DETAILED ACTION
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 112
The following is a quotation of 35 U.S.C. 112(b):
(b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention.
The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph:
The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention.
Claims 13-20 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention.
Claim 13 recites “moving the frame with a measurement value.” The phrase “measurement value” fails to clearly identify what physical quantity is being measured (e.g. displacement, tilt, curvature),because the claim does not specify what is being measured or how the value relates to the movement of the frame, the scope of the claim cannot be determined with reasonable certainty.
Claim 14 recited “pushing the frame in a first direction that is parallel with the ground according to a value.” The term “a value” is vague and does not specify what the value represents or how the value controls the direction or magnitude of the pushing. As a result, the metes and bounds of claim 14 are unclear.
Claim 20 recites the limitation “a deposition pixel position accuracy (PPA) distortion is induced in a direction that is opposite a direction in which the deposition PPA is distorted” fails to specify the physical basis for the direction of the distortion. The meaning of “opposite direction” cannot be determined with reasonable certainty. Claim 20 does not define PPA distortion, it is unclear whether the distortion refers to substrate motion, mask sagging, substrate warpage, or deposition misalignment.
Claims 15-18 are included in the rejection since they depend from claim 13.
Allowable Subject Matter
Claims 1-12 are allowed.
Claim 13 would be allowable if rewritten or amended to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action.
Claims 14 and 20 would be allowable if rewritten to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action and to include all of the limitations of the base claim and any intervening claims.
The following is a statement of reasons for the indication of allowable subject matter:
Kim et al. (KR 20130009601) discloses a deposition apparatus comprising a deposition source (390 of Fig. 2); a deposition portion that faces the deposition source (see 10, 20, 310, 311, 320, 330, and 340 of Fig. 2) that is disposed at an angle of 1 to 10 degrees with respect to a reference line perpendicular to the ground; see 0089 of the translation). The deposition portion comprises a frame (20-substrate tray of Fig. 2) comprising a frame (20, substrate tray of Fig. 2) and rollers (311) which support the substrate that is connected to a tilting unit which tilts the deposition portion (see Fig. 2).
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Kim fails to teach or suggest a deposition apparatus that comprises a deposition portion having a frame with an opening; a substrate disposed on the first side of the frame and a plurality of back stages disposed on a second side opposite of the first side of the fame, and the frame moves by movement of the plurality of back stages.
Ogata et al. (US 2020/0220114) discloses a film forming apparatus comprising a deposition source (3- supply unit of Fig. 1) and a deposition portion facing the deposition source (see 2 of Fig 1). The deposition portion comprising a frame (substrate frame 2 of Fig. 1) where the substrate is placed on a first side and a back stage (14b) form moving the substrate holder (see 0048).
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Ogata et al. fails to teach a deposition apparatus that comprises a deposition portion having a frame with an opening; a substrate disposed on the first side of the frame and a plurality of back stages disposed on a second side opposite of the first side of the fame, and the frame moves by movement of the plurality of back stages.
White et al. (US 2016/0043319) discloses a fine metal mask with local actuators used to adjust mask deformation by stretching or repositioning the mask to maintain the position and size of the mask relative to the substrate.
Kawato et al. (WO2013183374) discloses a vapor deposition device comprising a deposition source, and a substrate support having pins (see 101 of Fig. 9) which holds the substrate with a slight bend allowing the substrate holder to attract to the substrate without any distortion or stress.
As to claims 1 and 13, the cited prior art fails to teach or suggest the combination of a deposition apparatus comprising a deposition source and a deposition portion where the deposition portion is disposed at an angle of 4 to 14 degrees with respect to a vertical reference line perpendicular to the ground where the deposition portion includes a frame having an opening and an outer portion around the opening; a substrate disposed on one side of the frame and back stages disposed on a second side of the frame and the frame moves by movement of the plurality of back stages.
Conclusion
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/CACHET I. PROCTOR/
Examiner
Art Unit 1715
/CACHET I PROCTOR/ Primary Examiner, Art Unit 1715