Prosecution Insights
Prosecution Insights
297 pending office actions • 52 art units • 178 examiners • 0 of 297 (0%) have an AI response strategy ready • 670 patents granted in the last 365 days
Based on the USPTO statutory response window for each pending office action. 88 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 88 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 3 (1%) |
| §103 only | 205 (69%) |
| §102 only | 19 (6%) |
| §112 only | 21 (7%) |
| Double-patenting only | 3 (1%) |
| Double-patenting + other | 1 (0%) |
| No statute on record | 45 (15%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| REYES, JOSHUA NATHANIEL PI | 8 | 42.4% | +51.0% |
| BALDWIN, GORDON | 7 | 55.6% | +31.9% |
| CHEN, KEATH T | 7 | 30.3% | +24.6% |
| CROWELL, ANNA M | 6 | 44.8% | +30.5% |
| PHAM, THOMAS T | 6 | 51.8% | +16.1% |
| KENDALL, BENJAMIN R | 6 | 32.5% | +23.3% |
| ZERVIGON, RUDY | 5 | 66.6% | -6.1% |
| BAREFORD, KATHERINE A | 5 | 13.8% | +28.6% |
| MACARTHUR, SYLVIA | 5 | 65.3% | +26.0% |
| CHAN, LAUREEN | 5 | 58.1% | +54.7% |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 4d overdue |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 7d |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 19d |
| 19063756 | INFORMATION PROCESSING APPARATUS AND SELECTION SUPPORTING METHOD | SPIELER, WILLIAM | 35d |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 60d |
| 18066078 | IN-SITU DIAGNOSIS OF PLASMA SYSTEM | ALANKO, ANITA KAREN | 78d |
| 19185246 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | — |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | — |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17903431 | SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 103d overdue |
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 86d overdue |
| 17761091 | RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD | REYES, JOSHUA NATHANIEL PI | 77d overdue |
| 17809384 | PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 70d overdue |
| 17882834 | PLASMA PROCESSING APPARATUS AND FILM FORMING METHOD | CROWELL, ANNA M | 60d overdue |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 51d overdue |
| 17896904 | APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM ON SUBSTRATE | BALDWIN, GORDON | 45d overdue |
| 17645829 | PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD | CHEN, KEATH T | 44d overdue |
| Art Unit | Apps |
|---|---|
| 1716 | 41 |
| 1718 | 38 |
| 1713 | 32 |
| 1717 | 12 |
| 1714 | 9 |
| 2897 | 8 |
| 1737 | 7 |
| 1794 | 6 |
| 2896 | 6 |
| 3753 | 5 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19290768 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM | ALANKO, ANITA KAREN | 1713 | — | Non-Final OA | — | Pending | Aug 05, 2025 |
| 19261691 | METHOD AND APPARATUS FOR FORMING MOLYBDENUM METAL FILM | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | — | Pending | Jul 07, 2025 |
| 19245988 | ETCHING METHOD | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | — | Pending | Jun 23, 2025 |
| 19233851 | Apparatus for Transferring Substrate and Method for Transferring Substrate | DO, TRUC M | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19185246 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | — | Non-Final OA | — | Pending | Apr 22, 2025 |
| 19091933 | PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM | LUQUE, RENAN | — | §103 | Non-Final OA | — | Pending | Mar 27, 2025 |
| 18684088 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | — | Non-Final OA | — | Pending | Mar 24, 2025 |
| 19063756 | INFORMATION PROCESSING APPARATUS AND SELECTION SUPPORTING METHOD | SPIELER, WILLIAM | 2159 | §101 | Final Rejection | 35d | Pending | Feb 26, 2025 |
| 19043669 | FLUID SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND FLUID SUPPLY METHOD | PRICE, CRAIG JAMES | 3753 | §112 | Non-Final OA | — | Pending | Feb 03, 2025 |
| 19042169 | FILM FORMING METHOD AND FILM FORMING APPARATUS | PROCTOR, CACHET I | 1712 | §103 | Non-Final OA | 76d | Pending | Jan 31, 2025 |
| 19037464 | PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM | SATHIRAJU, SRINIVAS | 2844 | — | Non-Final OA | — | Pending | Jan 27, 2025 |
| 19032823 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CORMIER, DAVID G | — | — | Non-Final OA | — | Pending | Jan 21, 2025 |
| 19015772 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | CHEN, PATRICK C | 2842 | — | Non-Final OA | — | Pending | Jan 10, 2025 |
| 19000972 | GAS BOX AND SEMICONDUCTOR MANUFACTURING APPARATUS | JELLETT, MATTHEW WILLIAM | 3753 | §112 | Non-Final OA | — | Pending | Dec 24, 2024 |
| 18999454 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | 63d | Pending | Dec 23, 2024 |
| 18986429 | MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE | FABIAN JR, ROBERTO | — | — | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18969148 | Plasma Processing Apparatus and Plasma Processing Method | WELLS, KENNETH B | 2842 | §112 | Non-Final OA | 9d overdue | Pending | Dec 04, 2024 |
| 18964075 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WEDDLE, ALEXANDER MARION | 1712 | §103 | Non-Final OA | 75d | Pending | Nov 29, 2024 |
| 18961960 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | TOLIN, MICHAEL A | 1745 | §103 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18958279 | METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS | MAYY, MOHAMMAD | 1718 | §103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18958534 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18956676 | SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE PROCESSING METHOD | PARIHAR, PRADHUMAN | 1714 | §103 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18956301 | SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK | SREEVATSA, SREEYA | 2838 | — | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18954901 | METHOD FOR FORMING INSULATION FILM | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | — | Pending | Nov 21, 2024 |
| 18949248 | SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD | LEE, DOUGLAS | 1714 | — | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18949966 | MAINTENANCE DEVICE | KEENAN, JAMES W | 3656 | §112 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18864203 | HEATING APPARATUS, HEATING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM | TADESSE, YEWEBDAR T | 1717 | §103 | Non-Final OA | — | Pending | Nov 08, 2024 |
| 18923921 | FILM FORMING METHOD AND PROCESSING SYSTEM | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | 83d | Pending | Oct 23, 2024 |
| 18917538 | FILM FORMING METHOD | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Oct 16, 2024 |
| 18909227 | DISPLAY DEVICE, RECORDING MEDIUM, AND DISPLAY METHOD | PEREN, VINCENT ROBERT | 2617 | — | Non-Final OA | — | Pending | Oct 08, 2024 |
| 18896902 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | LUND, JEFFRIE ROBERT | — | DP | Non-Final OA | — | Pending | Sep 26, 2024 |
| 18847761 | TEST DEVICE AND TEST METHOD | RIOS RUSSO, RAUL J | 2858 | — | Non-Final OA | — | Pending | Sep 17, 2024 |
| 18882880 | PLASMA PROCESSING APPARATUS | LEE, DOUGLAS | 1714 | §103 | Non-Final OA | 70d | Pending | Sep 12, 2024 |
| 18822332 | METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE | GATES, BRADFORD M | 1713 | §102 | Non-Final OA | 84d | Pending | Sep 02, 2024 |
| 18820492 | PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS | GARCIA, SANTIAGO | — | — | Non-Final OA | — | Pending | Aug 30, 2024 |
| 18842620 | HARD MASK, SUBSTRATE PROCESSING METHOD, AND REMOVAL METHOD FOR HARD MASK | AHMED, SHAMIM | — | — | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18808358 | SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD | TIGHE, BRENDAN P | 3657 | — | Non-Final OA | — | Pending | Aug 19, 2024 |
| 18792948 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MATTHEWS, TERRELL HOWARD | — | — | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18791007 | ANGLED BEAM EXPOSURE FOR HARDMASK BASED MODIFICATION | PERSAUD, DEORAM | 2882 | §103 | Non-Final OA | — | Pending | Jul 31, 2024 |
| 18833079 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | GROSS, CARSON | 1746 | §103 | Non-Final OA | — | Pending | Jul 25, 2024 |
| 18782194 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | §103 | Final Rejection | — | Pending | Jul 24, 2024 |
| 18780952 | SUBSTRATE PROCESSING METHOD | NEIBAUR, ROBERT F | — | §103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18778072 | FILM-FORMING METHOD AND FILM-FORMING APPARATUS | BOWMAN, ANDREW J | 1717 | §103 | Final Rejection | — | Pending | Jul 19, 2024 |
| 18764779 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | ALANKO, ANITA KAREN | 1713 | §103 | Non-Final OA | — | Pending | Jul 05, 2024 |
| 18764474 | DISTANCE MEASURING DEVICE, DISTANCE MEASURING METHOD, BONDING APPARATUS, AND BONDING METHOD | LE, THANG XUAN | 2858 | §103 | Non-Final OA | — | Pending | Jul 05, 2024 |
| 18761581 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | §112 | Final Rejection | — | Pending | Jul 02, 2024 |
| 18726285 | DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS | KEFAYATI, SOORENA | 2884 | §112 | Non-Final OA | — | Pending | Jul 02, 2024 |
| 18757803 | SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROCESSING AND RECORDING MEDIUM | SHAFAYET, MOHAMMED | 1713 | §103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18753777 | METHOD AND APPARATUS FOR DAMASCENE ETCHING | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Jun 25, 2024 |
| 18720848 | PREDICTION DEVICE, TEST SYSTEM, PREDICTION METHOD, AND PREDICTION PROGRAM | LIU, KENDRICK X | 2853 | §103 | Non-Final OA | 75d | Pending | Jun 17, 2024 |
| 18745926 | Plasma Processing Apparatus | CHAN, LAUREEN | — | — | Non-Final OA | — | Pending | Jun 17, 2024 |
| 18569248 | METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM | ROLLAND, ALEX A | 1759 | §103 | Non-Final OA | 14d | Pending | Jun 13, 2024 |
| 18736055 | Method for Teaching Transfer Robot and Substrate Processing System | ORTIZ RODRIGUEZ, CARLOS R | — | §112 | Non-Final OA | — | Pending | Jun 06, 2024 |
| 18733073 | Inner Wall and substrate Processing Apparatus | KLUNK, MARGARET D | — | DP | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18672479 | GATE VALVE AND DRIVING METHOD | ROST, ANDREW J | 3753 | — | Non-Final OA | — | Pending | May 23, 2024 |
| 18672248 | SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND RECORDING MEDIUM | THOMAS, BINU | 1717 | §103 | Final Rejection | — | Pending | May 23, 2024 |
| 18672092 | METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING HARD MASK USING THE CARBON-CONTAINING FILM | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | — | Pending | May 23, 2024 |
| 18668767 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PROGRAM | NORTON, JENNIFER L | — | — | Non-Final OA | — | Pending | May 20, 2024 |
| 18710214 | PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD | MATTHEWS, TERRELL HOWARD | — | §103 | Non-Final OA | — | Pending | May 15, 2024 |
| 18663611 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD | MATTHEWS, TERRELL HOWARD | 3653 | — | Non-Final OA | — | Pending | May 14, 2024 |
| 18660479 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CHEN, PATRICK C | 2842 | §103 | Final Rejection | — | Pending | May 10, 2024 |
| 18659116 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | — | §103 | Non-Final OA | — | Pending | May 09, 2024 |
| 18658527 | CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS | CHOI, ALICIA M | 4100 | §112 | Non-Final OA | — | Pending | May 08, 2024 |
| 18655619 | APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE, AND METHOD OF TRANSPORTING SUBSTRATE | LOWE, MICHAEL S | 3652 | §103 | Final Rejection | 60d | Pending | May 06, 2024 |
| 18707235 | SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD | CHIN, EDWARD | — | — | Non-Final OA | — | Pending | May 03, 2024 |
| 18706088 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | PARIHAR, PRADHUMAN | 1714 | §102 | Non-Final OA | — | Pending | Apr 30, 2024 |
| 18648903 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KNUDSON, BRAD ALLAN | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18648828 | SUBSTRATE PROCESSING APPARATUS | SWEELY, KURT D | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18639975 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY | MCDONALD, RODNEY GLENN | — | §103 | Non-Final OA | — | Pending | Apr 19, 2024 |
| 18634497 | Wet Processing Systems Having Novel Wafer Chuck Designs For Retaining A Processing Liquid On A Surface Of A Semiconductor Substrate | GOLIGHTLY, ERIC WAYNE | 1714 | §103 | Non-Final OA | 19d overdue | Pending | Apr 12, 2024 |
| 18630262 | PLASMA PROCESSING APPARATUS AND ANNULAR CONSUMABLE PART | HASSANZADEH, PARVIZ | — | — | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18628349 | PLASMA PROCESSING APPARATUS | BERMAN, JASON | — | §103 | Non-Final OA | — | Pending | Apr 05, 2024 |
| 18626693 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | DEO, DUY VU NGUYEN | 1713 | §103 | Final Rejection | — | Pending | Apr 04, 2024 |
| 18624279 | BONDING APPARATUS AND BONDING METHOD | HALL JR, TYRONE VINCENT | 3723 | §102 | Non-Final OA | — | Pending | Apr 02, 2024 |
| 18621229 | METHOD AND WAFER PROCESSING SYSTEM FOR WET ETCHING A SEMICONDUCTOR WAFER | PRASAD, NEIL R | — | — | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18622713 | DIE TO WAFER BONDING METHOD AND APPARATUS WITH THERMAL CONTACTLESS DIE SHAPE CONTROL | NGUYEN, DUY T V | — | §103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18622764 | INTEGRATION METHOD OF VERTICAL DRAM WITH PERIPHERAL CIRCUIT | BODNAR, JOHN A | — | — | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18622318 | METHOD FOR REMOVING METAL-CONTAINING MATERIALS IN SMALL PITCH STRUCTURES | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 16d | Pending | Mar 29, 2024 |
| 18622541 | APPARATUS AND METHOD FOR DETECTING AND MONITORING OBJECTS IN A FLUID BATH AND ADJUSTING THE FLUID BATH BASED ON THE MEASURED OBJECT PROPERTIES | BODNARK, MATTHEW JAMES | — | §103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18620463 | X-RAY METHODS AND SYSTEMS FOR SEMICONDUCTOR SUBSTRATE ALIGNMENT | FAYE, MAMADOU | 2884 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620762 | CONTROLLING ETCH EDGE EFFECTS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620417 | HARD MASK PROTECTION OF METAL INTERCONNECTS | LU, JIONG-PING | 1713 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620482 | ETCHING BI-METAL OXIDES WITH ALKALINE EARTH METALS | LU, JIONG-PING | 1713 | §102 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18619755 | METALLIZATION AND PLANARIZATION | MAZUMDER, DIDARUL A | — | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620366 | MULTIPLE PATTERNING UTILIZING A TWO-COLOR SPACER DESIGN | REMAVEGE, CHRISTOPHER | 1713 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18618354 | INTEGRATING NITRIDE STRESS COMPENSATION LAYERS FOR THICK OXIDE WAFER CREATION | HARBOTTLE, CHARLOTTE ELIZABETH | 2818 | §103 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18619016 | VERTICALLY STACKED CAPACITORS AND METHOD OF FORMING THE SAME | MOJADDEDI, OMAR F | — | §102 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18616526 | PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD | BALDWIN, GORDON | 1713 | §103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18614207 | METAL ENCAPSULATION OF ETCH MASK VIA SPUTTERING | BAND, MICHAEL A | 1794 | §103 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18612873 | SUBSTRATE PROCESSING APPARATUS | MACARTHUR, SYLVIA | — | §103 | Non-Final OA | — | Pending | Mar 21, 2024 |
| 18694153 | TEMPERATURE CALIBRATION SYSTEM, INSPECTION APPARATUS, AND TEMPERATURE CALIBRATION METHOD | GIBSON, RANDY W | 2855 | §102 | Non-Final OA | — | Pending | Mar 21, 2024 |
| 18610723 | SUBSTRATE SUPPORT AND ASSEMBLY PART | RAIMUND, CHRISTOPHER W | — | — | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18611527 | PLASMA ASSISTED METAL OXIDE REDUCTION | BERRY, PAUL ANTHONY | 4100 | — | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18609525 | FILM FORMING METHOD AND FILM FORMING APPARATUS | BRATLAND JR, KENNETH A | 1714 | §103 | Final Rejection | — | Pending | Mar 19, 2024 |
| 18608043 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CULBERT, ROBERTS P | 1716 | §103 | Final Rejection | 67d overdue | Pending | Mar 18, 2024 |
| 18607202 | HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | Mar 15, 2024 |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | 11d overdue | Pending | Mar 12, 2024 |
| 18600373 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | — | — | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18597801 | THREE-DIMENSIONAL FERROELECTRIC MEMORY DEVICE AND METHODS OF FABRICATING THE SAME | BOWEN, ADAM S | 2897 | §102 | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18597779 | 3D FET DEVICES AND METHODS FOR MANUFACTURING THE SAME | BOWEN, ADAM S | 2897 | §102 | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18592336 | Plasma Processing Apparatus | KENDALL, BENJAMIN R | — | — | Non-Final OA | — | Pending | Feb 29, 2024 |
| 18589845 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | DANIELS, MATTHEW J | 2891 | — | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589570 | BOTTOM-UP DIRECTIONAL ATOMIC LAYER DEPOSITION (ALD) | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 5d overdue | Pending | Feb 28, 2024 |
| 18588318 | IN-SITU VARIABLE TEMPERATURE BOW METROLOGY | SADATE-MOUALEU, MIREILLE SANDRA | 2855 | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18589071 | RESONANT PHASE-CONTROLLED OSCILLATOR | KACKAR, RAM N | — | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18588371 | SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | — | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18588315 | SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | — | — | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18586860 | SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | — | §103 | Non-Final OA | — | Pending | Feb 26, 2024 |
| 18586259 | MIXED ACTIVATING AND REDUCING AGENT FOR BONDING | SANDVIK, BENJAMIN P | 2812 | — | Non-Final OA | — | Pending | Feb 23, 2024 |
| 18583059 | DEPOSITION APPARATUS AND DEPOSITION METHOD | ALEJANDRO MULERO, LUZ L | 1716 | §103 | Final Rejection | — | Pending | Feb 21, 2024 |
| 18581954 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | — | — | Non-Final OA | — | Pending | Feb 20, 2024 |
| 18441719 | PROTECTION STRUCTURE FOR LINER REMOVAL | TRAN, BINH X | 1713 | §112 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18439469 | IN-SITU METAL DEPOSITION FOR REDUCED CHARGING DURING DIELECTRIC ETCH | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Feb 12, 2024 |
| 18431887 | PLASMA PROCESSING SYSTEM WITH DIRECT CURRENT SUPERPOSITION | MILLER, JR, JOSEPH ALBERT | 2891 | — | Final Rejection | — | Pending | Feb 02, 2024 |
| 18429046 | PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS | NAVARRO, HUGO IVAN | 2858 | §103 | Non-Final OA | 82d | Pending | Jan 31, 2024 |
| 18427838 | PLASMA PROCESSING APPARATUS, ELECTROSTATIC CHUCK, AND PLASMA PROCESSING METHOD | MOORE, KARLA A | 1716 | §103 | Non-Final OA | — | Pending | Jan 31, 2024 |
| 18426925 | PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD | SATHIRAJU, SRINIVAS | 2844 | §103 | Non-Final OA | — | Pending | Jan 30, 2024 |
| 18423391 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT | BRAYTON, JOHN JOSEPH | 1794 | — | Non-Final OA | — | Pending | Jan 26, 2024 |
| 18424262 | SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES | AHMED, SHAMIM | 1713 | §103 | Final Rejection | 1d overdue | Pending | Jan 26, 2024 |
| 18422013 | ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCHING PROGRAM, AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | — | Pending | Jan 25, 2024 |
| 18417564 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | RIDDLE, CHRISTINA A | 3652 | §103 | Non-Final OA | — | Pending | Jan 19, 2024 |
| 18417507 | TEMPERATURE CONTROL METHOD OF VAPORIZER AND SUBSTRATE PROCESSING APPARATUS | LEDERER, SARAH B | — | §103 | Non-Final OA | — | Pending | Jan 19, 2024 |
| 18415611 | DUAL-CHAMBER PRESSURE CONTROL METHOD AND DUAL-CHAMBER PRESSURE CONTROL DEVICE | CAHILL, JESSICA MARIE | 3753 | §103 | Final Rejection | — | Pending | Jan 17, 2024 |
| 18579659 | TEST METHOD OF TEST SYSTEM AND TEST SYSTEM | HOLMES, JANELLE AMBER | 2857 | — | Non-Final OA | — | Pending | Jan 16, 2024 |
| 18413295 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS MAINTENANCE METHOD | GRAVINI, STEPHEN MICHAEL | — | — | Non-Final OA | — | Pending | Jan 16, 2024 |
| 18412676 | FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS | COLE, VICTOR | 3762 | — | Non-Final OA | — | Pending | Jan 15, 2024 |
| 18412067 | PLURALITY OF ADVANCED MULTILEVEL CIRCUIT ATTACHMENTS | GONDARENKO, NATALIA A | 2891 | — | Non-Final OA | — | Pending | Jan 12, 2024 |
| 18407527 | METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICONDUCTOR SUBSTRATE | TRAN, TAN N | 2812 | §102 | Final Rejection | 41d | Pending | Jan 09, 2024 |
| 18406451 | SUBSTRATE SUPPORT WITH PRINTED HEATER | WILLIS, TREMESHA S | 2847 | §102 | Non-Final OA | — | Pending | Jan 08, 2024 |
| 18398217 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | ALANKO, ANITA KAREN | 2896 | §102 | Non-Final OA | — | Pending | Dec 28, 2023 |
| 18397024 | METHOD FOR CLEANING CHAMBER OR COMPONENT, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CARRILLO, BIBI SHARIDAN | 1711 | §103 | Non-Final OA | — | Pending | Dec 27, 2023 |
| 18395788 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | TRAN, BINH X | 1713 | §103 | Final Rejection | — | Pending | Dec 26, 2023 |
| 18392102 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | — | Non-Final OA | — | Pending | Dec 21, 2023 |
| 18390547 | SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER PROCESSING METHOD | MACKEY, PATRICK HEWEY | 3653 | — | Non-Final OA | — | Pending | Dec 20, 2023 |
| 18532873 | FULLY SELF-ALIGNED VIAS USING A HARDMASK AND ANTISPACERS | NGUYEN, KHIEM D | 2892 | §103 | Non-Final OA | — | Pending | Dec 07, 2023 |
| 18529189 | PLASMA PROCESS FOR ETCHING A MULTILAYER STACK | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Dec 05, 2023 |
| 18530067 | COMPLIANT CHUCK EDGE RING | SCHATZ, CHRISTOPHER T | 1746 | §103 | Non-Final OA | — | Pending | Dec 05, 2023 |
| 18525935 | TRANSFER MODULE AND TRANSFER METHOD | MCCLAIN, GERALD | 3652 | §103 | Final Rejection | — | Pending | Dec 01, 2023 |
| 18525930 | TRANSFER MODULE AND TRANSFER METHOD | MYERS, GLENN F | 3652 | §112 | Non-Final OA | 23d | Pending | Dec 01, 2023 |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 60d | Pending | Nov 29, 2023 |
| 18523060 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BOWMAN, ANDREW J | 1717 | §103 | Final Rejection | — | Pending | Nov 29, 2023 |
| 18564314 | FILM FORMATION METHOD AND FILM FORMATION DEVICE | PHAM, THOMAS T | 1713 | §112 | Non-Final OA | — | Pending | Nov 27, 2023 |
| 18517206 | METHOD AND SYSTEM FOR PLASMA PROCESS | PHAM, THOMAS T | 1713 | §103 | Final Rejection | — | Pending | Nov 22, 2023 |
| 18517486 | OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS | GARBER, ERIN R | 2878 | §103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18513994 | PROCESSING APPARATUS AND PROCESSING METHOD | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | — | Pending | Nov 20, 2023 |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 2899 | §103 | Non-Final OA | 6d | Pending | Nov 15, 2023 |
| 18510273 | PLASMA PROCESSING APPARATUS | BRAYTON, JOHN JOSEPH | 1794 | §103 | Non-Final OA | — | Pending | Nov 15, 2023 |
| 18505810 | SUB-MILLISECOND OPTICAL DETECTION OF PULSED PLASMA PROCESSES | MENDOZA, ALEXANDRIA ARELLANO | 2877 | §103 | Non-Final OA | — | Pending | Nov 09, 2023 |
| 18387619 | METHOD TO PATTERN A SEMICONDUCTOR SUBSTRATE USING A MULTILAYER PHOTORESIST FILM STACK | MALLOY, ANNA E | — | §103 | Non-Final OA | — | Pending | Nov 07, 2023 |
| 18558822 | SUBSTRATE PROCESSING DEVICE AND METHOD FOR MEASURING PROCESS GAS TEMPERATURE AND CONCENTRATION | FABIAN JR, ROBERTO | 2877 | §103 | Final Rejection | — | Pending | Nov 03, 2023 |
| 18501309 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE | ORTA, LAUREN GRACE | 1711 | §103 | Final Rejection | 70d | Pending | Nov 03, 2023 |
| 18501056 | PLASMA PROCESSING APPARATUS AND METHOD FOR DETECTING END POINT | CHAN, LAUREEN | 1716 | §103 | Final Rejection | — | Pending | Nov 03, 2023 |
| 18386781 | SUBSTRATE PROCESSING APPARATUS | PENCE, JETHRO M | 1717 | §103 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18385528 | METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | — | Pending | Oct 31, 2023 |
| 18383602 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BELAY, DILNESSA B | — | §103 | Non-Final OA | — | Pending | Oct 25, 2023 |
| 18556569 | FILM FORMING METHOD AND FILM FORMING APPARATUS | CHEN, BRET P | 1718 | DPOther | Non-Final OA | — | Pending | Oct 20, 2023 |
| 18489188 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Oct 18, 2023 |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | §112 | Final Rejection | 7d | Pending | Oct 11, 2023 |
| 18484372 | SELECTIVE PASSIVATION OF PHOTORESISTS | SULLIVAN, CALEEN O | 2899 | — | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18483050 | SUBSTRATE PROCESSING APPARATUS | HAGEMAN, MARK C | 3652 | §103 | Final Rejection | — | Pending | Oct 09, 2023 |
| 18554225 | ETCHING METHOD AND PROCESSING DEVICE | LU, JIONG-PING | 1713 | §103 | Final Rejection | — | Pending | Oct 06, 2023 |
| 18479986 | PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD | BRAYTON, JOHN JOSEPH | 1794 | §103 | Non-Final OA | — | Pending | Oct 03, 2023 |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 1713 | §103 | Final Rejection | 32d overdue | Pending | Oct 03, 2023 |
| 18375958 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | WILSON, GREGORY A | 3762 | §103 | Final Rejection | 36d overdue | Pending | Oct 02, 2023 |
| 18374679 | PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18552957 | FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | MOJADDEDI, OMAR F | 2898 | §103 | Non-Final OA | — | Pending | Sep 28, 2023 |
| 18373098 | SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING | PATEL, REEMA | 2812 | §103 | Non-Final OA | — | Pending | Sep 26, 2023 |
| 18470491 | METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | — | Pending | Sep 20, 2023 |
| 18468966 | ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD | REMAVEGE, CHRISTOPHER | 1713 | §102 | Non-Final OA | — | Pending | Sep 18, 2023 |
| 18368110 | ETCHING METHOD AND ETCHING APPARATUS | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Sep 14, 2023 |
| 18466613 | TUNABLE PATTERNED SURFACE UNIFORMITY USING DIRECT CURRENT BIAS | TRAN, BINH X | 1713 | §103 | Final Rejection | — | Pending | Sep 13, 2023 |
| 18465420 | SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD | PENCE, JETHRO M | 1717 | §103 | Non-Final OA | 75d | Pending | Sep 12, 2023 |
| 18549934 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD | GHYKA, ALEXANDER G | 2812 | §102 | Final Rejection | — | Pending | Sep 11, 2023 |
| 18459913 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CARRILLO, BIBI SHARIDAN | 1711 | §103 | Non-Final OA | — | Pending | Sep 01, 2023 |
| 18459151 | SUBSTRATE PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Aug 31, 2023 |
| 18241008 | PROCESSING SUBSTRATES WITH PLASMA MODULATED BY DC MAGNETIC FIELDS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Non-Final OA | — | Pending | Aug 31, 2023 |
| 18458688 | 3D SPACER NANOSHEET FORMATION | GREAVING, JASON JAMES | 2893 | §103 | Non-Final OA | 42d | Pending | Aug 30, 2023 |
| 18458630 | 3D COMB NANOSHEET AND PI/2 ROTATED NANOSHEET | SALAZ, SAMMANTHA KATELYN | 2892 | §103 | Non-Final OA | — | Pending | Aug 30, 2023 |
| 18456642 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | RUCKER, BASEEMAH QADEER | 2817 | §103 | Final Rejection | — | Pending | Aug 28, 2023 |
| 18547888 | FILM FORMING METHOD, PROCESSING APPARATUS, AND PROCESSING SYSTEM | CARTER, JONATHAN LANGDON | 2896 | §103 | Non-Final OA | — | Pending | Aug 25, 2023 |
| 18237409 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18454632 | HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 67d overdue | Pending | Aug 23, 2023 |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | 29d | Pending | Aug 08, 2023 |
| 18231378 | LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD | ZHANG, RICHARD Z | 1714 | §103 | Non-Final OA | — | Pending | Aug 08, 2023 |
| 18366492 | FULLY SELF-ALIGNED VIA WITH GRAPHENE CAP | AU, BAC H | 2898 | §103 | Non-Final OA | — | Pending | Aug 07, 2023 |
| 18364010 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 71d | Pending | Aug 02, 2023 |
| 18275359 | FILM FORMING DEVICE AND FILM FORMING METHOD | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | 78d | Pending | Aug 01, 2023 |
| 18263435 | PLATING METHOD AND PLATING APPARATUS | MARUF, SHEIKH | 2897 | §103 | Non-Final OA | 55d | Pending | Jul 28, 2023 |
| 18224940 | FORKSHEET SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME | SLUTSKER, JULIA | 2891 | §103 | Non-Final OA | 52d overdue | Pending | Jul 21, 2023 |
| 18224077 | PROFILE DETECTION METHOD, PROFILE DETECTION PROGRAM, AND INFORMATION PROCESSING APPARATUS | YANG, JIANXUN | 2662 | §103 | Non-Final OA | — | Pending | Jul 20, 2023 |
| 18261898 | METHOD FOR MANUFACTURING SUBSTRATE WITH CHIPS, AND SUBSTRATE PROCESSING DEVICE | SIPLING, KENNETH MARK | 2818 | §103 | Non-Final OA | — | Pending | Jul 18, 2023 |
| 18353747 | PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD | CHEN, KEATH T | 1716 | §103 | Final Rejection | 33d | Pending | Jul 17, 2023 |
| 18271898 | METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 14d | Pending | Jul 12, 2023 |
| 18218450 | DISPLAY METHOD AND INFORMATION PROCESSING APPARATUS | RICKS, DONNA J | 2618 | §103 | Final Rejection | — | Pending | Jul 05, 2023 |
| 18346287 | LIQUID PROCESSING APPARATUS | PATEL, VISHAL I | 1746 | §102 | Non-Final OA | 42d | Pending | Jul 03, 2023 |
| 18216874 | METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALLIC OXIDES | COSGROVE, JAYSON D | 1737 | §103 | Final Rejection | — | Pending | Jun 30, 2023 |
| 18341903 | BONDING APPARATUS AND BONDING METHOD | SHAMSUZZAMAN, MOHAMMED | 2897 | §103 | Non-Final OA | — | Pending | Jun 27, 2023 |
| 18210368 | HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §103 | Non-Final OA | 62d | Pending | Jun 15, 2023 |
| 18210329 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM | ANDUJAR, LEONARDO | 3991 | Other | Non-Final OA | 12d | Pending | Jun 15, 2023 |
| 18207737 | ETCHING METHOD AND PLASMA PROCESSING SYSTEM | CULBERT, ROBERTS P | 1716 | §103 | Final Rejection | 35d overdue | Pending | Jun 09, 2023 |
| 18329372 | VACUUM HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §112 | Non-Final OA | 49d overdue | Pending | Jun 05, 2023 |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 1716 | §103 | Final Rejection | 4d overdue | Pending | Jun 02, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | §103 | Final Rejection | 31d overdue | Pending | May 31, 2023 |
| 18319419 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | — | Pending | May 17, 2023 |
| 18198355 | METAL OXIDE PRECLEANING PRIOR TO METAL FILLING | PHAM, THOMAS T | 1713 | §112 | Non-Final OA | 84d | Pending | May 17, 2023 |
| 18318041 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | — | Pending | May 16, 2023 |
| 18035401 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE | LUND, JEFFRIE ROBERT | 1716 | §103 | Final Rejection | — | Pending | May 04, 2023 |
| 18141700 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | ALEJANDRO MULERO, LUZ L | 1716 | §103 | Non-Final OA | 41d | Pending | May 01, 2023 |
| 18298829 | Method and System for Plasma Processing | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 83d | Pending | Apr 11, 2023 |
| 18295144 | Apparatus and Methods for Plasma Processing | STARK, JARRETT J | 2898 | §103 | Non-Final OA | 60d | Pending | Apr 03, 2023 |
| 18027722 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE | TRAN, TONY | 2893 | §103 | Final Rejection | — | Pending | Mar 22, 2023 |
| 18185674 | PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD | HUNTER, JOHN S | 3761 | §112 | Final Rejection | — | Pending | Mar 17, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 36d overdue | Pending | Mar 10, 2023 |
| 18044386 | LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD | ZABEL, ANDREW JOHN | 2818 | §103 | Final Rejection | — | Pending | Mar 08, 2023 |
| 18025250 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | TADESSE, YEWEBDAR T | 1717 | — | Non-Final OA | — | Pending | Mar 08, 2023 |
| 18179503 | Ceramic Pedestal Shaft with Heated/Cooled Gas Tube | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Mar 07, 2023 |
| 18043757 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | PRICE, CRAIG JAMES | 3753 | §103 | Non-Final OA | — | Pending | Mar 02, 2023 |
| 18115366 | SUBSTRATE HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | HUNTER, JOHN S | 3761 | §103 | Final Rejection | — | Pending | Feb 28, 2023 |
| 18042513 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTRIC WINDOW | LEE, WILSON | 2844 | §103 | Final Rejection | 27d | Pending | Feb 22, 2023 |
| 18022213 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CHACKO DAVIS, DABORAH | 1737 | §112 | Final Rejection | 49d overdue | Pending | Feb 20, 2023 |
| 18108391 | PLASMA PROCESSING APPARATUS | SWEELY, KURT D | 1718 | §103 | Non-Final OA | — | Pending | Feb 10, 2023 |
| 18105993 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | KITT, STEPHEN A | 1717 | §103 | Final Rejection | — | Pending | Feb 06, 2023 |
| 18159865 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | — | Pending | Jan 26, 2023 |
| 18101676 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 40d | Pending | Jan 26, 2023 |
| 18159295 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 30d | Pending | Jan 25, 2023 |
| 18156618 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Jan 19, 2023 |
| 18004931 | FILM FORMING METHOD AND FILM FORMING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | 50d overdue | Pending | Jan 10, 2023 |
| 18014884 | FILM FORMING APPARATUS AND FILM FORMING METHOD | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | — | Pending | Jan 06, 2023 |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 3665 | §101 | Non-Final OA | 19d | Pending | Dec 29, 2022 |
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 86d overdue | Pending | Dec 28, 2022 |
| 18088870 | PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK MANUFACTURING METHOD | CROWELL, ANNA M | 1716 | §102 | Non-Final OA | 79d | Pending | Dec 27, 2022 |
| 18146535 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18084908 | METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM | WEGNER, AARON MICHAEL | 2897 | §103 | Non-Final OA | — | Pending | Dec 20, 2022 |
| 18066078 | IN-SITU DIAGNOSIS OF PLASMA SYSTEM | ALANKO, ANITA KAREN | 1713 | §101 | Non-Final OA | 78d | Pending | Dec 14, 2022 |
| 18062449 | Methods for Etching Molybdenum | KIELIN, ERIK J | 2814 | §102 | Final Rejection | — | Pending | Dec 06, 2022 |
| 17994711 | PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE | SWEELY, KURT D | 1718 | §103 | Final Rejection | 7d | Pending | Nov 28, 2022 |
| 18058245 | APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR | SHAMSUZZAMAN, MOHAMMED | 2897 | §103 | Final Rejection | 36d overdue | Pending | Nov 22, 2022 |
| 17989438 | Self Aligned Multiple Patterning Method | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 77d | Pending | Nov 17, 2022 |
| 18049661 | FILM FORMING METHOD AND FILM FORMING APPARATUS | NETTLES, CORALIE ANN | 2893 | §103 | Final Rejection | — | Pending | Oct 26, 2022 |
| 17997158 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM | GHYKA, ALEXANDER G | 2812 | §103 | Final Rejection | 16d overdue | Pending | Oct 26, 2022 |
| 17961601 | SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS | MOORE, KARLA A | 1716 | Other | Non-Final OA | — | Pending | Oct 07, 2022 |
| 17956089 | Low-Temperature Etch | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | — | Pending | Sep 29, 2022 |
| 17952326 | ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | YU, YUECHUAN | 1718 | §103 | Non-Final OA | — | Pending | Sep 26, 2022 |
| 17907102 | REMOVING APPARATUS | SHUM, KENT N | 3723 | §112 | Non-Final OA | — | Pending | Sep 23, 2022 |
| 17950685 | HIGH RESOLUTION LATENT IMAGE PROCESSING, CONTRAST ENHANCEMENT AND THERMAL DEVELOPMENT | CHU, JOHN S Y | 1737 | §103 | Final Rejection | — | Pending | Sep 22, 2022 |
| 17950116 | SUBSTRATE PROCESSING SYSTEM | FORD, NATHAN K | 1716 | §112 | Final Rejection | — | Pending | Sep 22, 2022 |
| 17949520 | GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GATE VALVE | MOORE, KARLA A | 1716 | §112 | Non-Final OA | — | Pending | Sep 21, 2022 |
| 17906353 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | 17d overdue | Pending | Sep 15, 2022 |
| 17943702 | METHOD OF DETECTING DEVIATION AMOUNT OF SUBSTRATE TRANSPORT POSITION AND SUBSTRATE PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Non-Final OA | — | Pending | Sep 13, 2022 |
| 17943926 | PATTERNING A SEMICONDUCTOR WORKPIECE | CHACKO DAVIS, DABORAH | 1737 | §103 | Final Rejection | — | Pending | Sep 13, 2022 |
| 17943729 | Hybrid Development of EUV Resists | CHACKO DAVIS, DABORAH | 1737 | §102 | Final Rejection | — | Pending | Sep 13, 2022 |
| 17903431 | SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | 103d overdue | Pending | Sep 06, 2022 |
| 17896961 | PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS | KIM, JAHAE | 2897 | §103 | Non-Final OA | — | Pending | Aug 26, 2022 |
| 17896904 | APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM ON SUBSTRATE | BALDWIN, GORDON | 1718 | §103 | Final Rejection | 45d overdue | Pending | Aug 26, 2022 |
| 17894296 | ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 12d | Pending | Aug 24, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | §112 | Final Rejection | 145d overdue | Pending | Aug 23, 2022 |
| 17820962 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | §103 | Final Rejection | 4d overdue | Pending | Aug 19, 2022 |
| 17904427 | PLASMA PROCESSING APPARATUS | YU, YUECHUAN | 1718 | §103 | Non-Final OA | — | Pending | Aug 17, 2022 |
| 17818547 | FILM FORMING APPARATUS | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | — | Pending | Aug 09, 2022 |
| 17882834 | PLASMA PROCESSING APPARATUS AND FILM FORMING METHOD | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 60d overdue | Pending | Aug 08, 2022 |
| 17880660 | METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 17d overdue | Pending | Aug 04, 2022 |
| 17879803 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | SWEELY, KURT D | 1718 | §103 | Final Rejection | 23d | Pending | Aug 03, 2022 |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17876385 | PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | — | Pending | Jul 28, 2022 |
| 17857914 | FILM FORMING METHOD AND HEAT TREATMENT APPARATUS | LOUIE, MANDY C | 1718 | §103 | Final Rejection | — | Pending | Jul 05, 2022 |
| 17854944 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 30d overdue | Pending | Jun 30, 2022 |
| 17809384 | PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | 70d overdue | Pending | Jun 28, 2022 |
| 17850250 | SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Jun 27, 2022 |
| 17848596 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | — | Pending | Jun 24, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 51d overdue | Pending | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | §103 | Final Rejection | 26d | Pending | Jun 17, 2022 |
| 17756980 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | — | Pending | Jun 07, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | §103 | Final Rejection | 60d overdue | Pending | May 24, 2022 |
| 17736048 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | FORD, NATHAN K | 1716 | §103 | Non-Final OA | — | Pending | May 03, 2022 |
| 17734125 | ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | — | Pending | May 02, 2022 |
| 17661124 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Apr 28, 2022 |
| 17706958 | BILAYER DIELECTRIC STACK FOR A FERROELECTRIC TUNNEL JUNCTION AND METHOD OF FORMING | WINTERS, SEAN AYERS | 2892 | §103 | Final Rejection | 32d overdue | Pending | Mar 29, 2022 |
| 17761091 | RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 77d overdue | Pending | Mar 16, 2022 |
| 17655071 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | — | Pending | Mar 16, 2022 |
| 17654625 | TEMPERATURE CONTROL UNIT AND PROCESSING APPARATUS | JONES, GORDON A | 3763 | §103 | Non-Final OA | — | Pending | Mar 14, 2022 |
| 17676411 | APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF | BAND, MICHAEL A | 1794 | §103 | Final Rejection | 23d | Pending | Feb 21, 2022 |
| 17647185 | METHOD FOR FORMING FILM AND PROCESSING APPARATUS | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Non-Final OA | — | Pending | Jan 06, 2022 |
| 17645829 | PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 44d overdue | Pending | Dec 23, 2021 |
| 17644412 | DEPOSITION APPARATUS AND DEPOSITION METHOD | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 43d overdue | Pending | Dec 15, 2021 |
| 17542874 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | Other | Non-Final OA | — | Pending | Dec 06, 2021 |
| 17456609 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS | CRAMER, HALEE PAIGE | 2891 | §103 | Final Rejection | — | Pending | Nov 26, 2021 |
| 17522191 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | FORD, NATHAN K | 1716 | §103 | Non-Final OA | — | Pending | Nov 09, 2021 |
| 17501889 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103 | Final Rejection | 57d | Pending | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | §103 | Non-Final OA | 3d overdue | Pending | Sep 27, 2021 |
| 17428597 | FILM FORMING APPARATUS AND FILM FORMING METHOD | BAND, MICHAEL A | 1794 | Other | Non-Final OA | 33d | Pending | Aug 04, 2021 |
| 17347824 | DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE POLISHING MEMBER | POON, DANA LEE | 3723 | §103 | Final Rejection | — | Pending | Jun 15, 2021 |
| 17183138 | SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK | MELLOTT, JAMES M | 1759 | §103 | Final Rejection | 71d | Pending | Feb 23, 2021 |
| 17118158 | PART FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM | KIRKWOOD, SPENCER HAMMETT | 3761 | §103 | Final Rejection | — | Pending | Dec 10, 2020 |
| 17114096 | FURNACE WITH METAL FURNACE TUBE | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 97d overdue | Pending | Dec 07, 2020 |
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 4d overdue | Pending | Sep 29, 2020 |
| 16992550 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | Aug 13, 2020 |
| 16580232 | VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 104d overdue | Pending | Sep 24, 2019 |
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