304 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 19111422 | PROCESSOR THAT IMPLEMENTS INDIRECT ADDRESSING-STYLE CONDITIONAL JUMP INSTRUCTIONS, PROGRAM RECORDING MEDIUM, AND METHOD | METZGER, MICHAEL J | 2183 | Final Rejection | Mar 13, 2025 |
| 18876798 | PROCESSOR FOR CONTROLLING PIPELINE PROCESSING BASED ON JUMP INSTRUCTION, AND PROGRAM STORAGE MEDIUM | METZGER, MICHAEL J | 2183 | Final Rejection | Dec 19, 2024 |
| 18982168 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | CHEN, BRET P | 1718 | Non-Final OA | Dec 16, 2024 |
| 18976345 | SUBSTRATE PROCESSING SYSTEM | KAISER, SYED M | 2831 | Non-Final OA | Dec 11, 2024 |
| 18970324 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | LEONG, NATHAN T | 1718 | Non-Final OA | Dec 05, 2024 |
| 18969148 | Plasma Processing Apparatus and Plasma Processing Method | WELLS, KENNETH B | 2842 | Non-Final OA | Dec 04, 2024 |
| 18957942 | SUBSTRATE PROCESSING APPARATUS | CHEN, PATRICK C | 2842 | Non-Final OA | Nov 25, 2024 |
| 18947903 | MODIFICATION METHOD AND MODIFICATION DEVICE | CHAN, WEI | 2844 | Non-Final OA | Nov 14, 2024 |
| 18935665 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2844 | Non-Final OA | Nov 04, 2024 |
| 18933255 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | PROCTOR, CACHET I | 1712 | Non-Final OA | Oct 31, 2024 |
| 18857016 | FILM-FORMING METHOD AND SUBSTRATE-PROCESSING DEVICE | TADAYYON ESLAMI, TABASSOM | 1718 | Non-Final OA | Oct 15, 2024 |
| 18911171 | Substrate Processing Apparatus | BAND, MICHAEL A | 1794 | Final Rejection | Oct 09, 2024 |
| 18855230 | PLASMA PROCESSING APPARATUS | LUONG, HENRY T | 2844 | Final Rejection | Oct 08, 2024 |
| 18899015 | LIQUID PROCESSING APPARATUS, AND MONITORING METHOD | HAGHANI, SHADAN E | 2485 | Non-Final OA | Sep 27, 2024 |
| 18850155 | FILLING METHOD AND SUBSTRATE PROCESSING SYSTEM | GAMBETTA, KELLY M | 1718 | Non-Final OA | Sep 24, 2024 |
| 18885134 | Plasma Source and Plasma Processing Apparatus | SATHIRAJU, SRINIVAS | 2844 | Non-Final OA | Sep 13, 2024 |
| 18838595 | SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | Non-Final OA | Aug 14, 2024 |
| 18836386 | LIQUID PROCESSING METHOD, DISCHARGE ADJUSTMENT METHOD, AND LIQUID PROCESSING APPARATUS | CARRILLO, BIBI SHARIDAN | 1711 | Non-Final OA | Aug 07, 2024 |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 1716 | Non-Final OA | Jul 31, 2024 |
| 18782194 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | Non-Final OA | Jul 24, 2024 |
| 18771025 | EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD | NGUYEN, HUNG | 2882 | Non-Final OA | Jul 12, 2024 |
| 18769841 | LIQUID TREATMENT METHOD AND STORAGE MEDIUM | NGUYEN, HUNG | 2882 | Final Rejection | Jul 11, 2024 |
| 18724335 | FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD | XING, CHRISTINA ILONA | 2877 | Non-Final OA | Jun 26, 2024 |
| 18754701 | SUBSTRATE-PROCESSING APPARATUS | BAUER, SCOTT ALLEN | 2838 | Non-Final OA | Jun 26, 2024 |
| 18724360 | FILM FORMING METHOD AND FILM FORMING APPARATUS | LOUIE, MANDY C | 1718 | Non-Final OA | Jun 26, 2024 |
| 18748171 | SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCESSING METHOD | BENNETT, CHARLEE | 1718 | Non-Final OA | Jun 20, 2024 |
| 18569248 | METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM | ROLLAND, ALEX A | 1759 | Non-Final OA | Jun 13, 2024 |
| 18740007 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Jun 11, 2024 |
| 18678469 | SITU WAFER BOND PROPAGATION MEASUREMENT | BOLOGNA, DOMINIC JOSEPH | 2877 | Non-Final OA | May 30, 2024 |
| 18672248 | SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND RECORDING MEDIUM | THOMAS, BINU | 1717 | Non-Final OA | May 23, 2024 |
| 18668645 | ANTENNA AND PLASMA PROCESSING APPARATUS | LAW, NGA LEUNG V | 1717 | Non-Final OA | May 20, 2024 |
| 18709674 | NITRIDE FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | Non-Final OA | May 13, 2024 |
| 18621827 | WAFER BOW METROLOGY SYSTEM | AMARA, MOHAMED K | 2877 | Final Rejection | Mar 29, 2024 |
| 18622318 | METHOD FOR REMOVING METAL-CONTAINING MATERIALS IN SMALL PITCH STRUCTURES | PHAM, THOMAS T | 1713 | Non-Final OA | Mar 29, 2024 |
| 18620482 | ETCHING BI-METAL OXIDES WITH ALKALINE EARTH METALS | LU, JIONG-PING | 1713 | Non-Final OA | Mar 28, 2024 |
| 18620417 | HARD MASK PROTECTION OF METAL INTERCONNECTS | LU, JIONG-PING | 1713 | Non-Final OA | Mar 28, 2024 |
| 18611755 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | ALANKO, ANITA KAREN | 1713 | Non-Final OA | Mar 21, 2024 |
| 18612938 | INFORMATION PROCESSING APPARATUS AND CORRECTION METHOD | WOODWARD, NATHANIEL T | 2855 | Non-Final OA | Mar 21, 2024 |
| 18608043 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CULBERT, ROBERTS P | 1716 | Final Rejection | Mar 18, 2024 |
| 18605902 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS INCLUDING APPLYING A VOLTAGE TO A LOWER ELECTRODE IN A SUBSTRATE SUPPORT WITH A GAS SUPPLIED INTO A CHAMBER | SATHIRAJU, SRINIVAS | 2844 | Final Rejection | Mar 15, 2024 |
| 18606633 | POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS | BITOR, RENAE ALLYN | 2663 | Non-Final OA | Mar 15, 2024 |
| 18607202 | HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Mar 15, 2024 |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Mar 12, 2024 |
| 18599619 | SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS | MCMICHAEL, TAUREAN LLOYD | 3652 | Non-Final OA | Mar 08, 2024 |
| 18595890 | SUBSTRATE POSITIONING DEVICE, SUBSTRATE POSITIONING METHOD, AND BONDING APPARATUS | WILSON, LEE D | 3723 | Non-Final OA | Mar 05, 2024 |
| 18589570 | BOTTOM-UP DIRECTIONAL ATOMIC LAYER DEPOSITION (ALD) | MCCLURE, CHRISTINA D | 1718 | Final Rejection | Feb 28, 2024 |
| 18585340 | Methods To Improve Etch Uniformity Across A Semiconductor Substrate When Etching With A Hydrofluoric Acid (HF) And Nitric Acid (HNO3) Solution | LU, JIONG-PING | 1713 | Non-Final OA | Feb 23, 2024 |
| 18584114 | METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON SUBSTRATE | GAMBETTA, KELLY M | 1718 | Final Rejection | Feb 22, 2024 |
| 18442022 | PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLASMA STATE DETECTION PROGRAM | CHAN, LAUREEN | 1716 | Non-Final OA | Feb 14, 2024 |
| 18683478 | JIG SUBSTRATE AND TEACHING METHOD | SALEH, ZAID MUHAMMAD | 2668 | Non-Final OA | Feb 13, 2024 |
| 18681914 | SUBSTRATE THICKNESS MEASURING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE THICKNESS MEASURING METHOD | LYONS, MICHAEL A | 2877 | Non-Final OA | Feb 07, 2024 |
| 18433320 | DIRECT CURRENT SUPERPOSITION (DCS) FOR PROTECTION OF ORGANIC MANDREL DURING SPACER DEPOSITION | PHAM, THOMAS T | 1713 | Non-Final OA | Feb 05, 2024 |
| 18430313 | METHOD FOR ETCHING A PATTERN IN A LAYER OF A SUBSTRATE | REMAVEGE, CHRISTOPHER | 1713 | Non-Final OA | Feb 01, 2024 |
| 18426925 | PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD | SATHIRAJU, SRINIVAS | 2844 | Final Rejection | Jan 30, 2024 |
| 18425323 | SENSOR IN CHAMBER INSERT RING ASSEMBLY | OTT, PATRICK S | 1794 | Final Rejection | Jan 29, 2024 |
| 18424262 | SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES | AHMED, SHAMIM | 1713 | Non-Final OA | Jan 26, 2024 |
| 18292528 | SUBSTRATE PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM | DULANEY, KATHLEEN YUAN | 2666 | Non-Final OA | Jan 26, 2024 |
| 18419592 | FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING PART HAVING FILM CONTAINING SILICON | PROCTOR, CACHET I | 1712 | Non-Final OA | Jan 23, 2024 |
| 18418757 | SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM | LU, JIONG-PING | 1713 | Non-Final OA | Jan 22, 2024 |
| 18418580 | INFORMATION COLLECTION DEVICE | AZAD, MD ABUL K | 2119 | Non-Final OA | Jan 22, 2024 |
| 18416880 | PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Jan 18, 2024 |
| 18415499 | METHOD OF DETECTING LIQUID IN LIQUID PROCESSING APPARATUS | KITT, STEPHEN A | 1717 | Non-Final OA | Jan 17, 2024 |
| 18410031 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | LU, JIONG-PING | 1713 | Non-Final OA | Jan 11, 2024 |
| 18410811 | DEVICE FABRICATION METHODS WITH ION BEAM PROCESSING | DEO, DUY VU NGUYEN | 1713 | Non-Final OA | Jan 11, 2024 |
| 18410046 | METHOD OF FORMING SILICON NITRIDE FILM | GAMBETTA, KELLY M | 1718 | Non-Final OA | Jan 11, 2024 |
| 18409606 | INTEGRATED OPTICAL NANOTHERMOMETRY FOR REAL-TIME WAFER TEMPERATURE MONITORING DURING PROCESSING | COTEY, PHILIP L | 2855 | Non-Final OA | Jan 10, 2024 |
| 18406670 | METHOD AND SYSTEM FOR PLASMA PROCESS | DEO, DUY VU NGUYEN | 1713 | Non-Final OA | Jan 08, 2024 |
| 18406783 | METHOD AND SYSTEM FOR PLASMA PROCESS | LU, JIONG-PING | 1713 | Non-Final OA | Jan 08, 2024 |
| 18402328 | FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EPD) BY REFLECTOMETRY | PHAM, THOMAS T | 1713 | Non-Final OA | Jan 02, 2024 |
| 18395879 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | PHAM, THOMAS T | 1713 | Non-Final OA | Dec 26, 2023 |
| 18573627 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM | TRAN, BINH X | 1713 | Non-Final OA | Dec 22, 2023 |
| 18572959 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | OWENS, DOUGLAS W | 2897 | Non-Final OA | Dec 21, 2023 |
| 18390221 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | TRAN, BINH X | 1713 | Non-Final OA | Dec 20, 2023 |
| 18541526 | PLASMA PROCESSING APPARATUS | DANIELS, MATTHEW J | 1742 | Non-Final OA | Dec 15, 2023 |
| 18541164 | SUBSTRATE PROCESSING APPARATUS | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Dec 15, 2023 |
| 18539187 | METHOD OF PERFORMING CLEANING AND APPARATUS FOR PERFORMING SUBSTRATE PROCESSING | ZHANG, RICHARD Z | 1714 | Final Rejection | Dec 13, 2023 |
| 18536789 | FILM FORMING APPARATUS | BERMAN, JASON | 1794 | Non-Final OA | Dec 12, 2023 |
| 18536813 | DEPOSITION APPARATUS AND PROCESSING METHOD | SWEELY, KURT D | 1718 | Non-Final OA | Dec 12, 2023 |
| 18533256 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, BAO D | 3762 | Non-Final OA | Dec 08, 2023 |
| 18532585 | METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF | GRAY, SUNGHEE Y | 2877 | Non-Final OA | Dec 07, 2023 |
| 18528025 | PLASMA PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND CORRECTION METHOD | BENNETT, CHARLEE | 1718 | Non-Final OA | Dec 04, 2023 |
| 18525930 | TRANSFER MODULE AND TRANSFER METHOD | MYERS, GLENN F | 3652 | Non-Final OA | Dec 01, 2023 |
| 18566183 | SUBSTRATE PROCESSING APPARATUS | HASSANZADEH, PARVIZ | 1716 | Non-Final OA | Dec 01, 2023 |
| 18522825 | PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | Final Rejection | Nov 29, 2023 |
| 18518810 | FILM FORMING METHOD AND FILM FORMING APPARATUS | LOUIE, MANDY C | 1718 | Final Rejection | Nov 24, 2023 |
| 18518696 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Nov 24, 2023 |
| 18518862 | CLEANING METHOD AND PLASMA PROCESSING METHOD | PHAM, THOMAS T | 1713 | Final Rejection | Nov 24, 2023 |
| 18517486 | OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS | GARBER, ERIN R | 2878 | Final Rejection | Nov 22, 2023 |
| 18515667 | SOLUTION TREATMENT APPARATUS AND CLEANING METHOD | RIVERA-CORDERO, ARLYN I | 1714 | Non-Final OA | Nov 21, 2023 |
| 18562502 | SUBSTRATE PROCESSING METHOD | YAP, DOUGLAS ANTHONY | 2899 | Non-Final OA | Nov 20, 2023 |
| 17907217 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MOJADDEDI, OMAR F | 2898 | Non-Final OA | Nov 20, 2023 |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 2899 | Non-Final OA | Nov 15, 2023 |
| 18505133 | PASSIVATION EQUIPMENT AND PASSIVATION METHOD FOR SEMICONDUCTOR DEVICE | BALLMAN, CHRISTOPHER D | 3753 | Non-Final OA | Nov 09, 2023 |
| 18558822 | SUBSTRATE PROCESSING DEVICE AND METHOD FOR MEASURING PROCESS GAS TEMPERATURE AND CONCENTRATION | FABIAN JR, ROBERTO | 2877 | Non-Final OA | Nov 03, 2023 |
| 18386601 | ETCHING METHOD | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Nov 03, 2023 |
| 18500170 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE | BANKLER, AIDAN DENNEHY | 2817 | Non-Final OA | Nov 02, 2023 |
| 18496824 | SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD | WIBLIN, MATTHEW | 3745 | Non-Final OA | Oct 27, 2023 |
| 18557144 | SUBSTRATE LIQUID PROCESSING METHOD, AND RECORDING MEDIUM | HO, ANTHONY | 2817 | Non-Final OA | Oct 25, 2023 |
| 18383637 | SUBSTRATE PROCESSING APPARATUS | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Oct 25, 2023 |
| 18381269 | SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD | WOLDEGEORGIS, ERMIAS T | 2893 | Non-Final OA | Oct 18, 2023 |
| 18489229 | SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE | WAN, DEMING | 3762 | Non-Final OA | Oct 18, 2023 |
| 18380776 | SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC LAYER ETCHING (ALE) | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Oct 17, 2023 |
| 18555055 | SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE | HERNANDEZ-KENNEY, JOSE | 1717 | Non-Final OA | Oct 12, 2023 |
| 18485469 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | LIU, BENJAMIN T | 2893 | Non-Final OA | Oct 12, 2023 |
| 18485978 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | DUCLAIR, STEPHANIE P. | 1713 | Final Rejection | Oct 12, 2023 |
| 18554836 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | Final Rejection | Oct 11, 2023 |
| 18483050 | SUBSTRATE PROCESSING APPARATUS | HAGEMAN, MARK C | 3652 | Non-Final OA | Oct 09, 2023 |
| 18554225 | ETCHING METHOD AND PROCESSING DEVICE | LU, JIONG-PING | 1713 | Non-Final OA | Oct 06, 2023 |
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 1713 | Non-Final OA | Oct 06, 2023 |
| 18376512 | SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD | KC, SAGAR | 3657 | Non-Final OA | Oct 04, 2023 |
| 18376050 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | AHMED, SHAMIM | 1713 | Final Rejection | Oct 03, 2023 |
| 18479986 | PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD | BRAYTON, JOHN JOSEPH | 1794 | Non-Final OA | Oct 03, 2023 |
| 18375958 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | WILSON, GREGORY A | 3762 | Non-Final OA | Oct 02, 2023 |
| 18479599 | ETCHING METHOD AND PLASMA PROCESSING SYSTEM | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Oct 02, 2023 |
| 18553337 | PLASMA PROCESSING APPARATUS | MILLER, JR, JOSEPH ALBERT | 1712 | Non-Final OA | Sep 29, 2023 |
| 18475502 | PLASMA PROCESSING APPARATUS AND COIL HOLDER FOR HOLDING PLASMA EXCITATION ANTENNA | LEE, AIDEN Y | 1718 | Non-Final OA | Sep 27, 2023 |
| 18372767 | SUBSTRATE TRANSFER SYSTEM AND IMAGE CORRECTION METHOD | LEE, BENEDICT E | 2665 | Non-Final OA | Sep 26, 2023 |
| 18552108 | SUBSTRATE LIQUID-TREATMENT DEVICE | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Sep 22, 2023 |
| 18470878 | FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM | BENNETT, CHARLEE | 1718 | Non-Final OA | Sep 20, 2023 |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | Non-Final OA | Sep 18, 2023 |
| 18467071 | BONDING APPARATUS AND BONDING METHOD | NGUYEN, DUY T V | 2818 | Non-Final OA | Sep 14, 2023 |
| 18367742 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | LEE, KEVIN G | 1711 | Non-Final OA | Sep 13, 2023 |
| 18367315 | METHOD OF SURFACE MODIFICATION FOR WAFER BONDING | INOUSSA, MOULOUCOULAY | 2818 | Non-Final OA | Sep 12, 2023 |
| 18549610 | SEMICONDUCTOR CHIP MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS | NGUYEN, THANH T | 2893 | Non-Final OA | Sep 08, 2023 |
| 18459913 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CARRILLO, BIBI SHARIDAN | 1711 | Final Rejection | Sep 01, 2023 |
| 18240010 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | Non-Final OA | Aug 30, 2023 |
| 18456642 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | RUCKER, BASEEMAH QADEER | 2817 | Non-Final OA | Aug 28, 2023 |
| 18457053 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SHAPE SPECIFYING METHOD, TRANSFER DEVICE, AND END EFFECTOR | MCCLAIN, GERALD | 3652 | Non-Final OA | Aug 28, 2023 |
| 18454632 | HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUENCY PLASMA | BENNETT, CHARLEE | 1718 | Non-Final OA | Aug 23, 2023 |
| 18546140 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | SHAMSUZZAMAN, MOHAMMED | 2897 | Non-Final OA | Aug 11, 2023 |
| 18366829 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Aug 08, 2023 |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | Final Rejection | Aug 08, 2023 |
| 18275908 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | KEBEDE, BROOK | 2818 | Non-Final OA | Aug 04, 2023 |
| 18230049 | PLASMA PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD | KACKAR, RAM N | 1716 | Non-Final OA | Aug 03, 2023 |
| 18229471 | INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TREATMENT APPARATUS | WOLDEGEORGIS, ERMIAS T | 2893 | Final Rejection | Aug 02, 2023 |
| 18364010 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | Final Rejection | Aug 02, 2023 |
| 18363993 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | Final Rejection | Aug 02, 2023 |
| 18263920 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | Non-Final OA | Aug 02, 2023 |
| 18275359 | FILM FORMING DEVICE AND FILM FORMING METHOD | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Aug 01, 2023 |
| 18227156 | SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING METHOD, AND SUPPLY METHOD | LEE, KEVIN G | 1711 | Non-Final OA | Jul 27, 2023 |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Jul 26, 2023 |
| 18359275 | SYSTEMS AND METHODS FOR DEPOSITING METAL | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Jul 26, 2023 |
| 18225077 | SEASONING METHOD AND PLASMA PROCESSING APPARATUS | YU, YUECHUAN | 1718 | Non-Final OA | Jul 21, 2023 |
| 18224940 | FORKSHEET SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME | SLUTSKER, JULIA | 2891 | Non-Final OA | Jul 21, 2023 |
| 18262422 | SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS | SELLS, JAMES D | 1745 | Non-Final OA | Jul 21, 2023 |
| 18273446 | APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE | YU, YUECHUAN | 1718 | Final Rejection | Jul 20, 2023 |
| 18273116 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | TRAN, TIEN | 2812 | Non-Final OA | Jul 19, 2023 |
| 18354889 | SUBSTRATE TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | FRASER, STEWART A | 1724 | Non-Final OA | Jul 19, 2023 |
| 18353300 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | RIDDLE, CHRISTINA A | 2882 | Non-Final OA | Jul 17, 2023 |
| 18261518 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | VU, VU A | 2897 | Non-Final OA | Jul 14, 2023 |
| 18261507 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE MANUFACTURING METHOD | WILCZEWSKI, MARY A | 2898 | Final Rejection | Jul 14, 2023 |
| 18261157 | PLATING METHOD AND PLATING APPARATUS | BAREFORD, KATHERINE A | 1718 | Non-Final OA | Jul 12, 2023 |
| 18271898 | METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS | STEVENSON, ANDRE C | 2899 | Final Rejection | Jul 12, 2023 |
| 18350519 | PLASMA PROCESSING METHOD AND APPARATUS | ZERVIGON, RUDY | 1716 | Non-Final OA | Jul 11, 2023 |
| 18260575 | COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | ZHAO, XIAO SI | 1744 | Non-Final OA | Jul 06, 2023 |
| 18345134 | FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS | BOWMAN, ANDREW J | 1717 | Non-Final OA | Jun 30, 2023 |
| 18336678 | 3D HYBRID MEMORY USING HORIZONTALLY ORIENTED CONDUCTIVE DIELECTRIC CHANNEL REGIONS | KIM, TONG-HO | 2811 | Non-Final OA | Jun 16, 2023 |
| 18210772 | SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE | VETERE, ROBERT A | 1712 | Non-Final OA | Jun 16, 2023 |
| 18210329 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM | ANDUJAR, LEONARDO | 3991 | Non-Final OA | Jun 15, 2023 |
| 18333724 | FILM FORMING METHOD | GAMBETTA, KELLY M | 1718 | Non-Final OA | Jun 13, 2023 |
| 18333019 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | AYALEW, TINSAE B | 1711 | Non-Final OA | Jun 12, 2023 |
| 18207737 | ETCHING METHOD AND PLASMA PROCESSING SYSTEM | CULBERT, ROBERTS P | 1716 | Final Rejection | Jun 09, 2023 |
| 18205426 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, PRESSURE VALVE CONTROL DEVICE, PRESSURE VALVE CONTROL METHOD, AND PRESSURE REGULATION SYSTEM | CHEN, KEATH T | 1716 | Final Rejection | Jun 02, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | Non-Final OA | May 31, 2023 |
| 18255133 | FILM FORMATION METHOD | JEFFERSON, QUOVAUNDA | 2899 | Final Rejection | May 31, 2023 |
| 18325423 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | Non-Final OA | May 30, 2023 |
| 18203062 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | YUEN, JESSICA JIPING | 3762 | Non-Final OA | May 30, 2023 |
| 18254608 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | SHUM, KENT N | 3723 | Final Rejection | May 26, 2023 |
| 18199401 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER | CROWELL, ANNA M | 1716 | Non-Final OA | May 19, 2023 |
| 18319915 | METHOD TO REDUCE PARASITIC RESISTANCE FOR CFET DEVICES THROUGH SINGLE DAMASCENE PROCESSING OF VIAS | OH, JIYOUNG | 2818 | Non-Final OA | May 18, 2023 |
| 18198928 | CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER METHOD | HAGEMAN, MARK C | 3652 | Non-Final OA | May 18, 2023 |
| 18197525 | ABNORMALITY DETECTION METHOD AND TRANSFER DEVICE | MARU, TEMESGEN MALLEDE | 3655 | Non-Final OA | May 15, 2023 |
| 18312427 | Protection Layer Formation during Plasma Etching Conductive Materials | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | May 04, 2023 |
| 18035401 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE | LUND, JEFFRIE ROBERT | 1716 | Non-Final OA | May 04, 2023 |
| 18141700 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | ALEJANDRO MULERO, LUZ L | 1716 | Non-Final OA | May 01, 2023 |
| 18249552 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Apr 19, 2023 |
| 18303485 | SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD | CHAN, LAUREEN | 1716 | Final Rejection | Apr 19, 2023 |
| 18248562 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Apr 11, 2023 |
| 18295462 | BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD, AND RECORDING MEDIUM | GRAY, AARON J | 2897 | Non-Final OA | Apr 04, 2023 |
| 18295144 | Apparatus and Methods for Plasma Processing | STARK, JARRETT J | 2898 | Non-Final OA | Apr 03, 2023 |
| 18247497 | FILLING METHOD AND FILM FORMING APPARATUS | HERNANDEZ-KENNEY, JOSE | 1717 | Final Rejection | Mar 31, 2023 |
| 18129437 | SUBSTRATE PROCESSING APPARATUS | MCCORMACK, JOHN PATRICK | 3762 | Non-Final OA | Mar 31, 2023 |
| 18193324 | Dry Developing Metal-Free Photoresists | LEE, ALEXANDER N | 1737 | Non-Final OA | Mar 30, 2023 |
| 18125206 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Mar 23, 2023 |
| 18027722 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE | TRAN, TONY | 2893 | Non-Final OA | Mar 22, 2023 |
| 18187558 | Impedance Matching Network and Control Method | FERNANDEZ, PEDRO C | 2844 | Non-Final OA | Mar 21, 2023 |
| 18121621 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Mar 15, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | Final Rejection | Mar 10, 2023 |
| 18044386 | LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD | ZABEL, ANDREW JOHN | 2818 | Non-Final OA | Mar 08, 2023 |
| 18118582 | STATE MANAGEMENT SYSTEM, STATE MANAGEMENT METHOD, AND STORAGE MEDIUM | SHECHTMAN, SEAN P | 2896 | Final Rejection | Mar 07, 2023 |
| 18115366 | SUBSTRATE HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | HUNTER, JOHN S | 3761 | Non-Final OA | Feb 28, 2023 |
| 18114998 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KACKAR, RAM N | 1716 | Final Rejection | Feb 28, 2023 |
| 18113862 | SUBSTRATE PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Feb 24, 2023 |
| 18113374 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD | LOWE, MICHAEL S | 3652 | Non-Final OA | Feb 23, 2023 |
| 18042513 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTRIC WINDOW | LEE, WILSON | 2844 | Final Rejection | Feb 22, 2023 |
| 18022213 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | CHACKO DAVIS, DABORAH | 1737 | Non-Final OA | Feb 20, 2023 |
| 18109632 | PLASMA PROCESSING APPARATUS | KACKAR, RAM N | 1716 | Final Rejection | Feb 14, 2023 |
| 18040669 | THERMAL TREATMENT APPARATUS, THERMAL TREATMENT METHOD, AND STORAGE MEDIUM | ELLIOTT, TOPAZ L | 3761 | Non-Final OA | Feb 06, 2023 |
| 18105993 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | KITT, STEPHEN A | 1717 | Non-Final OA | Feb 06, 2023 |
| 18106036 | SUBSTRATE PROCESSING APPARATUS | FORD, NATHAN K | 1716 | Final Rejection | Feb 06, 2023 |
| 18164003 | METHOD AND APPARATUS FOR PROCESSING SUBSTRATE | MYERS, KEITH STANLEY | 3763 | Final Rejection | Feb 03, 2023 |
| 18162876 | Antenna Plane Magnets | YU, YUECHUAN | 1718 | Final Rejection | Feb 01, 2023 |
| 18160779 | Selective Deposition of Passivating Layer During Spacer Etching | BOEGEL, CHEVY JACOB | 2812 | Non-Final OA | Jan 27, 2023 |
| 18159865 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE | ZERVIGON, RUDY | 1716 | Non-Final OA | Jan 26, 2023 |
| 18159295 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 1716 | Final Rejection | Jan 25, 2023 |
| 18156618 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | Final Rejection | Jan 19, 2023 |
| 18016943 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Jan 19, 2023 |
| 18004931 | FILM FORMING METHOD AND FILM FORMING APPARATUS | MCCLURE, CHRISTINA D | 1718 | Non-Final OA | Jan 10, 2023 |
| 18014884 | FILM FORMING APPARATUS AND FILM FORMING METHOD | ZERVIGON, RUDY | 1716 | Final Rejection | Jan 06, 2023 |
| 18151223 | Method for Etching Features in a Layer in a Substrate | LAOBAK, ANDREW KEELAN | 1713 | Non-Final OA | Jan 06, 2023 |
| 18093205 | 3D UFET DEVICE FOR ADVANCED 3D INTEGRATION | HENRY, CALEB E | 2818 | Non-Final OA | Jan 04, 2023 |
| 18090537 | INFORMATION PROCESSING METHOD AND INFORMATION PROCESSING APPARATUS INCLUDING ACQUIRING A TIME SERIES DATA GROUP MEASURED DUIRNG A PROCESSING CYCLE FOR A SUBSTRATE | YOUNG, TIFFANY P | 3665 | Non-Final OA | Dec 29, 2022 |
| 18146535 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | Non-Final OA | Dec 27, 2022 |
| 18145885 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | HONG, SEAHEE | 3723 | Non-Final OA | Dec 23, 2022 |
| 18086647 | PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD | FORD, NATHAN K | 1716 | Non-Final OA | Dec 22, 2022 |
| 18062449 | Methods for Etching Molybdenum | KIELIN, ERIK J | 2814 | Non-Final OA | Dec 06, 2022 |
| 18073185 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Dec 01, 2022 |
| 18060040 | SOLVENT VAPOR SUPPLY APPARATUS AND SOLVENT VAPOR SUPPLY METHOD | TREMARCHE, CONNOR J. | 3762 | Non-Final OA | Nov 30, 2022 |
| 17994711 | PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE | SWEELY, KURT D | 1718 | Non-Final OA | Nov 28, 2022 |
| 18058245 | APPARATUS AND METHOD FOR REPAIRING DEFECT OF SEMICONDUCTOR | SHAMSUZZAMAN, MOHAMMED | 2897 | Final Rejection | Nov 22, 2022 |
| 17990022 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | ZERVIGON, RUDY | 1716 | Non-Final OA | Nov 18, 2022 |
| 17988513 | SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS | LUND, JEFFRIE ROBERT | 1716 | Non-Final OA | Nov 16, 2022 |
| 18055490 | HEAT TREATMENT APPARATUS | TREMARCHE, CONNOR J. | 3762 | Final Rejection | Nov 15, 2022 |
| 17997558 | REPLACING APPARATUS AND REPLACING METHOD | CADUGAN, ERICA E | 3722 | Non-Final OA | Oct 31, 2022 |
| 17997557 | PROCESSING APPARATUS, AND INSTALLING METHOD OF PROCESSING TOOL OF PROCESSING APPARATUS | CADUGAN, ERICA E | 3722 | Non-Final OA | Oct 31, 2022 |
| 17976513 | SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Oct 28, 2022 |
| 17997158 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SYSTEM | GHYKA, ALEXANDER G | 2812 | Non-Final OA | Oct 26, 2022 |
| 18048618 | METHOD FOR FORMING A PATTERN | LAOBAK, ANDREW KEELAN | 1713 | Final Rejection | Oct 21, 2022 |
| 17996524 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Oct 19, 2022 |
| 17959771 | SILICON NANO SHEET THREE-DIMENSIONAL HORIZONTAL MEMORY WITH ALL-AROUND METAL STORAGE CAPACITOR | SON, ERIKA HEERA | 2893 | Non-Final OA | Oct 04, 2022 |
| 17952552 | ULTRA-DENSE THREE-DIMENSIONAL TRANSISTOR DESIGN | GREAVING, JASON JAMES | 2893 | Non-Final OA | Sep 26, 2022 |
| 17949520 | GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GATE VALVE | MOORE, KARLA A | 1716 | Final Rejection | Sep 21, 2022 |
| 17906353 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | WALTERS JR, ROBERT S | 1717 | Final Rejection | Sep 15, 2022 |
| 17931957 | DEPOSITION METHOD AND DEPOSITION APPARATUS | MILLER, JR, JOSEPH ALBERT | 1712 | Final Rejection | Sep 14, 2022 |
| 17943926 | PATTERNING A SEMICONDUCTOR WORKPIECE | CHACKO DAVIS, DABORAH | 1737 | Non-Final OA | Sep 13, 2022 |
| 17943702 | METHOD OF DETECTING DEVIATION AMOUNT OF SUBSTRATE TRANSPORT POSITION AND SUBSTRATE PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Sep 13, 2022 |
| 17943729 | Hybrid Development of EUV Resists | CHACKO DAVIS, DABORAH | 1737 | Non-Final OA | Sep 13, 2022 |
| 17903431 | SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Sep 06, 2022 |
| 17902919 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | MOORE, KARLA A | 1716 | Final Rejection | Sep 05, 2022 |
| 17901783 | METHODS OF COMPACT CELL DESIGN FOR LOGIC APPLICATIONS | ASHBAHIAN, ERIC K | 2891 | Non-Final OA | Sep 01, 2022 |
| 17898104 | METHODS FOR FORMING SEMICONDUCTOR DEVICES WITH ISOLATION STRUCTURES | KIM, SU C | 2899 | Non-Final OA | Aug 29, 2022 |
| 17896904 | APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM ON SUBSTRATE | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Aug 26, 2022 |
| 17894296 | ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK | CROWELL, ANNA M | 1716 | Non-Final OA | Aug 24, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | Final Rejection | Aug 23, 2022 |
| 17820962 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | Final Rejection | Aug 19, 2022 |
| 17889632 | PLASMA PROCESSING APPARATUS AND ETCHING METHOD | BENNETT, CHARLEE | 1718 | Final Rejection | Aug 17, 2022 |
| 17904427 | PLASMA PROCESSING APPARATUS | YU, YUECHUAN | 1718 | Final Rejection | Aug 17, 2022 |
| 17887946 | PROVIDING A BARRIER LAYER FOR PHOTORESIST PROCESSING | CHACKO DAVIS, DABORAH | 1737 | Non-Final OA | Aug 15, 2022 |
| 17818547 | FILM FORMING APPARATUS | ZERVIGON, RUDY | 1716 | Final Rejection | Aug 09, 2022 |
| 17880660 | METHOD AND APPARATUS FOR CONTROLLING A SHAPE OF A PATTERN OVER A SUBSTRATE | PHAM, THOMAS T | 1713 | Final Rejection | Aug 04, 2022 |
| 17817091 | ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SENSOR | KOTOWSKI, LISA MICHELLE | 2859 | Final Rejection | Aug 03, 2022 |
| 17879803 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | SWEELY, KURT D | 1718 | Non-Final OA | Aug 03, 2022 |
| 17865433 | ETCHING METHOD, PLASMA PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND PROGRAM | STEVENSON, ANDRE C | 2899 | Non-Final OA | Jul 15, 2022 |
| 17812523 | METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM | GATES, BRADFORD M | 1713 | Final Rejection | Jul 14, 2022 |
| 17863594 | WAFER BONDING METHOD USING SELECTIVE DEPOSITION AND SURFACE TREATMENT | STEPHENSON, KENNETH STEPHEN | 2898 | Final Rejection | Jul 13, 2022 |
| 17862889 | SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM | BAND, MICHAEL A | 1794 | Final Rejection | Jul 12, 2022 |
| 17860127 | METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Jul 08, 2022 |
| 17861021 | METHOD TO ENHANCE 3D VERTICAL DEVICE PERFORMANCE AND 3D CIRCUIT DENSITY | MICHAUD, NICHOLAS BRIAN | 2818 | Non-Final OA | Jul 08, 2022 |
| 17859520 | PLASMA PROCESSING APPARATUS AND PROCESSING METHOD | CHEN, KEATH T | 1716 | Non-Final OA | Jul 07, 2022 |
| 17854944 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHAN, LAUREEN | 1716 | Non-Final OA | Jun 30, 2022 |
| 17809384 | PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Final Rejection | Jun 28, 2022 |
| 17848596 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Jun 24, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Jun 21, 2022 |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | SEOANE, TODD MICHAEL | 1718 | Non-Final OA | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | Non-Final OA | Jun 17, 2022 |
| 17807506 | FILM FORMING APPARATUS | CHEN, KEATH T | 1716 | Final Rejection | Jun 17, 2022 |
| 17757376 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | WIECZOREK, MICHAEL P | 1712 | Final Rejection | Jun 15, 2022 |
| 17828384 | CONTROL METHOD AND CONTROL APPARATUS | ALEXANDER, EMMA LYNNE | 2857 | Final Rejection | May 31, 2022 |
| 17826870 | INFORMATION PROCESSING APPARATUS, SIMULATION METHOD, AND INFORMATION PROCESSING SYSTEM | MIRABITO, MICHAEL PAUL | 2187 | Final Rejection | May 27, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | Final Rejection | May 24, 2022 |
| 17664607 | Apparatus for Plasma Processing | LEE, AIDEN Y | 1718 | Non-Final OA | May 23, 2022 |
| 17747861 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | Final Rejection | May 18, 2022 |
| 17734125 | ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | CROWELL, ANNA M | 1716 | Final Rejection | May 02, 2022 |
| 17661095 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MARKOFF, ALEXANDER | 1711 | Final Rejection | Apr 28, 2022 |
| 17657194 | INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC DEVICE, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS | SUN, XIUQIN | 2857 | Non-Final OA | Mar 30, 2022 |
| 17706958 | BILAYER DIELECTRIC STACK FOR A FERROELECTRIC TUNNEL JUNCTION AND METHOD OF FORMING | WINTERS, SEAN AYERS | 2892 | Final Rejection | Mar 29, 2022 |
| 17655071 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Mar 16, 2022 |
| 17761091 | RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Mar 16, 2022 |
| 17654625 | TEMPERATURE CONTROL UNIT AND PROCESSING APPARATUS | JONES, GORDON A | 3763 | Final Rejection | Mar 14, 2022 |
| 17753264 | SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM | BAREFORD, KATHERINE A | 1718 | Final Rejection | Feb 25, 2022 |
| 17676411 | APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF | BAND, MICHAEL A | 1794 | Non-Final OA | Feb 21, 2022 |
| 17636430 | SUPPLY SYSTEM FOR SUPPLYING RAW MATERIAL GAS GENERATED BY VAPORIZING SOLID RAW MATERIAL | KURPLE, KARL | 1717 | Non-Final OA | Feb 18, 2022 |
| 17667378 | ADVANCED 3D DEVICE ARCHITECTURE USING NANOSHEETS WITH 2D MATERIALS FOR SPEED ENHANCEMENT | PURVIS, SUE A | 2893 | Final Rejection | Feb 08, 2022 |
| 17650133 | SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HEATER | ZERVIGON, RUDY | 1716 | Non-Final OA | Feb 07, 2022 |
| 17647185 | METHOD FOR FORMING FILM AND PROCESSING APPARATUS | HERNANDEZ-KENNEY, JOSE | 1717 | Final Rejection | Jan 06, 2022 |
| 17645829 | PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD | CHEN, KEATH T | 1716 | Non-Final OA | Dec 23, 2021 |
| 17596385 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | Final Rejection | Dec 09, 2021 |
| 17542874 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | Non-Final OA | Dec 06, 2021 |
| 17454308 | EDGE RING AND SUBSTRATE PROCESSING APPARATUS | MOORE, KARLA A | 1716 | Final Rejection | Nov 10, 2021 |
| 17522191 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | FORD, NATHAN K | 1716 | Final Rejection | Nov 09, 2021 |
| 17452642 | SUBSTRATE HOLDER, SUBSTRATE TRANSFER DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER | NIELSEN, DEREK LANG | 2899 | Non-Final OA | Oct 28, 2021 |
| 17501986 | SUBSTRATE PROCESSING SYSTEM, CONTROL METHOD, AND CONTROL PROGRAM | MOORE, KARLA A | 1716 | Final Rejection | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | Final Rejection | Sep 27, 2021 |
| 17380624 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Jul 20, 2021 |
| 17421001 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | ALEJANDRO MULERO, LUZ L | 1716 | Non-Final OA | Jul 06, 2021 |
| 17342809 | STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD | KLUNK, MARGARET D | 1716 | Final Rejection | Jun 09, 2021 |
| 17291713 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT METHOD | MOORE, KARLA A | 1716 | Non-Final OA | May 06, 2021 |
| 17272945 | MOUNTING BASE, SUBSTRATE PROCESSING DEVICE, EDGE RING, AND EDGE RING TRANSFER METHOD | CROWELL, ANNA M | 1716 | Non-Final OA | Mar 03, 2021 |
| 17178458 | SUBSTRATE PROCESSING APPARATUS | NUCKOLS, TIFFANY Z | 1716 | Final Rejection | Feb 18, 2021 |
| 17255990 | FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS | PIZARRO CRESPO, MARCOS D | 2814 | Final Rejection | Dec 23, 2020 |
| 17037142 | Systems and Methods for Spin Process Video Analysis During Substrate Processing | BAREFORD, KATHERINE A | 1718 | Non-Final OA | Sep 29, 2020 |
| 17037087 | METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE SYSTEMS | LOPEZ ALVAREZ, OLVIN | 2117 | Non-Final OA | Sep 29, 2020 |
| 16992550 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHEN, KEATH T | 1716 | Final Rejection | Aug 13, 2020 |
| 16580232 | VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS | FORD, NATHAN K | 1716 | Non-Final OA | Sep 24, 2019 |
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