Prosecution Insights
Last updated: April 19, 2026

Tokyo Electron Limited

304 pending office actions

Portfolio Summary

304
Total Pending OAs
93
Final Rejections
211
Non-Final OAs

Pending Office Actions

App #TitleExaminerArt UnitStatusFiled
19111422 PROCESSOR THAT IMPLEMENTS INDIRECT ADDRESSING-STYLE CONDITIONAL JUMP INSTRUCTIONS, PROGRAM RECORDING MEDIUM, AND METHOD METZGER, MICHAEL J 2183 Final Rejection Mar 13, 2025
18876798 PROCESSOR FOR CONTROLLING PIPELINE PROCESSING BASED ON JUMP INSTRUCTION, AND PROGRAM STORAGE MEDIUM METZGER, MICHAEL J 2183 Final Rejection Dec 19, 2024
18982168 SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS CHEN, BRET P 1718 Non-Final OA Dec 16, 2024
18976345 SUBSTRATE PROCESSING SYSTEM KAISER, SYED M 2831 Non-Final OA Dec 11, 2024
18970324 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM LEONG, NATHAN T 1718 Non-Final OA Dec 05, 2024
18969148 Plasma Processing Apparatus and Plasma Processing Method WELLS, KENNETH B 2842 Non-Final OA Dec 04, 2024
18957942 SUBSTRATE PROCESSING APPARATUS CHEN, PATRICK C 2842 Non-Final OA Nov 25, 2024
18947903 MODIFICATION METHOD AND MODIFICATION DEVICE CHAN, WEI 2844 Non-Final OA Nov 14, 2024
18935665 CONTROL METHOD AND PLASMA PROCESSING APPARATUS SATHIRAJU, SRINIVAS 2844 Non-Final OA Nov 04, 2024
18933255 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS PROCTOR, CACHET I 1712 Non-Final OA Oct 31, 2024
18857016 FILM-FORMING METHOD AND SUBSTRATE-PROCESSING DEVICE TADAYYON ESLAMI, TABASSOM 1718 Non-Final OA Oct 15, 2024
18911171 Substrate Processing Apparatus BAND, MICHAEL A 1794 Final Rejection Oct 09, 2024
18855230 PLASMA PROCESSING APPARATUS LUONG, HENRY T 2844 Final Rejection Oct 08, 2024
18899015 LIQUID PROCESSING APPARATUS, AND MONITORING METHOD HAGHANI, SHADAN E 2485 Non-Final OA Sep 27, 2024
18850155 FILLING METHOD AND SUBSTRATE PROCESSING SYSTEM GAMBETTA, KELLY M 1718 Non-Final OA Sep 24, 2024
18885134 Plasma Source and Plasma Processing Apparatus SATHIRAJU, SRINIVAS 2844 Non-Final OA Sep 13, 2024
18838595 SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS MCCLURE, CHRISTINA D 1718 Non-Final OA Aug 14, 2024
18836386 LIQUID PROCESSING METHOD, DISCHARGE ADJUSTMENT METHOD, AND LIQUID PROCESSING APPARATUS CARRILLO, BIBI SHARIDAN 1711 Non-Final OA Aug 07, 2024
18789854 HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM CROWELL, ANNA M 1716 Non-Final OA Jul 31, 2024
18782194 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD COLEMAN, RYAN L 1714 Non-Final OA Jul 24, 2024
18771025 EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD NGUYEN, HUNG 2882 Non-Final OA Jul 12, 2024
18769841 LIQUID TREATMENT METHOD AND STORAGE MEDIUM NGUYEN, HUNG 2882 Final Rejection Jul 11, 2024
18724335 FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD XING, CHRISTINA ILONA 2877 Non-Final OA Jun 26, 2024
18754701 SUBSTRATE-PROCESSING APPARATUS BAUER, SCOTT ALLEN 2838 Non-Final OA Jun 26, 2024
18724360 FILM FORMING METHOD AND FILM FORMING APPARATUS LOUIE, MANDY C 1718 Non-Final OA Jun 26, 2024
18748171 SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCESSING METHOD BENNETT, CHARLEE 1718 Non-Final OA Jun 20, 2024
18569248 METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM ROLLAND, ALEX A 1759 Non-Final OA Jun 13, 2024
18740007 PLASMA PROCESSING APPARATUS KENDALL, BENJAMIN R 2896 Non-Final OA Jun 11, 2024
18678469 SITU WAFER BOND PROPAGATION MEASUREMENT BOLOGNA, DOMINIC JOSEPH 2877 Non-Final OA May 30, 2024
18672248 SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND RECORDING MEDIUM THOMAS, BINU 1717 Non-Final OA May 23, 2024
18668645 ANTENNA AND PLASMA PROCESSING APPARATUS LAW, NGA LEUNG V 1717 Non-Final OA May 20, 2024
18709674 NITRIDE FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS MCCLURE, CHRISTINA D 1718 Non-Final OA May 13, 2024
18621827 WAFER BOW METROLOGY SYSTEM AMARA, MOHAMED K 2877 Final Rejection Mar 29, 2024
18622318 METHOD FOR REMOVING METAL-CONTAINING MATERIALS IN SMALL PITCH STRUCTURES PHAM, THOMAS T 1713 Non-Final OA Mar 29, 2024
18620482 ETCHING BI-METAL OXIDES WITH ALKALINE EARTH METALS LU, JIONG-PING 1713 Non-Final OA Mar 28, 2024
18620417 HARD MASK PROTECTION OF METAL INTERCONNECTS LU, JIONG-PING 1713 Non-Final OA Mar 28, 2024
18611755 ETCHING METHOD AND PLASMA PROCESSING APPARATUS ALANKO, ANITA KAREN 1713 Non-Final OA Mar 21, 2024
18612938 INFORMATION PROCESSING APPARATUS AND CORRECTION METHOD WOODWARD, NATHANIEL T 2855 Non-Final OA Mar 21, 2024
18608043 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS CULBERT, ROBERTS P 1716 Final Rejection Mar 18, 2024
18605902 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS INCLUDING APPLYING A VOLTAGE TO A LOWER ELECTRODE IN A SUBSTRATE SUPPORT WITH A GAS SUPPLIED INTO A CHAMBER SATHIRAJU, SRINIVAS 2844 Final Rejection Mar 15, 2024
18606633 POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS BITOR, RENAE ALLYN 2663 Non-Final OA Mar 15, 2024
18607202 HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS LAOBAK, ANDREW KEELAN 1713 Non-Final OA Mar 15, 2024
18603049 CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS LAOBAK, ANDREW KEELAN 1713 Non-Final OA Mar 12, 2024
18599619 SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS MCMICHAEL, TAUREAN LLOYD 3652 Non-Final OA Mar 08, 2024
18595890 SUBSTRATE POSITIONING DEVICE, SUBSTRATE POSITIONING METHOD, AND BONDING APPARATUS WILSON, LEE D 3723 Non-Final OA Mar 05, 2024
18589570 BOTTOM-UP DIRECTIONAL ATOMIC LAYER DEPOSITION (ALD) MCCLURE, CHRISTINA D 1718 Final Rejection Feb 28, 2024
18585340 Methods To Improve Etch Uniformity Across A Semiconductor Substrate When Etching With A Hydrofluoric Acid (HF) And Nitric Acid (HNO3) Solution LU, JIONG-PING 1713 Non-Final OA Feb 23, 2024
18584114 METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON SUBSTRATE GAMBETTA, KELLY M 1718 Final Rejection Feb 22, 2024
18442022 PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLASMA STATE DETECTION PROGRAM CHAN, LAUREEN 1716 Non-Final OA Feb 14, 2024
18683478 JIG SUBSTRATE AND TEACHING METHOD SALEH, ZAID MUHAMMAD 2668 Non-Final OA Feb 13, 2024
18681914 SUBSTRATE THICKNESS MEASURING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE THICKNESS MEASURING METHOD LYONS, MICHAEL A 2877 Non-Final OA Feb 07, 2024
18433320 DIRECT CURRENT SUPERPOSITION (DCS) FOR PROTECTION OF ORGANIC MANDREL DURING SPACER DEPOSITION PHAM, THOMAS T 1713 Non-Final OA Feb 05, 2024
18430313 METHOD FOR ETCHING A PATTERN IN A LAYER OF A SUBSTRATE REMAVEGE, CHRISTOPHER 1713 Non-Final OA Feb 01, 2024
18426925 PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD SATHIRAJU, SRINIVAS 2844 Final Rejection Jan 30, 2024
18425323 SENSOR IN CHAMBER INSERT RING ASSEMBLY OTT, PATRICK S 1794 Final Rejection Jan 29, 2024
18424262 SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES AHMED, SHAMIM 1713 Non-Final OA Jan 26, 2024
18292528 SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM DULANEY, KATHLEEN YUAN 2666 Non-Final OA Jan 26, 2024
18419592 FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING PART HAVING FILM CONTAINING SILICON PROCTOR, CACHET I 1712 Non-Final OA Jan 23, 2024
18418757 SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM LU, JIONG-PING 1713 Non-Final OA Jan 22, 2024
18418580 INFORMATION COLLECTION DEVICE AZAD, MD ABUL K 2119 Non-Final OA Jan 22, 2024
18416880 PROCESSING METHOD AND PLASMA PROCESSING APPARATUS MACARTHUR, SYLVIA 1716 Non-Final OA Jan 18, 2024
18415499 METHOD OF DETECTING LIQUID IN LIQUID PROCESSING APPARATUS KITT, STEPHEN A 1717 Non-Final OA Jan 17, 2024
18410031 ETCHING METHOD AND PLASMA PROCESSING APPARATUS LU, JIONG-PING 1713 Non-Final OA Jan 11, 2024
18410811 DEVICE FABRICATION METHODS WITH ION BEAM PROCESSING DEO, DUY VU NGUYEN 1713 Non-Final OA Jan 11, 2024
18410046 METHOD OF FORMING SILICON NITRIDE FILM GAMBETTA, KELLY M 1718 Non-Final OA Jan 11, 2024
18409606 INTEGRATED OPTICAL NANOTHERMOMETRY FOR REAL-TIME WAFER TEMPERATURE MONITORING DURING PROCESSING COTEY, PHILIP L 2855 Non-Final OA Jan 10, 2024
18406670 METHOD AND SYSTEM FOR PLASMA PROCESS DEO, DUY VU NGUYEN 1713 Non-Final OA Jan 08, 2024
18406783 METHOD AND SYSTEM FOR PLASMA PROCESS LU, JIONG-PING 1713 Non-Final OA Jan 08, 2024
18402328 FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EPD) BY REFLECTOMETRY PHAM, THOMAS T 1713 Non-Final OA Jan 02, 2024
18395879 ETCHING METHOD AND PLASMA PROCESSING APPARATUS PHAM, THOMAS T 1713 Non-Final OA Dec 26, 2023
18573627 SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM TRAN, BINH X 1713 Non-Final OA Dec 22, 2023
18572959 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS OWENS, DOUGLAS W 2897 Non-Final OA Dec 21, 2023
18390221 ETCHING METHOD AND PLASMA PROCESSING APPARATUS TRAN, BINH X 1713 Non-Final OA Dec 20, 2023
18541526 PLASMA PROCESSING APPARATUS DANIELS, MATTHEW J 1742 Non-Final OA Dec 15, 2023
18541164 SUBSTRATE PROCESSING APPARATUS MILLER, JR, JOSEPH ALBERT 1712 Non-Final OA Dec 15, 2023
18539187 METHOD OF PERFORMING CLEANING AND APPARATUS FOR PERFORMING SUBSTRATE PROCESSING ZHANG, RICHARD Z 1714 Final Rejection Dec 13, 2023
18536789 FILM FORMING APPARATUS BERMAN, JASON 1794 Non-Final OA Dec 12, 2023
18536813 DEPOSITION APPARATUS AND PROCESSING METHOD SWEELY, KURT D 1718 Non-Final OA Dec 12, 2023
18533256 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD NGUYEN, BAO D 3762 Non-Final OA Dec 08, 2023
18532585 METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF GRAY, SUNGHEE Y 2877 Non-Final OA Dec 07, 2023
18528025 PLASMA PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND CORRECTION METHOD BENNETT, CHARLEE 1718 Non-Final OA Dec 04, 2023
18525930 TRANSFER MODULE AND TRANSFER METHOD MYERS, GLENN F 3652 Non-Final OA Dec 01, 2023
18566183 SUBSTRATE PROCESSING APPARATUS HASSANZADEH, PARVIZ 1716 Non-Final OA Dec 01, 2023
18522825 PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS LOUIE, MANDY C 1718 Final Rejection Nov 29, 2023
18518810 FILM FORMING METHOD AND FILM FORMING APPARATUS LOUIE, MANDY C 1718 Final Rejection Nov 24, 2023
18518696 PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT MCDONALD, RODNEY GLENN 1794 Non-Final OA Nov 24, 2023
18518862 CLEANING METHOD AND PLASMA PROCESSING METHOD PHAM, THOMAS T 1713 Final Rejection Nov 24, 2023
18517486 OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS GARBER, ERIN R 2878 Final Rejection Nov 22, 2023
18515667 SOLUTION TREATMENT APPARATUS AND CLEANING METHOD RIVERA-CORDERO, ARLYN I 1714 Non-Final OA Nov 21, 2023
18562502 SUBSTRATE PROCESSING METHOD YAP, DOUGLAS ANTHONY 2899 Non-Final OA Nov 20, 2023
17907217 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS MOJADDEDI, OMAR F 2898 Non-Final OA Nov 20, 2023
18509560 INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS YAP, DOUGLAS ANTHONY 2899 Non-Final OA Nov 15, 2023
18505133 PASSIVATION EQUIPMENT AND PASSIVATION METHOD FOR SEMICONDUCTOR DEVICE BALLMAN, CHRISTOPHER D 3753 Non-Final OA Nov 09, 2023
18558822 SUBSTRATE PROCESSING DEVICE AND METHOD FOR MEASURING PROCESS GAS TEMPERATURE AND CONCENTRATION FABIAN JR, ROBERTO 2877 Non-Final OA Nov 03, 2023
18386601 ETCHING METHOD DUCLAIR, STEPHANIE P. 1713 Non-Final OA Nov 03, 2023
18500170 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE BANKLER, AIDAN DENNEHY 2817 Non-Final OA Nov 02, 2023
18496824 SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD WIBLIN, MATTHEW 3745 Non-Final OA Oct 27, 2023
18557144 SUBSTRATE LIQUID PROCESSING METHOD, AND RECORDING MEDIUM HO, ANTHONY 2817 Non-Final OA Oct 25, 2023
18383637 SUBSTRATE PROCESSING APPARATUS MCDONALD, RODNEY GLENN 1794 Non-Final OA Oct 25, 2023
18381269 SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD WOLDEGEORGIS, ERMIAS T 2893 Non-Final OA Oct 18, 2023
18489229 SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE WAN, DEMING 3762 Non-Final OA Oct 18, 2023
18380776 SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC LAYER ETCHING (ALE) KENDALL, BENJAMIN R 2896 Non-Final OA Oct 17, 2023
18555055 SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE HERNANDEZ-KENNEY, JOSE 1717 Non-Final OA Oct 12, 2023
18485469 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD LIU, BENJAMIN T 2893 Non-Final OA Oct 12, 2023
18485978 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS DUCLAIR, STEPHANIE P. 1713 Final Rejection Oct 12, 2023
18554836 SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM BAREFORD, KATHERINE A 1718 Final Rejection Oct 11, 2023
18483050 SUBSTRATE PROCESSING APPARATUS HAGEMAN, MARK C 3652 Non-Final OA Oct 09, 2023
18554225 ETCHING METHOD AND PROCESSING DEVICE LU, JIONG-PING 1713 Non-Final OA Oct 06, 2023
18482401 SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS TRAN, BINH X 1713 Non-Final OA Oct 06, 2023
18376512 SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD KC, SAGAR 3657 Non-Final OA Oct 04, 2023
18376050 ETCHING METHOD AND PLASMA PROCESSING APPARATUS AHMED, SHAMIM 1713 Final Rejection Oct 03, 2023
18479986 PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD BRAYTON, JOHN JOSEPH 1794 Non-Final OA Oct 03, 2023
18375958 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM WILSON, GREGORY A 3762 Non-Final OA Oct 02, 2023
18479599 ETCHING METHOD AND PLASMA PROCESSING SYSTEM DUCLAIR, STEPHANIE P. 1713 Non-Final OA Oct 02, 2023
18553337 PLASMA PROCESSING APPARATUS MILLER, JR, JOSEPH ALBERT 1712 Non-Final OA Sep 29, 2023
18475502 PLASMA PROCESSING APPARATUS AND COIL HOLDER FOR HOLDING PLASMA EXCITATION ANTENNA LEE, AIDEN Y 1718 Non-Final OA Sep 27, 2023
18372767 SUBSTRATE TRANSFER SYSTEM AND IMAGE CORRECTION METHOD LEE, BENEDICT E 2665 Non-Final OA Sep 26, 2023
18552108 SUBSTRATE LIQUID-TREATMENT DEVICE MACARTHUR, SYLVIA 1716 Non-Final OA Sep 22, 2023
18470878 FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM BENNETT, CHARLEE 1718 Non-Final OA Sep 20, 2023
18369219 SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS LEE, AIDEN Y 1718 Non-Final OA Sep 18, 2023
18467071 BONDING APPARATUS AND BONDING METHOD NGUYEN, DUY T V 2818 Non-Final OA Sep 14, 2023
18367742 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD LEE, KEVIN G 1711 Non-Final OA Sep 13, 2023
18367315 METHOD OF SURFACE MODIFICATION FOR WAFER BONDING INOUSSA, MOULOUCOULAY 2818 Non-Final OA Sep 12, 2023
18549610 SEMICONDUCTOR CHIP MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS NGUYEN, THANH T 2893 Non-Final OA Sep 08, 2023
18459913 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM CARRILLO, BIBI SHARIDAN 1711 Final Rejection Sep 01, 2023
18240010 PLASMA PROCESSING APPARATUS CROWELL, ANNA M 1716 Non-Final OA Aug 30, 2023
18456642 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS RUCKER, BASEEMAH QADEER 2817 Non-Final OA Aug 28, 2023
18457053 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SHAPE SPECIFYING METHOD, TRANSFER DEVICE, AND END EFFECTOR MCCLAIN, GERALD 3652 Non-Final OA Aug 28, 2023
18454632 HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA BENNETT, CHARLEE 1718 Non-Final OA Aug 23, 2023
18546140 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS SHAMSUZZAMAN, MOHAMMED 2897 Non-Final OA Aug 11, 2023
18366829 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD KENDALL, BENJAMIN R 2896 Non-Final OA Aug 08, 2023
18231278 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS KENDALL, BENJAMIN R 2896 Final Rejection Aug 08, 2023
18275908 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD KEBEDE, BROOK 2818 Non-Final OA Aug 04, 2023
18230049 PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD KACKAR, RAM N 1716 Non-Final OA Aug 03, 2023
18229471 INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TREATMENT APPARATUS WOLDEGEORGIS, ERMIAS T 2893 Final Rejection Aug 02, 2023
18364010 SUBSTRATE PROCESSING APPARATUS KENDALL, BENJAMIN R 2896 Final Rejection Aug 02, 2023
18363993 SUBSTRATE PROCESSING APPARATUS KENDALL, BENJAMIN R 2896 Final Rejection Aug 02, 2023
18263920 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS LOUIE, MANDY C 1718 Non-Final OA Aug 02, 2023
18275359 FILM FORMING DEVICE AND FILM FORMING METHOD KENDALL, BENJAMIN R 2896 Non-Final OA Aug 01, 2023
18227156 SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING METHOD, AND SUPPLY METHOD LEE, KEVIN G 1711 Non-Final OA Jul 27, 2023
18359783 APPARATUS AND METHOD FOR PLASMA PROCESSING KENDALL, BENJAMIN R 2896 Non-Final OA Jul 26, 2023
18359275 SYSTEMS AND METHODS FOR DEPOSITING METAL MCDONALD, RODNEY GLENN 1794 Non-Final OA Jul 26, 2023
18225077 SEASONING METHOD AND PLASMA PROCESSING APPARATUS YU, YUECHUAN 1718 Non-Final OA Jul 21, 2023
18224940 FORKSHEET SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME SLUTSKER, JULIA 2891 Non-Final OA Jul 21, 2023
18262422 SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS SELLS, JAMES D 1745 Non-Final OA Jul 21, 2023
18273446 APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE YU, YUECHUAN 1718 Final Rejection Jul 20, 2023
18273116 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS TRAN, TIEN 2812 Non-Final OA Jul 19, 2023
18354889 SUBSTRATE TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM FRASER, STEWART A 1724 Non-Final OA Jul 19, 2023
18353300 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM RIDDLE, CHRISTINA A 2882 Non-Final OA Jul 17, 2023
18261518 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD VU, VU A 2897 Non-Final OA Jul 14, 2023
18261507 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE MANUFACTURING METHOD WILCZEWSKI, MARY A 2898 Final Rejection Jul 14, 2023
18261157 PLATING METHOD AND PLATING APPARATUS BAREFORD, KATHERINE A 1718 Non-Final OA Jul 12, 2023
18271898 METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS STEVENSON, ANDRE C 2899 Final Rejection Jul 12, 2023
18350519 PLASMA PROCESSING METHOD AND APPARATUS ZERVIGON, RUDY 1716 Non-Final OA Jul 11, 2023
18260575 COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM ZHAO, XIAO SI 1744 Non-Final OA Jul 06, 2023
18345134 FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS BOWMAN, ANDREW J 1717 Non-Final OA Jun 30, 2023
18336678 3D HYBRID MEMORY USING HORIZONTALLY ORIENTED CONDUCTIVE DIELECTRIC CHANNEL REGIONS KIM, TONG-HO 2811 Non-Final OA Jun 16, 2023
18210772 SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE VETERE, ROBERT A 1712 Non-Final OA Jun 16, 2023
18210329 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM ANDUJAR, LEONARDO 3991 Non-Final OA Jun 15, 2023
18333724 FILM FORMING METHOD GAMBETTA, KELLY M 1718 Non-Final OA Jun 13, 2023
18333019 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD AYALEW, TINSAE B 1711 Non-Final OA Jun 12, 2023
18207737 ETCHING METHOD AND PLASMA PROCESSING SYSTEM CULBERT, ROBERTS P 1716 Final Rejection Jun 09, 2023
18205426 PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM CHEN, KEATH T 1716 Final Rejection Jun 02, 2023
18326266 HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM ADHIKARI DAWADI, BIPANA 2898 Non-Final OA May 31, 2023
18255133 FILM FORMATION METHOD JEFFERSON, QUOVAUNDA 2899 Final Rejection May 31, 2023
18325423 ETCHING METHOD AND PLASMA PROCESSING APPARATUS KLUNK, MARGARET D 1716 Non-Final OA May 30, 2023
18203062 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD YUEN, JESSICA JIPING 3762 Non-Final OA May 30, 2023
18254608 SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD SHUM, KENT N 3723 Final Rejection May 26, 2023
18199401 SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER CROWELL, ANNA M 1716 Non-Final OA May 19, 2023
18319915 METHOD TO REDUCE PARASITIC RESISTANCE FOR CFET DEVICES THROUGH SINGLE DAMASCENE PROCESSING OF VIAS OH, JIYOUNG 2818 Non-Final OA May 18, 2023
18198928 CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER METHOD HAGEMAN, MARK C 3652 Non-Final OA May 18, 2023
18197525 ABNORMALITY DETECTION METHOD AND TRANSFER DEVICE MARU, TEMESGEN MALLEDE 3655 Non-Final OA May 15, 2023
18312427 Protection Layer Formation during Plasma Etching Conductive Materials DUCLAIR, STEPHANIE P. 1713 Non-Final OA May 04, 2023
18035401 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE LUND, JEFFRIE ROBERT 1716 Non-Final OA May 04, 2023
18141700 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS ALEJANDRO MULERO, LUZ L 1716 Non-Final OA May 01, 2023
18249552 PLASMA PROCESSING APPARATUS REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Apr 19, 2023
18303485 SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD CHAN, LAUREEN 1716 Final Rejection Apr 19, 2023
18248562 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS DUCLAIR, STEPHANIE P. 1713 Non-Final OA Apr 11, 2023
18295462 BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD, AND RECORDING MEDIUM GRAY, AARON J 2897 Non-Final OA Apr 04, 2023
18295144 Apparatus and Methods for Plasma Processing STARK, JARRETT J 2898 Non-Final OA Apr 03, 2023
18247497 FILLING METHOD AND FILM FORMING APPARATUS HERNANDEZ-KENNEY, JOSE 1717 Final Rejection Mar 31, 2023
18129437 SUBSTRATE PROCESSING APPARATUS MCCORMACK, JOHN PATRICK 3762 Non-Final OA Mar 31, 2023
18193324 Dry Developing Metal-Free Photoresists LEE, ALEXANDER N 1737 Non-Final OA Mar 30, 2023
18125206 PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM DUCLAIR, STEPHANIE P. 1713 Non-Final OA Mar 23, 2023
18027722 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE TRAN, TONY 2893 Non-Final OA Mar 22, 2023
18187558 Impedance Matching Network and Control Method FERNANDEZ, PEDRO C 2844 Non-Final OA Mar 21, 2023
18121621 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS LAOBAK, ANDREW KEELAN 1713 Non-Final OA Mar 15, 2023
18120050 UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS CHAN, LAUREEN 1716 Final Rejection Mar 10, 2023
18044386 LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD ZABEL, ANDREW JOHN 2818 Non-Final OA Mar 08, 2023
18118582 STATE MANAGEMENT SYSTEM, STATE MANAGEMENT METHOD, AND STORAGE MEDIUM SHECHTMAN, SEAN P 2896 Final Rejection Mar 07, 2023
18115366 SUBSTRATE HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS HUNTER, JOHN S 3761 Non-Final OA Feb 28, 2023
18114998 ETCHING METHOD AND PLASMA PROCESSING APPARATUS KACKAR, RAM N 1716 Final Rejection Feb 28, 2023
18113862 SUBSTRATE PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Non-Final OA Feb 24, 2023
18113374 SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD LOWE, MICHAEL S 3652 Non-Final OA Feb 23, 2023
18042513 PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTRIC WINDOW LEE, WILSON 2844 Final Rejection Feb 22, 2023
18022213 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS CHACKO DAVIS, DABORAH 1737 Non-Final OA Feb 20, 2023
18109632 PLASMA PROCESSING APPARATUS KACKAR, RAM N 1716 Final Rejection Feb 14, 2023
18040669 THERMAL TREATMENT APPARATUS, THERMAL TREATMENT METHOD, AND STORAGE MEDIUM ELLIOTT, TOPAZ L 3761 Non-Final OA Feb 06, 2023
18105993 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM KITT, STEPHEN A 1717 Non-Final OA Feb 06, 2023
18106036 SUBSTRATE PROCESSING APPARATUS FORD, NATHAN K 1716 Final Rejection Feb 06, 2023
18164003 METHOD AND APPARATUS FOR PROCESSING SUBSTRATE MYERS, KEITH STANLEY 3763 Final Rejection Feb 03, 2023
18162876 Antenna Plane Magnets YU, YUECHUAN 1718 Final Rejection Feb 01, 2023
18160779 Selective Deposition of Passivating Layer During Spacer Etching BOEGEL, CHEVY JACOB 2812 Non-Final OA Jan 27, 2023
18159865 SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE ZERVIGON, RUDY 1716 Non-Final OA Jan 26, 2023
18159295 SUBSTRATE PROCESSING APPARATUS CHEN, KEATH T 1716 Final Rejection Jan 25, 2023
18156618 PLASMA PROCESSING APPARATUS CHEN, KEATH T 1716 Final Rejection Jan 19, 2023
18016943 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD MACARTHUR, SYLVIA 1716 Non-Final OA Jan 19, 2023
18004931 FILM FORMING METHOD AND FILM FORMING APPARATUS MCCLURE, CHRISTINA D 1718 Non-Final OA Jan 10, 2023
18014884 FILM FORMING APPARATUS AND FILM FORMING METHOD ZERVIGON, RUDY 1716 Final Rejection Jan 06, 2023
18151223 Method for Etching Features in a Layer in a Substrate LAOBAK, ANDREW KEELAN 1713 Non-Final OA Jan 06, 2023
18093205 3D UFET DEVICE FOR ADVANCED 3D INTEGRATION HENRY, CALEB E 2818 Non-Final OA Jan 04, 2023
18090537 INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE YOUNG, TIFFANY P 3665 Non-Final OA Dec 29, 2022
18146535 FILM FORMING METHOD AND FILM FORMING APPARATUS TADAYYON ESLAMI, TABASSOM 1718 Non-Final OA Dec 27, 2022
18145885 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS HONG, SEAHEE 3723 Non-Final OA Dec 23, 2022
18086647 PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD FORD, NATHAN K 1716 Non-Final OA Dec 22, 2022
18062449 Methods for Etching Molybdenum KIELIN, ERIK J 2814 Non-Final OA Dec 06, 2022
18073185 UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Final Rejection Dec 01, 2022
18060040 SOLVENT VAPOR SUPPLY APPARATUS AND SOLVENT VAPOR SUPPLY METHOD TREMARCHE, CONNOR J. 3762 Non-Final OA Nov 30, 2022
17994711 PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE SWEELY, KURT D 1718 Non-Final OA Nov 28, 2022
18058245 APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR SHAMSUZZAMAN, MOHAMMED 2897 Final Rejection Nov 22, 2022
17990022 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD ZERVIGON, RUDY 1716 Non-Final OA Nov 18, 2022
17988513 SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS LUND, JEFFRIE ROBERT 1716 Non-Final OA Nov 16, 2022
18055490 HEAT TREATMENT APPARATUS TREMARCHE, CONNOR J. 3762 Final Rejection Nov 15, 2022
17997558 REPLACING APPARATUS AND REPLACING METHOD CADUGAN, ERICA E 3722 Non-Final OA Oct 31, 2022
17997557 PROCESSING APPARATUS, AND INSTALLING METHOD OF PROCESSING TOOL OF PROCESSING APPARATUS CADUGAN, ERICA E 3722 Non-Final OA Oct 31, 2022
17976513 SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD SEOANE, TODD MICHAEL 1718 Final Rejection Oct 28, 2022
17997158 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM GHYKA, ALEXANDER G 2812 Non-Final OA Oct 26, 2022
18048618 METHOD FOR FORMING A PATTERN LAOBAK, ANDREW KEELAN 1713 Final Rejection Oct 21, 2022
17996524 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD SEOANE, TODD MICHAEL 1718 Final Rejection Oct 19, 2022
17959771 SILICON NANO SHEET THREE-DIMENSIONAL HORIZONTAL MEMORY WITH ALL-AROUND METAL STORAGE CAPACITOR SON, ERIKA HEERA 2893 Non-Final OA Oct 04, 2022
17952552 ULTRA-DENSE THREE-DIMENSIONAL TRANSISTOR DESIGN GREAVING, JASON JAMES 2893 Non-Final OA Sep 26, 2022
17949520 GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GATE VALVE MOORE, KARLA A 1716 Final Rejection Sep 21, 2022
17906353 FILM FORMATION METHOD AND FILM FORMATION APPARATUS WALTERS JR, ROBERT S 1717 Final Rejection Sep 15, 2022
17931957 DEPOSITION METHOD AND DEPOSITION APPARATUS MILLER, JR, JOSEPH ALBERT 1712 Final Rejection Sep 14, 2022
17943926 PATTERNING A SEMICONDUCTOR WORKPIECE CHACKO DAVIS, DABORAH 1737 Non-Final OA Sep 13, 2022
17943702 METHOD OF DETECTING DEVIATION AMOUNT OF SUBSTRATE TRANSPORT POSITION AND SUBSTRATE PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Non-Final OA Sep 13, 2022
17943729 Hybrid Development of EUV Resists CHACKO DAVIS, DABORAH 1737 Non-Final OA Sep 13, 2022
17903431 SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Final Rejection Sep 06, 2022
17902919 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD MOORE, KARLA A 1716 Final Rejection Sep 05, 2022
17901783 METHODS OF COMPACT CELL DESIGN FOR LOGIC APPLICATIONS ASHBAHIAN, ERIC K 2891 Non-Final OA Sep 01, 2022
17898104 METHODS FOR FORMING SEMICONDUCTOR DEVICES WITH ISOLATION STRUCTURES KIM, SU C 2899 Non-Final OA Aug 29, 2022
17896904 APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM ON SUBSTRATE SEOANE, TODD MICHAEL 1718 Non-Final OA Aug 26, 2022
17894296 ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK CROWELL, ANNA M 1716 Non-Final OA Aug 24, 2022
17893736 METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY BAIG, ANEESA RIAZ 2814 Final Rejection Aug 23, 2022
17820962 FILM FORMING METHOD AND FILM FORMING APPARATUS TUROCY, DAVID P 1718 Final Rejection Aug 19, 2022
17889632 PLASMA PROCESSING APPARATUS AND ETCHING METHOD BENNETT, CHARLEE 1718 Final Rejection Aug 17, 2022
17904427 PLASMA PROCESSING APPARATUS YU, YUECHUAN 1718 Final Rejection Aug 17, 2022
17887946 PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING CHACKO DAVIS, DABORAH 1737 Non-Final OA Aug 15, 2022
17818547 FILM FORMING APPARATUS ZERVIGON, RUDY 1716 Final Rejection Aug 09, 2022
17880660 METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE PHAM, THOMAS T 1713 Final Rejection Aug 04, 2022
17817091 ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SENSOR KOTOWSKI, LISA MICHELLE 2859 Final Rejection Aug 03, 2022
17879803 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD SWEELY, KURT D 1718 Non-Final OA Aug 03, 2022
17865433 ETCHING METHOD, PLASMA PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND PROGRAM STEVENSON, ANDRE C 2899 Non-Final OA Jul 15, 2022
17812523 METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM GATES, BRADFORD M 1713 Final Rejection Jul 14, 2022
17863594 WAFER BONDING METHOD USING SELECTIVE DEPOSITION AND SURFACE TREATMENT STEPHENSON, KENNETH STEPHEN 2898 Final Rejection Jul 13, 2022
17862889 SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM BAND, MICHAEL A 1794 Final Rejection Jul 12, 2022
17860127 METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Jul 08, 2022
17861021 METHOD TO ENHANCE 3D VERTICAL DEVICE PERFORMANCE AND 3D CIRCUIT DENSITY MICHAUD, NICHOLAS BRIAN 2818 Non-Final OA Jul 08, 2022
17859520 PLASMA PROCESSING APPARATUS AND PROCESSING METHOD CHEN, KEATH T 1716 Non-Final OA Jul 07, 2022
17854944 FILM FORMING APPARATUS AND FILM FORMING METHOD CHAN, LAUREEN 1716 Non-Final OA Jun 30, 2022
17809384 PLASMA PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Final Rejection Jun 28, 2022
17848596 PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT REYES, JOSHUA NATHANIEL PI 1718 Non-Final OA Jun 24, 2022
17757781 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD REYES, JOSHUA NATHANIEL PI 1718 Non-Final OA Jun 21, 2022
17845354 SHOWER HEAD AND PLASMA PROCESSING APPARATUS SEOANE, TODD MICHAEL 1718 Non-Final OA Jun 21, 2022
17786745 FILM FORMING METHOD AND FILM FORMING SYSTEM ZHU, SHENG-BAI 2897 Non-Final OA Jun 17, 2022
17807506 FILM FORMING APPARATUS CHEN, KEATH T 1716 Final Rejection Jun 17, 2022
17757376 FILM FORMATION METHOD AND FILM FORMATION APPARATUS WIECZOREK, MICHAEL P 1712 Final Rejection Jun 15, 2022
17828384 CONTROL METHOD AND CONTROL APPARATUS ALEXANDER, EMMA LYNNE 2857 Final Rejection May 31, 2022
17826870 INFORMATION PROCESSING APPARATUS, SIMULATION METHOD, AND INFORMATION PROCESSING SYSTEM MIRABITO, MICHAEL PAUL 2187 Final Rejection May 27, 2022
17756373 INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS AGRAWAL, SHISHIR 2123 Final Rejection May 24, 2022
17664607 Apparatus for Plasma Processing LEE, AIDEN Y 1718 Non-Final OA May 23, 2022
17747861 PLASMA PROCESSING APPARATUS KENDALL, BENJAMIN R 2896 Final Rejection May 18, 2022
17734125 ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM CROWELL, ANNA M 1716 Final Rejection May 02, 2022
17661095 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD MARKOFF, ALEXANDER 1711 Final Rejection Apr 28, 2022
17657194 INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC DEVICE, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS SUN, XIUQIN 2857 Non-Final OA Mar 30, 2022
17706958 BILAYER DIELECTRIC STACK FOR A FERROELECTRIC TUNNEL JUNCTION AND METHOD OF FORMING WINTERS, SEAN AYERS 2892 Final Rejection Mar 29, 2022
17655071 PLASMA PROCESSING APPARATUS REYES, JOSHUA NATHANIEL PI 1718 Non-Final OA Mar 16, 2022
17761091 RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Mar 16, 2022
17654625 TEMPERATURE CONTROL UNIT AND PROCESSING APPARATUS JONES, GORDON A 3763 Final Rejection Mar 14, 2022
17753264 SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM BAREFORD, KATHERINE A 1718 Final Rejection Feb 25, 2022
17676411 APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF BAND, MICHAEL A 1794 Non-Final OA Feb 21, 2022
17636430 SUPPLY SYSTEM FOR SUPPLYING RAW MATERIAL GAS GENERATED BY VAPORIZING SOLID RAW MATERIAL KURPLE, KARL 1717 Non-Final OA Feb 18, 2022
17667378 ADVANCED 3D DEVICE ARCHITECTURE USING NANOSHEETS WITH 2D MATERIALS FOR SPEED ENHANCEMENT PURVIS, SUE A 2893 Final Rejection Feb 08, 2022
17650133 SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HEATER ZERVIGON, RUDY 1716 Non-Final OA Feb 07, 2022
17647185 METHOD FOR FORMING FILM AND PROCESSING APPARATUS HERNANDEZ-KENNEY, JOSE 1717 Final Rejection Jan 06, 2022
17645829 PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD CHEN, KEATH T 1716 Non-Final OA Dec 23, 2021
17596385 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS BAREFORD, KATHERINE A 1718 Final Rejection Dec 09, 2021
17542874 PLASMA PROCESSING APPARATUS MOORE, KARLA A 1716 Non-Final OA Dec 06, 2021
17454308 EDGE RING AND SUBSTRATE PROCESSING APPARATUS MOORE, KARLA A 1716 Final Rejection Nov 10, 2021
17522191 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FORD, NATHAN K 1716 Final Rejection Nov 09, 2021
17452642 SUBSTRATE HOLDER, SUBSTRATE TRANSFER DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER NIELSEN, DEREK LANG 2899 Non-Final OA Oct 28, 2021
17501986 SUBSTRATE PROCESSING SYSTEM, CONTROL METHOD, AND CONTROL PROGRAM MOORE, KARLA A 1716 Final Rejection Oct 14, 2021
17598339 SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD FERDOUSI, FAHMIDA NMN 3761 Final Rejection Sep 27, 2021
17380624 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD REYES, JOSHUA NATHANIEL PI 1718 Final Rejection Jul 20, 2021
17421001 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD ALEJANDRO MULERO, LUZ L 1716 Non-Final OA Jul 06, 2021
17342809 STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD KLUNK, MARGARET D 1716 Final Rejection Jun 09, 2021
17291713 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT METHOD MOORE, KARLA A 1716 Non-Final OA May 06, 2021
17272945 MOUNTING BASE, SUBSTRATE PROCESSING DEVICE, EDGE RING, AND EDGE RING TRANSFER METHOD CROWELL, ANNA M 1716 Non-Final OA Mar 03, 2021
17178458 SUBSTRATE PROCESSING APPARATUS NUCKOLS, TIFFANY Z 1716 Final Rejection Feb 18, 2021
17255990 FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS PIZARRO CRESPO, MARCOS D 2814 Final Rejection Dec 23, 2020
17037142 Systems and Methods for Spin Process Video Analysis During Substrate Processing BAREFORD, KATHERINE A 1718 Non-Final OA Sep 29, 2020
17037087 METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE SYSTEMS LOPEZ ALVAREZ, OLVIN 2117 Non-Final OA Sep 29, 2020
16992550 FILM FORMING APPARATUS AND FILM FORMING METHOD CHEN, KEATH T 1716 Final Rejection Aug 13, 2020
16580232 VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS FORD, NATHAN K 1716 Non-Final OA Sep 24, 2019

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