Prosecution Insights
Last updated: July 17, 2026
Application No. 18/505,041

PHOTOLITHOGRAPHY APPARATUS AND OPERATION METHOD OF THE SAME

Non-Final OA
Filed
Nov 08, 2023
Priority
May 08, 2023 — RE 10-2023-0059257
Examiner
PERSAUD, DEORAM
Art Unit
Tech Center
Assignee
Samsung Electronics Co., Ltd.
OA Round
1 (Non-Final)
77%
Grant Probability
Favorable
1-2
OA Rounds
1m
Est. Remaining
89%
With Interview

Examiner Intelligence

Grants 77% — above average
77%
Career Allowance Rate
583 granted / 759 resolved
+16.8% vs TC avg
Moderate +12% lift
Without
With
+11.8%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
33 currently pending
Career history
798
Total Applications
across all art units

Statute-Specific Performance

§101
1.2%
-38.8% vs TC avg
§103
63.8%
+23.8% vs TC avg
§102
28.0%
-12.0% vs TC avg
§112
0.7%
-39.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 759 resolved cases

Prosecution Timeline

Nov 08, 2023
Application Filed
Jun 02, 2026
Non-Final Rejection mailed
Jul 03, 2026
Interview Requested

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12676447
APPARATUS FOR AND METHOD OF OPTICAL COMPONENT ALIGNMENT
3y 1m to grant Granted Jul 07, 2026
Patent 12675052
SUBSTRATE WARPAGE DETERMINATION SYSTEM
1y 9m to grant Granted Jul 07, 2026
Patent 12663732
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING
2y 5m to grant Granted Jun 23, 2026
Patent 12645156
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM, AND METHOD FOR USING SAME
2y 3m to grant Granted Jun 02, 2026
Patent 12645069
HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSING SYSTEM
3y 0m to grant Granted Jun 02, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
77%
Grant Probability
89%
With Interview (+11.8%)
2y 9m (~1m remaining)
Median Time to Grant
Low
PTA Risk
Based on 759 resolved cases by this examiner. Grant probability derived from career allowance rate.

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