Prosecution Insights
Last updated: October 02, 2026
Application No. 18/515,031

COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS

Non-Final OA §103
Filed
Nov 20, 2023
Priority
Sep 14, 2017 — provisional 62/558,621 +2 more
Examiner
COHEN, STEFANIE J
Art Unit
1732
Tech Center
1700 — Chemical & Materials Engineering
Assignee
Versum Materials US LLC
OA Round
1 (Non-Final)
75%
Grant Probability
Favorable
1-2
OA Rounds
0m
Est. Remaining
78%
With Interview

Examiner Intelligence

Grants 75% — above average
75%
Career Allowance Rate
740 granted / 981 resolved
+10.4% vs TC avg
Minimal +2% lift
Without
With
+2.5%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
41 currently pending
Career history
999
Total Applications
across all art units

Statute-Specific Performance

§101
1.6%
-38.4% vs TC avg
§103
59.6%
+19.6% vs TC avg
§102
10.9%
-29.1% vs TC avg
§112
20.0%
-20.0% vs TC avg
Black line = Tech Center average estimate • Based on career data from 981 resolved cases

Office Action

§103
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Group I, claims 1-5, in the reply filed on 6/9/26 is acknowledged. Claim Rejections - 35 USC § 103 The following is a quotation of 35 U.S.C. 103 which forms the basis for all obviousness rejections set forth in this Office action: A patent for a claimed invention may not be obtained, notwithstanding that the claimed invention is not identically disclosed as set forth in section 102, if the differences between the claimed invention and the prior art are such that the claimed invention as a whole would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains. Patentability shall not be negated by the manner in which the invention was made. Claims 1-5 are rejected under 35 U.S.C. 103 as being unpatentable over Cawthon et al (4973723). Cawthon teaches silacycloalkanes. Cawthon, col. 3, teaches the number of carbons incorporated in the silacycloalkane ring can vary from 3 to 8. The silacycloalkane can be, for example, silacyclobutane, silacyclopentane, silacyclohexane, silacycloheptane, and silacyclononane. The silicon atom of the silacycloalkane can be substituted with a hydrocarbon radical, R, of ten or less carbon atoms. One or more carbon atoms of the silacycloalkane ring may be substituted with one or more radicals independently selected from the group consisting of trialkylsilyl, alkyl, alkenyl, aryl, and aralkyl., and radicals of formula Ro O-. Cawthon, example 1, teaches the product was recovered from the vessel by vacuum distillation and trapping the resultant distillate in a cold trap maintained at minus 78° C. It would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains that the silicon atom of the silacycloalkane can be substituted with a tert-butyl group as the reference broadly teaches the silicon atom of the silacycloalkane can be substituted with a hydrocarbon radical, R of ten or less carbon atoms. Further, it would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains that the 3 position carbon atom of the silacycloalkane ring may be substituted with broadly any alkyl group such as a branched alkyl group such as a tert-butyl group. Further, it would have been obvious before the effective filing date of the claimed invention to a person having ordinary skill in the art to which the claimed invention pertains that after vacuum distillation this compound is substantially free of water. Regarding claim 2, Cawthon, col. 3, teaches the halogen constituent can be chloride, fluoride, bromide, iodide atoms, or a combination thereof. Regarding claims 3-5, Cawthon, col. 3, teaches the halogen constituent can be fluoride, bromide or iodide atoms. Therefore, there was be minimal if any chloride ions. Conclusion The prior art made of record and not relied upon is considered pertinent to applicant's disclosure. US20150376211 teaches Si-containing films. US5302734 teaches a 1,3-disilacyclobutane compound. Any inquiry concerning this communication or earlier communications from the examiner should be directed to STEFANIE J COHEN whose telephone number is (571)270-5836. The examiner can normally be reached 10am- 6pm M-F. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Coris Fung can be reached at (571) 270-5713. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /STEFANIE J COHEN/Examiner, Art Unit 1732 8/18/26
Read full office action

Prosecution Timeline

Nov 20, 2023
Application Filed
Aug 20, 2026
Non-Final Rejection mailed — §103 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
75%
Grant Probability
78%
With Interview (+2.5%)
2y 9m (~0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 981 resolved cases by this examiner. Grant probability derived from career allowance rate.

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