Prosecution Insights
Last updated: April 19, 2026
Application No. 18/464,759

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

Non-Final OA §102§112
Filed
Sep 11, 2023
Examiner
HOSSAIN, MOAZZAM
Art Unit
2898
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Rohm Co. Ltd.
OA Round
1 (Non-Final)
88%
Grant Probability
Favorable
1-2
OA Rounds
2y 6m
To Grant
98%
With Interview

Examiner Intelligence

Grants 88% — above average
88%
Career Allow Rate
694 granted / 792 resolved
+19.6% vs TC avg
Moderate +11% lift
Without
With
+10.7%
Interview Lift
resolved cases with interview
Typical timeline
2y 6m
Avg Prosecution
52 currently pending
Career history
844
Total Applications
across all art units

Statute-Specific Performance

§101
2.7%
-37.3% vs TC avg
§103
45.5%
+5.5% vs TC avg
§102
31.3%
-8.7% vs TC avg
§112
16.6%
-23.4% vs TC avg
Black line = Tech Center average estimate • Based on career data from 792 resolved cases

Office Action

§102 §112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election, without traverse, of group I, claims 1-4 in ”Response to Election / Restriction Filed - 01/05/2026”, is acknowledged. This office action considers claims 1-6 are thus pending for prosecution, of which, non-elected claims 5-6 are withdrawn, and elected claims 1-4 are examined on their merits. Drawings The drawings are objected to under 37 CFR 1.83(a). The drawings must show every feature of the invention specified in the claims. Therefore, the limitations in claims: (related to device claim 2 in view of the parent device claim), “a depth of the movable portion adjacent to the isolation joint is less than a depth of the isolation joint”(claim 2, Ln 1-2), must be shown or the feature(s) canceled from the claim(s). Applicant is reminded that the element, to be shown in the drawing, must not be a temporary element of a method or a lithographic process that does not exist in the final device structure as claimed. No new matter should be entered. Corrected drawing sheets in compliance with 37 CFR 1.121(d) are required in reply to the Office action to avoid abandonment of the application. Any amended replacement drawing sheet should include all of the figures appearing on the immediate prior version of the sheet, even if only one figure is being amended. The figure or figure number of an amended drawing should not be labeled as “amended.” If a drawing figure is to be canceled, the appropriate figure must be removed from the replacement sheet, and where necessary, the remaining figures must be renumbered and appropriate changes made to the brief description of the several views of the drawings for consistency. Additional replacement sheets may be necessary to show the renumbering of the remaining figures. Each drawing sheet submitted after the filing date of an application must be labeled in the top margin as either “Replacement Sheet” or “New Sheet” pursuant to 37 CFR 1.121(d). If the changes are not accepted by the examiner, the applicant will be notified and informed of any required corrective action in the next Office action. The objection to the drawings will not be held in abeyance. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (B) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. Claims 2-3 are rejected under 35 U.S.C. 112(b), second paragraph, as being indefinite and non-functional for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor, or for pre-AIA the applicant regards as the invention. Regarding claim 2, The instant claim, recites the limitation, in view of claim 1, wherein the metes and bounds of the claimed invention, in claim 2, is vague and ill-defined, as a result of limitation the claim “wherein a depth of the movable portion adjacent to the isolation joint is less than a depth of the isolation joint” (claim 2. Line 1-2). The claim is indefinite because it is unclear what is the depth of the movable portion? It is noted that, in PGPUB version of specification, paragraph [0030] defines “the depth of the IJ 4 is t”, that is shown in Fig 2; from where the depth of the movable portion (3) is “mh”; and paragraph [0045] determined “mh > t” . This statement contradicts claim’s limitation “a depth of the movable portion adjacent to the isolation joint is less than a depth of the isolation joint”. It is also found in paragraph [0055] a depth (s2) of the movable portion adjacent to the isolation joint is less than a depth (t) of the isolation joint. However, the s2 is not defined in disclosure of the MEMS device; s2 is defined as a temporary etching depth in process step solely in Fig 12. Therefore, the resulting claim is indefinite and is failing to particularly point out and distinctly claim the subject matter. The specification does not provide a standard for ascertaining the requisite degree, and one of ordinary skill in the art would not be reasonably apprised of the scope of the invention. Appropriate clarification and/or correction are/is required within metes and bounds of the claimed invention. For the purposes of evaluating the prior art, the Examiner assumes any feature as necessarily being appropriate. Regarding claim 3 this is rejected under 35 U.S.C. 112 (b), because of its dependency in claim 2. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: (a)(2) the claimed invention was described in a patent issued under section 151, or in an application for patent published or deemed published under section 122(b), in which the patent or application, as the case may be, names another inventor and was effectively filed before the effective filing date of the claimed invention. Notes: when present, semicolon separated fields within the parenthesis (; ;) represent, for example, as 10; Fig 2; [0038]) = (element 10; Figure No. 3; Paragraph No. [0038]). For brevity, the texts “Element”, “Figure No.” and “Paragraph No.” shall be excluded, though; additional clarification notes may be added within each field. The number of fields may be fewer or more than three indicated above. These conventions are used throughout this document. Claims 1-4 are rejected under 35 U.S.C. 102 (a) (2) as being anticipated by MILLER; Scott A. (US 20230136105 A1) hereinafter Miller. Regarding claim 1. Miller teaches a MEMS device (10; Figs 1-2; [0038]) having a movable portion (comprising {220,227, 214} including hanging mass or blade), comprising (see the entire document, Figs 1-2, along with subject matter referenced in other figures, specifically, as cited below): PNG media_image1.png 396 834 media_image1.png Greyscale Miller Figures 1-2 (truncated) a substrate (212; Fig.2; [0047]); a recess (232; [0046] labelled as cavity), disposed in the substrate (212); the movable portion ({220,227, 214} including hanging masses or blades), hollowly supported in the recess (232); and an isolation joint (210; Fig 2; [0047]), inserted into a predetermined position of the movable portion ( 214) and electrically insulating (as disclosed in [0047] as 210 is a dielectric material, which for one embodiment is silicon dioxide and provide the electrical isolation between blade 14) both sides of the movable portion (214), wherein a shortest distance (hereinafter d_shortest) between a bottom of the recess (232; depicted in Fig 2 where 234 touches 232; hereinafter 232_bottom) and the movable portion (hanging masses or blades) is less (depicted in Fig 2) than a distance between the bottom of the recess (232_bottom) and the isolation joint (210). Regarding claim 2. Miller as applied to the MEMS device of Claim 1, further teaches (see drawing objection in section I and 112(b) rejection in section II, supra), wherein a depth (along the vertical direction) of the movable portion (214) adjacent to the isolation joint (210) is less than a depth (Fig 2) of the isolation joint (210). ([0057]. Regarding claim 3. Miller as applied to the MEMS device of Claim 2, further teaches, further teaches, wherein the movable portion ({220,227, 214} including hanging masses or blades) includes a portion (hanging masses or blades) having a depth (along vertical length) greater (depicted in Fig 2) than the depth (along vertical length) of the isolation joint (210). Regarding claim 4. Miller as applied to the MEMS device of Claim 1, further teaches, further teaches, wherein the distance between the bottom of the recess (232_bottom) and the isolation joint (210) is a distance between a lower end of the isolation joint (210) and a protrusion (502 in Fig 5; [0050]) formed at the bottom of the recess (232_bottom). Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to MOAZZAM HOSSAIN whose telephone number is (571)270-7960. The examiner can normally be reached M-F: 8:30AM - 6:00 PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Julio J. Maldonado can be reached on 571-272-1864. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /MOAZZAM HOSSAIN/Primary Examiner, Art Unit 2898 February 6, 2026
Read full office action

Prosecution Timeline

Sep 11, 2023
Application Filed
Feb 06, 2026
Non-Final Rejection — §102, §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12600619
EARLY-IMPACT OUT-OF-PLANE MOTION LIMITER FOR MEMS DEVICE
2y 5m to grant Granted Apr 14, 2026
Patent 12600620
LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
2y 5m to grant Granted Apr 14, 2026
Patent 12604503
PROFILE CONTROL OF ISOLATION STRUCTURES IN SEMICONDUCTOR DEVICES
2y 5m to grant Granted Apr 14, 2026
Patent 12596948
METHOD FOR MAKING A QUANTUM DEVICE
2y 5m to grant Granted Apr 07, 2026
Patent 12589989
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE
2y 5m to grant Granted Mar 31, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
88%
Grant Probability
98%
With Interview (+10.7%)
2y 6m
Median Time to Grant
Low
PTA Risk
Based on 792 resolved cases by this examiner. Grant probability derived from career allow rate.

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