Prosecution Insights
Last updated: July 17, 2026
Application No. 18/098,233

PHOTOSENSITIVE POLYMER CAPABLE OF MULTI-STEP DEPROTECTION REACTION, PHOTORESIST COMPOSITION INCLUDING THE PHOTOSENSITIVE POLYMER, AND METHOD OF MANUFACTURING THE INTEGRATED CIRCUIT DEVICE

Non-Final OA §103
Filed
Jan 18, 2023
Priority
Jan 25, 2022 — RE 10-2022-0011046
Examiner
CHU, JOHN S Y
Art Unit
1737
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Samsung Electronics Co., Ltd.
OA Round
2 (Non-Final)
77%
Grant Probability
Favorable
2-3
OA Rounds
0m
Est. Remaining
83%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allowance Rate
749 granted / 971 resolved
+12.1% vs TC avg
Moderate +6% lift
Without
With
+5.6%
Interview Lift
resolved cases with interview
Typical timeline
2y 11m
Avg Prosecution
49 currently pending
Career history
1034
Total Applications
across all art units

Statute-Specific Performance

§101
0.4%
-39.6% vs TC avg
§103
75.6%
+35.6% vs TC avg
§102
12.8%
-27.2% vs TC avg
§112
6.3%
-33.7% vs TC avg
Black line = Tech Center average estimate • Based on career data from 971 resolved cases

Office Action

§103
DETAILED ACTION This Office action is in response to the IDS received April 10, 2026. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. The factual inquiries set forth in Graham v. John Deere Co., 383 U.S. 1, 148 USPQ 459 (1966), that are applied for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows: 1. Determining the scope and contents of the prior art. 2. Ascertaining the differences between the prior art and the claims at issue. 3. Resolving the level of ordinary skill in the pertinent art. 4. Considering objective evidence present in the application indicating obviousness or nonobviousness. Claims 1-20 are rejected under 35 U.S.C. 103 as being unpatentable over KR-10-2014-0105377 (SAGEHASHI et al) in view of MASAYAMA et al (JP-2017-0119678). The claimed invention recites the following: PNG media_image1.png 634 648 media_image1.png Greyscale PNG media_image2.png 286 662 media_image2.png Greyscale SAGEHASHI et al disclose a photosensitive polymer having the following structure as seen on page 58 shown here: PNG media_image3.png 128 524 media_image3.png Greyscale The first monomer unit meets the claimed polymer of Formula 1, lacking only the R3 group being a t-butyl substituted with a first substituent wherein the first substituent is a C1 to C10 alkyl group. Applicants are directed to the second monomer unit above in SAGEHASHI et al which is a t-amyl group having a first substituent which is a C1 alkyl group. Both groups on the polymer side chain are acid labile and applicants have disclosed on page 23 that the acid labile groups for XE can be any of those listed in para. [0149], see below: PNG media_image4.png 732 918 media_image4.png Greyscale In addition, the divalent linking group between the esters groups can be alkylene or cycloaliphatic groups, see below from para. [0093]. PNG media_image5.png 574 682 media_image5.png Greyscale SAGEHASHI et al lacks a repeating unit comprising an aromatic ring. MASAYAMA et al disclose a photosensitive polymer comprising units similar to those disclose in SAGEHASHI et al wherein a divalent linking group in a repeating unit between two ester groups can be alkylene and further disclose the addition of a non-acid labile unit having an aromatic ring for use having a KrF excimer laser, EUV , see para. [0047] PNG media_image6.png 212 922 media_image6.png Greyscale Claims 2-13 are met by the copolymer above for the linking groups defined by R2 . Claims 14-20 for the method are reported in paras. [0048] – [0056] in MASAYAMA et al and in para. [0241] of SAGEHASHI et al, see the translation from MASAYAMA et al below: PNG media_image7.png 676 782 media_image7.png Greyscale It would have been prima facie obvious to one of ordinary skill in the art of photosensitive compositions to substitute any known acid labile side chain groups as reported in para. [0149] in for the t-butyl group on the first monomer unit as these acid labile group are seen as equivalent in function to give improved photolithographic properties. And absent any objective evidence to show unexpected results over the prior art acid labile group, the claims would be seen as obvious to the skilled artisan in the photoresist art. Any inquiry concerning this communication or earlier communications from the examiner should be directed to JOHN S. CHU whose telephone number is (571)272-1329. The examiner can normally be reached on M-F, IFP-Flex. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Keith Hendricks, can be reached at telephone number 571-272-1401. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from Patent Center. Status information for published applications may be obtained from Patent Center. Status information for unpublished applications is available through Patent Center to authorized users only. Should you have questions about access to the USPTO patent electronic filing system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). Examiner interviews are available via a variety of formats. See MPEP § 713.01. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) Form at https://www.uspto.gov/InterviewPractice. /John S. Chu/ Primary Examiner, Art Unit 1737 J. Chu June 22, 2026
Read full office action

Prosecution Timeline

Jan 18, 2023
Application Filed
Sep 30, 2025
Non-Final Rejection mailed — §103
Nov 13, 2025
Examiner Interview Summary
Nov 13, 2025
Applicant Interview (Telephonic)
Dec 29, 2025
Response Filed
Jun 24, 2026
Non-Final Rejection mailed — §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12681385
PHOTOSENSITIVE RESIN COMPOSITION AND MANUFACTURING METHOD OF DISPLAY DEVICE USING THE SAME
3y 12m to grant Granted Jul 14, 2026
Patent 12663714
RESIST COMPOSITION AND PATTERN FORMING PROCESS
2y 11m to grant Granted Jun 23, 2026
Patent 12663715
PHOTOSENSITIVE RESIN FILM AND APPLICATION THEREOF
2y 3m to grant Granted Jun 23, 2026
Patent 12645142
A PHOTORESIST COMPOSITION, A METHOD FOR MANUFACTURING A PHOTORESIST COATING, ETCHED PHOTORESIST COATING, AND ETCHED SI CONTAINING LAYER(S), AND MANUFACTURING A DEVICE USING THEREOF
5y 5m to grant Granted Jun 02, 2026
Patent 12625427
NOVEL NAPHTHALIMIDE SULFONATE DERIVATIVE, AND PHOTOACID GENERATOR AND PHOTORESIST COMPOSITION EACH COMPRISING SAME
2y 10m to grant Granted May 12, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

2-3
Expected OA Rounds
77%
Grant Probability
83%
With Interview (+5.6%)
2y 11m (~0m remaining)
Median Time to Grant
Moderate
PTA Risk
Based on 971 resolved cases by this examiner. Grant probability derived from career allowance rate.

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