Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Continued Examination Under 37 CFR 1.114
A request for continued examination under 37 CFR 1.114, including the fee set forth in 37 CFR 1.17(e), was filed in this application after final rejection. Since this application is eligible for continued examination under 37 CFR 1.114, and the fee set forth in 37 CFR 1.17(e) has been timely paid, the finality of the previous Office action has been withdrawn pursuant to 37 CFR 1.114. Applicant's submission filed on 7/29/2026 has been entered.
Response to Arguments
Applicant’s arguments with respect to claim(s) have been considered but are moot because the new ground of rejection does not rely on any reference applied in the prior rejection of record for any teaching or matter specifically challenged in the argument.
Claim Interpretation
The following is a quotation of 35 U.S.C. 112(f):
(f) Element in Claim for a Combination. – An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof.
The following is a quotation of pre-AIA 35 U.S.C. 112, sixth paragraph:
An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof.
The claims in this application are given their broadest reasonable interpretation using the plain meaning of the claim language in light of the specification as it would be understood by one of ordinary skill in the art. The broadest reasonable interpretation of a claim element (also commonly referred to as a claim limitation) is limited by the description in the specification when 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is invoked.
As explained in MPEP § 2181, subsection I, claim limitations that meet the following three-prong test will be interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph:
(A) the claim limitation uses the term “means” or “step” or a term used as a substitute for “means” that is a generic placeholder (also called a nonce term or a non-structural term having no specific structural meaning) for performing the claimed function;
(B) the term “means” or “step” or the generic placeholder is modified by functional language, typically, but not always linked by the transition word “for” (e.g., “means for”) or another linking word or phrase, such as “configured to” or “so that”; and
(C) the term “means” or “step” or the generic placeholder is not modified by sufficient structure, material, or acts for performing the claimed function.
Use of the word “means” (or “step”) in a claim with functional language creates a rebuttable presumption that the claim limitation is to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites sufficient structure, material, or acts to entirely perform the recited function.
Absence of the word “means” (or “step”) in a claim creates a rebuttable presumption that the claim limitation is not to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is not interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites function without reciting sufficient structure, material or acts to entirely perform the recited function.
Claim limitations in this application that use the word “means” (or “step”) are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. Conversely, claim limitations in this application that do not use the word “means” (or “step”) are not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action.
This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, because the claim limitation(s) uses a generic placeholder that is coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitation(s) is/are:
a moving mechanism that moves the chuck table in a cutting feed direction of the cutting blade in claim 3. See specification [0022] disclosing the structure of moving mechanism 20.
a transfer unit that loads and unloads the workpiece onto and from the chuck table in claim 6. See specification [0031-0032] disclosing the structure of transfer unit 50.
Because this/these claim limitation(s) is/are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, it/they is/are being interpreted to cover the corresponding structure described in the specification as performing the claimed function, and equivalents thereof.
If applicant does not intend to have this/these limitation(s) interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, applicant may: (1) amend the claim limitation(s) to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph (e.g., by reciting sufficient structure to perform the claimed function); or (2) present a sufficient showing that the claim limitation(s) recite(s) sufficient structure to perform the claimed function so as to avoid it/them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph.
Claim Objections
Claim 7 is objected to because of the following informalities:
Regarding claim 7, please amend “wherein the lower surface of the plurality of ultrasonic horns are parallel to the upper surface of the workpiece” to read” wherein the lower surface of each of the plurality of ultrasonic horns[[ are ]] is parallel to the upper surface of the workpiece” or an alternative amendment for proper grammar.
Appropriate correction is required.
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
(a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention.
Claim(s) 3 and 4 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Qiu (US 20120137847).
Regarding claim 3, Qiu discloses a cutting machine for cutting a workpiece having an upper surface, a lower surface opposite the upper surface, and a peripheral edge between the upper surface and the lower surface (see Abstract, as well as Figures 1, 3, and 6), comprising:
a cutting unit that cuts with a cutting blade a workpiece held on a holding surface of a chuck table (see cutting apparatus comprising a cutting blade 43, see also chuck table 3 for supporting a workpiece, [0019-0020]);
a moving mechanism that moves the chuck table in a cutting feed direction of the cutting blade ([0019]: chuck table 3 is movable in the direction shown by the X arrow as a feeding direction, wherein the cutting apparatus includes feeding means for feeding the chuck table 3 in the X direction);
a plurality of ultrasonic horns each having a lower surface that is facing the upper surface of the workpiece held on the holding surface of the chuck table, with a clearance therebetween, for emitting ultrasonic waves from the lower surface thereof towards the upper surface of the workpiece and being arranged in at least two rows or in an annular pattern (see ultrasonic generating means 6 composed of a pair of units including a pair of mounting members 63, vibrating plates 61, ultrasonic vibrators 62, [0025], i.e. a plurality of ultrasonic horns under broadest reasonable interpretations; wherein these units have a lower surface facing the upper surface of the wafer workpiece W, and are arranged in at least two rows, see Figures 2, 3, 5, and 6; see also [0033-0035], [0038-0039]); and
a water film forming nozzle configured to supply water to the workpiece held on the holding surface and to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film (see at least nozzles 531, 532, as well as Figures 5, 6, [0025], [0032-0035], [0038-0039]).
Regarding claim 4, Qiu discloses the claimed invention as applied above, wherein Qiu further discloses wherein the ultrasonic horns are arranged beside the cutting blade in the cutting feed direction (see Figures 1, 2, 5, and 6 regarding the pair of elements each comprising components 61/62/63, arranged beside the blade 43 in the X direction), and the water film forming nozzle is configured to also function as a cutting water nozzle that supplies cutting water to the cutting blade (see at least [0022-0025], [0032-0035], and [0039] regarding the nozzles acting to dispense cutting water).
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows:
1. Determining the scope and contents of the prior art.
2. Ascertaining the differences between the prior art and the claims at issue.
3. Resolving the level of ordinary skill in the pertinent art.
4. Considering objective evidence present in the application indicating obviousness or nonobviousness.
Claim(s) 1, 2, and 7 is/are rejected under 35 U.S.C. 103 as being unpatentable over McDermott (US 20050183739) in view of Dobashi (JP 2014067864).
Regarding claim 1, McDermott (US 20050183739) discloses a deburring unit for removing burrs from a workpiece having an upper surface, a lower surface opposite the upper surface and a peripheral edge between the upper surface and the lower surface, with the burrs formed along kerfs cut by a cutting blade (see Abstract, as well as Figures 5 and 6, [0045-0046], [0125]), comprising:
a chuck table that holds the workpiece on a holding surface thereof ([0090]: silicon wafer placed on the surface of a rotating table, see also Figures 5 and 6);
a plurality of ultrasonic horns each of which that emits ultrasonic waves from a lower surface thereof towards the upper surface of the workpiece, each of the lower surfaces of the plurality of ultrasonic horns facing the upper surface of the workpiece held on the holding surface and being arranged in at least two rows or in an annular pattern (see at least Figures 5 and 6; [0090-0091]: see ultrasonic transducers 515, 517, 519, 521 and probes 523, 525, 527, 529, and wherein each probe includes probe main body 1, collar 5, and horn 7 of Figure 3; see Figures 5 and 6; see also [0092-0094]);
a water film forming nozzle configured to supply water to the workpiece held on the holding surface and to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film (see inlet line 539, as well as [0092]; see also [0001-0002] regarding immersing articles during cleaning; see also [0031]; see also [0094]: fluid flows uniformly over the surface of the wafer; see also [0120]); and
the plurality of ultrasonic horns to come into contact at the lower surface thereof with the water film formed with the water supplied from the water film forming nozzle and to cause ultrasonic vibrations to propagate to the water film, to thereby remove the burrs formed along the kerfs (see at least [0001-0004] regarding ultrasonic energy being introduces into the bath; see also [0032-0045], [0072-0074], [0093]).
While McDermott describes that the invention is an ultrasonic cleaning system, McDermott is silent regarding a controller, wherein the controller is configured to cause the plurality of ultrasonic horns to perform as recited above.
However, from the same or similar field of endeavor, Dobashi teaches of a controller, wherein the controller is configured to control the components of the system (see [0019]: control unit 60 controls each component of the apparatus; see also the ultrasonic component controlled by the controller in [0028]; see also [0030-0031], Figure 1).
It would have been obvious to one having ordinary skill in the art before the effective filing date of the claimed invention to have modified the apparatus of McDermott to include a controller, as taught by Dobashi. One would be motivated to do so in order to incorporated an automatic operating device which adjusts the apparatus as needed, while still enabling operator input (see [0030-0031] of Dobashi’s translation).
Regarding claim 2, McDermott in view of Dobashi teaches the claimed invention as applied above, wherein modified McDermott further teaches wherein plurality of ultrasonic horns each has a circular cylindrical shape and are integrally arranged in a direction parallel to the holding surface as seen in plan (McDermott: see Figures 5 and 6, see ultrasonic transducers 515, 517, 519, 521 and probes 523, 525, 527, 529; see also [0008], [0017], [0019], [0025], [0064], [0066-0067], [0072]).
Regarding claim 7, McDermott in view of Dobashi teaches the claimed invention as applied above, wherein modified McDermott further teaches wherein the lower surface of the plurality of ultrasonic horns are parallel to the upper surface of the workpiece (McDermott: see Figures 5 and 6, see ultrasonic transducers 515, 517, 519, 521 and probes 523, 525, 527, 529; see also [0008], [0017], [0019], [0025], [0064], [0066-0067], [0072]).
Claim(s) 5 is/are rejected under 35 U.S.C. 103 as being unpatentable over Qiu (US 20120137847) in view of Osada (JPH 1121433).
Regarding claim 5, Qiu discloses the claimed invention as applied above, wherein Qiu further discloses a cleaning unit including a cleaning table that holds the workpiece obtained after cutting processing (see cleaning means 15 and table surface of the housing 2, as well as [0028] and [0037]),
wherein the water film forming nozzle is configured to also function as another cleaning water nozzle (wherein given the nozzles 531, 532 are configured to dispense water, the nozzles are configured to clean the surface of the wafer by removing debris; see [0022-0023], [0032-0034]).
However, Qiu does not explicitly teach a cleaning water nozzle that ejects cleaning water toward the workpiece held on the cleaning table.
However, from the same or similar field of endeavor, Osada teaches of a cleaning unit (20) having a table 24, wherein there is a cleaning water nozzle (28) that ejects cleaning water toward the workpiece held on the cleaning table (see Figure 4, [0010-0011]: the cleaning unit 20 includes nozzle 28; see also [0015]).
It would have been obvious to one having ordinary skill in the art before the effective filing date of the claimed invention to have incorporated the cleaning nozzle as taught by Osada into the invention of Qiu. One would be motivated to do so in order to ensure that all unwanted contaminants/debris is removed from the wafer, i.e. further enhancing the cleaning means (15) of Qiu by incorporating an additional mechanism by which the wafer is cleaned.
Claim(s) 6 is/are rejected under 35 U.S.C. 103 as being unpatentable over Qiu (US 20120137847) in view of Higashi (US 7219419).
Regarding claim 6, Qiu discloses the claimed invention as applied above, wherein Qiu further discloses a transfer unit that loads and unloads the workpiece onto and from the chuck table (see transporting means 16, transporting means 14, handling means 13, [0028-0029], [0037]).
However, Qiu does not explicitly teach a combination of a transfer unit and ultrasonic assembly such that the ultrasonic horns are disposed on the transfer unit.
However, from the same or similar field of endeavor, Higashi teaches of a transfer unit that loads and unloads the workpiece, and wherein the ultrasonic unit is disposed on a transfer unit (wherein component handling device 23 is configured to bring a component to a different position, see Col. 5 lines 10-15; see also base 57, table 56, table 58, and Col. 7, lines 7-17 and 23-31; wherein there is also an ultrasonic component 24, see Col. 6, lines 39-54; see also Figure 6; wherein there are transfer components on which the ultrasonic device is located, i.e. the components which enable loading and unloading the workpiece includes the ultrasonic component located thereon; see also Col. 7, lines 47-49).
It would have been obvious to one having ordinary skill in the art before the effective filing date of the claimed invention to have combined a transport/gripping device with the ultrasonic unit configuration, as taught by Higashi, into the invention of Qiu. One would be motivated to do so in order to provide a combined, seamless transporting means with the cutting/ultrasonic configuration of Qiu, thus enabling additional gripping or adjustment of the position of the workpiece within the internal machine housing of Qiu, i.e. the transporting/handling means (13, 14, 16) of unmodified Qiu are unable to access/grip a workpiece from the exterior of the housing as can be seen in Figure 1 of Qiu, and thus the combination would result in a more advantageous apparatus configured to handle a workpiece therein.
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to MAKENA S MARKMAN whose telephone number is (469)295-9162. The examiner can normally be reached Monday-Thursday 8:00 am-6:00pm.
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, David Posigian can be reached at 313-446-6546. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/MAKENA S MARKMAN/Primary Examiner, Art Unit 3723
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