Prosecution Insights
Prosecution Insights
234 pending office actions • 52 art units • 146 examiners • 0 of 234 (0%) have an AI response strategy ready • 680 patents granted in the last 365 days
Based on the USPTO statutory response window for each pending office action. 228 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 228 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 3 (1%) |
| §103 only | 186 (79%) |
| §102 only | 20 (9%) |
| §112 only | 14 (6%) |
| No statute on record | 11 (5%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| KENDALL, BENJAMIN R | 7 | 32.8% | +22.7% |
| PHAM, THOMAS T | 7 | 51.7% | +16.3% |
| BAREFORD, KATHERINE A | 6 | 13.5% | +28.5% |
| REYES, JOSHUA NATHANIEL PI | 6 | 42.2% | +51.6% |
| SEOANE, TODD MICHAEL | 6 | 61.5% | +52.4% |
| GAMBETTA, KELLY M | 5 | 72.0% | +32.7% |
| CHAN, LAUREEN | 5 | 58.1% | +54.7% |
| MCCLURE, CHRISTINA D | 4 | 29.4% | +34.6% |
| DUCLAIR, STEPHANIE P. | 4 | 71.5% | +19.8% |
| KACKAR, RAM N | 4 | 39.4% | +59.0% |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17753264 | SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM | BAREFORD, KATHERINE A | 77d overdue |
| 18004931 | FILM FORMING METHOD AND FILM FORMING APPARATUS | MCCLURE, CHRISTINA D | 50d overdue |
| 18709674 | NITRIDE FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 49d overdue |
| 18261157 | PLATING METHOD AND PLATING APPARATUS | BAREFORD, KATHERINE A | 49d overdue |
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 4d overdue |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 7d |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 19d |
| 18838595 | SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 21d |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17860127 | METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE | REYES, JOSHUA NATHANIEL PI | 128d overdue |
| 17903431 | SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 103d overdue |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 91d overdue |
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 86d overdue |
| 18740007 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 81d overdue |
| 17761091 | RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD | REYES, JOSHUA NATHANIEL PI | 77d overdue |
| 17753264 | SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM | BAREFORD, KATHERINE A | 77d overdue |
| 17809384 | PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 70d overdue |
| Art Unit | Apps |
|---|---|
| 1718 | 44 |
| 1716 | 36 |
| 1713 | 26 |
| 1717 | 9 |
| 2896 | 7 |
| 3762 | 7 |
| 2893 | 7 |
| 3652 | 6 |
| 2897 | 6 |
| 2899 | 6 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19063756 | INFORMATION PROCESSING APPARATUS AND SELECTION SUPPORTING METHOD | SPIELER, WILLIAM | 2159 | §101 | Non-Final OA | 35d | Pending | Feb 26, 2025 |
| 19045187 | Support Device, Support System, and Support Method | NGUYEN, JENNIFER T | 2629 | §103 | Non-Final OA | 41d | Pending | Feb 04, 2025 |
| 19042169 | FILM FORMING METHOD AND FILM FORMING APPARATUS | PROCTOR, CACHET I | 1712 | §103 | Non-Final OA | 76d | Pending | Jan 31, 2025 |
| 18999454 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | 63d | Pending | Dec 23, 2024 |
| 18982168 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | CHEN, BRET P | 1718 | §103 | Non-Final OA | 34d | Pending | Dec 16, 2024 |
| 18976345 | SUBSTRATE PROCESSING SYSTEM | KAISER, SYED M | 2831 | §103 | Non-Final OA | 6d | Pending | Dec 11, 2024 |
| 18970324 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | LEONG, NATHAN T | 1718 | §103 | Non-Final OA | 27d | Pending | Dec 05, 2024 |
| 18969148 | Plasma Processing Apparatus and Plasma Processing Method | WELLS, KENNETH B | 2842 | §112 | Non-Final OA | 9d overdue | Pending | Dec 04, 2024 |
| 18964075 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WEDDLE, ALEXANDER MARION | 1712 | §103 | Non-Final OA | 75d | Pending | Nov 29, 2024 |
| 18957942 | SUBSTRATE PROCESSING APPARATUS | CHEN, PATRICK C | 2842 | §103 | Non-Final OA | 15d overdue | Pending | Nov 25, 2024 |
| 18935665 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2844 | Other | Non-Final OA | 14d | Pending | Nov 04, 2024 |
| 18933255 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | PROCTOR, CACHET I | 1712 | §103 | Non-Final OA | 15d | Pending | Oct 31, 2024 |
| 18923921 | FILM FORMING METHOD AND PROCESSING SYSTEM | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | 83d | Pending | Oct 23, 2024 |
| 18923883 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 40d | Pending | Oct 23, 2024 |
| 18857016 | FILM-FORMING METHOD AND SUBSTRATE-PROCESSING DEVICE | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Non-Final OA | 21d | Pending | Oct 15, 2024 |
| 18850155 | FILLING METHOD AND SUBSTRATE PROCESSING SYSTEM | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | 9d overdue | Pending | Sep 24, 2024 |
| 18882880 | PLASMA PROCESSING APPARATUS | LEE, DOUGLAS | 1714 | §103 | Non-Final OA | 70d | Pending | Sep 12, 2024 |
| 18822332 | METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE | GATES, BRADFORD M | 1713 | §102 | Non-Final OA | 84d | Pending | Sep 02, 2024 |
| 18838595 | SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 21d | Pending | Aug 14, 2024 |
| 18836386 | LIQUID PROCESSING METHOD, DISCHARGE ADJUSTMENT METHOD, AND LIQUID PROCESSING APPARATUS | CARRILLO, BIBI SHARIDAN | 1711 | §112 | Non-Final OA | 1d overdue | Pending | Aug 07, 2024 |
| 18771025 | EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD | NGUYEN, HUNG | 2882 | §112 | Non-Final OA | 10d overdue | Pending | Jul 12, 2024 |
| 18769841 | LIQUID TREATMENT METHOD AND STORAGE MEDIUM | NGUYEN, HUNG | 2882 | §102 | Final Rejection | 15d | Pending | Jul 11, 2024 |
| 18761944 | SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD | HARM, NICKOLAS R | 1745 | §102 | Non-Final OA | 34d | Pending | Jul 02, 2024 |
| 18724360 | FILM FORMING METHOD AND FILM FORMING APPARATUS | LOUIE, MANDY C | 1718 | Other | Non-Final OA | 42d | Pending | Jun 26, 2024 |
| 18724335 | FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD | XING, CHRISTINA ILONA | 2877 | §103 | Non-Final OA | 46d overdue | Pending | Jun 26, 2024 |
| 18754701 | SUBSTRATE-PROCESSING APPARATUS | BAUER, SCOTT ALLEN | 2838 | §102 | Non-Final OA | 6d | Pending | Jun 26, 2024 |
| 18720848 | PREDICTION DEVICE, TEST SYSTEM, PREDICTION METHOD, AND PREDICTION PROGRAM | LIU, KENDRICK X | 2853 | §103 | Non-Final OA | 75d | Pending | Jun 17, 2024 |
| 18569248 | METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM | ROLLAND, ALEX A | 1759 | §103 | Non-Final OA | 14d | Pending | Jun 13, 2024 |
| 18740007 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 81d overdue | Pending | Jun 11, 2024 |
| 18734581 | WAFER CLEANING METHOD AND SYSTEM | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | 54d | Pending | Jun 05, 2024 |
| 18668645 | ANTENNA AND PLASMA PROCESSING APPARATUS | LAW, NGA LEUNG V | 1717 | §103 | Non-Final OA | 2d overdue | Pending | May 20, 2024 |
| 18709674 | NITRIDE FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 49d overdue | Pending | May 13, 2024 |
| 18655619 | APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE, AND METHOD OF TRANSPORTING SUBSTRATE | LOWE, MICHAEL S | 3652 | §103 | Final Rejection | 60d | Pending | May 06, 2024 |
| 18653410 | FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | 54d | Pending | May 02, 2024 |
| 18634497 | Wet Processing Systems Having Novel Wafer Chuck Designs For Retaining A Processing Liquid On A Surface Of A Semiconductor Substrate | GOLIGHTLY, ERIC WAYNE | 1714 | §103 | Non-Final OA | 19d overdue | Pending | Apr 12, 2024 |
| 18622318 | METHOD FOR REMOVING METAL-CONTAINING MATERIALS IN SMALL PITCH STRUCTURES | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 16d | Pending | Mar 29, 2024 |
| 18612938 | INFORMATION PROCESSING APPARATUS AND CORRECTION METHOD | WOODWARD, NATHANIEL T | 2855 | §103 | Non-Final OA | 13d | Pending | Mar 21, 2024 |
| 18608043 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CULBERT, ROBERTS P | 1716 | §103 | Final Rejection | 67d overdue | Pending | Mar 18, 2024 |
| 18599619 | SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS | MCMICHAEL, TAUREAN LLOYD | 3652 | §102 | Non-Final OA | 20d | Pending | Mar 08, 2024 |
| 18595890 | SUBSTRATE POSITIONING DEVICE, SUBSTRATE POSITIONING METHOD, AND BONDING APPARATUS | WILSON, LEE D | 3723 | §112 | Non-Final OA | 20d | Pending | Mar 05, 2024 |
| 18588751 | VERTICAL FEATURE GROWTH USING FLUORINE-CONTAINING GAS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 56d | Pending | Feb 27, 2024 |
| 18585340 | Methods To Improve Etch Uniformity Across A Semiconductor Substrate When Etching With A Hydrofluoric Acid (HF) And Nitric Acid (HNO3) Solution | LU, JIONG-PING | 1713 | §103 | Non-Final OA | 7d | Pending | Feb 23, 2024 |
| 18584114 | METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON SUBSTRATE | GAMBETTA, KELLY M | 1718 | §103 | Final Rejection | 8d overdue | Pending | Feb 22, 2024 |
| 18442022 | PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLASMA STATE DETECTION PROGRAM | CHAN, LAUREEN | 1716 | Other | Non-Final OA | 18d overdue | Pending | Feb 14, 2024 |
| 18683478 | JIG SUBSTRATE AND TEACHING METHOD | SALEH, ZAID MUHAMMAD | 2668 | — | Non-Final OA | 58d overdue | Pending | Feb 13, 2024 |
| 18433320 | DIRECT CURRENT SUPERPOSITION (DCS) FOR PROTECTION OF ORGANIC MANDREL DURING SPACER DEPOSITION | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 27d | Pending | Feb 05, 2024 |
| 18430313 | METHOD FOR ETCHING A PATTERN IN A LAYER OF A SUBSTRATE | REMAVEGE, CHRISTOPHER | 1713 | §103 | Non-Final OA | 1d overdue | Pending | Feb 01, 2024 |
| 18429046 | PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS | NAVARRO, HUGO IVAN | 2858 | §103 | Non-Final OA | 82d | Pending | Jan 31, 2024 |
| 18292528 | SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM | DULANEY, KATHLEEN YUAN | 2666 | §102 | Non-Final OA | 15d | Pending | Jan 26, 2024 |
| 18424262 | SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES | AHMED, SHAMIM | 1713 | §103 | Non-Final OA | 1d overdue | Pending | Jan 26, 2024 |
| 18416880 | PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §102 | Non-Final OA | 9d overdue | Pending | Jan 18, 2024 |
| 18415499 | METHOD OF DETECTING LIQUID IN LIQUID PROCESSING APPARATUS | KITT, STEPHEN A | 1717 | §103 | Non-Final OA | 4d overdue | Pending | Jan 17, 2024 |
| 18410046 | METHOD OF FORMING SILICON NITRIDE FILM | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | 11d overdue | Pending | Jan 11, 2024 |
| 18410811 | DEVICE FABRICATION METHODS WITH ION BEAM PROCESSING | DEO, DUY VU NGUYEN | 1713 | §103 | Non-Final OA | 1d overdue | Pending | Jan 11, 2024 |
| 18409606 | INTEGRATED OPTICAL NANOTHERMOMETRY FOR REAL-TIME WAFER TEMPERATURE MONITORING DURING PROCESSING | COTEY, PHILIP L | 2855 | §103 | Non-Final OA | 19d | Pending | Jan 10, 2024 |
| 18407527 | METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICONDUCTOR SUBSTRATE | TRAN, TAN N | 2812 | §102 | Non-Final OA | 41d | Pending | Jan 09, 2024 |
| 18406783 | METHOD AND SYSTEM FOR PLASMA PROCESS | LU, JIONG-PING | 1713 | §102 | Non-Final OA | 16d | Pending | Jan 08, 2024 |
| 18402328 | FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EPD) BY REFLECTOMETRY | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 16d | Pending | Jan 02, 2024 |
| 18572959 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | OWENS, DOUGLAS W | 2897 | §103 | Non-Final OA | 10d overdue | Pending | Dec 21, 2023 |
| 18539187 | METHOD OF PERFORMING CLEANING AND APPARATUS FOR PERFORMING SUBSTRATE PROCESSING | ZHANG, RICHARD Z | 1714 | §103 | Final Rejection | 28d | Pending | Dec 13, 2023 |
| 18533256 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, BAO D | 3762 | §103 | Non-Final OA | 28d | Pending | Dec 08, 2023 |
| 18532585 | METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF | GRAY, SUNGHEE Y | 2877 | §112 | Non-Final OA | 33d | Pending | Dec 07, 2023 |
| 18525930 | TRANSFER MODULE AND TRANSFER METHOD | MYERS, GLENN F | 3652 | §112 | Non-Final OA | 23d | Pending | Dec 01, 2023 |
| 18525935 | TRANSFER MODULE AND TRANSFER METHOD | MCCLAIN, GERALD | 3652 | §103 | Final Rejection | — | Pending | Dec 01, 2023 |
| 18524082 | TRANSFER SYSTEM, PROCESSING SYSTEM, AND TRANSFER METHOD | MORFORD, ALEXANDRA ROBYN | 3658 | §103 | Non-Final OA | 46d overdue | Pending | Nov 30, 2023 |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 60d | Pending | Nov 29, 2023 |
| 18518810 | FILM FORMING METHOD AND FILM FORMING APPARATUS | LOUIE, MANDY C | 1718 | §103 | Final Rejection | 17d overdue | Pending | Nov 24, 2023 |
| 18518862 | CLEANING METHOD AND PLASMA PROCESSING METHOD | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 15d | Pending | Nov 24, 2023 |
| 18562502 | SUBSTRATE PROCESSING METHOD | YAP, DOUGLAS ANTHONY | 2899 | §103 | Non-Final OA | 19d | Pending | Nov 20, 2023 |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 2899 | §103 | Non-Final OA | 6d | Pending | Nov 15, 2023 |
| 18505133 | PASSIVATION EQUIPMENT AND PASSIVATION METHOD FOR SEMICONDUCTOR DEVICE | BALLMAN, CHRISTOPHER D | 3753 | §103 | Non-Final OA | 34d | Pending | Nov 09, 2023 |
| 18501309 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE | ORTA, LAUREN GRACE | 1711 | §103 | Final Rejection | 70d | Pending | Nov 03, 2023 |
| 18386601 | ETCHING METHOD | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 4d overdue | Pending | Nov 03, 2023 |
| 18500170 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE | BANKLER, AIDAN DENNEHY | 2817 | §103 | Non-Final OA | 42d overdue | Pending | Nov 02, 2023 |
| 18383673 | CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §102 | Non-Final OA | 36d | Pending | Oct 25, 2023 |
| 18381269 | SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD | WOLDEGEORGIS, ERMIAS T | 2893 | §103 | Non-Final OA | 9d | Pending | Oct 18, 2023 |
| 18555055 | SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Non-Final OA | 34d | Pending | Oct 12, 2023 |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | §112 | Final Rejection | 7d | Pending | Oct 11, 2023 |
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 1713 | §112 | Non-Final OA | 27d | Pending | Oct 06, 2023 |
| 18376512 | SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD | KC, SAGAR | 3657 | §103 | Non-Final OA | 2d overdue | Pending | Oct 04, 2023 |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 1713 | §103 | Final Rejection | 32d overdue | Pending | Oct 03, 2023 |
| 18376359 | MULTI-MATERIAL CHUCK | ABEL, GARY ROBERT | 2897 | §103 | Non-Final OA | 43d overdue | Pending | Oct 03, 2023 |
| 18375958 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | WILSON, GREGORY A | 3762 | §103 | Non-Final OA | 36d overdue | Pending | Oct 02, 2023 |
| 18475502 | PLASMA PROCESSING APPARATUS AND COIL HOLDER FOR HOLDING PLASMA EXCITATION ANTENNA | LEE, AIDEN Y | 1718 | §103 | Non-Final OA | 21d | Pending | Sep 27, 2023 |
| 18552108 | SUBSTRATE LIQUID-TREATMENT DEVICE | MACARTHUR, SYLVIA | 1716 | §103 | Non-Final OA | 14d | Pending | Sep 22, 2023 |
| 18472157 | SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD | PATEL, JAIMIN GHANSHYAM | 3652 | §103 | Non-Final OA | 35d | Pending | Sep 21, 2023 |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | Other | Non-Final OA | 19d overdue | Pending | Sep 18, 2023 |
| 18467071 | BONDING APPARATUS AND BONDING METHOD | NGUYEN, DUY T V | 2818 | §103 | Non-Final OA | 12d | Pending | Sep 14, 2023 |
| 18466613 | TUNABLE PATTERNED SURFACE UNIFORMITY USING DIRECT CURRENT BIAS | TRAN, BINH X | 1713 | §103 | Final Rejection | — | Pending | Sep 13, 2023 |
| 18465420 | SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD | PENCE, JETHRO M | 1717 | §103 | Non-Final OA | 75d | Pending | Sep 12, 2023 |
| 18367315 | METHOD OF SURFACE MODIFICATION FOR WAFER BONDING | INOUSSA, MOULOUCOULAY | 2818 | §102 | Non-Final OA | 41d | Pending | Sep 12, 2023 |
| 18549610 | SEMICONDUCTOR CHIP MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS | NGUYEN, THANH T | 2893 | §103 | Non-Final OA | 15d overdue | Pending | Sep 08, 2023 |
| 18243059 | INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD | BARBEE, MANUEL L | 2857 | §103 | Non-Final OA | 46d | Pending | Sep 06, 2023 |
| 18458688 | 3D SPACER NANOSHEET FORMATION | GREAVING, JASON JAMES | 2893 | §103 | Non-Final OA | 42d | Pending | Aug 30, 2023 |
| 18457053 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SHAPE SPECIFYING METHOD, TRANSFER DEVICE, AND END EFFECTOR | MCCLAIN, GERALD | 3652 | §103 | Non-Final OA | 22d | Pending | Aug 28, 2023 |
| 18454632 | HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 67d overdue | Pending | Aug 23, 2023 |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | 29d | Pending | Aug 08, 2023 |
| 18230049 | PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD | KACKAR, RAM N | 1716 | Other | Non-Final OA | 28d | Pending | Aug 03, 2023 |
| 18364010 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 71d | Pending | Aug 02, 2023 |
| 18263920 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | 22d | Pending | Aug 02, 2023 |
| 18275359 | FILM FORMING DEVICE AND FILM FORMING METHOD | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 78d | Pending | Aug 01, 2023 |
| 18263435 | PLATING METHOD AND PLATING APPARATUS | MARUF, SHEIKH | 2897 | §103 | Non-Final OA | 55d | Pending | Jul 28, 2023 |
| 18227156 | SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING METHOD, AND SUPPLY METHOD | LEE, KEVIN G | 1711 | §103 | Non-Final OA | 28d | Pending | Jul 27, 2023 |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 18d overdue | Pending | Jul 26, 2023 |
| 18224940 | FORKSHEET SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME | SLUTSKER, JULIA | 2891 | §103 | Non-Final OA | 52d overdue | Pending | Jul 21, 2023 |
| 18262422 | SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS | SELLS, JAMES D | 1745 | §103 | Non-Final OA | 12d | Pending | Jul 21, 2023 |
| 18273446 | APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE | YU, YUECHUAN | 1718 | §103 | Final Rejection | 28d overdue | Pending | Jul 20, 2023 |
| 18273116 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | TRAN, TIEN | 2812 | §103 | Non-Final OA | 5d overdue | Pending | Jul 19, 2023 |
| 18354889 | SUBSTRATE TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | FRASER, STEWART A | 1724 | §103 | Non-Final OA | 20d | Pending | Jul 19, 2023 |
| 18354705 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 40d | Pending | Jul 19, 2023 |
| 18353757 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 55d | Pending | Jul 17, 2023 |
| 18353747 | PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 33d | Pending | Jul 17, 2023 |
| 18353300 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | RIDDLE, CHRISTINA A | 2882 | §103 | Non-Final OA | 5d | Pending | Jul 17, 2023 |
| 18271898 | METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS | STEVENSON, ANDRE C | 2899 | §103 | Final Rejection | 14d | Pending | Jul 12, 2023 |
| 18261157 | PLATING METHOD AND PLATING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 49d overdue | Pending | Jul 12, 2023 |
| 18350519 | PLASMA PROCESSING METHOD AND APPARATUS | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 14d | Pending | Jul 11, 2023 |
| 18260575 | COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | ZHAO, XIAO SI | 1744 | §103 | Non-Final OA | 72d overdue | Pending | Jul 06, 2023 |
| 18346287 | LIQUID PROCESSING APPARATUS | PATEL, VISHAL I | 1746 | §102 | Non-Final OA | 42d | Pending | Jul 03, 2023 |
| 18345134 | FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS | BOWMAN, ANDREW J | 1717 | §102 | Non-Final OA | 34d | Pending | Jun 30, 2023 |
| 18216168 | METHOD OF FORMING PHOTOSENSITIVE ORGANOMETALLIC OXIDES BY CHEMICAL VAPOR POLYMERIZATION | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 46d | Pending | Jun 29, 2023 |
| 18210329 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM | ANDUJAR, LEONARDO | 3991 | Other | Non-Final OA | 12d | Pending | Jun 15, 2023 |
| 18210368 | HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §103 | Non-Final OA | 62d | Pending | Jun 15, 2023 |
| 18333724 | FILM FORMING METHOD | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | 29d | Pending | Jun 13, 2023 |
| 18333019 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | AYALEW, TINSAE B | 1711 | §103 | Non-Final OA | 17d overdue | Pending | Jun 12, 2023 |
| 18207737 | ETCHING METHOD AND PLASMA PROCESSING SYSTEM | CULBERT, ROBERTS P | 1716 | §103 | Final Rejection | 35d overdue | Pending | Jun 09, 2023 |
| 18329372 | VACUUM HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §103 | Non-Final OA | 49d overdue | Pending | Jun 05, 2023 |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 1716 | §103 | Final Rejection | 4d overdue | Pending | Jun 02, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | §103 | Non-Final OA | 31d overdue | Pending | May 31, 2023 |
| 18204081 | NON-PLANAR TRANSISTOR STRUCTURES AND METHODS OF MANUFACTURING THEREOF | GARCES, NELSON Y | 2814 | §103 | Non-Final OA | 48d | Pending | May 31, 2023 |
| 18255133 | FILM FORMATION METHOD | JEFFERSON, QUOVAUNDA | 2899 | §103 | Final Rejection | 4d overdue | Pending | May 31, 2023 |
| 18325423 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | 28d | Pending | May 30, 2023 |
| 18203062 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | YUEN, JESSICA JIPING | 3762 | §112 | Non-Final OA | 3d overdue | Pending | May 30, 2023 |
| 18319915 | METHOD TO REDUCE PARASITIC RESISTANCE FOR CFET DEVICES THROUGH SINGLE DAMASCENE PROCESSING OF VIAS | OH, JIYOUNG | 2818 | §103 | Non-Final OA | 8d | Pending | May 18, 2023 |
| 18198355 | METAL OXIDE PRECLEANING PRIOR TO METAL FILLING | PHAM, THOMAS T | 1713 | §112 | Non-Final OA | 84d | Pending | May 17, 2023 |
| 18197525 | ABNORMALITY DETECTION METHOD AND TRANSFER DEVICE | MARU, TEMESGEN MALLEDE | 3655 | §103 | Non-Final OA | 66d overdue | Pending | May 15, 2023 |
| 18315137 | Deposition Systems with Rotating Electrostatic Chuck and Methods Thereof | HASSANZADEH, PARVIZ | 1716 | §103 | Non-Final OA | 31d overdue | Pending | May 10, 2023 |
| 18313177 | SURFACE ENERGY MODIFICATION IN HYBRID BONDING | BERRY, PAUL ANTHONY | 2898 | §103 | Non-Final OA | 39d | Pending | May 05, 2023 |
| 18141700 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | ALEJANDRO MULERO, LUZ L | 1716 | §103 | Non-Final OA | 41d | Pending | May 01, 2023 |
| 18309521 | Semiconductor Processing Using a Two-Dimensional Polymer | GHYKA, ALEXANDER G | 2812 | §102 | Non-Final OA | 118d overdue | Pending | Apr 28, 2023 |
| 18303485 | SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 15d | Pending | Apr 19, 2023 |
| 18298829 | Method and System for Plasma Processing | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 83d | Pending | Apr 11, 2023 |
| 18248562 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 49d overdue | Pending | Apr 11, 2023 |
| 18295656 | Silicidation Process for Semiconductor Devices | KIELIN, ERIK J | 2814 | §103 | Non-Final OA | 33d | Pending | Apr 04, 2023 |
| 18295462 | BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD, AND RECORDING MEDIUM | GRAY, AARON J | 2897 | §103 | Non-Final OA | 25d overdue | Pending | Apr 04, 2023 |
| 18295144 | Apparatus and Methods for Plasma Processing | STARK, JARRETT J | 2898 | §103 | Final Rejection | 60d | Pending | Apr 03, 2023 |
| 18129437 | SUBSTRATE PROCESSING APPARATUS | MCCORMACK, JOHN PATRICK | 3762 | §103 | Non-Final OA | 45d overdue | Pending | Mar 31, 2023 |
| 18193324 | Dry Developing Metal-Free Photoresists | LEE, ALEXANDER N | 1737 | §103 | Non-Final OA | 1d overdue | Pending | Mar 30, 2023 |
| 18192186 | DEPOSITION METHOD AND PROCESSING APPARATUS | SEHAR, FAKEHA | 2893 | §103 | Non-Final OA | 56d | Pending | Mar 29, 2023 |
| 18125206 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | 9d | Pending | Mar 23, 2023 |
| 18027722 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE | TRAN, TONY | 2893 | §103 | Final Rejection | — | Pending | Mar 22, 2023 |
| 18187558 | Impedance Matching Network and Control Method | FERNANDEZ, PEDRO C | 2844 | §103 | Non-Final OA | 12d | Pending | Mar 21, 2023 |
| 18121621 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 24d overdue | Pending | Mar 15, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 36d overdue | Pending | Mar 10, 2023 |
| 18114998 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KACKAR, RAM N | 1716 | Other | Final Rejection | 34d | Pending | Feb 28, 2023 |
| 18113862 | SUBSTRATE PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | §103 | Non-Final OA | 4d overdue | Pending | Feb 24, 2023 |
| 18042513 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTRIC WINDOW | LEE, WILSON | 2844 | §103 | Final Rejection | 27d | Pending | Feb 22, 2023 |
| 18022213 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 49d overdue | Pending | Feb 20, 2023 |
| 18109632 | PLASMA PROCESSING APPARATUS | KACKAR, RAM N | 1716 | §103 | Final Rejection | 3d overdue | Pending | Feb 14, 2023 |
| 18106036 | SUBSTRATE PROCESSING APPARATUS | FORD, NATHAN K | 1716 | §103 | Final Rejection | 22d | Pending | Feb 06, 2023 |
| 18162876 | Antenna Plane Magnets | YU, YUECHUAN | 1718 | §103 | Non-Final OA | 14d | Pending | Feb 01, 2023 |
| 18161298 | DEPOSITION METHOD AND DEPOSITION APPARATUS | SLUTSKER, JULIA | 2891 | §103 | Non-Final OA | 61d | Pending | Jan 30, 2023 |
| 18101676 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 40d | Pending | Jan 26, 2023 |
| 18016943 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | §102 | Non-Final OA | 53d overdue | Pending | Jan 19, 2023 |
| 18004931 | FILM FORMING METHOD AND FILM FORMING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 50d overdue | Pending | Jan 10, 2023 |
| 18151223 | Method for Etching Features in a Layer in a Substrate | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 121d overdue | Pending | Jan 06, 2023 |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 3665 | §101 | Non-Final OA | 19d | Pending | Dec 29, 2022 |
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 86d overdue | Pending | Dec 28, 2022 |
| 18088870 | PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK MANUFACTURING METHOD | CROWELL, ANNA M | 1716 | §102 | Non-Final OA | 79d | Pending | Dec 27, 2022 |
| 18066078 | IN-SITU DIAGNOSIS OF PLASMA SYSTEM | ALANKO, ANITA KAREN | 1713 | §101 | Non-Final OA | 78d | Pending | Dec 14, 2022 |
| 18062449 | Methods for Etching Molybdenum | KIELIN, ERIK J | 2814 | §102 | Final Rejection | — | Pending | Dec 06, 2022 |
| 18073185 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | §103 | Final Rejection | 4d overdue | Pending | Dec 01, 2022 |
| 18060040 | SOLVENT VAPOR SUPPLY APPARATUS AND SOLVENT VAPOR SUPPLY METHOD | TREMARCHE, CONNOR J. | 3762 | §103 | Non-Final OA | 36d overdue | Pending | Nov 30, 2022 |
| 17994711 | PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE | SWEELY, KURT D | 1718 | §103 | Non-Final OA | 7d | Pending | Nov 28, 2022 |
| 18058245 | APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR | SHAMSUZZAMAN, MOHAMMED | 2897 | §103 | Final Rejection | 36d overdue | Pending | Nov 22, 2022 |
| 17989438 | Self Aligned Multiple Patterning Method | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | 77d | Pending | Nov 17, 2022 |
| 17997558 | REPLACING APPARATUS AND REPLACING METHOD | CADUGAN, ERICA E | 3722 | §103 | Non-Final OA | 2d overdue | Pending | Oct 31, 2022 |
| 17997158 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM | GHYKA, ALEXANDER G | 2812 | §103 | Non-Final OA | 16d overdue | Pending | Oct 26, 2022 |
| 18048618 | METHOD FOR FORMING A PATTERN | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | 19d | Pending | Oct 21, 2022 |
| 17996524 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD | SEOANE, TODD MICHAEL | 1718 | §103 | Final Rejection | 12d | Pending | Oct 19, 2022 |
| 17959771 | SILICON NANO SHEET THREE-DIMENSIONAL HORIZONTAL MEMORY WITH ALL-AROUND METAL STORAGE CAPACITOR | SON, ERIKA HEERA | 2893 | §103 | Non-Final OA | 87d overdue | Pending | Oct 04, 2022 |
| 17933189 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 146d overdue | Pending | Sep 19, 2022 |
| 17906353 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | 17d overdue | Pending | Sep 15, 2022 |
| 17903431 | SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | §103 | Final Rejection | 103d overdue | Pending | Sep 06, 2022 |
| 17902919 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | MOORE, KARLA A | 1716 | §112 | Non-Final OA | 32d overdue | Pending | Sep 05, 2022 |
| 17901783 | METHODS OF COMPACT CELL DESIGN FOR LOGIC APPLICATIONS | ASHBAHIAN, ERIC K | 2891 | Other | Non-Final OA | 84d overdue | Pending | Sep 01, 2022 |
| 17898104 | METHODS FOR FORMING SEMICONDUCTOR DEVICES WITH ISOLATION STRUCTURES | KIM, SU C | 2899 | §103 | Non-Final OA | 22d | Pending | Aug 29, 2022 |
| 17894296 | ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 12d | Pending | Aug 24, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | §112 | Final Rejection | 145d overdue | Pending | Aug 23, 2022 |
| 17820962 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | §103 | Final Rejection | 4d overdue | Pending | Aug 19, 2022 |
| 17904427 | PLASMA PROCESSING APPARATUS | YU, YUECHUAN | 1718 | §103 | Non-Final OA | — | Pending | Aug 17, 2022 |
| 17889632 | PLASMA PROCESSING APPARATUS AND ETCHING METHOD | BENNETT, CHARLEE | 1718 | §103 | Final Rejection | 28d | Pending | Aug 17, 2022 |
| 17887946 | PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING | CHACKO DAVIS, DABORAH | 1737 | §102 | Non-Final OA | 28d | Pending | Aug 15, 2022 |
| 17882834 | PLASMA PROCESSING APPARATUS AND FILM FORMING METHOD | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | 60d overdue | Pending | Aug 08, 2022 |
| 17880660 | METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 17d overdue | Pending | Aug 04, 2022 |
| 17760120 | PLATING METHOD AND PLATING APPARATUS | CHUNG, HOSUNG CHARLES | 1794 | §103 | Final Rejection | 15d overdue | Pending | Aug 04, 2022 |
| 17817091 | ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SENSOR | KOTOWSKI, LISA MICHELLE | 2859 | §103 | Final Rejection | 5d overdue | Pending | Aug 03, 2022 |
| 17879803 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | SWEELY, KURT D | 1718 | §103 | Non-Final OA | 23d | Pending | Aug 03, 2022 |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17812523 | METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM | GATES, BRADFORD M | 1713 | §103 | Final Rejection | 39d | Pending | Jul 14, 2022 |
| 17860127 | METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE | REYES, JOSHUA NATHANIEL PI | 1718 | §102 | Final Rejection | 128d overdue | Pending | Jul 08, 2022 |
| 17859520 | PLASMA PROCESSING APPARATUS AND PROCESSING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 79d overdue | Pending | Jul 07, 2022 |
| 17854944 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 30d overdue | Pending | Jun 30, 2022 |
| 17809384 | PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | §103 | Final Rejection | 70d overdue | Pending | Jun 28, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 51d overdue | Pending | Jun 21, 2022 |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | §103 | Non-Final OA | 91d overdue | Pending | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | §103 | Non-Final OA | 26d | Pending | Jun 17, 2022 |
| 17842501 | PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VARIABLE DUTY CYCLING | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | 50d overdue | Pending | Jun 16, 2022 |
| 17828384 | CONTROL METHOD AND CONTROL APPARATUS | ALEXANDER, EMMA LYNNE | 2857 | §103 | Final Rejection | 27d | Pending | May 31, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | §103 | Final Rejection | 60d overdue | Pending | May 24, 2022 |
| 17664607 | Apparatus for Plasma Processing | LEE, AIDEN Y | 1718 | §102 | Non-Final OA | 13d | Pending | May 23, 2022 |
| 17747326 | CONTROL APPARATUS AND CONTROL METHOD FOR FILM FORMING APPARATUS | KITT, STEPHEN A | 1717 | §103 | Final Rejection | 30d | Pending | May 18, 2022 |
| 17747861 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 31d overdue | Pending | May 18, 2022 |
| 17657194 | INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC DEVICE, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS | SUN, XIUQIN | 2857 | §103 | Non-Final OA | 7d | Pending | Mar 30, 2022 |
| 17706958 | BILAYER DIELECTRIC STACK FOR A FERROELECTRIC TUNNEL JUNCTION AND METHOD OF FORMING | WINTERS, SEAN AYERS | 2892 | §103 | Final Rejection | 32d overdue | Pending | Mar 29, 2022 |
| 17761091 | RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 77d overdue | Pending | Mar 16, 2022 |
| 17753264 | SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | 77d overdue | Pending | Feb 25, 2022 |
| 17676411 | APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF | BAND, MICHAEL A | 1794 | §103 | Non-Final OA | 23d | Pending | Feb 21, 2022 |
| 17636430 | SUPPLY SYSTEM FOR SUPPLYING RAW MATERIAL GAS GENERATED BY VAPORIZING SOLID RAW MATERIAL | KURPLE, KARL | 1717 | §103 | Non-Final OA | 20d | Pending | Feb 18, 2022 |
| 17667378 | ADVANCED 3D DEVICE ARCHITECTURE USING NANOSHEETS WITH 2D MATERIALS FOR SPEED ENHANCEMENT | PURVIS, SUE A | 2893 | §103 | Final Rejection | 96d overdue | Pending | Feb 08, 2022 |
| 17650133 | SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HEATER | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | 3d overdue | Pending | Feb 07, 2022 |
| 17645829 | PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 44d overdue | Pending | Dec 23, 2021 |
| 17644412 | DEPOSITION APPARATUS AND DEPOSITION METHOD | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 43d overdue | Pending | Dec 15, 2021 |
| 17452642 | SUBSTRATE HOLDER, SUBSTRATE TRANSFER DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER | NIELSEN, DEREK LANG | 2899 | §103 | Non-Final OA | 1d overdue | Pending | Oct 28, 2021 |
| 17501889 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103 | Final Rejection | 57d | Pending | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | §103 | Final Rejection | 3d overdue | Pending | Sep 27, 2021 |
| 17428597 | FILM FORMING APPARATUS AND FILM FORMING METHOD | BAND, MICHAEL A | 1794 | Other | Non-Final OA | 33d | Pending | Aug 04, 2021 |
| 17421001 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | ALEJANDRO MULERO, LUZ L | 1716 | Other | Non-Final OA | 28d | Pending | Jul 06, 2021 |
| 17342809 | STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | 14d | Pending | Jun 09, 2021 |
| 17291713 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT METHOD | MOORE, KARLA A | 1716 | §112 | Non-Final OA | 98d overdue | Pending | May 06, 2021 |
| 17183138 | SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK | MELLOTT, JAMES M | 1759 | §103 | Final Rejection | 71d | Pending | Feb 23, 2021 |
| 17114096 | FURNACE WITH METAL FURNACE TUBE | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 97d overdue | Pending | Dec 07, 2020 |
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 4d overdue | Pending | Sep 29, 2020 |
| 16892321 | SUBSTRATE PROCESSING APPARATUS | ZAWORSKI, JONATHAN R | 3723 | §103 | Non-Final OA | 119d overdue | Pending | Jun 04, 2020 |
| 16580232 | VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 104d overdue | Pending | Sep 24, 2019 |
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