Prosecution Insights
Last updated: April 19, 2026
Application No. 17/902,167

HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS

Final Rejection §102§103§DP
Filed
Sep 02, 2022
Examiner
CHU, JOHN S Y
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Samsung Electronics
OA Round
2 (Final)
77%
Grant Probability
Favorable
3-4
OA Rounds
3y 1m
To Grant
82%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allow Rate
740 granted / 959 resolved
+12.2% vs TC avg
Moderate +5% lift
Without
With
+5.1%
Interview Lift
resolved cases with interview
Typical timeline
3y 1m
Avg Prosecution
65 currently pending
Career history
1024
Total Applications
across all art units

Statute-Specific Performance

§101
0.2%
-39.8% vs TC avg
§103
48.2%
+8.2% vs TC avg
§102
29.9%
-10.1% vs TC avg
§112
12.1%
-27.9% vs TC avg
Black line = Tech Center average estimate • Based on career data from 959 resolved cases

Office Action

§102 §103 §DP
DETAILED CORRESPONDENCE This Office action is in response to the amendment received December 10, 2025. The provisional rejection on the ground of nonstatutory double patenting as being unpatentable over claims 1-15 of copending Application No. 17/893,458 is withdrawn in view of the terminal disclaimer received December 10, 2025. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale or otherwise available to the public before the effective filing date of the claimed invention. (a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. The factual inquiries set forth in Graham v. John Deere Co., 383 U.S. 1, 148 USPQ 459 (1966), that are applied for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows: 1. Determining the scope and contents of the prior art. 2. Ascertaining the differences between the prior art and the claims at issue. 3. Resolving the level of ordinary skill in the pertinent art. 4. Considering objective evidence present in the application indicating obviousness or nonobviousness. Claims 1, and 3-15 are rejected under 35 U.S.C. 103 as being unpatentable over HATAKEYAMA et al (2017/0199457) in view of OKUYAMA et al (2013/0189533). The claimed invention now recites the following: PNG media_image1.png 716 650 media_image1.png Greyscale PNG media_image2.png 826 650 media_image2.png Greyscale PNG media_image3.png 644 656 media_image3.png Greyscale The amendment inserts a specific linking group for variable “ Z’”, wherein the heteroatom is now oxygen or sulfur. The heteroring can be monocyclic or a fused having up to a total of 10 rings as defined by the variable “d” and “e” being 0-5. HATAKEYAMA et al report an underlayer comprising a polymer having the structure shown here on page 5, para. [0050]: PNG media_image4.png 192 330 media_image4.png Greyscale The defined group for R3 include a carbazole which contains a heteroatom in the ring wherein each of the independent R3 groups include an arylene group meeting the claimed structure of Chemical formula 1. Applicants are further directed to para. [0071] wherein HATAKEYAMA et al report that other copolymerizable monomers may be used to include benzofuran (d=1 and d=0) as seen here which would meet amended claim 1 for Z’ being oxygen (O). PNG media_image5.png 222 376 media_image5.png Greyscale OKUYAMA et al is cited to disclose resist underlayer film comprising a polymer containing fluorene units and comonomer units which include heterocyclic groups such as thiophene (Z’=S, d =1 and e = 1) and furan (Z’=O, and d=0 and e=0) and carbazole. These monomer groups meet amended claim 1 for Z’ being oxygen (O) or sulfur (S), see page 3, para. [0036]. PNG media_image6.png 92 364 media_image6.png Greyscale Exemplary copolymers are reported on page 3-5, such as Formula (3-1) wherein the listed monomers disclosed would be in a random order in the copolymer/terpolymer. PNG media_image7.png 192 566 media_image7.png Greyscale Claims 3-7 include a benzofuran unit in the copolymer which is met by HATAKEYAMA et al above in para. [0071) and the thiophene is reported in OKUYAMA et al, para. [0036]. Claims 8 is met by the formula above in HATAKEYAMA et al formula (2) for ring “X”. Claim 9 and 10 exemplify a furan comonomer and a benzene comonomer taught in HATAKEYAMA et al. page 6, para. [0050], line 2: PNG media_image8.png 888 370 media_image8.png Greyscale Claims 11-15 are met by the molecular weight disclosed on page 22 for the polymer structures. The solvent is found in page 25 to 26, Table 1. It would have been prima facie obvious to one of ordinary skill in the art of underlayer composition to select known units such as thiophene, furan and benzofuran as other polymerizable monomers in the copolymer of HATAKEYAMA et al wherein equivalent comonomers can be used with the reasonable expectation of having an underlayer which is excellent in reducing reflection with pattern formation which high dimensional accuracy. Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN S CHU whose telephone number is (571)272-1329. The examiner can normally be reached M-F, IFP-Flex. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Mark Huff, can be reached at telephone number 571-272-1385. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see http://portal.uspto.gov/external/portal. Should you have questions about access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. /John S. Chu/ Primary Examiner, Art Unit 1737 J. Chu March 18, 2026
Read full office action

Prosecution Timeline

Sep 02, 2022
Application Filed
Sep 06, 2025
Non-Final Rejection — §102, §103, §DP
Dec 10, 2025
Response Filed
Mar 18, 2026
Final Rejection — §102, §103, §DP (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
77%
Grant Probability
82%
With Interview (+5.1%)
3y 1m
Median Time to Grant
Moderate
PTA Risk
Based on 959 resolved cases by this examiner. Grant probability derived from career allow rate.

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