DETAILED ACTION
Claim Rejections - 35 USC § 102
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claims 1-3 and 8-9 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by White (US 2016/0043319).
In regards to claim 1, White teaches a mask comprising:
a frame (112) which defines an opening (shown) on a plane (fig. 1-2; para. 28-29, 37);
a sub-mask (106) overlaps the opening and has patterning (120) which provides holes through which a deposition material is capable of passing (fig. 1-2; para. 28-29, 37);
a micro-actuators (114, aligner) are between the mask and the frame, are computer controlled and moves the mask within the opening of the frame when a voltage (i.e. power/signals from the computer) is applied to the microactuators (fig. 1-2; para. 29-32, 35, 37).
In regards to claim 2, White teaches the mask comprises a polygonal shape with sides and the microactuators are between the sides of the mask and the frame (fig. 1-2; para. 29-32, 35, 37).
In regards to claim 3, White teaches the connecting parts, shown as a line between the mask and the micro-actuator, along connecting part shown as a line between the micro-actuator and the frame, the connecting parts are shown to protrude from the sides of the mask and frame and connect to the micro-actuators (fig. 1-2).
In regards to claim 8, White teaches the mask and frame are spaced apart from each other in a first direction and the actuators provide a first actuator which extends in a second direction perpendicular to the first direction (fig. 1-2).
In regards to claim 9, White teaches the mask and frame are spaced apart from each other in the second direction and provides a second actuator which extends in the first direction (fig. 1-2).
Claim Rejections - 35 USC § 103
The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action:
A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made.
The factual inquiries for establishing a background for determining obviousness under 35 U.S.C. 103 are summarized as follows:
1. Determining the scope and contents of the prior art.
2. Ascertaining the differences between the prior art and the claims at issue.
3. Resolving the level of ordinary skill in the pertinent art.
4. Considering objective evidence present in the application indicating obviousness or nonobviousness.
This application currently names joint inventors. In considering patentability of the claims the examiner presumes that the subject matter of the various claims was commonly owned as of the effective filing date of the claimed invention(s) absent any evidence to the contrary. Applicant is advised of the obligation under 37 CFR 1.56 to point out the inventor and effective filing dates of each claim that was not commonly owned as of the effective filing date of the later invention in order for the examiner to consider the applicability of 35 U.S.C. 102(b)(2)(C) for any potential 35 U.S.C. 102(a)(2) prior art against the later invention.
Claims 12-15 are rejected under 35 U.S.C. 103 as being unpatentable over White (US 2016/0043319) in view of Terada (US 2021/0202854).
In regards to claim 12, White teaches an apparatus comprising:
a process chamber (100) (fig. 1; para. 24-25);
a deposition source (108) is positioned within the process chamber and supplies a deposition material (fig. 1; para. 26-27);
a chuck (not shown) supports a substrate (102) within the process chamber (fig. 1; para. 25);
a mask comprising:
a frame (112) which defines an opening (shown) on a plane (fig. 1-2; para. 28-29, 37);
a sub-mask (106) overlaps the opening and has patterning (120) which provides holes through which a deposition material is capable of passing (fig. 1-2; para. 28-29, 37);
a micro-actuators (114, aligner) are between the mask and the frame, are computer controlled and moves the mask within the opening of the frame when a voltage (i.e. power/signals from the computer) is applied to the microactuators (fig. 1-2; para. 29-32, 35, 37).
White does not explicitly teach a mask frame supporting the mask.
However, Terada teaches vapor deposition mask (10) on a base frame (20). Terada teaches the base frame has a higher in rigidity than a mask frame (12) of the vapor deposition mask (fig. 2-5, 8-11; para. 34).
Therefore, it would have been obvious to one of ordinary skill in the art, before the effective filing date of the claimed invention, to incorporate the base frame of Terada onto the mask of White because Terada teaches it will reduce deflection of the mask (para. 22).
In regards to claim 13, White and Terada as discussed, where White teaches a first alignment mark (122) is on the mask and the substrate on the chuck have features (second alignment mark) which are used to align the elements (fig. 1-2; para. 32-33, 37).
In regards to claim 14, White and Terada as discussed, where White teaches a processor/computer-controlled algorithm in control of the microactuators (114), to control the alignment (para. 32-33).
White as discussed, but does not explicitly teach a camera for capturing an image of the first and second alignment marks.
However, Terada teaches alignment cameras (100A-D/200) which images alignment marks (128 A-B /129A-C), where the alignment camera are connected to a control mechanism (40) to control the alignment of elements, the (fig. 8-9; para. 40, 55, 60).
Therefore, it would have been obvious to one of ordinary skill in the art, before the effective filing date of the claimed invention, to incorporate the alignment camera of Terada onto the apparatus of White because Terada teaches it will reduce deflection of the mask (para. 22).
In regards to claim 15, White and Terada as discussed, where White teaches the processor/computer-controlled algorithm controls and moves the mask within the opening of the frame when a voltage (i.e. power/signals from the computer) is applied to the microactuators (fig. 1-2; para. 29-32, 35, 37).
Allowable Subject Matter
Claims 4-7 and 10-11 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims.
Conclusion
Any inquiry concerning this communication or earlier communications from the examiner should be directed to Binu Thomas whose telephone number is (571)270-7684. The examiner can normally be reached Monday to Thursday, 8:00AM-5:00PM PT.
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If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Dah-Wei Yuan can be reached at 571-272-1295. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300.
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/Binu Thomas/Primary Examiner, Art Unit 1717
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