77 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18989224 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | ROLLAND, ALEX A | 1759 | Non-Final OA | Dec 20, 2024 |
| 18929742 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | HERNANDEZ-KENNEY, JOSE | 1717 | Non-Final OA | Oct 29, 2024 |
| 18905713 | Substrate Processing Method, Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus | MCCLURE, CHRISTINA D | 1718 | Non-Final OA | Oct 03, 2024 |
| 18782775 | PROCESSING APPARATUS, DISPLAY METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | ALAM, MIRZA F | 2688 | Non-Final OA | Jul 24, 2024 |
| 18655990 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | HUNTER III, CARNELL | 2893 | Non-Final OA | May 06, 2024 |
| 18624655 | PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | LIU, XIAOMING | 2812 | Non-Final OA | Apr 02, 2024 |
| 18611093 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | DAGENAIS, KRISTEN A | 1717 | Non-Final OA | Mar 20, 2024 |
| 18603503 | LEAKAGE DETECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | VILLALUNA, ERIKA J | 2852 | Non-Final OA | Mar 13, 2024 |
| 18601076 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | TIGHE, BRENDAN P | 3652 | Non-Final OA | Mar 11, 2024 |
| 18598293 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | GAMBETTA, KELLY M | 1718 | Final Rejection | Mar 07, 2024 |
| 18597415 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | TALBOT, BRIAN K | 1712 | Final Rejection | Mar 06, 2024 |
| 18591209 | TEMPERATURE CONTROL SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | GIBSON, RANDY W | 2855 | Non-Final OA | Feb 29, 2024 |
| 18514631 | Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium | SHECHTMAN, SEAN P | 2896 | Non-Final OA | Nov 20, 2023 |
| 18495891 | SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Oct 27, 2023 |
| 18377159 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | ANDERSON, ERIK ARTHUR | 2812 | Non-Final OA | Oct 05, 2023 |
| 18481715 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | REAMES, MATTHEW L | 2896 | Non-Final OA | Oct 05, 2023 |
| 18480719 | PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS, AND RECORDING MEDIUM | LEONG, NATHAN T | 1718 | Non-Final OA | Oct 04, 2023 |
| 18467909 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | LOHAKARE, PRATIKSHA JAYANT | 2818 | Non-Final OA | Sep 15, 2023 |
| 18368719 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RECORDING MEDIUM | GATES, BRADFORD M | 1713 | Non-Final OA | Sep 15, 2023 |
| 18468179 | PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | PAN, YONGJIA | 2118 | Non-Final OA | Sep 15, 2023 |
| 18465537 | GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | CHEN, KEATH T | 1716 | Non-Final OA | Sep 12, 2023 |
| 18463529 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | SHAFAYET, MOHAMMED | 2116 | Non-Final OA | Sep 08, 2023 |
| 18463435 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Sep 08, 2023 |
| 18458491 | SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Aug 30, 2023 |
| 18447533 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Aug 10, 2023 |
| 18226854 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | STARK, JARRETT J | 2898 | Final Rejection | Jul 27, 2023 |
| 18357293 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | Final Rejection | Jul 24, 2023 |
| 18339997 | SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | SANDERS, JOSHUA T | 2119 | Non-Final OA | Jun 22, 2023 |
| 18336406 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PRESSURE CONTROL DEVICE, AND RECORDING MEDIUM | BRAYTON, JOHN JOSEPH | 1794 | Final Rejection | Jun 16, 2023 |
| 18336524 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Jun 16, 2023 |
| 18336634 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | BRAYTON, JOHN JOSEPH | 1794 | Non-Final OA | Jun 16, 2023 |
| 18335207 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | TRAN, BINH X | 1713 | Non-Final OA | Jun 15, 2023 |
| 18189472 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM | MOORE, KARLA A | 1716 | Non-Final OA | Mar 24, 2023 |
| 18188879 | SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | STARK, JARRETT J | 2898 | Non-Final OA | Mar 23, 2023 |
| 18124799 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | PEREZ BERMUDEZ, YARITZA H | 2857 | Non-Final OA | Mar 22, 2023 |
| 18124294 | SUBSTRATE PROCESSING APPARATUS, APPARATUS START-UP METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | OKASHA, RAMI RAFAT | 2118 | Non-Final OA | Mar 21, 2023 |
| 18186997 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | YU, YUECHUAN | 1718 | Non-Final OA | Mar 21, 2023 |
| 18186333 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Mar 20, 2023 |
| 18186264 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | TRAN, TONY | 2893 | Non-Final OA | Mar 20, 2023 |
| 18185647 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | RAHIM, NILUFA | 2893 | Final Rejection | Mar 17, 2023 |
| 18184736 | GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | ZERVIGON, RUDY | 1716 | Final Rejection | Mar 16, 2023 |
| 18184390 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | CHEN, BRET P | 1718 | Non-Final OA | Mar 15, 2023 |
| 18182862 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | BENNETT, CHARLEE | 1718 | Non-Final OA | Mar 13, 2023 |
| 18183090 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | ZERVIGON, RUDY | 1716 | Non-Final OA | Mar 13, 2023 |
| 18170289 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA GENERATING APPARATUS | SWEELY, KURT D | 1718 | Non-Final OA | Feb 16, 2023 |
| 18159457 | GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | KIELIN, ERIK J | 2814 | Final Rejection | Jan 25, 2023 |
| 18099338 | GAS SUPPLY ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | LEE, AIDEN Y | 1718 | Non-Final OA | Jan 20, 2023 |
| 18087216 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | KENDALL, BENJAMIN R | 2896 | Final Rejection | Dec 22, 2022 |
| 18082044 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | YU, YUECHUAN | 1718 | Non-Final OA | Dec 15, 2022 |
| 17987456 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Nov 15, 2022 |
| 17967347 | Substrate Processing Apparatus | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Oct 17, 2022 |
| 17953516 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | GHYKA, ALEXANDER G | 2812 | Non-Final OA | Sep 27, 2022 |
| 17951205 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | GAMBETTA, KELLY M | 1718 | Final Rejection | Sep 23, 2022 |
| 17951059 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND INNER TUBE | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Sep 22, 2022 |
| 17950442 | GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | ESKRIDGE, CORY W | 3624 | Non-Final OA | Sep 22, 2022 |
| 17950418 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | RAMIREZ, ALEXANDRE XAVIER | 2812 | Final Rejection | Sep 22, 2022 |
| 17947399 | Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium | WAN, DEMING | 3762 | Non-Final OA | Sep 19, 2022 |
| 17945764 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | LUND, JEFFRIE ROBERT | 1716 | Final Rejection | Sep 15, 2022 |
| 17941278 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RECORDING MEDIUM | STEVENSON, ANDRE C | 2899 | Non-Final OA | Sep 09, 2022 |
| 17939578 | SUBSTRATE PROCESSING APPARATUS, INNER TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | MOORE, KARLA A | 1716 | Final Rejection | Sep 07, 2022 |
| 17903499 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MOUNTING TABLE COVER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM | BENNETT, CHARLEE | 1718 | Final Rejection | Sep 06, 2022 |
| 17903515 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM | BENNETT, CHARLEE | 1718 | Final Rejection | Sep 06, 2022 |
| 17898760 | SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | LUND, JEFFRIE ROBERT | 1716 | Final Rejection | Aug 30, 2022 |
| 17897618 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1715 | Final Rejection | Aug 29, 2022 |
| 17881772 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | STEVENSON, ANDRE C | 2899 | Non-Final OA | Aug 05, 2022 |
| 17825393 | SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | KUYKENDALL, ALYSSA LEE | 1774 | Non-Final OA | May 26, 2022 |
| 17692688 | SUBSTRATE COOLING UNIT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | FORD, NATHAN K | 1716 | Non-Final OA | Mar 11, 2022 |
| 17675633 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RECORDING MEDIUM | YAP, DOUGLAS ANTHONY | 2899 | Non-Final OA | Feb 18, 2022 |
| 17591396 | Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device | ZERVIGON, RUDY | 1716 | Final Rejection | Feb 02, 2022 |
| 17560684 | SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING METHOD | ZERVIGON, RUDY | 1716 | Final Rejection | Dec 23, 2021 |
| 17476843 | VAPORIZING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | CHEN, KEATH T | 1716 | Non-Final OA | Sep 16, 2021 |
| 17475407 | SUBSTRATE PROCESSING APPARATUS, REFLECTOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | CHEN, KEATH T | 1716 | Non-Final OA | Sep 15, 2021 |
| 17313491 | SUBSTRATE PROCESSING APPARATUS | MOORE, KARLA A | 1716 | Non-Final OA | May 06, 2021 |
| 17186498 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | SWEELY, KURT D | 1718 | Non-Final OA | Feb 26, 2021 |
| 17037034 | Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus | CHEN, JACK S J | 2893 | Final Rejection | Sep 29, 2020 |
| 17001056 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | WILCZEWSKI, MARY A | 2898 | Final Rejection | Aug 24, 2020 |
| 16815284 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | CROWELL, ANNA M | 1716 | Final Rejection | Mar 11, 2020 |
IP Author helps IP teams respond to office actions faster with AI-generated responses, examiner analytics, and prosecution intelligence.
Start Free Trial