DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Election/Restrictions
Applicant's election with traverse of species I, claims 1-20, in the reply filed on September 29, 2025 is acknowledged. The traversal is on the ground(s) that “search and examination of all the claims may be made without serious burden”. This is not found persuasive because examining a several distinct and separated inventions imposes serious burden on the examiner due to the uniqueness of each invention.
The requirement is still deemed proper and is therefore made FINAL.
Priority
Receipt is acknowledged of certified copies of papers required by 37 CFR 1.55.
Information Disclosure Statement
The information disclosure statements (IDS) submitted on April 28, 2023 and April 25, 2024 are in compliance with the provisions of 37 CFR 1.97. Accordingly, the information disclosure statement is being considered by the examiner.
The information disclosure statement filed April 10, 2024 fails to comply with 37 CFR 1.98(a)(2), which requires a legible copy of each cited foreign patent document; each non-patent literature publication or that portion which caused it to be listed; and all other information or that portion which caused it to be listed. It has been placed in the application file, but the information referred to therein has not been considered.
Drawings
The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the “end portions” (claim 1); “edge portion”and “recess portion (claim 6) must be shown or the feature(s) canceled from the claim(s). No new matter should be entered.
Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
The drawings are objected to as failing to comply with 37 CFR 1.84(p)(5) because they do not include the following reference sign(s) mentioned in the description: “180c” ([0079]). Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
The drawings are objected to as failing to comply with 37 CFR 1.84(p)(5) because they include the following reference character(s) not mentioned in the description: “180d”. Corrected drawing sheets in compliance with 37 CFR 1.121(d), or amendment to the specification to add the reference character(s) in the description in compliance with 37 CFR 1.121(b) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
The drawings (Figs. 26 and 29) are objected to because both “174a” and “176a” point to a same shading pattern. Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance.
Claim Objections
Claims 4, 11-20 are objected to because of the following informalities:
1) one of “wherein” should be removed from claim 4;
2) inconsistent terminology. Changing “the contact holes” to “the plurality of contact holes” (claim 11, lines 5-6).
3) “,” should read “:” (claims 12 (line 12) and 18 (line 19)); and “an” should be inserted before “upper” (claim 12, line 14).
Appropriate correction is required.
Claim Rejections - 35 USC § 112
The following is a quotation of the first paragraph of 35 U.S.C. 112(a):
(a) IN GENERAL.—The specification shall contain a written description of the invention, and of the manner and process of making and using it, in such full, clear, concise, and exact terms as to enable any person skilled in the art to which it pertains, or with which it is most nearly connected, to make and use the same, and shall set forth the best mode contemplated by the inventor or joint inventor of carrying out the invention.
The following is a quotation of the first paragraph of pre-AIA 35 U.S.C. 112:
The specification shall contain a written description of the invention, and of the manner and process of making and using it, in such full, clear, concise, and exact terms as to enable any person skilled in the art to which it pertains, or with which it is most nearly connected, to make and use the same, and shall set forth the best mode contemplated by the inventor of carrying out his invention.
Claims 1-20 are rejected under 35 U.S.C. 112(a) or 35 U.S.C. 112 (pre-AIA ), first paragraph, as failing to comply with the written description requirement. The claim(s) contains subject matter which was not described in the specification in such a way as to reasonably convey to one skilled in the relevant art that the inventor or a joint inventor, or for applications subject to pre-AIA 35 U.S.C. 112, the inventor(s), at the time the application was filed, had possession of the claimed invention. There appears to be no adequate description in the specification for the claim limitation of “insulation structures between the bit line structures …; a second barrier metal pattern arranged along a surface profile of the opening on the first barrier metal pattern, the second barrier metal pattern having end portions on the bit line structures adjacent the opening; a first metal pattern on the second barrier metal pattern, the first metal pattern having an upper surface higher than an upper surface of a bit line structure among the bit line structures, an uppermost surface of the first barrier metal pattern is lower than a lowermost surface of the first metal pattern”, as recited in claims 1 and 12; “the second barrier metal pattern includes a first portion on an upper surface of the first barrier metal pattern, a second portion on one sidewall of one of the bit line structures, and a third portion on an upper surface and one sidewall of the bit line structure facing the second portion”, as recited in claims 5 and 15; “the second barrier metal pattern covers the void of the first barrier metal pattern”, as recited in claims 10 and 20; “a third barrier metal pattern partially filling each of the plurality of contact holes; a fourth barrier metal pattern along a surface profile of each of the plurality of contact holes on the third barrier metal pattern; and a second metal pattern on the fourth barrier metal pattern”, as recited in claims 11 and 17; “… a structure in which the second barrier metal pattern and the first metal pattern are stacked …”, as recited in claim 16; “a second barrier metal pattern on the first barrier metal pattern, and a first metal pattern on the second barrier metal pattern, the first metal pattern having an upper surface higher than an upper surface of the bit line structure, an uppermost surface of the first barrier metal pattern is lower than a lowermost surface of the first metal pattern”, as recited in claim 18 (note: the disclosure discloses in paragraphs [0038] that “…, first metal pattern, … sequentially stacked may serve as a bit line structure”; [0078] that a first wiring includes a second barrier metal pattern, a fifth barrier metal pattern and a third metal pattern formed in a first contact hole; [0079] that a second wiring includes a third barrier metal pattern, a sixth barrier metal pattern and a fourth metal pattern formed in a second contact hole; in [0080] that third wiring includes a fourth barrier metal pattern, a seventh barrier metal pattern and a fifth metal pattern formed in a third contact hole; [0086] that a landing pad structure includes a first barrier metal pattern, an eighth barrier metal pattern, and a second metal pattern).
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 1-20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
The claimed limitation of "bit line structures … extending in one (second) direction", as recited in claims 1 and 12, is unclear as to which dimension of bit line structures extending in one (second) direction applicant refers.
The claimed limitation of "insulation structures between the bit line structures", as recited in claims 1 and 12, is unclear as to whether said limitation is in one-to-one or one-to-multiple or multiple-to-one relationship between insulation structure and bit line structure applicant refers.
The claimed limitation of "openings between the bit line structures and the insulation structures", as recited in claim 1, is unclear as to opening or openings between which two elements applicant refers.
The claimed limitations of “a second barrier metal pattern arranged along a surface profile of the opening on the first barrier metal pattern, …; a first metal pattern on the second barrier metal pattern, the first metal pattern having an upper surface higher than an upper surface of a bit line structure among the bit line structures, an uppermost surface of the first barrier metal pattern is lower than a lowermost surface of the first metal pattern”, as recited in claims 1 and 12, which indefinite and renders the claim uncertain because said limitations are inconsistent with the specification disclosure: i.e. [0086], [0089]. See MPEP §2173.03.
The claimed limitation of "… end portions on the bit line structures", as recited in claims 1 and 12, is unclear as to whether said limitation is in one-to-one or one-to-multiple or multiple-to-one relationship between end portion and bit line structure applicant refers.
The claimed limitation of "one of the bit line structures", as recited in claims 5 and 15, is unclear as to whether said limitation is the same as or different from "a bit line structure among the bit line structures", as recited in claims 1 and 12, respectively.
The claimed limitation of "an upper surface", as recited in claims 5, 15 (line 4) and 18 (line 23), is unclear as to whether said limitation is the same as or different from "an upper surface of a bit line structure", as recited in claims 1, 12 and 18 (line10).
The claimed limitation of "one sidewall", as recited in claims 5 and 15, line 4, is unclear as to whether said limitation is the same as or different from "one sidewall", as recited in claims 5 and 15, line 3.
The claimed limitation of "the bit line structure", as recited in claims 5 and 15, line 5, is unclear as to whether said limitation is the same as or different from “bit line structures”, “a bit line structure among the bit line structures”, as recited in claims 1 and 12 and/or “one of the bit line structures”, as recited in claims 5 and 15, lines 3-4.
The claimed limitations of “the second barrier metal pattern includes a first portion on an upper surface of the first barrier metal pattern, a second portion on one sidewall of one of the bit line structures, and a third portion on an upper surface and one sidewall of the bit line structure facing the second portion”, as recited in claims 5 and 15, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0121]. See MPEP §2173.03.
The claimed limitations of “an edge portion of the second barrier metal pattern includes a recessed portion from the first metal pattern on the second barrier metal pattern”, as recited in claim 6, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0093]. See MPEP §2173.03.
The claimed limitation of "an edge portion", as recited in claim 6, is unclear as to whether said limitation is the same as or different from "end portions", as recited in claim 1.
The claimed limitation of "a structure", as recited in claims 7 and 16, is unclear as to whether said limitation is the same as or different from "landing pad structure", as recited in claims 1 and 12, respectively.
The claimed limitation of "an upper surface of the bit line structure", as recited in claim 8, is unclear as to whether said limitation is the same as or different from "an upper surface of a bit line structure", as recited in claim 1.
The claimed limitations of “the second barrier metal pattern covers the void of the first barrier metal pattern”, as recited in claim 10, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0120]. See MPEP §2173.03.
The claimed limitations of "the plurality of contact holes having bottom surfaces of different planes", as recited in claim 11, are unclear as to how a surface can be “of” a plane; and whether each contact hole having bottom surface or surfaces on different planes applicant refers.
The claimed limitations of “a third barrier metal pattern partially filling each of the (plurality of) contact holes; a fourth barrier metal pattern along a surface profile of each of the (plurality of) contact holes on the third barrier metal pattern; and a second metal pattern on the fourth barrier metal pattern”, as recited in claims 11 and 17, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0078]-[0080]. See MPEP §2173.03.
The claimed limitation of "a first gate structure …, extending in a first direction", as recited in claim 12, is unclear as to which dimension of a first gate structure extending in a first direction applicant refers.
The claimed limitation of "contact holes between the bit line structures and the insulation structures", as recited in claim 12, is unclear as to contact hole or holes between which two elements applicant refers.
The claimed limitations of “… a structure in which the second barrier metal pattern and the first metal pattern are stacked …”, as recited in claim 16, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0090]. See MPEP §2173.03.
The claimed limitation of "the plurality of contact holes having bottom surfaces on different planes", as recited in claim 17, is unclear as to whether each contact hole having bottom surface or surfaces on different planes applicant refers.
The claimed limitation of "impurity regions at the substrate adjacent to both sides of the second gate structure", as recited in claim 18, is unclear as to whether said limitation is in one-to-one or multiple-to-one relationship between impurity region and side applicant refers.
The claimed limitation of "the bit line structure", as recited in claim 18, lines 23-24, is unclear as to whether said limitation is the same as or different from “each of the bit line structures” and/or "a bit line structure among the bit line structures", as recited in claim 18, lines 10-11 and/or 14-15.
The claimed limitations of “a second barrier metal pattern on the first barrier metal pattern, and a first metal pattern on the second barrier metal pattern, and an uppermost surface of the first barrier metal pattern is lower than a lowermost surface of the first metal pattern”, as recited in claim 18, which indefinite and renders the claim uncertain because said limitation is inconsistent with the specification disclosure: i.e. [0086], [0089]. See MPEP §2173.03.
The claimed limitation of "each of the first barrier metal pattern and the second barrier metal pattern", as recited in claim 19, is unclear as to each of the first barrier metal pattern and the second barrier metal pattern of which element(s) applicant refers.
The claimed limitation of "the first barrier metal pattern", as recited in claim 20, is unclear as to the first barrier metal pattern of which element(s) applicant refers.
The claimed limitation of "the second barrier metal pattern", as recited in claim 20, is unclear as to the second barrier metal pattern of which element(s) applicant refers.
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claim(s) 1 and 3-7, as best understood, is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Jung et al. (2021/0134804).
As for claim 1, Jung et al. show in Figs. 2A-2B and related text a semiconductor device, comprising:
bit line structures BL on a substrate 301 and extending in one direction X3;
insulation structures SP between the bit line structures and spaced apart from each other; and
a landing pad structure BC/309/311a/LP in each of openings between the bit line structures and the insulation structures;
wherein the landing pad structure includes,
a first barrier metal pattern 309 filling a portion of an opening among the openings,
a second barrier metal pattern 311a arranged along a surface profile of the opening on the first barrier metal pattern, the second barrier metal pattern having end portions on the bit line structures adjacent the opening, and
a first metal pattern LP on the second barrier metal pattern, and the first metal pattern having an upper surface higher than an upper surface of a bit line structure among the bit line structures,
wherein an uppermost surface of the first barrier metal pattern is lower than a lowermost surface of the first metal pattern.
As for claim 3, Jung et al. show the first metal pattern includes tungsten ([00087]).
As for claim 4, Jung et al. show a lower contact plug BC in a lower portion of the opening, wherein the landing pad structure is on the lower contact plug (Fig. 2B).
As for claim 5, Jung et al. show in a cross-sectional view, the second barrier metal pattern includes a first portion on an upper surface of the first barrier metal pattern, a second portion on one sidewall of one of the bit line structures, and a third portion on an upper surface and one sidewall of the bit line structure facing the second portion (Fig. 2B).
As for claim 6, Jung et al. show an edge portion of the second barrier metal pattern includes a recessed portion from the first metal pattern on the second barrier metal pattern (Fig. 2B).
As for claim 7, Jung et al. show in the landing pad structure, a lower width of a structure in which the second barrier metal pattern and the first metal pattern are stacked is greater than an upper width of the first barrier metal pattern (Fig. 2B).
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows:
1. Determining the scope and contents of the prior art.
2. Ascertaining the differences between the prior art and the claims at issue.
3. Resolving the level of ordinary skill in the pertinent art.
4. Considering objective evidence present in the application indicating obviousness or nonobviousness.
This application currently names joint inventors. In considering patentability of the claims the examiner presumes that the subject matter of the various claims was commonly owned as of the effective filing date of the claimed invention(s) absent any evidence to the contrary. Applicant is advised of the obligation under 37 CFR 1.56 to point out the inventor and effective filing dates of each claim that was not commonly owned as of the effective filing date of the later invention in order for the examiner to consider the applicability of 35 U.S.C. 102(b)(2)(C) for any potential 35 U.S.C. 102(a)(2) prior art against the later invention.
Claim(s) 2, as best understood, is/are rejected under 35 U.S.C. 103 as being unpatentable over Jung et al. (2021/0134804) in view of Kim et al. (2018/0040560).
June et al. disclosed substantially the entire claimed invention, as applied to claim 1 above, including the second barrier metal pattern includes at least one selected from titanium (Ti), tantalum (Ta), titanium nitride (TiN), and tantalum nitride (TaN) ([0063]).
June et al. do not disclose the first barrier metal pattern includes at least one selected from titanium (Ti), tantalum (Ta), titanium nitride (TiN), and tantalum nitride (TaN).
Kim et al. teach in Figs. 1A-1C and related text the first barrier metal pattern includes at least one selected from titanium (Ti), tantalum (Ta), titanium nitride (TiN), and tantalum nitride (TaN) ([0033]).
June et al. and Kim et al. are analogous art because they are directed to a semiconductor memory device and one of ordinary skill in the art would have had a reasonable expectation of success to modify June et al. with the specified feature(s) of Kim et al. because they are from the same field of endeavor.
It would have been obvious to one of ordinary skill in the art, before the effective filing date of the claimed invention to use titanium (Ti), tantalum (Ta), titanium nitride (TiN), or tantalum nitride (TaN), as the first barrier metal pattern, as taught by Kim et al., in June et al.'s device, in order to in order to prevent a metallic material in the contact hole from diffuse into a substrate.
Claim(s) 9, as best understood, is/are rejected under 35 U.S.C. 103 as being unpatentable over Jung et al. (2021/0134804).
June et al. disclosed substantially the entire claimed invention, as applied to claim 1 above, except the first barrier metal pattern has a pillar shape.
It would have been obvious to one of ordinary skill in the art, before the effective filing date of the claimed invention to include the first barrier metal pattern having a pillar shape, in order to improve the performance of the device. Furthermore, a change in shape is generally recognized as being within the level of ordinary skill in the art. In re Dailey, 357 F.2d 669, 149 USPQ 47 (CCPA 1966).
Conclusion
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/MEIYA LI/Primary Examiner, Art Unit 2811