 | STAMP TREATMENT TO GUIDE SOLVENT REMOVAL DIRECTION AND MAINTAIN CRITICAL DIMENSION | MALIK, VIPUL | 1754 | §103 | Final Rejection | 33d | Pending | Dec 30, 2022 |
| 18088889 | TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING | LAW, NGA LEUNG V | 1717 | §103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18065742 | Gas Distribution Apparatuses | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | 22d | Pending | Dec 14, 2022 |
| 18076234 | THERMAL CHOKE PLATE | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 49d overdue | Pending | Dec 06, 2022 |
| 18075216 | SEMICONDUCTOR FILM THICKNESS PREDICTION USING MACHINE-LEARNING | BAKER, EZRA JAMES | 2126 | §103 | Final Rejection | 16d | Pending | Dec 05, 2022 |
| 18070744 | MODELING FOR INDEXING AND SEMICONDUCTOR DEFECT IMAGE RETRIEVAL | ZAK, JACQUELINE ROSE | 2666 | §103 | Non-Final OA | 34d | Pending | Nov 29, 2022 |
| 18070114 | MONITORING OF DEPOSITED OR ETCHED FILM THICKNESS USING IMAGE-BASED MASS DISTRIBUTION METROLOGY | CAMMARATA, MICHAEL ROBERT | 2667 | §103 | Non-Final OA | 7d | Pending | Nov 28, 2022 |
| 18070010 | GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | 70d | Pending | Nov 28, 2022 |
| 17991540 | TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFERRING SUBSTRATES | MCCLAIN, GERALD | 3652 | Other | Non-Final OA | 13d | Pending | Nov 21, 2022 |
| 17991651 | PLASMA GENERATOR FOR EDGE UNIFORMITY | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 15d overdue | Pending | Nov 21, 2022 |
| 17990536 | SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE | BAND, MICHAEL A | 1794 | §103 | Final Rejection | 56d | Pending | Nov 18, 2022 |
| 17984201 | WAFER PROFILING FOR ETCHING SYSTEM | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 97d overdue | Pending | Nov 09, 2022 |
| 17981278 | MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS | WEDDLE, ALEXANDER MARION | 1712 | §103 | Non-Final OA | 9d | Pending | Nov 04, 2022 |
| 17975016 | TEMPERATURE CONTROLLED ELECTRODE TO LIMIT DEPOSITION RATES AND DISTORTION | TSAI, HSIEN C | 2881 | §103 | Non-Final OA | 42d overdue | Pending | Oct 27, 2022 |
| 17975195 | EPI OVERLAPPING DISK AND RING | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 17d overdue | Pending | Oct 27, 2022 |
| 17973927 | OXIDATION ENHANCED DOPING | JEFFERSON, QUOVAUNDA | 2899 | §103 | Final Rejection | 72d | Pending | Oct 26, 2022 |
| 17974385 | PIXEL DEFINING ENCAPSULATING BARRIER FOR RGB COLOR PATTERNING | MANDALA, MICHELLE | 2893 | §102 | Final Rejection | 42d | Pending | Oct 26, 2022 |
| 17970451 | PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDGE SHEATH CONTROL | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Oct 20, 2022 |
| 17968454 | ENHANCED CHAMBER CLEAN AND RECOVERY WITH DUAL FLOW PATH | MARKOFF, ALEXANDER | 1711 | §112 | Final Rejection | 27d | Pending | Oct 18, 2022 |
| 17968201 | METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE | PETERSON, ERIK T | 2898 | §112 | Final Rejection | 63d | Pending | Oct 18, 2022 |
| 18046872 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103 | Non-Final OA | 28d | Pending | Oct 14, 2022 |
| 17964684 | ELECTROSTATIC CHUCK WITH DETACHABLE SHAFT | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 3d overdue | Pending | Oct 12, 2022 |
| 17961516 | ACOUSTIC MONITORING OF CMP RETAINING RING | SOTO, CHRISTOPHER ASHLEY | 3723 | §103 | Non-Final OA | 22d | Pending | Oct 06, 2022 |
| 17961214 | LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COOLING OR HEATING | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | 28d | Pending | Oct 06, 2022 |
| 17954085 | MULTILAYER TRANSMISSION STRUCTURES FOR WAVEGUIDE DISPLAY | CHIEM, DINH D | 2874 | §103 | Non-Final OA | 23d | Pending | Sep 27, 2022 |
| 17954100 | PARTIALLY METALLIZED GRATING AS HIGH-PERFORMANCE WAVEGUIDE INCOUPLER | TRAN, HOANG Q | 2874 | §103 | Final Rejection | 15d | Pending | Sep 27, 2022 |
| 17952059 | ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING | LESLIE, MICHAEL S | 3745 | §103 | Non-Final OA | 4d overdue | Pending | Sep 23, 2022 |
| 17950012 | GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS | SHAMS, NAZMUN NAHAR | 1738 | §103 | Final Rejection | 50d overdue | Pending | Sep 21, 2022 |
| 17945861 | SINGULATION OF OPTICAL DEVICES FROM OPTICAL DEVICE SUBSTRATES VIA LASER ABLATION | THONG, YEONG JUEN | 3761 | §103 | Non-Final OA | 32d overdue | Pending | Sep 15, 2022 |
| 17941976 | SOLID STATE VARIABLE IMPEDANCE DEVICE AND SYSTEM | GLENN, KIMBERLY E | 2843 | §102 | Non-Final OA | 9d overdue | Pending | Sep 09, 2022 |
| 17903916 | ROBOT ARM TRAJECTORY CONTROL | SINGH, ESVINDER | 3657 | §103 | Final Rejection | 8d overdue | Pending | Sep 06, 2022 |
| 17900386 | FDSOI DEVICE INCLUDING SELF-ALIGNED DIFFUSION BREAK | PRIDEMORE, NATHAN ANDREW | 2898 | §103 | Non-Final OA | 7d | Pending | Aug 31, 2022 |
| 17896716 | ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS | SLUTSKER, JULIA | 2891 | §103 | Non-Final OA | 6d | Pending | Aug 26, 2022 |
| 17822009 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Non-Final OA | 13d | Pending | Aug 24, 2022 |
| 17893430 | CLAMPED DUAL-CHANNEL SHOWERHEAD | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 2d overdue | Pending | Aug 23, 2022 |
| 17893018 | GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 4d overdue | Pending | Aug 22, 2022 |
| 17891923 | INTEGRATED DIPOLE REGION FOR TRANSISTOR | WILCZEWSKI, MARY A | 2898 | §112 | Final Rejection | 11d overdue | Pending | Aug 19, 2022 |
| 17891753 | CONFORMAL MOLYBDENUM DEPOSITION | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | 21d | Pending | Aug 19, 2022 |
| 17886353 | ON WAFER DIMENSIONALITY REDUCTION | HICKS, AUSTIN JAMES | 2142 | §103 | Non-Final OA | 2d overdue | Pending | Aug 11, 2022 |
| 17880310 | SINGLE PROCESS GAS FEED LINE ARCHITECTURE | MOORE, KARLA A | 1716 | §103 | Non-Final OA | 20d | Pending | Aug 03, 2022 |
| 17880335 | SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 26d | Pending | Aug 03, 2022 |
| 17879097 | SELECTION GATE STRUCTURE AND FABRICATION METHOD FOR 3D MEMORY | PIZARRO CRESPO, MARCOS D | 2814 | §103 | Non-Final OA | 16d | Pending | Aug 02, 2022 |
| 17879091 | SELECTIVE SILICIDE DEPOSITION FOR 3-D DRAM | PARENDO, KEVIN A | 2896 | §103 | Non-Final OA | 15d overdue | Pending | Aug 02, 2022 |
| 17874627 | MINIMIZING SUBSTRATE BOW DURING POLISHING | HUANG, STEVEN | 3723 | §103 | Final Rejection | 6d | Pending | Jul 27, 2022 |
| 17874873 | SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | 71d overdue | Pending | Jul 27, 2022 |
| 17874105 | GENERATING INDICATIONS OF LEARNING OF MODELS FOR SEMICONDUCTOR PROCESSING | BONSHOCK, DENNIS G | 3992 | §103 | Final Rejection | 12d | Pending | Jul 26, 2022 |
| 17873842 | ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL | EVANGELISTA, THEODORE JUSTINE | 3761 | §103 | Final Rejection | — | Pending | Jul 26, 2022 |
| 17863656 | CONDUCTIVE OXIDE SILICIDES FOR RELIABLE LOW CONTACT RESISTANCE | LEE, DA WEI | 2817 | §103 | Final Rejection | 21d | Pending | Jul 13, 2022 |
| 17858006 | ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL POLISHING AND METHODS OF FORMING PADS | ZAWORSKI, JONATHAN R | 3723 | §103 | Final Rejection | 42d overdue | Pending | Jul 05, 2022 |
| 17810466 | MULTI STACK OPTICAL ELEMENTS USING TEMPORARY AND PERMANENT BONDING | LI, MEIYA | 2811 | §103 | Non-Final OA | 29d | Pending | Jul 01, 2022 |
| 17855524 | DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MECHANICAL POLISHING | HOLIZNA, CALEB ANDREW | 3723 | §103 | Non-Final OA | 2d overdue | Pending | Jun 30, 2022 |
| 17847454 | DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS | TURNER, BRIAN | 2818 | §103 | Final Rejection | 22d overdue | Pending | Jun 23, 2022 |
| 17844346 | DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL | KUMAR, SRILAKSHMI K | 1700 | §103 | Final Rejection | 140d overdue | Pending | Jun 20, 2022 |
| 17786520 | SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | 12d | Pending | Jun 16, 2022 |
| 17841561 | CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORPTION SPECIES SENSOR | YAZBACK, MAHER | 2877 | §103 | Non-Final OA | 30d | Pending | Jun 15, 2022 |
| 17748329 | METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 55d | Pending | May 19, 2022 |
| 17663695 | HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR FILM PROCESSING | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | 36d | Pending | May 17, 2022 |
| 17737665 | AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES | RETEBO, METASEBIA T | 2842 | §103 | Non-Final OA | 28d overdue | Pending | May 05, 2022 |
| 17735674 | POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL | MCFARLAND, TYLER JAMES | 3723 | §103 | Final Rejection | 25d overdue | Pending | May 03, 2022 |
| 17735623 | WAFER FILM FRAME CARRIER | SOTO, CHRISTOPHER ASHLEY | 3723 | §103 | Final Rejection | 46d overdue | Pending | May 03, 2022 |
| 17729715 | WINDOWS FOR RAPID THERMAL PROCESSING CHAMBERS | EVANGELISTA, THEODORE JUSTINE | 3761 | §103 | Non-Final OA | 98d overdue | Pending | Apr 26, 2022 |
| 17770237 | MAGNETIC LEVITATION SYSTEM, PROCESSING SYSTEM, AND METHOD OF TRANSPORTING A CARRIER | JONES, JAMES WILLIAM | 3615 | §103 | Non-Final OA | 84d overdue | Pending | Apr 19, 2022 |
| 17713350 | COATINGS WITH DIFFUSION BARRIERS FOR CORROSION AND CONTAMINATION PROTECTION | WELLINGTON, ANDREA L | 2800 | §103 | Non-Final OA | 53d overdue | Pending | Apr 05, 2022 |
| 17710728 | GENERATING SYNTHETIC MICROSPY IMAGES OF MANUFACTURED DEVICES | HALES, BRIAN J | 2125 | §103 | Final Rejection | 33d | Pending | Mar 31, 2022 |
| 17698769 | UTILIZATION OF SPARCE CODEBOOK IN MULTIPLEXED FLUORESCENT IN-SITU HYBRIDIZATION IMAGING | PLAYER, ROBERT AUSTIN | 1686 | §103 | Non-Final OA | 147d overdue | Pending | Mar 18, 2022 |
| 17695619 | UNIFORM RADIATION HEATING CONTROL ARCHITECTURE | MIRABITO, MICHAEL PAUL | 2187 | §103 | Non-Final OA | 71d | Pending | Mar 15, 2022 |
| 17693037 | SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 30d overdue | Pending | Mar 11, 2022 |
| 17690193 | Integrated CMOS Source Drain Formation With Advanced Control | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 117d overdue | Pending | Mar 09, 2022 |
| 17688650 | GENERATING AND UTILIZING SYNTHETIC TIME SERIES DATA FOR IMPOVING SUBSTRATE MANUFACTURING | SMITH, KEVIN LEE | 2122 | §103 | Non-Final OA | 15d | Pending | Mar 07, 2022 |
| 17687157 | COIL FOR IMPROVED PROCESS CHAMBER DEPOSITION AND ETCH UNIFORMITY | BAND, MICHAEL A | 1794 | §103 | Final Rejection | 141d overdue | Pending | Mar 04, 2022 |
| 17685272 | BIASABLE ROTATING PEDESTAL | OTT, PATRICK S | 1794 | §103 | Non-Final OA | 26d | Pending | Mar 02, 2022 |
| 17673538 | OPTICAL DEVICE FILM WITH TUNABLE REFRACTIVE INDEX | BOURQUINE, MACKENZI TATE | 2872 | §103 | Final Rejection | 30d | Pending | Feb 16, 2022 |
| 17673511 | CONTROLLED PROFILE POLISHING PLATEN | MCFARLAND, TYLER JAMES | 3723 | §103 | Non-Final OA | 13d | Pending | Feb 16, 2022 |
| 17672520 | ELECTROSTATIC CHUCK WITH METAL SHAFT | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 5d overdue | Pending | Feb 15, 2022 |
| 17571370 | PROCESSING CHAMBER CALIBRATION | DARWISH, AMIR ELSAYED | 2199 | §103 | Non-Final OA | 28d | Pending | Jan 07, 2022 |
| 17566584 | UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION | SWEELY, KURT D | 1718 | §103 | Final Rejection | 8d | Pending | Dec 30, 2021 |
| 17554596 | ADAPTIVE SLURRY DISPENSE SYSTEM | SHECHTMAN, SEAN P | 2896 | §102 | Final Rejection | 28d | Pending | Dec 17, 2021 |
| 17545781 | RECIPE OPTIMIZATION THROUGH MACHINE LEARNING | ALAWDI, ANWER AHMED | 2851 | §103 | Non-Final OA | 23d | Pending | Dec 08, 2021 |
| 17545618 | SCANNING RADICAL SENSOR USABLE FOR MODEL TRAINING | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 8d | Pending | Dec 08, 2021 |
| 17457597 | APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT RESISTANCE | BAUMAN, SCOTT E | 2815 | §103 | Final Rejection | 32d overdue | Pending | Dec 03, 2021 |
| 17541702 | METHODS FOR SEAMLESS GAP FILLING USING GRADIENT OXIDATION | CULLEN, PATRICK LAWRENCE | 2899 | §103 | Non-Final OA | 9d | Pending | Dec 03, 2021 |
| 17537314 | METHOD AND APPARATUS FOR REALTIME WAFER POTENTIAL MEASUREMENT IN A PLASMA PROCESSING CHAMBER | MOORE, KARLA A | 1716 | §103 | Final Rejection | 32d overdue | Pending | Nov 29, 2021 |
| 17456507 | METHOD OF BUILDING A 3D FUNCTIONAL OPTICAL MATERIAL LAYER STACKING STRUCTURE | CHANG, AUDREY Y | 2872 | §103 | Final Rejection | 140d overdue | Pending | Nov 24, 2021 |
| 17510111 | HORIZONTAL BUFFING MODULE | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 13d | Pending | Oct 25, 2021 |
| 17496242 | METHODS AND APPARATUS FOR CELL AND GENE THERAPY AT POINT-OF-CARE LOCATION | TRAN, JULIE THI | 3791 | §103 | Non-Final OA | 26d | Pending | Oct 07, 2021 |
| 17495140 | TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM | MIRABITO, MICHAEL PAUL | 2187 | §103 | Final Rejection | 27d | Pending | Oct 06, 2021 |
| 17463966 | INTEGRATED EPITAXY AND PRECLEAN SYSTEM | SWEELY, KURT D | 1718 | §103 | Final Rejection | 19d | Pending | Sep 01, 2021 |
| 17380788 | FACE-UP WAFER EDGE POLISHING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 14d | Pending | Jul 20, 2021 |
| 17379707 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103 | Non-Final OA | 28d | Pending | Jul 19, 2021 |
| 17374558 | APPARATUS DESIGN FOR PHOTORESIST DEPOSITION | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | 14d | Pending | Jul 13, 2021 |
| 17371441 | METHOD FOR DEPOSITION OF DEPTH-VARYING REFRACTIVE INDEX FILMS | SIPES, JOHN CURTIS | 2872 | §102 | Non-Final OA | 55d | Pending | Jul 09, 2021 |
| 17370619 | SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS | CROWELL, ANNA M | 1716 | Other | Final Rejection | 22d | Pending | Jul 08, 2021 |
| 17351530 | SEMITRANSPARENT SUBSTRATE SUPPORT FOR MICROWAVE DEGAS CHAMBER | WARD, THOMAS JOHN | 3761 | §103 | Final Rejection | 20d | Pending | Jun 18, 2021 |
| 17344788 | OBTAINING SUBSTRATE METROLOGY MEASUREMENT VALUES USING MACHINE LEARNING | TRIEU, EM N | 2128 | §103 | Final Rejection | 6d | Pending | Jun 10, 2021 |
| 17318166 | HIGH MOBILITY SEMICONDUCTOR CHANNEL BASED THIN-FILM TRANSISTORS AND MANUFACTURING METHODS | WIEGAND, TYLER J | 2812 | §103 | Final Rejection | 79d | Pending | May 12, 2021 |
| 17192355 | SYSTEMS AND METHODS FOR PROCESS CHAMBER HEALTH MONITORING AND DIAGNOSTICS USING VIRTUAL MODEL | ZAYKOVA-FELDMAN, LYUDMILA | 2857 | §103 | Non-Final OA | 19d | Pending | Mar 04, 2021 |
| 17186594 | SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES | LUND, JEFFRIE ROBERT | 1716 | §103 | Final Rejection | 38d overdue | Pending | Feb 26, 2021 |
| 17174732 | CHAMBER INTERFACE FOR LINKED PROCESSING TOOLS | KURPLE, KARL | 1717 | §103 | Final Rejection | — | Pending | Feb 12, 2021 |
| 17156957 | METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 34d | Pending | Jan 25, 2021 |
| 17142641 | DOPED SILICON NITRIDE FOR 3D NAND | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 12d | Pending | Jan 06, 2021 |
| 17099454 | APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION | QI, HUA | 1714 | §103 | Final Rejection | 12d | Pending | Nov 16, 2020 |
| 17089047 | PMOS High-K Metal Gates | PIZARRO CRESPO, MARCOS D | 2814 | §103 | Final Rejection | 44d overdue | Pending | Nov 04, 2020 |
| 17081773 | SURFACE ENCASING MATERIAL LAYER | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | 33d | Pending | Oct 27, 2020 |
| 17046975 | EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 86d overdue | Pending | Oct 12, 2020 |
| 17063824 | LOW CURRENT HIGH ION ENERGY PLASMA CONTROL SYSTEM | ALEJANDRO MULERO, LUZ L | 1716 | §112 | Final Rejection | 9d | Pending | Oct 06, 2020 |
| 17033201 | METHODS TO FABRICATE 2D WEDGE AND LOCALIZED ENCAPSULATION FOR DIFFRACTIVE OPTICS | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 41d | Pending | Sep 25, 2020 |
| 17023186 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING MODULATED CROSS-FLOW | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 13d | Pending | Sep 16, 2020 |
| 17019061 | ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 58d overdue | Pending | Sep 11, 2020 |
| 17003622 | PROCESSING SYSTEM AND METHOD OF CONTROLLING CONDUCTANCE IN A PROCESSING SYSTEM | KURPLE, KARL | 1717 | §103 | Final Rejection | 107d overdue | Pending | Aug 26, 2020 |
| 16971239 | SYSTEMS AND METHODS OF FORMATION OF A METAL HARDMASK IN DEVICE FABRICATION | MELLOTT, JAMES M | 1759 | §103 | Non-Final OA | 56d | Pending | Aug 19, 2020 |
| 16922931 | MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM | MOORE, KARLA A | 1716 | §112 | Non-Final OA | 28d | Pending | Jul 07, 2020 |
| 16915110 | METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK AND OTHER PATTERNING APPLICATIONS | SARKAR, ASOK K | 2891 | §103 | Non-Final OA | 105d overdue | Pending | Jun 29, 2020 |
| 16898244 | CLEAN UNIT FOR CHAMBER EXHAUST CLEANING | ALEJANDRO MULERO, LUZ L | 1716 | DPOther | Final Rejection | 70d | Pending | Jun 10, 2020 |
| 16831664 | SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING | DION, MARCEL T | 3723 | §103 | Final Rejection | 38d overdue | Pending | Mar 26, 2020 |
| 16718029 | SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS | MOORE, KARLA A | 1716 | §112 | Non-Final OA | 146d overdue | Pending | Dec 17, 2019 |
| 16525465 | METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT | WARD, THOMAS JOHN | 3761 | §103 | Non-Final OA | 6d | Pending | Jul 29, 2019 |
| 16134200 | SYSTEMS AND PROCESSES FOR PLASMA TUNING | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 142d overdue | Pending | Sep 18, 2018 |
| 16047641 | METAL BONDED ELECTROSTATIC CHUCK FOR HIGH POWER APPLICATION | GATES, ERIC ANDREW | 3722 | §112 | Non-Final OA | 29d | Pending | Jul 27, 2018 |
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