Prosecution Insights
Last updated: July 17, 2026
Application No. 18/227,277

SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS

Final Rejection §102§112
Filed
Jul 27, 2023
Priority
Aug 02, 2022 — RE 10-2022-0095890
Examiner
BERMAN, JASON
Art Unit
1794
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Tes Co. Ltd.
OA Round
2 (Final)
64%
Grant Probability
Moderate
3-4
OA Rounds
5m
Est. Remaining
85%
With Interview

Examiner Intelligence

Grants 64% of resolved cases
64%
Career Allowance Rate
581 granted / 913 resolved
-1.4% vs TC avg
Strong +22% interview lift
Without
With
+21.7%
Interview Lift
resolved cases with interview
Typical timeline
3y 4m
Avg Prosecution
25 currently pending
Career history
940
Total Applications
across all art units

Statute-Specific Performance

§103
91.9%
+51.9% vs TC avg
§102
3.4%
-36.6% vs TC avg
§112
2.2%
-37.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 913 resolved cases

Office Action

§102 §112
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . DETAILED ACTION Status of the Claims Claims 1, 4-7, 9-11 are pending in the current application. Response to Amendment Applicant’s amendment of 3/31/26 does not render the application allowable. Status of the Rejections All rejections from the previous office action are withdrawn. New grounds of rejection under 35 USC 112 are necessitated by the amendments. Claim Objections Claim 1 is objected to because of the following informalities: the claim contains the phrase “wherein the airtight unit includes comprises:” [emphasis added] in line 7. Appropriate correction is required. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 1, 4-5, 10 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 1 is directed towards a showerhead assembly which comprises a heater body and airtight unit, and the airtight unit is further defined with respect to a lid of a chamber (diffusion space) and the elastic pressurizer fixed to the lid. While it is not improper to claim an apparatus with respect to its intended use or other structures to be used with the apparatus, in this case it is unclear as to whether the chamber and chamber lid are being included as part of the showerhead assembly. Claims 4-5 and 10 are rejected for their dependence upon claim 1. Claims 6-7, 9, 11 are allowed. Claim 6 requires structure for securing a showerhead assembly, the airtight unit’s specific series of connecting structures, which is not taught nor suggested by the prior art. Response to Arguments Applicant’s arguments are generally accepted and therefore the prior rejections under 35 USC 102/103 have been withdrawn. Conclusion Applicant's amendment necessitated the new ground(s) of rejection presented in this Office action. Accordingly, THIS ACTION IS MADE FINAL. See MPEP § 706.07(a). Applicant is reminded of the extension of time policy as set forth in 37 CFR 1.136(a). A shortened statutory period for reply to this final action is set to expire THREE MONTHS from the mailing date of this action. In the event a first reply is filed within TWO MONTHS of the mailing date of this final action and the advisory action is not mailed until after the end of the THREE-MONTH shortened statutory period, then the shortened statutory period will expire on the date the advisory action is mailed, and any nonprovisional extension fee (37 CFR 1.17(a)) pursuant to 37 CFR 1.136(a) will be calculated from the mailing date of the advisory action. In no event, however, will the statutory period for reply expire later than SIX MONTHS from the mailing date of this final action. /JASON BERMAN/Primary Examiner, Art Unit 1794
Read full office action

Prosecution Timeline

Jul 27, 2023
Application Filed
Nov 24, 2025
Non-Final Rejection (signed) — §102, §112
Jan 07, 2026
Non-Final Rejection mailed — §102, §112
Mar 31, 2026
Response Filed
Jun 17, 2026
Final Rejection mailed — §102, §112 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

3-4
Expected OA Rounds
64%
Grant Probability
85%
With Interview (+21.7%)
3y 4m (~5m remaining)
Median Time to Grant
Moderate
PTA Risk
Based on 913 resolved cases by this examiner. Grant probability derived from career allowance rate.

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