Prosecution Insights
Last updated: July 17, 2026
Application No. 18/442,876

ELECTROSTATIC WAFER CLAMPING AND SENSING SYSTEM

Non-Final OA §102§103
Filed
Feb 15, 2024
Examiner
LEE, WILSON
Art Unit
Tech Center
Assignee
Advanced Energy Industries Inc.
OA Round
1 (Non-Final)
87%
Grant Probability
Favorable
1-2
OA Rounds
4m
Est. Remaining
90%
With Interview

Examiner Intelligence

Grants 87% — above average
87%
Career Allowance Rate
570 granted / 657 resolved
+26.8% vs TC avg
Minimal +3% lift
Without
With
+3.1%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
25 currently pending
Career history
678
Total Applications
across all art units

Statute-Specific Performance

§101
10.5%
-29.5% vs TC avg
§103
52.3%
+12.3% vs TC avg
§102
20.5%
-19.5% vs TC avg
§112
3.2%
-36.8% vs TC avg
Black line = Tech Center average estimate • Based on career data from 657 resolved cases

Office Action

§102 §103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Remarks Applicant elects Group I (Claims 1-15) without traverse. Group II (Claims 16-20) has been withdrawn. Claim Rejections – 35 U.S.C. 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 9, 14, 15 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Enzinna (2022/0334160). Regarding Claim 9, Enzinna (2022/0334160) discloses an apparatus, comprising: a power source (102) configured to provide a voltage (fig. 7); a transformer (715) comprising a primary and a secondary, the secondary coupled to an output of the power source (102) (fig. 7); a time-varying source (705) coupled to the primary of the transformer and configured to inject a time-varying signal onto a conduction path between the power source (102) and a node (109) (fig. 7); and a monitor (103) configured to measure time-varying amplitude in the conduction path via a portion of the primary (“a current monitor 103 configured to measure time-varying current in the conduction path”, paragraphs [0050], [0064], [0080]). PNG media_image1.png 427 775 media_image1.png Greyscale Regarding Claim 14, Enzinna discloses the apparatus of claim 9, wherein the time-varying source is configured to provide a constant amplitude (“maintain a substantially constant amplitude of the time-varying current provided to the load”, paragraph [0012] while an amplitude at the monitor varies in response to a capacitance (“More specifically, it has been found that it is common for the time-varying signal to change amplitude with changing capacitive load resulting in non-linearities in the capacitance sensing”, paragraph [0064]) seen at the node (fig. 7). Regarding Claim 15, Enzinna discloses the apparatus of claim 14, wherein the monitor (103) provides feedback configured to adjust the power source in response to the capacitance seen at the node (fig. 7). Claim Rejections – 35 U.S.C. 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claim(s) 1, 4, 6, 8, 10 is/are rejected under 35 U.S.C. 103 as being unpatentable over Enzinna (2022/0334160) in view of Millner et al. (2007/0103092). Regarding Claim 1, Enzinna (2022/0334160) discloses a system, comprising: a power source (102) configured to provide a voltage to a node (109) (Fig. 7); a transformer (715) having a primary and a secondary (paragraph [0040], fig. 7), the secondary coupled to the power source (102) and the node (109) (fig. 7), the primary comprising a center tap; a time-varying source (705) coupled to the primary of the transformer (fig. 7); and a sensing circuit (718) coupled to the primary of the transformer, and configured to measure a time-varying amplitude (paragraphs [0064], [0080]) . As discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the primary comprising a center tap. However, Millner et al. (2007/0103092) discloses a center tap coupled to the transformer for applying a voltage of a first polarity to the first lead and a voltage of a second polarity to the second lead, resulting in electric field flux traversing a cross-sectional area between the first and second electrode to generate the plasma body (paragraph [0012]). It would have been obvious to one of ordinary skill in the art to have provided a center tap to the transformer in Enzinna in order to result in electric field flux traversing a cross-sectional area between the first and second electrode to generate the plasma body as taught by Millner. Regarding Claim 4, Enzinna discloses the system of claim 1, wherein the center tap (fig. 5A of Millner, connected to ground) and the time-varying source (205 of Enzinna) are referenced to a common voltage (Fig. 2 of Enzinna, connected to ground too). Regarding Claim 6, Enzinna discloses the system of claim 1, further comprising a resistive device (resistive shunt, paragraph [0043]) at an output of the primary to provide a ground referenced voltage measurement (fig. 7). Regarding Claim 8, Enzinna discloses the system of claim 1, wherein the amplitude on the second side of the center tap is proportional to a capacitance at the node (“More specifically, it has been found that it is common for the time-varying signal to change amplitude with changing capacitive load resulting in non-linearities in the capacitance sensing”, paragraph [0064]). Regarding Claim 10, as discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the apparatus of claim 9, wherein a center tap separates the portion of the primary coupled to the monitor from the portion of the primary coupled to the time-varying source. However, Millner et al. (2007/0103092) discloses a center tap coupled to the transformer for applying a voltage of a first polarity to the first lead and a voltage of a second polarity to the second lead, resulting in electric field flux traversing a cross-sectional area between the first and second electrode to generate the plasma body (paragraph [0012]). It would have been obvious to one of ordinary skill in the art to have provided a center tap to the transformer in Enzinna to sperate the portion of the primary coupled to the monitor from the portion of the primary coupled to the time-varying source in order to result in electric field flux traversing a cross-sectional area between the first and second electrode to generate the plasma body as taught by Millner. Claim(s) 2, 11 is/are rejected under 35 U.S.C. 103 as being unpatentable over Enzinna (2022/0334160) in view of Millner et al. (2007/0103092) further in view of Zhao et al. (2020/0214087). Regarding Claim 2, as discussed above, Enzinna essentially discloses a filter (filtering, paragraphs [0045], [0084], [0085]) arranged between the node and a capacitive load (abstract, paragraph [0012]) but does not explicitly disclose the system of claim 1, wherein an amplitude and/or frequency of the time-varying source is configured to match a bandpass of a filter arranged between the node and a capacitive load. However, Zhao et al. (2020/0214087) discloses that the programmable power supply may input, based on match relationships between outputted AC heating powers and conduction frequencies of the bandpass filters BPF, an AC heating power to a matched heater unit to perform heating, thereby achieving zoned temperature control; the disclosures offer a simple circuit structure due to eliminating the need of switch elements, thereby offering a simple control manner (abstract). It would have been obvious to one of ordinary skill in the art at the time the invention was filed to have matched the AC power (amplitude) with the bandpass filter in Enzinna in order to achieve zoned temperature control, offer a simple control as taught by Zhao. Regarding Claim 11, as discussed above, Enzinna discloses filtering, paragraphs [0045], [0084], [0085]) but does not explicitly disclose the apparatus of claim 10, wherein a frequency of the time-varying source is configured to correspond with a passband of a filter arranged between the node and a capacitive load. However, Zhao et al. (2020/0214087) discloses that the programmable power supply may input, based on match relationships between outputted AC heating powers and conduction frequencies of the bandpass filters BPF, an AC heating power to a matched heater unit to perform heating, thereby achieving zoned temperature control; the disclosures offer a simple circuit structure due to eliminating the need of switch elements, thereby offering a simple control manner (abstract). It would have been obvious to one of ordinary skill in the art at the time the invention was filed to have corresponded the AC power (amplitude) with the bandpass filter in Enzinna in order to achieve zoned temperature control, offer a simple control as taught by Zhao. Claim(s) 3, 12 is/are rejected under 35 U.S.C. 103 as being unpatentable over Enzinna (2022/0334160) in view of Millner et al. (2007/0103092) further in view of Zhao et al. (2020/0214087), further in view of Hori et al. (2012/0175515). Regarding Claim 3, as discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the system of claim 2, wherein the time-varying source operates at a frequency of 5 Hz to 50 Hz. However, Hori et al. (2012/0175515) discloses that the frequency of the n-phase AC power source is preferably about 20 Hz to about 200 Hz. And a commercial power source (50 Hz or 60 Hz) may be incorporated into a power circuit [0099]. It would have been obvious to one of ordinary skill in the art at the time the invention was filed to have provided a commonly used or commercial power source at 20Hz or 50Hz in Enzinna in order to facilitate the operation of the plasma generation as taught by Hori et al. Regarding Claim 12, as discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the apparatus of claim 11, wherein the frequency of the time-varying source is between 5 Hz and 50 Hz. However, Hori et al. (2012/0175515) discloses that the frequency of the n-phase AC power source is preferably about 20 Hz to about 200 Hz. And a commercial power source (50 Hz or 60 Hz) may be incorporated into a power circuit [0099]. It would have been obvious to one of ordinary skill in the art at the time the invention was filed to have provided a commonly used or commercial power source at 20Hz or 50Hz in Enzinna in order to facilitate the operation of the plasma generation as taught by Hori et al. Claim(s) 5, 7, 13 is/are rejected under 35 U.S.C. 103 as being unpatentable over Enzinna (2022/0334160) in view of Millner et al. (2007/0103092), further in view of Chawla et al. (6,046,641). Regarding Claim 5, as discussed above, Enzinna in view of Millner essentially discloses the claimed invention but does not explicitly disclose the system of claim 1, wherein the secondary of the transformer has fewer turns than a number of turns in the primary and the secondary coupled in series to the power source and the node. However, Chawla et al. (6,046,641) discloses that an isolating transformer T1 has a primary connected between the input terminal and ground, and a secondary with one end coupled to the gate G of transistor Q1 and the other end tied to the source S. The transformer T1 has a turn ratio of 3:1. (Col. 5, lines 37-56). It would have been obvious to one of ordinary skill in the art to have provided the secondary of the transformer has fewer turns than a number of turns in the primary and the secondary coupled in series to the power source and the node (e.g. turn ratio of 3 (primary):1 (secondary)) in order to achieve a desired power output in Enzinna as taught by Chawla. Regarding Claim 7, as discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the system of claim 1, wherein a number of turns of the primary on both sides of the center tap is selected to achieve a desired gain between the time-varying source and the sensing circuit. However, Chawla et al (6,046,641) discloses particular turn ratio of the primary and secondary in the transformer to provide stable operation such as power gain (Col. 5, lines 37-56). It would have been obvious to one of ordinary skill in the art at the time the invention was filed to have adjust particular numbers of turns in the primary and secondary windings of the transformer in Enzinna in order to achieve desired power gain for stable operation as taught by Chawla. Regarding Claim 13, as discussed above, Enzinna essentially discloses the claimed invention but does not explicitly disclose the apparatus of claim 9, wherein the secondary of the transformer has fewer turns than a number of turns in the primary. However, Chawla et al. (6,046,641) discloses that an isolating transformer T1 has a primary connected between the input terminal and ground, and a secondary with one end coupled to the gate G of transistor Q1 and the other end tied to the source S. The transformer T1 has a turn ratio of 3:1. (Col. 5, lines 37-56). It would have been obvious to one of ordinary skill in the art to have provided the secondary of the transformer has fewer turns than a number of turns in the primary and the secondary coupled in series to the power source and the node (e.g. turn ratio of 3 (primary):1 (secondary)) in order to achieve a desired power output in Enzinna as taught by Chawla. Conclusion The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. Yamazawa (2017/0338081) discloses a plasma processing apparatus. Yuzurihara et al. (2017/0279364) discloses regeneration circulator high frequency power supply device. Fahimi (8,940,243) discloses a reforming chamber with constant electric discharge to generate hydrogen. Correspondence Any inquiry concerning this communication or earlier communications from the examiner should be directed to Examiner Wilson Lee whose telephone number is (571) 272-1824. Proposed amendment and interview agenda can be submitted to Examiner’s direct fax at (571) 273-1824. If attempts to reach the examiner by telephone are unsuccessful, examiner’s supervisor, Alexander Taningco can be reached at (571) 272-8048. Papers related to the application may be submitted by facsimile transmission. Any transmission not to be considered an official response must be clearly marked "DRAFT". The official fax number is (571) 273-8300. Information regarding the status of an application may be obtained from the Patent Center. Status information for published applications may be obtained from Patent Center. For more information about the Patent Center, see https://patentcenter.uspto.gov. Should you have questions on access to the Patent Center, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). /WILSON LEE/ Primary Examiner, Art Unit 2845
Read full office action

Prosecution Timeline

Feb 15, 2024
Application Filed
Jun 03, 2026
Non-Final Rejection mailed — §102, §103 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12627018
Rat-race balun and associated method for reducing the footprint of a rat-race balun
2y 4m to grant Granted May 12, 2026
Patent 12614851
DISPLAY MODULE AND ELECTRONIC DEVICE
2y 7m to grant Granted Apr 28, 2026
Patent 12614860
FREIGHT CONTAINER SIDE-MOUNTED ANTENNA
1y 6m to grant Granted Apr 28, 2026
Patent 12603258
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
2y 12m to grant Granted Apr 14, 2026
Patent 12586891
ANTENNA DEVICE
1y 7m to grant Granted Mar 24, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.
Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2
Expected OA Rounds
87%
Grant Probability
90%
With Interview (+3.1%)
2y 9m (~4m remaining)
Median Time to Grant
Low
PTA Risk
Based on 657 resolved cases by this examiner. Grant probability derived from career allowance rate.

Sign in with your work email

Enter your email to receive a magic link. No password needed.

Personal email addresses (Gmail, Yahoo, etc.) are not accepted.

Free tier: 3 strategy analyses per month