Last updated: July 17, 2026

Application No. 18/630,262

PLASMA PROCESSING APPARATUS AND ANNULAR CONSUMABLE PART

Non-Final OA

Filed

Apr 09, 2024

Priority

May 15, 2018 — JP 2018-094129 +2 more

Examiner

HASSANZADEH, PARVIZ

Art Unit

Tech Center

Assignee

Tokyo Electron Limited

OA Round

1 (Non-Final)

This examiner grants 25% of cases after interview

— +33.2% interview lift. A telephonic interview to clarify the technical implementation could significantly improve the outcome.

Based on 71 resolved cases, 2023–2026

Examiner Intelligence

HASSANZADEH, PARVIZ View full profile →

Grants only 25% of cases

Career Allowance Rate

18 granted / 71 resolved

-34.6% vs TC avg

Strong +33% interview lift

Without

With

+33.2%

Interview Lift

resolved cases with interview

Typical timeline

3y 9m

Avg Prosecution

18 currently pending

Career history

Total Applications

across all art units

Statute-Specific Performance

§103

86.8%

+46.8% vs TC avg

§102

1.9%

-38.1% vs TC avg

§112

2.4%

-37.6% vs TC avg

Black line = Tech Center average estimate • Based on career data from 71 resolved cases

Prosecution Timeline

Apr 09, 2024

Application Filed

Sep 24, 2024

Response after Non-Final Action

May 27, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/322,502

Patent 12660536

SYSTEMS AND METHODS FOR SEMICONDUCTOR ETCHING

3y 0m to grant Granted Jun 16, 2026

18/250,510

Patent 12642054

MULTl-STATION TOOL WITH ROTATABLE TOP PLATE ASSEMBLY

3y 1m to grant Granted May 26, 2026

18/135,917

Patent 12618151

SUBSTRATE PROCESSING APPARATUS

3y 0m to grant Granted May 05, 2026

18/266,888

Patent 12590373

AQUEOUS COMPOSITION, STAINLESS STEEL SURFACE ROUGHENING METHOD USING SAME, AND METHOD FOR MANUFACTURING ROUGHENED STAINLESS STEEL

2y 9m to grant Granted Mar 31, 2026

18/129,628

Patent 12581883

ETCHING METHOD AND PLASMA ETCHING APPARATUS

2y 11m to grant Granted Mar 17, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

25%

Grant Probability

59%

With Interview (+33.2%)

3y 9m (~1y 5m remaining)

Median Time to Grant

Low

PTA Risk

Based on 71 resolved cases by this examiner. Grant probability derived from career allowance rate.