Prosecution Insights
Last updated: April 19, 2026
Application No. 18/147,644

FABRICATION OF NOVEL DEVICES USING ION BEAMS

Non-Final OA §102§112§DP
Filed
Dec 28, 2022
Examiner
WALL, VINCENT
Art Unit
2898
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Intel Corporation
OA Round
1 (Non-Final)
62%
Grant Probability
Moderate
1-2
OA Rounds
2y 8m
To Grant
87%
With Interview

Examiner Intelligence

Grants 62% of resolved cases
62%
Career Allow Rate
488 granted / 793 resolved
-6.5% vs TC avg
Strong +25% interview lift
Without
With
+25.4%
Interview Lift
resolved cases with interview
Typical timeline
2y 8m
Avg Prosecution
52 currently pending
Career history
845
Total Applications
across all art units

Statute-Specific Performance

§101
2.0%
-38.0% vs TC avg
§103
48.9%
+8.9% vs TC avg
§102
16.9%
-23.1% vs TC avg
§112
27.2%
-12.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 793 resolved cases

Office Action

§102 §112 §DP
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions At this time Examiner is not requiring a restriction as the devices read on the method and vice-versa. Information Disclosure Statement As of February 2, 2026 no information disclosure statement has been made of record. Drawing Objections The drawings are objected to because: The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. The claimed subject matter of claim 12 is not shown. Applicant does not have a drawing showing any system, nor is any system shown which is capable of performing the claimed steps. No new matter should be entered. The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. The claimed subject matter of claim 18 is not shown. Applicant does not have a drawing showing any processing circuitry coupled to storage, nor does Applicant show how this processing circuitry is configured to process any of the instructions claimed. No new matter should be entered Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance. Claim Rejections - 35 USC § 112(b) The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 3-4, 9, 14-15, and 20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claims 3-4, 9, 14-15, and 20 recites the limitation "the mask" or “the patterning mask” or “hard mask”. There is insufficient antecedent basis for this limitation in the claim. None of the independent claims 1, 12, or 18 recite a mask. As the claims have insufficient antecedent basis Examiner is unable to interpret the claims for examination without considerable speculation as to how the terms above would interact with the claimed structure. In re Steele, 305 F.2d 859 (CCPA 1962), where an examiner should not simply speculate about the meaning of the claim language and then enter an obviousness rejection in view of that speculative interpretation. MPEP 2143.03(I). Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 1-2, 5, 8, 10-13, 16-20 is/are rejected under 35 U.S.C. 102(a)(1) as being (anticipated) by Defect Control and n-Doping of Encapsulated Graphene by Helium-Ion-Beam Irradiation, Gaurav Nanda, Srijit Goswami, Kenji Watanabe, Takashi Taniguchi, and Paul F. A. Alkemade, Nano Letters 2015 15 (6), 4006-4012 (“Nanda”). Regarding claim 1, Nanda teaches: overlaying a wafer assembly of one or more layers with a top layer comprised of a material having 2D material characteristics (figure 6a where the top layer is h-BN); applying an ion beam targeted to at least one of one or more regions of the top layer (figure 6a where He+ is applied), a metal layer placed on top of the top layer, or one or more ion stoppers placed on top of the top layer (figure 6a shows Cr/au on top of h-bn, wherein the ion beam is tuned using a predetermined energy range or a dosing level of ions to modify the material characteristics of the 2D material at the one or more regions of the top layer; and creating a bond between the one or more 2D and metal layers to the one or more regions of the top layer where the material characteristics of the 2D material have been modified due to the impinging ion beam (pg 4011, where He+ ions are beamed into the h-bn encapsulated graphene causing the h-bn encapsulated graphene to become n-type. The 2D and metal layers are bonded together as they are stacked on top of each other). Regarding claims 2, Nanda teaches: further comprising generate tuned regions of the top layer based on the modified characteristics of the one or more regions (the area exposed to the He+ is so tuned; see Applicant’s ¶ 0024, where exposure to ion beam is the tuning). Regarding claim 5, Nanda teaches: wherein exposed regions of the top layer are hit by the ion beam to generate the tuned regions (figure 6a shows the exposed regions are hit by He+). Regarding claim 8, Nanda teaches: wherein the one or more layers of the wafer assembly comprise an oxide layer, a metal layer, or a silicon layer (figure 6a). Regarding claim 10, Nanda teaches: wherein the ion beam comprises ion beams of helium, neon, nitrogen, oxygen, argon, or xenon (figure 6a). Regarding claim 11, Nanda teaches: wherein the 2D material comprises at least one of transition metal dichalcogenide (TMD), Graphene, hBn, BCN, Fluorographene, Graphene Oxide, MoS2, WS2, MoSe2, WSe2, Semiconducting dichalcogenides, Metalic Dichalcogenides, Layered semiconductors, , Micas BSCCO, MoO3, WO3, Layered Cu oxides, TiO2, MnO2, V2O5, TaO3, RuO2, Perovskite-type, or Hydroxides (figure 6a). Regarding claim 12, Claim 12 is rejected for the same reasons as claim 1 above. Claim 12 is different than claim 1 in that it requires… the system comprising computer-executable instructions. This is inherent in the process. This is because in order to for one to perform either the claimed process and/or the prior art process they are going to have to use a computer controlled machine. Regarding claim 13, Claim 13 is rejected for the same reasons as claim 2 above. Regarding claim 16, Claim 16 is rejected for the same reasons as claim 5 above. Regarding claim 17, Claim 17 is rejected for the same reasons as claim 8 above. Regarding claim 18, Claim 18 is rejected for the same reasons as claim 1 above. Claim 18 is different than claim 1 in that it requires…“the device comprising processing circuitry coupled to storage, the processing circuitry configured to…” This is inherent in the process. This is because in order to for one to perform the process it will have to done in a semiconductor tool. Said semiconductor tool will likely be from one of Applicant’s, Intel’s, machine supplies such as Applied Materials, etc. Regarding claim 19, Claim 19 is rejected for the same reasons as claim 2 above. Regarding claim 20, Claim 20 is rejected for the same reasons as claim 2 above. Potentially Allowable Subject Matter Claims 6-7 is rejected under double patenting and objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims, and the double patenting rejection is overcome. The following is a statement of reasons for the indication of allowable subject matter: Regarding claim 6, The prior art does not teach the ion beam passes through the metal layer. Regarding claim 7, The prior art does not teach the ion beam passes through the metal layer. In regards to the limitation of causing a bond between the metal layer top layer. This is a result of the ion beam. Applicant’s paragraph 0029. That is to say if one has the ion beam pass through the top metal layer it will create a tuned region and create the bond. There is no separate bonding action happening based upon Applicant’s specification. These claimed effects are generated by the same cause at the same time. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to VINCENT WALL whose telephone number is (571)272-9567. The examiner can normally be reached Monday to Thursday at 7:30am to 2:30pm PST. Interviews can be scheduled on Tuesday thru Thursday at 10am PST or 2pm PST. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Jessica Manno can be reached at 571-272-2339. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /VINCENT WALL/ Primary Examiner, Art Unit 2898
Read full office action

Prosecution Timeline

Dec 28, 2022
Application Filed
Jul 05, 2023
Response after Non-Final Action
Feb 02, 2026
Non-Final Rejection — §102, §112, §DP (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
62%
Grant Probability
87%
With Interview (+25.4%)
2y 8m
Median Time to Grant
Low
PTA Risk
Based on 793 resolved cases by this examiner. Grant probability derived from career allow rate.

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