Last updated: July 17, 2026

Application No. 18/409,805

ATOMIC LAYER DEPOSITION APPARATUS

Non-Final OA

Filed

Jan 11, 2024

Priority

Dec 09, 2021 — divisional of 11/961,716

Examiner

KLUNK, MARGARET D

Art Unit

1716

Tech Center

1700 — Chemical & Materials Engineering

Assignee

Industrial Technology Research Institute

OA Round

1 (Non-Final)

Interview Optional

— +31.2% interview lift. Interview already conducted in this application's prosecution history. This examiner has a 44% grant rate with +31.2% interview lift. Since an interview has already been tried, recommend written response with narrowed claims based on precedent claim evolution patterns.

Based on 439 resolved cases, 2023–2026

Examiner Intelligence

KLUNK, MARGARET D View full profile →

Grants 44% of resolved cases

Career Allowance Rate

193 granted / 439 resolved

-21.0% vs TC avg

Strong +31% interview lift

Without

With

+31.2%

Interview Lift

resolved cases with interview

Typical timeline

3y 9m

Avg Prosecution

31 currently pending

Career history

481

Total Applications

across all art units

Statute-Specific Performance

§101

0.3%

-39.7% vs TC avg

§103

75.2%

+35.2% vs TC avg

§102

3.2%

-36.8% vs TC avg

§112

9.3%

-30.7% vs TC avg

Black line = Tech Center average estimate • Based on career data from 439 resolved cases

Prosecution Timeline

Jan 11, 2024

Application Filed

Apr 22, 2026

Non-Final Rejection mailed

Jun 15, 2026

Interview Requested

Jun 17, 2026

Applicant Interview (Telephonic)

Jun 18, 2026

Examiner Interview Summary

Precedent Cases

Applications granted by this same examiner with similar technology

17/728,467

Patent 12652988

THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONITORING THEREOF

4y 1m to grant Granted Jun 09, 2026

16/851,012

Patent 12622217

HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS

6y 0m to grant Granted May 05, 2026

17/446,477

Patent 12604698

SUBSTRATE PROCESSING SYSTEM AND STATE MONITORING METHOD

4y 7m to grant Granted Apr 14, 2026

17/513,986

Patent 12599925

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

4y 5m to grant Granted Apr 14, 2026

18/825,717

Patent 12595553

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

1y 7m to grant Granted Apr 07, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

44%

Grant Probability

75%

With Interview (+31.2%)

3y 9m (~1y 3m remaining)

Median Time to Grant

Low

PTA Risk

Based on 439 resolved cases by this examiner. Grant probability derived from career allowance rate.