Prosecution Insights
Last updated: August 16, 2026
Application No. 18/389,669

SEMICONDUCTOR WAFER DETECTION DEVICE AND DROPLET GUIDE MEMBER

Non-Final OA §103
Filed
Dec 19, 2023
Priority
Dec 21, 2022 — JP 2022-203853
Examiner
ESIABA, NKECHINYERE OTUOMASIRICH
Art Unit
2817
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Ebara Corporation
OA Round
1 (Non-Final)
67%
Grant Probability
Favorable
1-2
OA Rounds
9m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 67% — above average
67%
Career Allowance Rate
10 granted / 15 resolved
-1.3% vs TC avg
Strong +38% interview lift
Without
With
+38.5%
Interview Lift
resolved cases with interview
Typical timeline
3y 5m
Avg Prosecution
27 currently pending
Career history
53
Total Applications
across all art units

Statute-Specific Performance

§103
52.8%
+12.8% vs TC avg
§102
34.3%
-5.7% vs TC avg
§112
12.4%
-27.6% vs TC avg
Black line = Tech Center average estimate • Based on career data from 15 resolved cases

Office Action

§103
DETAILED ACTION This Notice is responsive to communication filed on 06/29/2026. Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Priority Receipt is acknowledged of certified copies of papers required by 37 CFR 1.55. Information Disclosure Statement The information disclosure statement (IDS) submitted on 12/19/2023 is in compliance with the provisions of 37 CFR 1.97. Accordingly, the information disclosure statement is being considered by the examiner. Election/Restrictions Applicant’s election without traverse of Species 1 reading on Fig. 15, Fig. 16 in the reply filed on 06/29/2026 is acknowledged. Claim Rejections - 35 USC § 103 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Rejection Note: Italicized claim limitations indicate limitations that are not explicitly disclosed in the primary reference(s). Claims 1-4, 6, and 7 are rejected under 35 U.S.C. 103 as being unpatentable over Oka (US 20050242305), and further in view of Irie et al. (US 20160349502). Regarding claim 1, Oka discloses: A semiconductor wafer detection device detecting a semiconductor wafer, comprising: a light sensor Fig. 1A: 52, comprising a light emitter Fig. 1A: 52A having a light emitting surface that emits light, and a light receiver Fig. 1A: 52B having a light receiving surface that receives the light (para. 0041); a detector, detecting the semiconductor wafer based on the light received by the light receiver (para. 0044 “scanning operation /operation unit…obtained from the light receiving signal of the light receiving unit 52B); and one or a plurality of droplet guide members, causing a droplet adhering to a sensor surface that is at least one of the light emitting surface and the light receiving surface to flow down, wherein the one or plurality of droplet guide members comprise a liquid guide part of a plate shape, and the liquid guide part is arranged with a tip facing a center of the sensor surface when viewed in an optical axis direction of the sensor surface. Irie et al. disclose the following claim limitations not disclosed by Oka: one or a plurality of droplet guide members Fig. 3: 21 (para. 0054), causing a droplet adhering to a sensor surface (i.e. surface of camera) that is at least one of the light emitting surface and the light receiving surface Fig. 3: 20 (para. 0055) to flow down, wherein the one or plurality of droplet guide members Fig. 3: 21 comprise a liquid guide part of a plate shape Fig. 4: 27 (para. 0063), and the liquid guide part Fig. 4: 27 is arranged with a tip facing a center of the sensor surface when viewed in an optical axis direction of the sensor surface (shown in Fig. 4, guiding plate member 27 comes to a tip facing a surface of the camera/lens/imagine element in para. 0055 not pictured). It would have been obvious to one of ordinary skill in the art before the effective filing date of the invention to modify Oka with Irie in order to include a plate-shaped droplet guide member in order to prevent water droplets from obstructing or distorting the light passing through the optically active area and improving the visibility of images from the imaging device (para. 0087). Regarding claim 2, Irie discloses the semiconductor wafer detection device according to claim 1, wherein a portion of the liquid guide part Fig 4: 27 that comprises at least the tip overlaps the sensor surface Fig. 4: 20 (i.e surface of camera/imaging element) when viewed in the optical axis direction (shown in Fig. 4). Regarding claim 3, Irie discloses the semiconductor wafer detection device according to claim 1, wherein a facing surface of the liquid guide part Fig 3: 27 facing the sensor surface Fig. 3: 20 (i.e surface of camera/imaging element) is an inclined surface that descends in a direction away from the sensor surface Fig. 3: 20 (i.e surface of camera/imaging element). This is shown in Fig. 3. Regarding claim 4, Irie discloses the semiconductor wafer detection device according to claim 1, wherein the liquid guide part Fig 3: 27 is formed in a blade shape whose thickness decreases toward the tip (shown in Fig. 3; para. 0065 teaches trapezoidal shape). Regarding claim 6, Oka discloses the semiconductor wafer detection device according to claim 1, further comprising: a support Fig. 1A: 51, supporting both the light emitter Fig. 1A: 52A and the light receiver Fig. 1A: 52B (para. 0038). Regarding claim 7, Irie discloses a droplet guide member Fig. 3: 21 (para. 0054) used in a semiconductor wafer detection device (semiconductor detection device taught by Oka US 20050242305) equipped with a light sensor and a detector, the light sensor comprising a light emitter having a light emitting surface that emits light and a light receiver having a light receiving surface that receives the light, the detector detecting a semiconductor wafer based on the light received by the light receiver, wherein the droplet guide member comprises: a liquid guide part of a plate shape Fig. 4: 27 (para. 0063), and the liquid guide part Fig. 4: 27 is arranged with a tip facing a center of the sensor surface when viewed in an optical axis direction of the sensor surface (shown in Fig. 4, guiding plate member 27 comes to a tip facing a surface of the camera/lens/imagine element in para. 0055 not pictured). Claim 5 is rejected under 35 U.S.C. 103 as being unpatentable over Oka (US 20050242305) and Irie et al. (US 20160349502) as applied to claim 1 above, and further in view of Ina et al. (US 20190100171 A1). Regarding claim 5, Ina discloses the following claim limitations not disclosed by Oka and Irie: The semiconductor wafer detection device according to claim 1, further comprising: a spraying mechanism Fig. 4: 7, spraying a gas in a direction approaching the liquid guide part Fig. 4: 4a (i.e. constriction used as a guide) when viewed in the optical axis direction onto the sensor surface Fig. 4: 3 (shown in Fig. 4). It would have been obvious to one of ordinary skill in the art before the effective filing date of the invention to modify Oka and Irie with Ina in order to include a gas or air spraying mechanism that removes water collected on a lens (i.e. light receiving surface), thereby stabilizing optical signal or imaging data being obtained (para. 0011). Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to NKECHINYERE ESIABA whose telephone number is (571)272-0720. The examiner can normally be reached Monday - Friday 10am-5pm EST. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Kretelia Graham can be reached at (571) 272-5055. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /Nkechinyere Esiaba/Examiner, Art Unit 2817 /Kretelia Graham/Supervisory Patent Examiner, Art Unit 2817
Read full office action

Prosecution Timeline

Dec 19, 2023
Application Filed
Jul 21, 2026
Non-Final Rejection mailed — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
67%
Grant Probability
99%
With Interview (+38.5%)
3y 5m (~9m remaining)
Median Time to Grant
Low
PTA Risk
Based on 15 resolved cases by this examiner. Grant probability derived from career allowance rate.

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