Prosecution Insights
Last updated: April 19, 2026
Application No. 18/171,795

SUBTRACTIVE METAL VIA WITH METAL BRIDGE

Non-Final OA §102§103
Filed
Feb 21, 2023
Examiner
ZABEL, ANDREW JOHN
Art Unit
2818
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
International Business Machines Corporation
OA Round
1 (Non-Final)
90%
Grant Probability
Favorable
1-2
OA Rounds
3y 5m
To Grant
99%
With Interview

Examiner Intelligence

Grants 90% — above average
90%
Career Allow Rate
26 granted / 29 resolved
+21.7% vs TC avg
Strong +16% interview lift
Without
With
+15.8%
Interview Lift
resolved cases with interview
Typical timeline
3y 5m
Avg Prosecution
28 currently pending
Career history
57
Total Applications
across all art units

Statute-Specific Performance

§103
61.4%
+21.4% vs TC avg
§102
24.5%
-15.5% vs TC avg
§112
12.9%
-27.1% vs TC avg
Black line = Tech Center average estimate • Based on career data from 29 resolved cases

Office Action

§102 §103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale , or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 1- 6 , 9- 15, and 18-20 is/are rejected under 35 U.S.C. 102 (a)(1) as being anticipated by Qian et al (US 20220165670 A1) . Qian et al teaches [ claim 1] A semiconductor structure comprising: a metal layer having a first pattern ( figure 5, paragraphs 0033-0035, element 514 on the bottom of the device [element 500] is the first metal layer with a metal pattern), a metal bridge located within the first pattern ( figure 5, paragraphs 0033-0035, where element 514 is the metal bridge and exists in the first pattern ); at least one via disposed on a portion of the metal layer such that the metal bridge extends to a top surface of the at least one via ( figure 5, paragraphs 0033-0035, where element 512 has a gap for a through via that is disposed into the gap and the metal bridge extends to a top surface of the via ); and a metal cap disposed directly on top of the at least one via disposed on the portion of the metal layer (figure 5, paragraphs 0033-0035, where element 510 on top of element 514 is the metal cap on a portion of the metal layer). [claim 2] The semiconductor structure of claim 1, wherein the metal bridge is at a same level as the metal layer ( figure 5, paragraphs 0033-0035, where element 514 extends to the bottom of the device [element 500] and thus is in the metal layer). [claim 3] The semiconductor structure of claim 1, wherein the metal bridge is at a same level as the at least one via ( figure 5, paragraphs 0033-0035, where element 514 [the metal bridge] is at the same level as the through via [in gap element 512]). [claim 4] The semiconductor structure of claim 1, wherein the metal bridge connects adjoining metal layers ( figure 5, paragraphs 0033-0035, where the metal bridge [element 514] connects the metal at the bottom of the device [element 500] to the the top element 510). [claim 5] The semiconductor structure of claim 1, wherein the metal bridge includes a plurality of metals bridges ( figure 5, paragraphs 0033-0035, where element 514 comprises two different sides of element 512 which can be seen as a plurality of metal bridges that connects the bottom layer to the top metal layer [element 510]). [claim 6] The semiconductor structure of claim 5, wherein the plurality of metal bridges are generally rectangular-shaped ( figure 5, paragraphs 0033-0035, where element 514 is rectangular in shape [even though it may be tilted at an angle, the shape of the layer is rectangular]). [claim 9] A semiconductor structure comprising: a metal layer having a first pattern (figure 5, paragraphs 0033-0035, where the layer below element 502 is the first metal layer with a first pattern), a metal bridge directly contacting the metal layer (figure 5, paragraphs 0033-0035, where element 514 contacts the layer below element 502). and a via disposed on a portion of the metal layer such that the metal bridge extends along a sidewall of the via to a topmost surface of the via (figure 5, paragraphs 0033-0035, where a via is disposed inside the gap of element 512, and the metal bridge [element 514] extends up sidewalls of the via to a top of the through via) . [claim 10] The semiconductor structure of claim 9, wherein a metal cap is disposed directly on the via disposed on the portion of the metal layer (figure 5, paragraphs 0033-0035, where element 510 is the metal cap disposed on top of the through via gap [element 512] and on top fo the metal bridge [element 514]). [claim 11] The semiconductor structure of claim 9, wherein the metal bridge is at a same level as the metal layer (figure 5, paragraphs 0033-0035, where element 514 [metal bridge] is on the same level as the metal layer [layer below element 502]). [claim 12] The semiconductor structure of claim 9, wherein the metal bridge is at a same level as the via (figure 5, paragraphs 0033-0035, where element 514 is at the same level as the through via [element 512] as it extends up the sidewalls of the via). [claim 13] The semiconductor structure of claim 9, wherein the metal bridge connects adjoining metal layers (figure 5, paragraphs 0033-0035, where element 514 connects the layer below element 502 and the element 510 [metal layer on top of via gap 512]). [claim 14] The semiconductor structure of claim 9, wherein the metal bridge includes a plurality of metals bridges (figure 5, paragraphs 0033-0035, where element 514 is comprised of two sides of element 512 which make up the plurality of metal bridges which connect together on the top of element 512). [claim 15] The semiconductor structure of claim 14, wherein the plurality of metal bridges are generally rectangular-shaped (figure 5, paragraphs 0033-0035, where element 514 [both sides of element 512] are rectangular shaped even though it is tilted a little bit, the shape is still rectangular). [claim 18] A method for constructing a semiconductor structure, the method comprising: forming a metal layer having a first pattern (figure 4, paragraph 0031, block 490 is the metal layer formed with a first patter on the bottom of element 502 of figure 5), constructing a metal bridge located within the first pattern (figure 4, paragraph 0031, block 480 is the metal bridge formed on a metal layer surrounding the through via [element 512 of figure 5]), forming at least one via on a portion of the metal layer such that the metal bridge extends to a top surface of the at least one via (figure 4, paragraph 0031, block 470 is the formation of the via that connects to a top metal layer [element 510 of figure 5], and block 490 forms the metal interconnect structure which connects the metal layer below element 502 of figure 5 to element 510 of figure 5) ; and disposing a metal cap directly on top of the at least one via disposed on the portion of the metal layer (figure 4, paragraph 0031, block 460 forms the metal cap [element 510 of figure 5] which sits on top of the through via [element 512 of figure 5] and connects to the metal bridge [element 514 of figure 5]). [claim 19] The method of claim 18, wherein the metal bridge is at a same level as the metal layer ( figure 5, paragraphs 0033-0035, where the metal layer is below element 502 and the metal bridge [element 514] extends to the metal layer). [claim 20] The method of claim 18, wherein the metal bridge includes a plurality of metal bridges electrically connecting a plurality of adjoining metal layers (figure 5, paragraphs 0033-0035, where element 514 extends from below element 502 [metal layer] to above element 514 through element 510 [adjoining metal layer]). Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claim (s) 7-8 and 16-17 is/are rejected under 35 U.S.C. 103 as being unpatentable over Qian et al (US 20220165670 A1) in view of Bonilla et al (US 9852980 B2). Qian et al teaches all of the limtiations of the parent claim, claims 1 and 9, but does not specifically disclos e [claim 7] The semiconductor structure of claim 1, wherein a dielectric encompasses the metal bridge . [claim 8] The semiconductor structure of claim 1, wherein the metal bridge includes ruthenium (Ru). [claim 16] The semiconductor structure of claim 9, wherein a dielectric encompasses the metal bridge. [claim 17] The semiconductor structure of claim 9, wherein the metal bridge includes ruthenium (Ru). However, Bonilla et al does teach [claim 7] The semiconductor structure of claim 1, wherein a dielectric encompasses the metal bridge (figure 2, col 5 lines 29-54, where element 206 is the dielectric layer and encompasses the metal bridge, element 203. Where element 203 supplants element 514 of Qian et al and element 202 supplants element 512 of Qian et al). [claim 8] The semiconductor structure of claim 1, wherein the metal bridge includes ruthenium (Ru) (figure 2, col 7 lines 47-52, where element 203 [metal bridge] can be made of Ruthenium). [claim 16] The semiconductor structure of claim 9, wherein a dielectric encompasses the metal bridge (figure 2, col 5 lines 29-54, where element 206 is the dielectric layer and encompasses the metal bridge, element 203. Where element 203 supplants element 514 of Qian et al and element 202 supplants element 512 of Qian et al). [claim 17] The semiconductor structure of claim 9, wherein the metal bridge includes ruthenium (Ru) (figure 2, col 7 lines 47-52, where element 203 [metal bridge] can be made of Ruthenium). It would have been obvious to one of ordinary skill in the art at the time of filing to have modified the teachings of Qian et al to incorporate the teachings of Bonilla et al in order to maximize maximize electrical durability by using Ruthenium as well as placing a dielectric layer around the metal connectors so no extra parasitic effects can affect the conductive material. Conclusion The prior art made of record and not relied upon is considered pertinent to applicant's disclosure : Bouche et al (US 20220130758), Anderson et al (US 11289371), Xie et al (US 20210082714), Topaloglu et al (US 20200126842), Banno et al (US 20160359110), Bao et al (US 20150137377), Yang et al (US 8716127), and Vega et al (US 20220181252). Any inquiry concerning this communication or earlier communications from the examiner should be directed to FILLIN "Examiner name" \* MERGEFORMAT ANDREW ZABEL whose telephone number is FILLIN "Phone number" \* MERGEFORMAT (703)756-4788 . The examiner can normally be reached FILLIN "Work Schedule?" \* MERGEFORMAT M-F 9-5PM ET . Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, FILLIN "SPE Name?" \* MERGEFORMAT Jeff W Natalini can be reached at FILLIN "SPE Phone?" \* MERGEFORMAT 572-272-2266 . The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /ANDREW JOHN ZABEL/ Examiner, Art Unit 2818 /JEFF W NATALINI/ Supervisory Patent Examiner, Art Unit 2818
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Prosecution Timeline

Feb 21, 2023
Application Filed
Jun 13, 2024
Response after Non-Final Action
Mar 17, 2026
Non-Final Rejection — §102, §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
90%
Grant Probability
99%
With Interview (+15.8%)
3y 5m
Median Time to Grant
Low
PTA Risk
Based on 29 resolved cases by this examiner. Grant probability derived from career allow rate.

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