Prosecution Insights
Last updated: August 16, 2026
Application No. 18/383,525

ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING FLAT PANEL DISPLAY

Non-Final OA §102§103§112
Filed
Oct 25, 2023
Priority
Apr 27, 2021 — JP 2021-075410 +3 more
Examiner
NGUYEN, HUNG
Art Unit
2882
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
NIKON Corporation
OA Round
1 (Non-Final)
91%
Grant Probability
Favorable
1-2
OA Rounds
0m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 91% — above average
91%
Career Allowance Rate
1337 granted / 1473 resolved
+22.8% vs TC avg
Moderate +9% lift
Without
With
+8.9%
Interview Lift
resolved cases with interview
Fast prosecutor
2y 2m
Avg Prosecution
34 currently pending
Career history
1506
Total Applications
across all art units

Statute-Specific Performance

§101
2.3%
-37.7% vs TC avg
§103
40.3%
+0.3% vs TC avg
§102
31.7%
-8.3% vs TC avg
§112
15.2%
-24.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1473 resolved cases

Office Action

§102 §103 §112
ETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of claims 1-23 and 56-65 in the reply filed on January 12, 2026 is acknowledged. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 1, 4-23, 81-82 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. As to claim 1, the limitation of “a synthesis/division part configured to...synthesize...and to divide and emit..” renders the claim indefinite. It is unclear whether the recited synthesis/division part is the same physical structure, or different from the previous recited division part. Please clarify. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. (a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention. Claim 2, is rejected under 35 U.S.C. 102(a)(1) as being anticipated by Kohl (U.S.Pat. 8,805,382 B2). With respect to claim 2, Kohl discloses an illumination optical system comprising all features of the instant claim such as: a plurality of light sources (2) each configured to emit a pulsed beam; an optical (9) emitted from each of the plurality of light sources and to divide and emit the synthesized pulse light beam and an illumination system (5, 29, 12-18) configured to illuminate patterning elements by guiding the divided pulse light beams emitted from the optical system to the respective patterning elements (19). Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claims 83-84 are rejected under 35 U.S.C. 103 as being unpatentable over Kohl (U.S.Pat. 8,805,382 B2) in view of Yashiki (U.S.Pat. 11,537,051 B2). As to claim 83-84, Kohl discloses an illumination optical system comprising substantially all features of the instant claims as discussed above including the respective patterning elements. Kohl does not expressly disclose that the patterning elements are a spatial light modulator having a plurality of elements each capable of being in a plurality of states, as recited in the instant claims. This feature is well known per se. For example, Yashiki discloses an illumination system having a photomask/patterning elements (14) being a spatial light modulator with a plurality of element each capable of being in a plurality of states (see figures 2A-D). It would have been obvious to a skilled artisan before the effective filling date of the claimed invention to employ the patterning elements as suggested by Yashiki into the illumination optical system of Kohl for the purpose of generating any desired pattern and thereby improving the throughput of the optical system as intended by Kohl. Allowable Subject Matter Claims 1, 4-23, 81-82 would be allowable if rewritten or amended to overcome the rejection(s) under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), 2nd paragraph, set forth in this Office action. Claims 56-63, 65-66 and 85 are allowed. The above mentioned claims have been found allowable since the prior art of record, either alone or in combination neither discloses nor makes obvious a combination of an illumination optical system comprising among other features, a plurality of light sources; an optical system having a division part, a delay optical system, a synthesis part, an illumination system with particular functions and a specific arrangement between those elements as recited in the claims. Prior Art Made of Record The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Godfried et al (U.S.Pat. 11,569,628); Fujii (U.S.Pat. 10,591,824) disclose illumination optical systems and have been cited for technical background. Any inquiry concerning this communication or earlier communications from the examiner should be directed to HUNG HENRY NGUYEN whose telephone number is (571)272-2124. The examiner can normally be reached Monday-Friday 7:00AM-4:30PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Toan Minh Ton can be reached at 571-272-2303. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. HUNG HENRY NGUYEN Primary Examiner Art Unit 2882 Hvn 7/13/26 /HUNG V NGUYEN/ Primary Examiner, Art Unit 2882
Read full office action

Prosecution Timeline

Oct 25, 2023
Application Filed
Jan 12, 2026
Response after Non-Final Action
Jul 16, 2026
Non-Final Rejection mailed — §102, §103, §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12699313
PHOTOMASK AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
1y 10m to grant Granted Aug 04, 2026
Patent 12693594
METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK
2y 9m to grant Granted Jul 28, 2026
Patent 12693601
EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
2y 7m to grant Granted Jul 28, 2026
Patent 12695264
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
1y 7m to grant Granted Jul 28, 2026
Patent 12681381
PELLICLE, EXPOSURE MASTER, EXPOSURE DEVICE, PELLICLE PRODUCTION METHOD AND TEST METHOD FOR MASK ADHESIVE LAYER
2y 0m to grant Granted Jul 14, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
91%
Grant Probability
99%
With Interview (+8.9%)
2y 2m (~0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1473 resolved cases by this examiner. Grant probability derived from career allowance rate.

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