DETAILED ACTION
Claim Rejections - 35 USC § 102
The text of those sections of Title 35, U.S. Code not included in this action can be found in a prior Office action.
Claims 1, 2, 4, 10 and 15 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Suzuki (WO2013/046286).
Suzuki teaches a holding apparatus for holding multiple substrates comprising:
- carrier inner plates parallel to each other for holding substrates on either side – see the inner supports including two substrates as per of Fig. 16 and
- carrier outer plates parallel to the inner plates for supporting a substrate only on its inner surface, see outer plates on the outer edges with one substate, and
- shielding plates space apart from the outer plates and shade the outer plates – see heat insulating plates 213. As it is placed into system per Fig. 17, the elements of Fig. 16 are unified and the shielding plates connected to the inner/outer plates indirectly.
The requirement of “in a plasma assisted deposition” is merely an intended use but in any case Suzuki teaches a plasma system [0059].
Regarding claim 2, the plates are arranged as claimed / parallel.
Regarding claim 4, the shield plates are free of electrical contact as presented.
Regarding claim 10, the shielding plates do not include cutouts.
Regarding claims 15, as depicted – the shielding plates are indirectly connected.
Claim Rejections - 35 USC § 103
Claims 3, 7-9, 12-14 and 16 are rejected under 35 U.S.C. 103 as being unpatentable over Suzuki.
Regarding claims 3, 13 and 14, the teachings do not include the claimed dimensions but generally the selection of size and shape is not patentable, see MPEP 2144.04 IV. A. and B. In this case one would alter the size and shape so long as the dimensions resulted in the requirements of shielding as described. There are no claimed limitations on what difference in size is required.
Regarding claim 7-9 and 12, Suzuki is silent on the composition of the plates, but as per MPEP 2144.07, the selection of a particular material for its intended use is obvious without a showing of criticality. In this case, to form the plates of one or more materials, including the materials such as graphite and/or metal, would have been obvious without a showing of criticality of using multiple materials and including graphite in the parts.
Regarding claim 16, the teachings do not include how the elements are connected – but Examiner takes Official Notice that to use rods to connect various parts would have been obvious wherein the teachings depict (see Figs. 16 and 17) that the elements are to be held together for movement.
Claims 5 and 6 are rejected under 35 U.S.C. 103 as being unpatentable over Suzuki in view of Seo (2006/0137607).
Regarding claims 5 and 6, the teachings of Suzuki do not include a cooling structure on the heat shields – but Seo teaches that on a heat dissipation plate for use in a substrate processing apparatus it is useful to include heat dissipation fins [0056]. It would have been obvious at the effective date of the invention to apply the heat dissipation fins of Seo on the heat shields of Suzuki. Both elements are generally to prevent the transfer of heat and Seo teaches that the fins (understood generally as “rib-like” structures) are useful for removing heat.
Response to Arguments
Applicant's arguments filed 04/15/2026 have been fully considered – the Office notes that reference was made to a different Suzuki reference than was applied. Upon further consideration, Suzuki appears to the be the closest prior art to the instant claims. The original rejection is withdrawn but one over Suzuki applied – however, the Office maintains that Ueda is still relevant art and would potentially be applied based on potential amendment.
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOSEPH A MILLER, JR whose number is (571)270-5825 and fax is (571)270-6825. If attempts to reach the examiner by telephone are unsuccessful, the examiner's supervisor, Michael Cleveland, can be reached on 571-272-1418. The fax number for the organization where this application or proceeding is assigned is 571-273-8300.
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/JOSEPH A MILLER, JR/Primary Examiner, Art Unit 1712
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