Prosecution Insights
Last updated: August 16, 2026
Application No. 18/613,801

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

Non-Final OA §102§112
Filed
Mar 22, 2024
Priority
Mar 24, 2023 — JP 2023-048742
Examiner
MANDALA, MICHELLE
Art Unit
Tech Center
Assignee
Rohm Co., Ltd.
OA Round
1 (Non-Final)
91%
Grant Probability
Favorable
1-2
OA Rounds
0m
Est. Remaining
99%
With Interview

Examiner Intelligence

Grants 91% — above average
91%
Career Allowance Rate
917 granted / 1008 resolved
+31.0% vs TC avg
Moderate +8% lift
Without
With
+7.9%
Interview Lift
resolved cases with interview
Typical timeline
2y 2m
Avg Prosecution
19 currently pending
Career history
1022
Total Applications
across all art units

Statute-Specific Performance

§101
0.8%
-39.2% vs TC avg
§103
51.3%
+11.3% vs TC avg
§102
31.7%
-8.3% vs TC avg
§112
10.1%
-29.9% vs TC avg
Black line = Tech Center average estimate • Based on career data from 1008 resolved cases

Office Action

§102 §112
DETAILED ACTION Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Election/Restrictions Applicant’s election without traverse of Group I (claims 1-5) in the reply filed on June 6, 2026 is acknowledged. Claim Objections Claims 4 and 5 are objected to because of the following informalities: In claim 4, line 2, “movable” should be replaced with --moveable-- in both instances. In claim 4, line 3, “movable” should be replaced with --moveable--. In claim 4, line 4, “movable” should be replaced with --moveable-- in both instances. In claim 5, line 1, “movable” should be replaced with --moveable--. Appropriate correction is required. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 4 and 5 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. The term “predetermined” in claim 4is a relative term which renders the claim indefinite. The term “predetermined” is not defined by the claim, the specification does not provide a standard for ascertaining the requisite degree, and one of ordinary skill in the art would not be reasonably apprised of the scope of the invention. If Applicant intends any particular amount of movement, it should be clearly recited. Claim Rejections - 35 USC § 102 The following is a quotation of the appropriate paragraphs of 35 U.S.C. 102 that form the basis for the rejections under this section made in this Office action: A person shall be entitled to a patent unless – (a)(1) the claimed invention was patented, described in a printed publication, or in public use, on sale, or otherwise available to the public before the effective filing date of the claimed invention. Claim(s) 1-5 are rejected under 35 U.S.C. 102(a)(1) as being anticipated by Lutz et al. (2008/0290494). Re claim 1, Lutz et al. disclose a substrate (26) including a silicon layer ([0078]); an isolation joint (30) configured to divide the substrate (26) into a first portion including an insulating layer (32) formed on the silicon layer (26) and a second portion including the silicon layer (26) in a plan view, and configured to electrically insulate the first portion and the second portion while mechanically connecting the first portion and the second portion (Fig. 3); and a wiring layer (36) arranged on the substrate (26), wherein the wiring layer (36) is electrically insulated from the silicon layer (26) by the insulating layer (32) at the first portion (left side) and electrically connected to the silicon layer (26) by being formed to be in contact with the silicon layer (26) at the second portion (right side) (See Fig. 3 annotated below). PNG media_image1.png 494 680 media_image1.png Greyscale Re claim 2, Lutz et al. disclose wherein the wiring layer (36) is made of a conductive silicon-containing material ([0080]). Re claim 3, Lutz et al. disclose wherein the wiring layer (36) has a side surface aligned with a side surface of the second portion (Fig. 3). Re claim 4, Lutz et al. disclose further comprising: a movable portion (18) which is movable relative to the substrate, wherein the second portion is configured to contact the movable portion (18 through layer 48) to restrict movement of the movable portion when the movable portion is moved by a predetermined amount of movement (secure layer 48 connected with the second portion of the substrate 26, would restrict some movement of the movable portion when moved~ Figs. 4C & 4J). Re claim 5, Lutz et al. disclose wherein the second portion and a portion of the movable portion (18) facing the second portion are connected to a same potential (Fig. 4J~ both connected to 36). Citation of Pertinent Prior Art The following prior art made of record and not relied upon is considered pertinent to applicant's disclosure: US 2012/0205752 A1, US 2021/0027965 A1, US 2012/0223410 A1 and US 2013/0147020 A1 disclose a similar configuration for a MEMS device with isolation joint and wiring layer. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to MICHELLE MANDALA whose telephone number is (571)272-1858. The examiner can normally be reached 8:00-5:00 PM. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Sue Purvis can be reached at 571-272-1236. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /MICHELLE MANDALA/Primary Examiner, Art Unit 2893 July 29, 2026
Read full office action

Prosecution Timeline

Mar 22, 2024
Application Filed
Jul 31, 2026
Non-Final Rejection mailed — §102, §112 (current)

Precedent Cases

Applications granted by this same examiner with similar technology

Patent 12701768
SEMICONDUCTOR DEVICE INCLUDING EXTENDED BACKSIDE CONTACT STRUCTURE
2y 10m to grant Granted Aug 04, 2026
Patent 12701905
DISPLAY PANEL AND DISPLAY DEVICE
2y 6m to grant Granted Aug 04, 2026
Patent 12702072
SELF-ALIGNED VERTICAL SOLID STATE DEVICES FABRICATION AND INTEGRATION METHODS
2y 9m to grant Granted Aug 04, 2026
Patent 12690331
DISPLAY SUBSTRATE AND DISPLAY DEVICE
3y 4m to grant Granted Jul 21, 2026
Patent 12690355
DISPLAY APPARATUS
3y 3m to grant Granted Jul 21, 2026
Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
91%
Grant Probability
99%
With Interview (+7.9%)
2y 2m (~0m remaining)
Median Time to Grant
Low
PTA Risk
Based on 1008 resolved cases by this examiner. Grant probability derived from career allowance rate.

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