Prosecution Insights
Prosecution Insights
295 pending office actions • 55 art units • 182 examiners • 0 of 295 (0%) have an AI response strategy ready • 652 patents granted in the last 365 days
Based on the USPTO statutory response window for each pending office action. 75 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 75 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 1 (0%) |
| §101 + other | 10 (3%) |
| §103 only | 125 (42%) |
| §102 only | 20 (7%) |
| §112 only | 18 (6%) |
| Double-patenting only | 5 (2%) |
| Double-patenting + other | 6 (2%) |
| Multi-statute (no §101) | 108 (37%) |
| No statute on record | 2 (1%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| PHAM, THOMAS T | 7 | 51.7% | +15.8% |
| REYES, JOSHUA NATHANIEL PI | 7 | 41.2% | +51.8% |
| MOORE, KARLA A | 6 | 43.1% | +14.1% |
| CHEN, KEATH T | 6 | 30.2% | +24.6% |
| KENDALL, BENJAMIN R | 6 | 32.9% | +22.8% |
| CROWELL, ANNA M | 5 | 44.7% | +30.8% |
| TRAN, BINH X | 5 | 81.6% | +11.9% |
| CHACKO DAVIS, DABORAH | 5 | 71.9% | +20.7% |
| MACARTHUR, SYLVIA | 4 | 65.7% | +25.8% |
| AHMED, SHAMIM | 4 | 78.5% | +22.0% |
Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 3 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 27d |
| 18395788 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | TRAN, BINH X | — |
| 18368110 | ETCHING METHOD AND ETCHING APPARATUS | TRAN, BINH X | — |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17809384 | PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 70d overdue |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 60d overdue |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 36d overdue |
| 18058245 | APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR | SHAMSUZZAMAN, MOHAMMED | 36d overdue |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 32d overdue |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 31d overdue |
| 17997158 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM | GHYKA, ALEXANDER G | 16d overdue |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 4d overdue |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 86d overdue |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 51d overdue |
| 18022213 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CHACKO DAVIS, DABORAH | 49d overdue |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 32d overdue |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 18d overdue |
| 17880660 | METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE | PHAM, THOMAS T | 17d overdue |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 4d overdue |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 3d overdue |
| Art Unit | Apps |
|---|---|
| 1718 | 36 |
| 1713 | 28 |
| 1716 | 27 |
| 1717 | 10 |
| 1714 | 9 |
| 1794 | 9 |
| 2896 | 7 |
| 1737 | 7 |
| 2899 | 6 |
| 2897 | 5 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19261691 | METHOD AND APPARATUS FOR FORMING MOLYBDENUM METAL FILM | WALTERS JR, ROBERT S | 1717 | §102§103§112 | Non-Final OA | — | Pending | Jul 07, 2025 |
| 19240089 | PLASMA PROCESSING APPARATUS | LE, TUNG X | — | §103 | Non-Final OA | — | Pending | Jun 17, 2025 |
| 19234767 | VALVE AND SUBSTRATE PROCESSING APPARATUS | BARRY, DAPHNE MARIE | 3753 | §102 | Non-Final OA | — | Pending | Jun 11, 2025 |
| 19233036 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19232884 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19233851 | Apparatus for Transferring Substrate and Method for Transferring Substrate | DO, TRUC M | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19232127 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | WIECZOREK, MICHAEL P | 1715 | §103§112 | Non-Final OA | — | Pending | Jun 09, 2025 |
| 19207755 | PLASMA PROCESSING APPARATUS AND MATCHING DEVICE | KAISER, SYED M | — | §102 | Non-Final OA | — | Pending | May 14, 2025 |
| 19184288 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | — | Pending | Apr 21, 2025 |
| 18846977 | EXHAUST STRUCTURE AND EXHAUST METHOD FOR FLOW RATE CONTROL DEVICE, AND GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD COMPRISING SAME | HICKS, ANGELISA | — | §103§112 | Non-Final OA | — | Pending | Apr 17, 2025 |
| 19170201 | SUBSTRATE PROCESSING SYSTEM | TRAN, MINH | — | §103 | Non-Final OA | — | Pending | Apr 04, 2025 |
| 19096492 | AREA SELECTIVE DEPOSITION USING METAL CARBONYL PRECURSORS | EMPIE, NATHAN H | 1712 | §103 | Non-Final OA | — | Pending | Mar 31, 2025 |
| 19091933 | PLASMA PROCESSING APPARATUS AND POWER SUPPLY SYSTEM | LUQUE, RENAN | — | §102§103 | Non-Final OA | — | Pending | Mar 27, 2025 |
| 19090475 | SUBSTRATE EVALUATION METHOD AND SUBSTRATE PROCESSING APPARATUS | AKANBI, ISIAKA O | — | §103 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 19086206 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TALBOT, BRIAN K | 1712 | §103§112 | Non-Final OA | — | Pending | Mar 21, 2025 |
| 19083581 | PLASMA PROCESSING APPARATUS | CHAN, WEI | — | §103Other | Non-Final OA | — | Pending | Mar 19, 2025 |
| 19111422 | PROCESSOR THAT IMPLEMENTS INDIRECT ADDRESSING-STYLE CONDITIONAL JUMP INSTRUCTIONS, PROGRAM RECORDING MEDIUM, AND METHOD | METZGER, MICHAEL J | 2183 | §103 | Non-Final OA | — | Pending | Mar 13, 2025 |
| 19052558 | ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS | THOMAS, LUCY M | — | §103 | Non-Final OA | — | Pending | Feb 13, 2025 |
| 19043669 | FLUID SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND FLUID SUPPLY METHOD | PRICE, CRAIG JAMES | 3753 | §112 | Non-Final OA | — | Pending | Feb 03, 2025 |
| 19042169 | FILM FORMING METHOD AND FILM FORMING APPARATUS | PROCTOR, CACHET I | 1712 | §102§103 | Non-Final OA | 76d | Pending | Jan 31, 2025 |
| 19032823 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CORMIER, DAVID G | — | §102§103 | Non-Final OA | — | Pending | Jan 21, 2025 |
| 19021284 | CONTROL PROGRAM, INFORMATION PROCESSING PROGRAM, CONTROL METHOD, INFORMATION PROCESSING METHOD, PLASMA PROCESSING DEVICE, AND INFORMATION PROCESSING DEVICE | LEE, WILSON | 2844 | §103 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19022101 | PLASMA PURGE METHOD AND PLASMA PROCESSING APPARATUS | GOLIGHTLY, ERIC WAYNE | — | §103 | Final Rejection | — | Pending | Jan 15, 2025 |
| 19023119 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCLUDING A PRE-TREATMENT PROCESS OF SUPPLYING A HEATED FLUID TO A SECOND SURFACE OF A SUBSTRATE AND SUPPLYING A PRE-WETTING LIQUID TO A FIRST SURFACE OF THE SUBSTRATE, WHILE ROTATING THE SUBSTRATE | BERGNER, ERIN FLANAGAN | — | §103 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19010740 | 3D IMAGING BY LIQUID IMMERSION WITH TILT AND/OR ROTATION | ZHAO, DAQUAN | 2484 | — | Non-Final OA | — | Pending | Jan 06, 2025 |
| 18879383 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | LEE, DOUGLAS | 1714 | §103 | Non-Final OA | — | Pending | Dec 27, 2024 |
| 18982168 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | CHEN, BRET P | 1718 | §103 | Final Rejection | 34d | Pending | Dec 16, 2024 |
| 18872281 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM | ZHANG, RICHARD Z | 1714 | §103§112 | Non-Final OA | — | Pending | Dec 06, 2024 |
| 18961960 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | TOLIN, MICHAEL A | 1745 | §102§103 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18962032 | DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBSTRATE PROCESSING APPARATUS | ASTACIO-OQUENDO, GIOVANNI | — | §112 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18958534 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | §102§103Other | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18958279 | METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS | MAYY, MOHAMMAD | 1718 | §102§103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18956676 | SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE PROCESSING METHOD | PARIHAR, PRADHUMAN | 1714 | §101§102§103 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18956301 | SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK | SREEVATSA, SREEYA | 2838 | §102§103 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18951828 | SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRANSFER METHOD | MOSCOSO, JUAN SALVADOR | — | §103 | Non-Final OA | — | Pending | Nov 19, 2024 |
| 18949966 | MAINTENANCE DEVICE | KEENAN, JAMES W | 3656 | §112 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18949607 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MCCLAIN, GERALD | 3652 | §102 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18949248 | SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD | LEE, DOUGLAS | 1714 | §102§103§112 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18944017 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NGUYEN, CHI Q | — | §112DP | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18921771 | Method for Controlling Substrate Processing System and Substrate Processing System | NGUYEN, BAO LONG T | — | §112 | Non-Final OA | — | Pending | Oct 21, 2024 |
| 18918152 | ETCHING METHOD | AHMED, SHAMIM | 1713 | §102§103DP | Non-Final OA | — | Pending | Oct 17, 2024 |
| 18917538 | FILM FORMING METHOD | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Oct 16, 2024 |
| 18914968 | METHODS FOR CONDITIONING A SURFACE PRIOR TO ETCHING TO OPTIMIZE ETCH PERFORMANCE | CARTER, JONATHAN LANGDON | 1713 | §112 | Non-Final OA | — | Pending | Oct 14, 2024 |
| 18914666 | SUBSTRATE PROCESSING APPARATUS | AHADI, ELIA | — | §102§103 | Non-Final OA | — | Pending | Oct 14, 2024 |
| 18913135 | METHOD FOR SEMICONDUCTOR MANUFACTURING | BRAYTON, JOHN JOSEPH | 1794 | §103§112 | Non-Final OA | — | Pending | Oct 11, 2024 |
| 18896902 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | LUND, JEFFRIE ROBERT | — | §112DP | Non-Final OA | — | Pending | Sep 26, 2024 |
| 18893492 | ELECTRICAL ENERGY PRODUCED BY ROTATING MAGNETS | TADESSE, YEWEBDAR T | 1717 | §102§103 | Non-Final OA | — | Pending | Sep 23, 2024 |
| 18893142 | SUBSTRATE PROCESSING APPARATUS | LE, TUNG X | — | §103 | Non-Final OA | — | Pending | Sep 23, 2024 |
| 18847897 | SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD | DEO, DUY VU NGUYEN | — | — | Non-Final OA | — | Pending | Sep 17, 2024 |
| 18882797 | DATA ANALYSIS SYSTEM, DATA ANALYSIS DEVICE, DATA ANALYSIS METHOD, AND RECORDING MEDIUM | ERDMAN, CHAD G | — | §101§103 | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18825163 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | LUND, JEFFRIE ROBERT | — | §112 | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18820492 | PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS | GARCIA, SANTIAGO | — | §102 | Non-Final OA | — | Pending | Aug 30, 2024 |
| 18842620 | HARD MASK, SUBSTRATE PROCESSING METHOD, AND REMOVAL METHOD FOR HARD MASK | AHMED, SHAMIM | — | §102 | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18817042 | PLASMA ADJUSTMENT USING SOURCE-LESS RESONANT STRUCTURE | MILLER, JR, JOSEPH ALBERT | — | §103 | Non-Final OA | — | Pending | Aug 27, 2024 |
| 18812476 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | COUSINEAU, CONNOR DANIEL | — | §103 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18810920 | FLOW DIVIDER AND LIQUID PROCESSING SYSTEM | CLEMENTE, ROBERT ARTHUR | — | §102 | Non-Final OA | — | Pending | Aug 21, 2024 |
| 18797266 | INJECTOR AND PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112DP | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18794757 | METHODS TO QUICKLY ADJUST THE TEMPERATURE OF AT LEAST ONE PROCESSING LIQUID USED TO PROCESS A SEMICONDUCTOR SUBSTRATE IN A WET PROCESS | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Aug 05, 2024 |
| 18792948 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MATTHEWS, TERRELL HOWARD | — | §103 | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 3d overdue | Pending | Jul 31, 2024 |
| 18834129 | SUBSTRATE PROCESSING APPARATUS | HASSANZADEH, PARVIZ | — | §102§103 | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18786164 | METHODS FOR PROTECTING TO REUSE SILICON CARRIER WAFER BASED ON IR LASER LIFT-OFF PROCESS | MATTABONI, TIMOTHY JAMES | — | §103 | Non-Final OA | — | Pending | Jul 26, 2024 |
| 18833079 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | GROSS, CARSON | 1746 | §103§112 | Non-Final OA | — | Pending | Jul 25, 2024 |
| 18780952 | SUBSTRATE PROCESSING METHOD | NEIBAUR, ROBERT F | — | §103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18778072 | FILM-FORMING METHOD AND FILM-FORMING APPARATUS | BOWMAN, ANDREW J | 1717 | §103§112 | Final Rejection | — | Pending | Jul 19, 2024 |
| 18773282 | Transfer Teaching Method and Substrate Processing System | KENIRY, HEATHER J | — | §103§112 | Non-Final OA | — | Pending | Jul 15, 2024 |
| 18771025 | EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD | NGUYEN, HUNG | 2882 | §103 | Final Rejection | 10d overdue | Pending | Jul 12, 2024 |
| 18771873 | METHOD OF FORMING HARD MASK STRUCTURE | GOODWIN, DAVID J | — | §103 | Non-Final OA | — | Pending | Jul 12, 2024 |
| 18764474 | DISTANCE MEASURING DEVICE, DISTANCE MEASURING METHOD, BONDING APPARATUS, AND BONDING METHOD | LE, THANG XUAN | 2858 | §102§103 | Non-Final OA | — | Pending | Jul 05, 2024 |
| 18761581 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Jul 02, 2024 |
| 18757803 | SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROCESSING AND RECORDING MEDIUM | SHAFAYET, MOHAMMED | 1713 | §101§102§103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18753777 | METHOD AND APPARATUS FOR DAMASCENE ETCHING | NUCKOLS, TIFFANY Z | 1716 | §102§103 | Non-Final OA | — | Pending | Jun 25, 2024 |
| 18751991 | ELECTROSTATIC CHUCK, FOCUS RING, SUPPORT BASE, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD | BENNETT, CHARLEE | — | §103 | Non-Final OA | — | Pending | Jun 24, 2024 |
| 18748171 | SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCESSING METHOD | BENNETT, CHARLEE | 1718 | §102 | Final Rejection | — | Pending | Jun 20, 2024 |
| 18743589 | SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD | MOORE, KARLA A | — | §102 | Non-Final OA | — | Pending | Jun 14, 2024 |
| 18736055 | Method for Teaching Transfer Robot and Substrate Processing System | ORTIZ RODRIGUEZ, CARLOS R | — | §102§112 | Non-Final OA | — | Pending | Jun 06, 2024 |
| 18733073 | Inner Wall and substrate Processing Apparatus | KLUNK, MARGARET D | — | §103§112DP | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18674349 | Remote Plasma Device and Plasma Processing Apparatus | FORD, NATHAN K | — | §103 | Non-Final OA | — | Pending | May 24, 2024 |
| 18672092 | METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING HARD MASK USING THE CARBON-CONTAINING FILM | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | — | Pending | May 23, 2024 |
| 18672248 | SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND RECORDING MEDIUM | THOMAS, BINU | 1717 | §103 | Non-Final OA | — | Pending | May 23, 2024 |
| 18711900 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CRANDALL, JOEL DILLON | — | §103 | Non-Final OA | — | Pending | May 21, 2024 |
| 18663644 | SUBSTRATE PROCESSING APPARATUS | MACARTHUR, SYLVIA | — | §103 | Non-Final OA | — | Pending | May 14, 2024 |
| 18663611 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD | MATTHEWS, TERRELL HOWARD | 3653 | §103 | Non-Final OA | — | Pending | May 14, 2024 |
| 18661470 | MIXED-SPECIES BUFFER FILM FOR STRUCTURAL INTEGRITY OF METALLIZATION | ALBRECHT, PETER M | — | §103 | Non-Final OA | — | Pending | May 10, 2024 |
| 18660479 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CHEN, PATRICK C | 2842 | §103§112 | Final Rejection | — | Pending | May 10, 2024 |
| 18659116 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | — | §103 | Non-Final OA | — | Pending | May 09, 2024 |
| 18658527 | CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS | CHOI, ALICIA M | 4100 | §112 | Non-Final OA | — | Pending | May 08, 2024 |
| 18655619 | APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE, AND METHOD OF TRANSPORTING SUBSTRATE | LOWE, MICHAEL S | 3652 | §103 | Final Rejection | 60d | Pending | May 06, 2024 |
| 18707235 | SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD | CHIN, EDWARD | — | §102§103 | Non-Final OA | — | Pending | May 03, 2024 |
| 18653410 | FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | GAMBETTA, KELLY M | 1718 | §103§112 | Final Rejection | 54d | Pending | May 02, 2024 |
| 18706088 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | PARIHAR, PRADHUMAN | 1714 | §102 | Non-Final OA | — | Pending | Apr 30, 2024 |
| 18648828 | SUBSTRATE PROCESSING APPARATUS | SWEELY, KURT D | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18648903 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KNUDSON, BRAD ALLAN | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18647077 | PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING APPARATUS | KACKAR, RAM N | — | §103 | Non-Final OA | — | Pending | Apr 26, 2024 |
| 18639975 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY | MCDONALD, RODNEY GLENN | — | §103 | Non-Final OA | — | Pending | Apr 19, 2024 |
| 18634497 | Wet Processing Systems Having Novel Wafer Chuck Designs For Retaining A Processing Liquid On A Surface Of A Semiconductor Substrate | GOLIGHTLY, ERIC WAYNE | 1714 | §103 | Non-Final OA | 19d overdue | Pending | Apr 12, 2024 |
| 18632595 | PROCESSING SYSTEM, AND PROCESSING METHOD | DRODGE, JOSEPH W | — | §112 | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18630262 | PLASMA PROCESSING APPARATUS AND ANNULAR CONSUMABLE PART | HASSANZADEH, PARVIZ | — | §102 | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18628349 | PLASMA PROCESSING APPARATUS | BERMAN, JASON | — | §102§103 | Non-Final OA | — | Pending | Apr 05, 2024 |
| 18626693 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | DEO, DUY VU NGUYEN | 1713 | §103 | Final Rejection | — | Pending | Apr 04, 2024 |
| 18624279 | BONDING APPARATUS AND BONDING METHOD | HALL JR, TYRONE VINCENT | 3723 | §102 | Non-Final OA | — | Pending | Apr 02, 2024 |
| 18622541 | APPARATUS AND METHOD FOR DETECTING AND MONITORING OBJECTS IN A FLUID BATH AND ADJUSTING THE FLUID BATH BASED ON THE MEASURED OBJECT PROPERTIES | BODNARK, MATTHEW JAMES | — | §102§103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18622764 | INTEGRATION METHOD OF VERTICAL DRAM WITH PERIPHERAL CIRCUIT | BODNAR, JOHN A | — | §112 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18621229 | METHOD AND WAFER PROCESSING SYSTEM FOR WET ETCHING A SEMICONDUCTOR WAFER | PRASAD, NEIL R | — | §103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18620762 | CONTROLLING ETCH EDGE EFFECTS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620463 | X-RAY METHODS AND SYSTEMS FOR SEMICONDUCTOR SUBSTRATE ALIGNMENT | FAYE, MAMADOU | 2884 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620541 | WAFER TEMPERATURE MEASUREMENT FOR WET ETCHING BATH APPLICATIONS | MILLER, JR, JOSEPH ALBERT | — | §102§103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18619755 | METALLIZATION AND PLANARIZATION | MAZUMDER, DIDARUL A | — | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18619016 | VERTICALLY STACKED CAPACITORS AND METHOD OF FORMING THE SAME | MOJADDEDI, OMAR F | — | §102 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18618354 | INTEGRATING NITRIDE STRESS COMPENSATION LAYERS FOR THICK OXIDE WAFER CREATION | HARBOTTLE, CHARLOTTE ELIZABETH | 2818 | §103 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18616526 | PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD | BALDWIN, GORDON | 1713 | §103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18612873 | SUBSTRATE PROCESSING APPARATUS | MACARTHUR, SYLVIA | — | §103 | Non-Final OA | — | Pending | Mar 21, 2024 |
| 18611755 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | ALANKO, ANITA KAREN | 1713 | §112 | Final Rejection | — | Pending | Mar 21, 2024 |
| 18610723 | SUBSTRATE SUPPORT AND ASSEMBLY PART | RAIMUND, CHRISTOPHER W | — | §102§103 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18607202 | HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS | LAOBAK, ANDREW KEELAN | 1713 | §102§103§112 | Non-Final OA | — | Pending | Mar 15, 2024 |
| 18603584 | ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | MUSE, ISMAIL A | 2815 | §102§103 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | 11d overdue | Pending | Mar 12, 2024 |
| 18598907 | FERROELECTRIC 3D MEMORY BLOCK UNIT | MEHTA, RATISHA | 2817 | §102§103 | Non-Final OA | — | Pending | Mar 07, 2024 |
| 18597801 | THREE-DIMENSIONAL FERROELECTRIC MEMORY DEVICE AND METHODS OF FABRICATING THE SAME | BOWEN, ADAM S | 2897 | §102 | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18589570 | BOTTOM-UP DIRECTIONAL ATOMIC LAYER DEPOSITION (ALD) | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 5d overdue | Pending | Feb 28, 2024 |
| 18589845 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | DANIELS, MATTHEW J | 2891 | §103§112 | Final Rejection | — | Pending | Feb 28, 2024 |
| 18589744 | DISTRIBUTOR AND PLASMA PROCESSING APPARATUS | CHEN, KEATH T | — | DP | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589947 | INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING SYSTEM | WENG, PEI YONG | — | §101§102§103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18588318 | IN-SITU VARIABLE TEMPERATURE BOW METROLOGY | SADATE-MOUALEU, MIREILLE SANDRA | 2855 | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18589071 | RESONANT PHASE-CONTROLLED OSCILLATOR | KACKAR, RAM N | — | §103§112 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18586860 | SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | — | §103§112 | Non-Final OA | — | Pending | Feb 26, 2024 |
| 18586259 | MIXED ACTIVATING AND REDUCING AGENT FOR BONDING | SANDVIK, BENJAMIN P | 2812 | §103 | Non-Final OA | — | Pending | Feb 23, 2024 |
| 18581954 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | — | §102§103 | Final Rejection | — | Pending | Feb 20, 2024 |
| 18441719 | PROTECTION STRUCTURE FOR LINER REMOVAL | TRAN, BINH X | 1713 | §102§103§112 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18436543 | APPARATUS FOR PLASMA PROCESSING | NGUYEN, SOPHIA T | 2893 | §103 | Final Rejection | — | Pending | Feb 08, 2024 |
| 18431887 | PLASMA PROCESSING SYSTEM WITH DIRECT CURRENT SUPERPOSITION | MILLER, JR, JOSEPH ALBERT | 2891 | §102 | Final Rejection | — | Pending | Feb 02, 2024 |
| 18429479 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, THANH T | 2893 | §102 | Non-Final OA | — | Pending | Feb 01, 2024 |
| 18429046 | PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS | NAVARRO, HUGO IVAN | 2858 | §103§112 | Non-Final OA | 82d | Pending | Jan 31, 2024 |
| 18427838 | PLASMA PROCESSING APPARATUS, ELECTROSTATIC CHUCK, AND PLASMA PROCESSING METHOD | MOORE, KARLA A | 1716 | §103§112 | Non-Final OA | — | Pending | Jan 31, 2024 |
| 18425323 | SENSOR IN CHAMBER INSERT RING ASSEMBLY | OTT, PATRICK S | 1794 | §102§103§112 | Non-Final OA | — | Pending | Jan 29, 2024 |
| 18423391 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT | BRAYTON, JOHN JOSEPH | 1794 | §102§103 | Non-Final OA | — | Pending | Jan 26, 2024 |
| 18424262 | SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES | AHMED, SHAMIM | 1713 | §103 | Non-Final OA | 1d overdue | Pending | Jan 26, 2024 |
| 18422013 | ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCHING PROGRAM, AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | Jan 25, 2024 |
| 18417564 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | RIDDLE, CHRISTINA A | 3652 | §102§103 | Non-Final OA | — | Pending | Jan 19, 2024 |
| 18417507 | TEMPERATURE CONTROL METHOD OF VAPORIZER AND SUBSTRATE PROCESSING APPARATUS | LEDERER, SARAH B | — | §102§103§112 | Non-Final OA | — | Pending | Jan 19, 2024 |
| 18579659 | TEST METHOD OF TEST SYSTEM AND TEST SYSTEM | HOLMES, JANELLE AMBER | 2857 | §101§103 | Non-Final OA | — | Pending | Jan 16, 2024 |
| 18412676 | FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS | COLE, VICTOR | 3762 | §102§112 | Non-Final OA | — | Pending | Jan 15, 2024 |
| 18411359 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §102 | Non-Final OA | — | Pending | Jan 12, 2024 |
| 18407499 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS MAINTENANCE METHOD | TREMARCHE, CONNOR J. | — | §102§103 | Non-Final OA | — | Pending | Jan 09, 2024 |
| 18406451 | SUBSTRATE SUPPORT WITH PRINTED HEATER | BURNS, TREMESHA WILLIS | 2847 | §102 | Non-Final OA | — | Pending | Jan 08, 2024 |
| 18398217 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | ALANKO, ANITA KAREN | 2896 | §101§102§112 | Non-Final OA | — | Pending | Dec 28, 2023 |
| 18398213 | CONSUMABLE MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING CONSUMABLE MEMBER | LEE, WOO KYUNG | 2815 | §102§103 | Final Rejection | — | Pending | Dec 28, 2023 |
| 18395788 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Dec 26, 2023 |
| 18395879 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | PHAM, THOMAS T | 1713 | §112 | Final Rejection | — | Pending | Dec 26, 2023 |
| 18573700 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUTER-READABLE RECORDING MEDIUM | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18536789 | FILM FORMING APPARATUS | BERMAN, JASON | 1794 | §102§103 | Final Rejection | — | Pending | Dec 12, 2023 |
| 18534880 | SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS | THOMAS, BINU | 1759 | §102§103 | Non-Final OA | — | Pending | Dec 11, 2023 |
| 18534224 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | CHEN, PATRICK C | 2842 | §102§103 | Non-Final OA | — | Pending | Dec 08, 2023 |
| 18532873 | FULLY SELF-ALIGNED VIAS USING A HARDMASK AND ANTISPACERS | NGUYEN, KHIEM D | 2892 | §102§103 | Non-Final OA | — | Pending | Dec 07, 2023 |
| 18530360 | PAD AND END EFFECTOR | SIMMONS, SYDNEY JEANINE | — | §102§103 | Non-Final OA | — | Pending | Dec 06, 2023 |
| 18530067 | COMPLIANT CHUCK EDGE RING | SCHATZ, CHRISTOPHER T | 1746 | §102§103§112 | Non-Final OA | — | Pending | Dec 05, 2023 |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | 60d | Pending | Nov 29, 2023 |
| 18523060 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BOWMAN, ANDREW J | 1717 | §103 | Final Rejection | — | Pending | Nov 29, 2023 |
| 18564314 | FILM FORMATION METHOD AND FILM FORMATION DEVICE | PHAM, THOMAS T | 1713 | §103§112 | Non-Final OA | — | Pending | Nov 27, 2023 |
| 18518696 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Nov 24, 2023 |
| 18517206 | METHOD AND SYSTEM FOR PLASMA PROCESS | PHAM, THOMAS T | 1713 | §102§103Other | Final Rejection | — | Pending | Nov 22, 2023 |
| 18517486 | OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS | GARBER, ERIN R | 2878 | §103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18562502 | SUBSTRATE PROCESSING METHOD | YAP, DOUGLAS ANTHONY | 2899 | §103 | Final Rejection | 19d | Pending | Nov 20, 2023 |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 2899 | §102§103 | Non-Final OA | 6d | Pending | Nov 15, 2023 |
| 18389207 | SYSTEM FOR PROCESS DEVELOPMENT ASSISTANCE | AUGUSTINE, NICHOLAS | 2178 | §103 | Non-Final OA | — | Pending | Nov 13, 2023 |
| 18505810 | SUB-MILLISECOND OPTICAL DETECTION OF PULSED PLASMA PROCESSES | MENDOZA, ALEXANDRIA ARELLANO | 2877 | §103 | Non-Final OA | — | Pending | Nov 09, 2023 |
| 18387619 | METHOD TO PATTERN A SEMICONDUCTOR SUBSTRATE USING A MULTILAYER PHOTORESIST FILM STACK | MALLOY, ANNA E | — | §102§103§112 | Non-Final OA | — | Pending | Nov 07, 2023 |
| 18558822 | SUBSTRATE PROCESSING DEVICE AND METHOD FOR MEASURING PROCESS GAS TEMPERATURE AND CONCENTRATION | FABIAN JR, ROBERTO | 2877 | §103 | Final Rejection | — | Pending | Nov 03, 2023 |
| 18386618 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | PHAM, THOMAS T | 1713 | §102§103 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18385528 | METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | — | Pending | Oct 31, 2023 |
| 18383602 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BELAY, DILNESSA B | — | §102§103 | Non-Final OA | — | Pending | Oct 25, 2023 |
| 18383637 | SUBSTRATE PROCESSING APPARATUS | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Oct 25, 2023 |
| 18383673 | CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §102 | Non-Final OA | 36d | Pending | Oct 25, 2023 |
| 18556569 | FILM FORMING METHOD AND FILM FORMING APPARATUS | CHEN, BRET P | 1718 | §103§112DPOther | Non-Final OA | — | Pending | Oct 20, 2023 |
| 18489188 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Oct 18, 2023 |
| 18380776 | SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC LAYER ETCHING (ALE) | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Oct 17, 2023 |
| 18378932 | VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD FOR VAPORIZING SOLID RAW MATERIAL | HASSANZADEH, PARVIZ | 1716 | §103§112 | Non-Final OA | — | Pending | Oct 11, 2023 |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | §103§112 | Final Rejection | 7d | Pending | Oct 11, 2023 |
| 18484372 | SELECTIVE PASSIVATION OF PHOTORESISTS | SULLIVAN, CALEEN O | 2899 | §102§103 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 1713 | §103 | Final Rejection | 27d | Pending | Oct 06, 2023 |
| 18554225 | ETCHING METHOD AND PROCESSING DEVICE | LU, JIONG-PING | 1713 | §102§103 | Final Rejection | — | Pending | Oct 06, 2023 |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 1713 | §103§112 | Final Rejection | 32d overdue | Pending | Oct 03, 2023 |
| 18375958 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | WILSON, GREGORY A | 3762 | §103 | Final Rejection | 36d overdue | Pending | Oct 02, 2023 |
| 18374679 | PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103§112 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18552957 | FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | MOJADDEDI, OMAR F | 2898 | §102§103 | Non-Final OA | — | Pending | Sep 28, 2023 |
| 18372995 | SUBSTRATE PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §102§103 | Non-Final OA | — | Pending | Sep 26, 2023 |
| 18373098 | SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING | PATEL, REEMA | 2812 | §103 | Non-Final OA | — | Pending | Sep 26, 2023 |
| 18470491 | METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | CHACKO DAVIS, DABORAH | 1737 | §102§103 | Non-Final OA | — | Pending | Sep 20, 2023 |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103 | Final Rejection | 19d overdue | Pending | Sep 18, 2023 |
| 18368110 | ETCHING METHOD AND ETCHING APPARATUS | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Sep 14, 2023 |
| 18466613 | TUNABLE PATTERNED SURFACE UNIFORMITY USING DIRECT CURRENT BIAS | TRAN, BINH X | 1713 | §102§103§112 | Non-Final OA | — | Pending | Sep 13, 2023 |
| 18462003 | TREATMENTS FOR METAL OXIDE PHOTORESIST FILMS | WALKE, AMANDA C | 1722 | §103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18459913 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CARRILLO, BIBI SHARIDAN | 1711 | §103§112 | Non-Final OA | — | Pending | Sep 01, 2023 |
| 18459151 | SUBSTRATE PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §102§103 | Non-Final OA | — | Pending | Aug 31, 2023 |
| 18458630 | 3D COMB NANOSHEET AND PI/2 ROTATED NANOSHEET | SALAZ, SAMMANTHA KATELYN | 2892 | §102§103 | Non-Final OA | — | Pending | Aug 30, 2023 |
| 18240010 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | DP | Final Rejection | — | Pending | Aug 30, 2023 |
| 18239006 | PLASMA TREATMENT DEVICE AND ELECTRODE MECHANISM | HASSANZADEH, PARVIZ | 1716 | §103 | Non-Final OA | — | Pending | Aug 28, 2023 |
| 18456642 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | RUCKER, BASEEMAH QADEER | 2817 | §102§103 | Final Rejection | — | Pending | Aug 28, 2023 |
| 18547888 | FILM FORMING METHOD, PROCESSING APPARATUS, AND PROCESSING SYSTEM | CARTER, JONATHAN LANGDON | 2896 | §102§103 | Non-Final OA | — | Pending | Aug 25, 2023 |
| 18237409 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Aug 24, 2023 |
| 18454632 | HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | 67d overdue | Pending | Aug 23, 2023 |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §102§103§112 | Final Rejection | 29d | Pending | Aug 08, 2023 |
| 18231378 | LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD | ZHANG, RICHARD Z | 1714 | §102§103§112 | Non-Final OA | — | Pending | Aug 08, 2023 |
| 18227156 | SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING METHOD, AND SUPPLY METHOD | LEE, KEVIN G | 1711 | §103 | Final Rejection | 28d | Pending | Jul 27, 2023 |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | 18d overdue | Pending | Jul 26, 2023 |
| 18224077 | PROFILE DETECTION METHOD, PROFILE DETECTION PROGRAM, AND INFORMATION PROCESSING APPARATUS | YANG, JIANXUN | 2662 | §103 | Non-Final OA | — | Pending | Jul 20, 2023 |
| 18261898 | METHOD FOR MANUFACTURING SUBSTRATE WITH CHIPS, AND SUBSTRATE PROCESSING DEVICE | SIPLING, KENNETH MARK | 2818 | §103 | Non-Final OA | — | Pending | Jul 18, 2023 |
| 18353300 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | RIDDLE, CHRISTINA A | 2882 | §102§103 | Final Rejection | 5d | Pending | Jul 17, 2023 |
| 18353747 | PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD | CHEN, KEATH T | 1716 | §101§103 | Final Rejection | 33d | Pending | Jul 17, 2023 |
| 18271898 | METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 14d | Pending | Jul 12, 2023 |
| 18350519 | PLASMA PROCESSING METHOD AND APPARATUS | ZERVIGON, RUDY | 1716 | §102§103 | Final Rejection | 14d | Pending | Jul 11, 2023 |
| 18218450 | DISPLAY METHOD AND INFORMATION PROCESSING APPARATUS | RICKS, DONNA J | 2618 | §103 | Non-Final OA | — | Pending | Jul 05, 2023 |
| 18216874 | METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALLIC OXIDES | COSGROVE, JAYSON D | 1737 | §103 | Non-Final OA | — | Pending | Jun 30, 2023 |
| 18216168 | METHOD OF FORMING PHOTOSENSITIVE ORGANOMETALLIC OXIDES BY CHEMICAL VAPOR POLYMERIZATION | CHACKO DAVIS, DABORAH | 1737 | §102§103 | Final Rejection | 46d | Pending | Jun 29, 2023 |
| 18333724 | FILM FORMING METHOD | GAMBETTA, KELLY M | 1718 | §103 | Final Rejection | 29d | Pending | Jun 13, 2023 |
| 18329372 | VACUUM HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §112 | Final Rejection | 49d overdue | Pending | Jun 05, 2023 |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 1716 | §102§103 | Non-Final OA | 4d overdue | Pending | Jun 02, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | §103§112 | Final Rejection | 31d overdue | Pending | May 31, 2023 |
| 18199401 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER | CROWELL, ANNA M | 1716 | §102§103 | Non-Final OA | — | Pending | May 19, 2023 |
| 18319419 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | May 17, 2023 |
| 18035401 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE | LUND, JEFFRIE ROBERT | 1716 | §103 | Final Rejection | — | Pending | May 04, 2023 |
| 18193324 | Dry Developing Metal-Free Photoresists | LEE, ALEXANDER N | 1737 | §103§112 | Final Rejection | 1d overdue | Pending | Mar 30, 2023 |
| 18192186 | DEPOSITION METHOD AND PROCESSING APPARATUS | SEHAR, FAKEHA | 2893 | §103 | Final Rejection | 56d | Pending | Mar 29, 2023 |
| 18027722 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE | TRAN, TONY | 2893 | §103 | Final Rejection | — | Pending | Mar 22, 2023 |
| 18185674 | PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD | HUNTER, JOHN S | 3761 | §112 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §103§112 | Final Rejection | 36d overdue | Pending | Mar 10, 2023 |
| 18044386 | LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD | ZABEL, ANDREW JOHN | 2818 | §103 | Final Rejection | — | Pending | Mar 08, 2023 |
| 18043757 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | PRICE, CRAIG JAMES | 3753 | §102§103§112 | Non-Final OA | — | Pending | Mar 02, 2023 |
| 18042513 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTRIC WINDOW | LEE, WILSON | 2844 | §103§112 | Final Rejection | 27d | Pending | Feb 22, 2023 |
| 18022213 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CHACKO DAVIS, DABORAH | 1737 | §112 | Final Rejection | 49d overdue | Pending | Feb 20, 2023 |
| 18108391 | PLASMA PROCESSING APPARATUS | SWEELY, KURT D | 1718 | §103 | Final Rejection | — | Pending | Feb 10, 2023 |
| 18105993 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | KITT, STEPHEN A | 1717 | §103 | Final Rejection | — | Pending | Feb 06, 2023 |
| 18161298 | DEPOSITION METHOD AND DEPOSITION APPARATUS | SLUTSKER, JULIA | 2891 | §103 | Final Rejection | 61d | Pending | Jan 30, 2023 |
| 18159295 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103§112 | Non-Final OA | 30d | Pending | Jan 25, 2023 |
| 18156618 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Jan 19, 2023 |
| 18004931 | FILM FORMING METHOD AND FILM FORMING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | 50d overdue | Pending | Jan 10, 2023 |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 3665 | §101 | Non-Final OA | 19d | Pending | Dec 29, 2022 |
| 18147157 | HEAT TREATMENT APPARATUS, PROCESSING TARGET PROTECTING METHOD, AND STORAGE MEDIUM | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 86d overdue | Pending | Dec 28, 2022 |
| 18146535 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | §102§103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18084908 | METHOD AND APPARATUS FOR FORMING CRYSTALLINE SILICON FILM | WEGNER, AARON MICHAEL | 2897 | §103§112 | Non-Final OA | — | Pending | Dec 20, 2022 |
| 18066078 | IN-SITU DIAGNOSIS OF PLASMA SYSTEM | ALANKO, ANITA KAREN | 1713 | §101§112 | Non-Final OA | 78d | Pending | Dec 14, 2022 |
| 17994711 | PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE | SWEELY, KURT D | 1718 | §103§112 | Final Rejection | 7d | Pending | Nov 28, 2022 |
| 18058245 | APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR | SHAMSUZZAMAN, MOHAMMED | 2897 | §103§112 | Final Rejection | 36d overdue | Pending | Nov 22, 2022 |
| 17989438 | Self Aligned Multiple Patterning Method | CHACKO DAVIS, DABORAH | 1737 | §102§103 | Non-Final OA | 77d | Pending | Nov 17, 2022 |
| 18055490 | HEAT TREATMENT APPARATUS | TREMARCHE, CONNOR J. | 3762 | §103 | Non-Final OA | — | Pending | Nov 15, 2022 |
| 17997158 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM | GHYKA, ALEXANDER G | 2812 | §103§112 | Final Rejection | 16d overdue | Pending | Oct 26, 2022 |
| 17956089 | Low-Temperature Etch | PHAM, THOMAS T | 1713 | §102§103 | Non-Final OA | — | Pending | Sep 29, 2022 |
| 17950116 | SUBSTRATE PROCESSING SYSTEM | FORD, NATHAN K | 1716 | §112 | Final Rejection | — | Pending | Sep 22, 2022 |
| 17949520 | GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GATE VALVE | MOORE, KARLA A | 1716 | §112 | Non-Final OA | — | Pending | Sep 21, 2022 |
| 17906353 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | 17d overdue | Pending | Sep 15, 2022 |
| 17943926 | PATTERNING A SEMICONDUCTOR WORKPIECE | CHACKO DAVIS, DABORAH | 1737 | §102§103 | Final Rejection | — | Pending | Sep 13, 2022 |
| 17898104 | METHODS FOR FORMING SEMICONDUCTOR DEVICES WITH ISOLATION STRUCTURES | KIM, SU C | 2899 | §102 | Final Rejection | 22d | Pending | Aug 29, 2022 |
| 17896961 | PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS | KIM, JAHAE | 2897 | §103 | Non-Final OA | — | Pending | Aug 26, 2022 |
| 17896904 | APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM ON SUBSTRATE | BALDWIN, GORDON | 1718 | §103 | Final Rejection | 45d overdue | Pending | Aug 26, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | §112 | Final Rejection | 145d overdue | Pending | Aug 23, 2022 |
| 17820962 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | §103§112 | Final Rejection | 4d overdue | Pending | Aug 19, 2022 |
| 17890766 | METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR STRESS FILM TUNING | CLEVELAND, MICHAEL B | 1700 | §102 | Final Rejection | — | Pending | Aug 18, 2022 |
| 17904427 | PLASMA PROCESSING APPARATUS | YU, YUECHUAN | 1718 | §103 | Non-Final OA | — | Pending | Aug 17, 2022 |
| 17818547 | FILM FORMING APPARATUS | ZERVIGON, RUDY | 1716 | §102§103 | Final Rejection | — | Pending | Aug 09, 2022 |
| 17880660 | METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 17d overdue | Pending | Aug 04, 2022 |
| 17879803 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | SWEELY, KURT D | 1718 | §103 | Final Rejection | 23d | Pending | Aug 03, 2022 |
| 17876385 | PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §102§103 | Non-Final OA | — | Pending | Jul 28, 2022 |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103§112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17862889 | SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM | BAND, MICHAEL A | 1794 | §103 | Non-Final OA | — | Pending | Jul 12, 2022 |
| 17809384 | PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103§112 | Final Rejection | 70d overdue | Pending | Jun 28, 2022 |
| 17850250 | SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Jun 27, 2022 |
| 17848596 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | REYES, JOSHUA NATHANIEL PI | 1718 | §103§112 | Final Rejection | — | Pending | Jun 24, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 51d overdue | Pending | Jun 21, 2022 |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | ZERVIGON, RUDY | 1718 | §103 | Final Rejection | 91d overdue | Pending | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | §103 | Final Rejection | 26d | Pending | Jun 17, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | §101§103 | Final Rejection | 60d overdue | Pending | May 24, 2022 |
| 17664607 | Apparatus for Plasma Processing | LEE, AIDEN Y | 1718 | §112 | Final Rejection | 13d | Pending | May 23, 2022 |
| 17747326 | CONTROL APPARATUS AND CONTROL METHOD FOR FILM FORMING APPARATUS | KITT, STEPHEN A | 1717 | §103 | Non-Final OA | 30d | Pending | May 18, 2022 |
| 17734125 | ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | — | Pending | May 02, 2022 |
| 17657194 | INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC DEVICE, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS | SUN, XIUQIN | 2857 | §103 | Final Rejection | 7d | Pending | Mar 30, 2022 |
| 17706958 | BILAYER DIELECTRIC STACK FOR A FERROELECTRIC TUNNEL JUNCTION AND METHOD OF FORMING | WINTERS, SEAN AYERS | 2892 | §103 | Final Rejection | 32d overdue | Pending | Mar 29, 2022 |
| 17753886 | GAS SUPPLY DEVICE AND GAS SUPPLY METHOD | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Mar 17, 2022 |
| 17655071 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §103§112 | Final Rejection | — | Pending | Mar 16, 2022 |
| 17654625 | TEMPERATURE CONTROL UNIT AND PROCESSING APPARATUS | JONES, GORDON A | 3763 | §102§103 | Non-Final OA | — | Pending | Mar 14, 2022 |
| 17676411 | APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF | BAND, MICHAEL A | 1794 | §103§112 | Final Rejection | 23d | Pending | Feb 21, 2022 |
| 17636430 | SUPPLY SYSTEM FOR SUPPLYING RAW MATERIAL GAS GENERATED BY VAPORIZING SOLID RAW MATERIAL | KURPLE, KARL | 1717 | §103 | Final Rejection | 20d | Pending | Feb 18, 2022 |
| 17644412 | DEPOSITION APPARATUS AND DEPOSITION METHOD | CHAN, LAUREEN | 1716 | §103 | Non-Final OA | 43d overdue | Pending | Dec 15, 2021 |
| 17456609 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS | CRAMER, HALEE PAIGE | 2891 | §103 | Final Rejection | — | Pending | Nov 26, 2021 |
| 17522191 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | FORD, NATHAN K | 1716 | §103 | Non-Final OA | — | Pending | Nov 09, 2021 |
| 17452642 | SUBSTRATE HOLDER, SUBSTRATE TRANSFER DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER | NIELSEN, DEREK LANG | 2899 | §103 | Final Rejection | 1d overdue | Pending | Oct 28, 2021 |
| 17501889 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112 | Final Rejection | 57d | Pending | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | §103 | Non-Final OA | 3d overdue | Pending | Sep 27, 2021 |
| 17428597 | FILM FORMING APPARATUS AND FILM FORMING METHOD | BAND, MICHAEL A | 1794 | §103Other | Non-Final OA | 33d | Pending | Aug 04, 2021 |
| 17347824 | DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE POLISHING MEMBER | POON, DANA LEE | 3723 | §103 | Final Rejection | — | Pending | Jun 15, 2021 |
| 17183138 | SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK | MELLOTT, JAMES M | 1759 | §103 | Final Rejection | 71d | Pending | Feb 23, 2021 |
| 17118158 | PART FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM | KIRKWOOD, SPENCER HAMMETT | 3761 | §103 | Final Rejection | — | Pending | Dec 10, 2020 |
| 17114096 | FURNACE WITH METAL FURNACE TUBE | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 97d overdue | Pending | Dec 07, 2020 |
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 1718 | §103§112 | Non-Final OA | 4d overdue | Pending | Sep 29, 2020 |
| 17037087 | METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE SYSTEMS | LOPEZ ALVAREZ, OLVIN | 2117 | §101§103 | Final Rejection | — | Pending | Sep 29, 2020 |
| 16992550 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | Aug 13, 2020 |
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