DETAILED ACTION
Claims 1-19 are pending.
Notice of Pre-AIA or AIA Status
The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA .
Claim Rejections - 35 USC § 102
In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status.
The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action:
A person shall be entitled to a patent unless –
(a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention.
Claim(s) 1-19 is/are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Willis et al.,
US Patent No. 7,477,960 (hereinafter Willis).
Regarding claims 1-19, Willis discloses all the claimed limitations, as outlined below.
Claim 1. A control apparatus comprising: a memory that stores an event item indicating at least one event related to a target apparatus (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - the apparatus being monitored); and a controller that is capable of controlling notifying a display of an event item corresponding to an occurred event when the event item corresponding to the occurred event is stored in the memory (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - displaying an alarm corresponding to the event. See Fig 5 below wherein faults are detected and alarms are triggered. Corresponding control strategies are executed).
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Claim 2. The control apparatus of Claim 1, wherein the display includes an event item display screen, and wherein the event item display screen includes an event item display area that displays at least one event item that is currently occurring (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61. (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes. See display screen shown in Fig 6 below).
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Claim 3. The control apparatus of Claim 2, wherein the at least one event item is arranged and displayed on the event item display area in order of a new occurrence time that is a time when the event occurred (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 4. The control apparatus of Claim 1, wherein the event item includes at least one selected from the group of an event name, an event occurrence time that is a time when the event occurred, and an outline of the event (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 5. The control apparatus of Claim 2, wherein the display includes an event display button for display of the event item display screen, and wherein the display displays the event item display screen according to an operation of the event display button (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 6. The control apparatus of Claim 5, wherein the event display button includes a display area that displays at least one selected from the group of an event occurrence icon indicating occurrence of the event and an event occurrence count indicating the number of occurrences of the event n(C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 7. The control apparatus of Claim 6, wherein a display format of the event occurrence icon differs between a case where the event occurs and a case where no event occurs (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 8. The control apparatus of Claim 6, wherein the event occurrence count is displayed when the event occurs and the number of occurring events is displayed (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 9. The control apparatus of claim 8, wherein the event occurrence count is not displayed when the occurring event disappears (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 10. The control apparatus of Claim 5, wherein the event item display screen being displayed is not displayed according to the operation of the event display button or switching to another screen (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 11. The control apparatus of Claim 1, wherein the memory further stores information indicating an event response screen that performs a response to the event, and wherein the display displays, when the event item is selected, the event response screen corresponding to the event of the selected event item (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 12. The control apparatus of Claim 5, wherein the display disables the operation of the event display button when no event occurs, or does not display the event item display screen even though the event display button is operated (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 13. The control apparatus of Claim 2, wherein the display further displays an information display screen that displays various information about the target apparatus, wherein the event item display screen is a screen independent from the information display screen, and wherein the display displays the event item display screen on a top (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 14. The control apparatus of Claim 5, wherein the display displays the event item display screen immediately below the event display button when the event display button is operated (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 15. A substrate processing apparatus comprising: a process container in which processing of a substrate is performed; and the control apparatus of Claim 1 that is capable of controlling the processing of the substrate based on an event occurrence status (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 16. The substrate processing apparatus of Claim 15, wherein the processing of the substrate is performed based on a recipe that defines a process condition of the substrate (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 17. The substrate processing apparatus of Claim 16, wherein the event item includes at least one selected from the group of a recovery standby of an alarm occurred in a self-operating apparatus, a condition standby for executing the recipe, a recovery standby due to crack detection in the substrate, a condition standby for continuing the processing of the substrate including the recipe, and an installation standby of an update program (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - When a fault condition is declared, the FDC system can perform a notification and/or intervention. Notification can be via e-mail, pager, cell phone, or other wireless device. Notifications can be configured by person, by day, and by time of day. For example, one or more GUI screens (not shown) can be provided for the tool operator, the process engineer on a workstation, and a host monitor. The GUI display can show the position for the wafer during the paused process, and can show the current process positions for other wafers in other processing modules that are not paused. It can also be noted that the system can store information for different types of alarms, and messages can be displayed on one or more GUI screens, such as an Alarm Summary screen 600, as shown in FIG. 6. In one embodiment, an alarm summary screen includes a table 601 with entries for an alarm number 602, an alarm time 604, alarm identification information 606, a description of the alarm 608, an alarm type 610, an indication of whether the alarm has been set or cleared 612, an indication of the tool which raised the alarm 614, an indication of the module which raised the alarm 616, and a source of the alarm 618. Alarm groups can include alarms that occurred at the tool, alarms that occurred in the software, and alarms that occurred due to a run rule violation. The software application may generate software alarms in a number of different circumstances. For example, alarms having varying levels of severity can be generated when starting up; when shutting down; when connecting to a tool and/or module; when disconnecting from or losing connection with a tool and/or module; when performing an unsuccessful control action; and when encountering any error. The software alarms can be differentiated by the assignment of error codes).
Claim 18. A method of manufacturing a semiconductor device comprising: storing, in a memory, an event item indicating at least one event related to a substrate processing apparatus (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - the event related to the processing apparatus);
notifying a display of an event item corresponding to an occurred event when the event item corresponding to the occurred event is stored in the memory;
displaying the event item notified to the display; and controlling processing of a substrate based on an occurrence status of the event (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - displaying the notification and making adjustments. See Fig 5 below wherein faults are detected and alarms are triggered. Corresponding control strategies are executed).
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Claim 19. A non-transitory computer readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising: storing, in a memory, an event item indicating at least one event related to the substrate processing apparatus (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - the event related to the processing apparatus);
notifying a display of an event item corresponding to an occurred event when the event item corresponding to the occurred event is stored in the memory; displaying the event item notified to the display; and controlling processing of a substrate based on an occurrence status of the event (C10 L26-41, C21 L40-67, C22 L1-24, C29 L40-61 - - displaying the notification and making adjustments. See Fig 5 below wherein faults are detected and alarms are triggered. Corresponding control strategies are executed).
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Citation of Pertinent Prior Art
The following prior art made of record and not relied upon is considered pertinent to applicant's disclosure:
1. Agrawal et al., US Patent No. 5,546,301 – relates to equipment control system.
2. Smith et al., US Patent Application Publication No. 2003/0063010 – control system comprising multiple alarms.
Conclusion
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/CARLOS R ORTIZ RODRIGUEZ/ Primary Examiner, Art Unit 2119
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