Prosecution Insights
Last updated: April 19, 2026
Application No. 18/589,134

THIN FILM TRANSISTOR DECK SELECTION IN A MEMORY DEVICE

Non-Final OA §102§112
Filed
Feb 27, 2024
Examiner
WARREN, MATTHEW E
Art Unit
2815
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
Micron Technology, Inc.
OA Round
1 (Non-Final)
87%
Grant Probability
Favorable
1-2
OA Rounds
2y 8m
To Grant
93%
With Interview

Examiner Intelligence

Grants 87% — above average
87%
Career Allow Rate
862 granted / 986 resolved
+19.4% vs TC avg
Moderate +6% lift
Without
With
+5.6%
Interview Lift
resolved cases with interview
Typical timeline
2y 8m
Avg Prosecution
25 currently pending
Career history
1011
Total Applications
across all art units

Statute-Specific Performance

§101
0.3%
-39.7% vs TC avg
§103
47.8%
+7.8% vs TC avg
§102
39.7%
-0.3% vs TC avg
§112
8.9%
-31.1% vs TC avg
Black line = Tech Center average estimate • Based on career data from 986 resolved cases

Office Action

§102 §112
DETAILED ACTION This Office Action is in response to the Election filed on December 1, 2025. Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Group II, claims 2-13 in the reply filed on December 1, 2025 is acknowledged. Claims 14-21 withdrawn from further consideration pursuant to 37 CFR 1.142(b) as being drawn to a nonelected invention and species, there being no allowable generic or linking claim. Election was made without traverse in the reply. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 2-13 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 2 recites the limitation “forming a first memory array associated with a first level above a substrate” and “forming a first memory array associated with a first level above a substrate.” The memory array being “associated” does not convey structure or configuration so its not understood how the memory arrays physical relate to the levels. The claim limitation in question needs to be corrected to show some form of structural relationship or connection. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claims 2-13 are rejected under 35 U.S.C. 102 (a)1) as being anticipated by Beigel et al. (WO 2019/133744 A1). In re claim 1, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) a method, comprising: forming a column decoder (206; fig. 2) of a memory die; forming a first memory array (108C; fig.1) associated with a first level (108) above a substrate of the memory die, the first memory array comprising a first plurality of digit lines each operable to couple with the column decoder via a respective first transistor (108B) of the first level ; and forming a second memory array (106C; fig. 1) associated with a second level (106) above the substrate of the memory die, the second memory array comprising a second plurality of digit lines each operable to couple with the column decoder via a respective second transistor (106B) of the second level. In re claim 3, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) a plurality of conductors each coupled with one of the first transistors of the first level, one of the second transistors of the second level, and the column decoder. In re claims 4-7, Beigel et al. shows (figs. 3) each of the first transistors comprises a respective channel portion of the first level; and each of the second transistors comprises a respective channel portion of the second level. The channel portion of each of the first transistors is operable to form a respective channel that is aligned along a direction relative to the substrate; and the channel portion of each of the second transistors is operable to form a respective channel that is aligned along the direction relative to the substrate. One or more first conductors of the first level each operable to modulate a conductivity of the channel portion of each of the first transistors; and one or more second conductors of the second level each operable to modulate a conductivity of the channel portion of each of the second transistors. The channel portion of each of the first transistors comprises a respective set of one or more first semiconductor pillars over the substrate of the memory die in the first level and in contact with the respective digit line of the first plurality of digit lines; and he channel portion of each of the second transistors comprises a respective set of one or more second semiconductor pillars over the substrate of the memory die in the second level and in contact with the respective digit line of the second plurality of digit lines. In re claim 8, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) each memory cell of a first plurality of memory cells of the first memory array is associated with a respective third transistor of the first level operable to couple the memory cell with a digit line of the first plurality of digit lines, each of the third transistors comprising a respective channel portion comprising a respective set of one or more third semiconductor pillars overlapping, along a height dimension relative to the substrate, with the first semiconductor pillars; and each memory cell of a second plurality of memory cells of the second memory array is associated with a respective fourth transistor of the second level operable to couple the memory cell with a digit line of the second plurality of digit lines, each of the fourth transistors comprising a respective channel portion comprising a respective set of one or more fourth semiconductor pillars overlapping, along the height dimension relative to the substrate, with the second semiconductor pillars. In re claim 8, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) a plurality of third transistors of the first level each operable to couple a respective memory cell of a first plurality of memory cells of the first memory array with a digit line of the first plurality of digit lines; and a plurality of fourth transistors of the second level each operable to couple a respective memory cell of a second plurality of memory cells of the second memory array with a digit line of the second plurality of digit lines. In re claims 9-11, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) a plurality of word line conductors each operable to activate a respective row of the plurality of third transistors and to activate a respective row of the plurality of fourth transistors. The column decoder is associated with a third level of the memory die, and the second level is positioned between the first level and the third level. The column decoder comprises a plurality of transistors, each transistor of the plurality of transistors comprising a respective channel portion formed at least in part by a doped portion of the substrate. In re claims 12, 13, Beigel et al. shows (figs. 1 & 2; pg. 10, line 21 - pg. 11, line 18) the column decoder is operable to couple digit lines of the first plurality of digit lines or of the second plurality of digit lines with a sense component for accessing memory cells of the first memory array or of the second memory array, wherein the sense component comprises a plurality of transistors, each transistor of the plurality of transistors comprising a respective channel portion formed at least in part by a doped portion of the substrate. each of the first transistors of the first level comprises a respective first channel portion formed at least in part by a polycrystalline semiconductor material over the substrate in the first level; and each of the second transistors of the second level comprises a respective second channel portion formed at least in part by the polycrystalline semiconductor material over the substrate in the second level. The substrate comprises a crystalline semiconductor material. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to MATTHEW E WARREN whose telephone number is (571)272-1737. The examiner can normally be reached Mon-Fri 10am - 6pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Joshua Benitez can be reached at 571-270-1435. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /MATTHEW E WARREN/Primary Examiner, Art Unit 2815
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Prosecution Timeline

Feb 27, 2024
Application Filed
Jan 10, 2026
Non-Final Rejection — §102, §112 (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
87%
Grant Probability
93%
With Interview (+5.6%)
2y 8m
Median Time to Grant
Low
PTA Risk
Based on 986 resolved cases by this examiner. Grant probability derived from career allow rate.

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