Prosecution Insights
Last updated: April 19, 2026
Application No. 18/451,542

Shallow Trench Isolation using Porous Semiconductor

Non-Final OA §102§103
Filed
Aug 17, 2023
Examiner
HOSSAIN, MOAZZAM
Art Unit
2898
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Murata Manufacturing Co. Ltd.
OA Round
1 (Non-Final)
88%
Grant Probability
Favorable
1-2
OA Rounds
2y 6m
To Grant
98%
With Interview

Examiner Intelligence

Grants 88% — above average
88%
Career Allow Rate
694 granted / 792 resolved
+19.6% vs TC avg
Moderate +11% lift
Without
With
+10.7%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
52 currently pending
Career history
844
Total Applications
across all art units

Statute-Specific Performance

§101
2.7%
-37.3% vs TC avg
§103
45.5%
+5.5% vs TC avg
§102
31.3%
-8.7% vs TC avg
§112
16.6%
-23.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 792 resolved cases

Office Action

§102 §103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election, without traverse, of group I, claims 1-10, in ”Response to Election / Restriction Filed - 12/04/2025”, is acknowledged along with cancellation of claims 11-17. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale or otherwise available to the public before the effective filing date of the claimed invention. Notes: when present, semicolon separated fields within the parenthesis (; ;) represent, for example, as 100; Fig 9(a); [0019]) = (element 100; Figure No. 9(a); Paragraph No. [0019]). For brevity, the texts “Element”, “Figure No.” and “Paragraph No.” shall be excluded, though; additional clarification notes may be added within each field. The number of fields may be fewer or more than three indicated above. These conventions are used throughout this document. Claims 1-2, 5-7 and 10 are rejected under 35 U.S.C. 102 (a) (1) as being anticipated by Divakaruni; Ramachandra et al. (US 20090206442 A1) hereinafter Divakaruni Regarding claim 1. Divakaruni teaches an integrated circuit (100; Fig 9(a)-9(b); 0019]) including (see the entire document, Figs 9(a)-9(b), 14 along with subject matter referenced in other figures, specifically, as cited below) . PNG media_image1.png 294 1015 media_image1.png Greyscale Divakaruni Figures 9(a) -9(b); and Figure 14 at least one porous semiconductor isolation structure (122 with opening 114 and filled area 108, Fig 9(a)-9B; [0019-0020]; opening 114 in between fill material 108 labeled as [0007] one or more STI regions (122) porous; see also claim 1: a plurality of vertically oriented nano-scale openings (114) in the trench fill material (108); and plugging upper portions of the nano-scale openings with additional trench fill material, thereby defining porous STI regions (122) in the substrate (100)). Regarding claim 2. Divakaruni as applied to the integrated circuit of claim 1, further teaches, wherein the at least one porous semiconductor isolation structure (122) includes a protective cap (110; Fig 14). Regarding claim 5. Divakaruni as applied to the integrated circuit of claim 1, further teaches, wherein the at least one porous semiconductor isolation structure (122) comprises mesoporous (because of opening of 10 nm to 40 nm [0018] and instant specification defines in paragraph [0039] mesoporous π-Semi (pore diameters φ between about 2 nm and 50 nm) semiconductor {114,108}. Regarding claim 6. Divakaruni teaches an integrated circuit (100; Fig 9(a)-9(b); 0019]) including (see the entire document, Figs 9(a)-9(b), 14 along with subject matter referenced in other figures, specifically, as cited below) . at least one transistor structure ( a gate structure 120; Fig 9a-9b; [0020]) surrounded by a porous semiconductor isolation structures (122 with opening 114 and filled area 108, Fig 9(a)-9B; [0019-0020]; opening 114 in between fill material 108 labeled as [0007] one or more STI regions (122) porous; see also claim 1: a plurality of vertically oriented nano-scale openings (114) in the trench fill material (108); and plugging upper portions of the nano-scale openings with additional trench fill material, thereby defining porous STI regions (122) in the substrate (100)).. Regarding claim 7. Divakaruni as applied to the integrated circuit of claim 6, further teaches, wherein the at least one porous semiconductor isolation structure (122) includes a protective cap (110; Fig 14). Regarding claim 10. Divakaruni as applied to the integrated circuit of claim 6, further teaches, wherein the at least one porous semiconductor isolation structure (122) comprises mesoporous (because of opening of 10 nm to 40 nm [0018])and and instant specification defines in paragraph [0039] mesoporous π-Semi (pore diameters φ between about 2 nm and 50 nm) semiconductor {114,108}. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102 of this title, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claims 4 and 9 are rejected under 35 U.S.C. 103 as being unpatentable over Divakaruni; Ramachandra et al. (US 20090206442 A1) hereinafter Divakaruni. Regarding claims 4, 9. Divakaruni as applied to the integrated circuit of claims 1 and/or 6, while further teaches, wherein the at least one porous semiconductor isolation structure (122) but does not expressly disclose “comprises microporous semiconductor” {114,108}. However, the Applicant has not presented persuasive evidence that microporous semiconductor is critical to the overall claimed invention (i.e. the invention would not work without the specific claimed thickness), since it clamed (in claims 5 and 10) mesoporous semiconductor . Also, the applicant has not shown that the claimed microporous semiconductor produces a result that was new or unexpected enough to patentably distinguish the claimed invention over the cited prior art. It is noted that instant specification defines in paragraph [0039] microporous π-Semi (pore diameters φ less than about 2 nm) or mesoporous π-Semi (pore diameters φ between about 2 nm and 50 nm), Examiner like to note MPEP 2144.05.I, specifically, In re Brandt, 886 F.3d 1171, 1177, 126 USPQ2d 1079, 1082 (Fed. Cir. 2018), wherein the court found a prima facie case of obviousness had been made in a predictable art wherein the claimed range of "less than 2nm" and the prior art range of "6 nm” were so mathematically close that the difference between the claimed ranges was virtually negligible absent any showing of unexpected results or criticality.). Therefore, the microporous semiconductor of claimed is not patentable over prior art disclosed porous semiconductor of 10 nm. Claims 3 and 8 are rejected under 35 U.S.C. 103 as being unpatentable over Divakaruni; Ramachandra et al. (US 20090206442 A1) hereinafter Divakaruni; in view of Kovacs; Terrence et al., (US 4444620 A) hereinafter Kovacs. Regarding claims 3. 8 Divakaruni as applied to the integrated circuit of claims 1 and/or 6, while further teaches, wherein the at least one porous semiconductor isolation structure (122; Fig 14) includes a protective cap (110), but was silent on “of recrystallized semiconductor”. However, in the analogous art, Kovacs teaches Growth Of Oriented Single Crystal Semiconductor On Insulator (title), wherein in (Column 3, Lines 8-20) highly perfect, capped, laterally recrystallized semiconductor material on buried insulator can be produced if the cap is appropriately patterned. It is thought to be of benefit also with other techniques for lateral recrystallization of capped semiconductor films on buried insulator, e.g., with the above-mentioned global melting technique. Furthermore, we believe that patterning can be advantageously used in semiconductor/insulator systems other than Si/SiO.sub.2, e.g., Ge, III-V or II-VI semiconductors such as GaAs, InP, and ZnS on oxides (including, where applicable, native oxide), nitrides, carbides, or borides. Therefore, it would have been obvious to one of ordinary skill in the, before the effective filing date of the claimed invention, to adopt the teaching of Kovac’ capped recrystallized semiconductor material for Divakaruni’s porous semiconductor isolation structure (122) and teaches the claimed limitation, since, this inclusion of Semiconductor material on insulator recrystallized can advantageously be employed for device manufacture, e.g., manufacture of electronic devices such as MOSFET or bipolar transistors, optoelectronic devices, or integrated optics devices( Kovacs Column 7, Lines 55-61). Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to MOAZZAM HOSSAIN whose telephone number is (571)270-7960. The examiner can normally be reached M-F: 8:30AM - 6:00 PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Julio J. Maldonado can be reached on 571-272-1864. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /MOAZZAM HOSSAIN/Primary Examiner, Art Unit 2898 January 31, 2026
Read full office action

Prosecution Timeline

Aug 17, 2023
Application Filed
Oct 30, 2023
Response after Non-Final Action
Jan 31, 2026
Non-Final Rejection — §102, §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
88%
Grant Probability
98%
With Interview (+10.7%)
2y 6m
Median Time to Grant
Low
PTA Risk
Based on 792 resolved cases by this examiner. Grant probability derived from career allow rate.

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