Prosecution Insights
Prosecution Insights
Technology areas: Chemistry & Materials • Semiconductors, Circuits & Optics
300 pending office actions • 53 art units • 198 examiners • 0 of 300 (0%) have an AI response strategy ready • 671 patents granted in the last 365 days
Tokyo Electron Limited has a large volume of 300 pending office actions in the Chemistry & Materials technology area. These actions are spread across 53 distinct art units, demonstrating a very broad and active prosecution pipeline. This extensive reach across 53 art units indicates that the company's chemical and material innovations are highly diverse and impact many different technical sectors.
The portfolio involves 196 distinct examiners. CHEN, KEATH T is the busiest examiner, managing 8 pending actions. Despite the high total of 300 actions, the use of 196 examiners suggests that the workload is distributed to avoid excessive concentration with any single individual. The 8 actions handled by CHEN, KEATH T represent only a small fraction of the total 300 pending matters.
Managing 300 pending office actions across 196 examiners and 53 art units requires a highly organized approach to prosecution. The lack of significant examiner concentration, with the busiest examiner only handling 8 actions, means the company must be prepared for a wide variety of examiner behaviors. Practitioners should focus on the 53 art units to find broader trends, as the 196 individual examiners will likely provide a diverse range of examination experiences.
Based on the USPTO statutory response window for each pending office action. 61 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 61 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 1 (0%) |
| §101 + other | 13 (4%) |
| §103 only | 107 (36%) |
| §102 only | 29 (10%) |
| §112 only | 16 (5%) |
| Double-patenting only | 3 (1%) |
| Double-patenting + other | 8 (3%) |
| Multi-statute (no §101) | 122 (41%) |
| No statute on record | 1 (0%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| CHEN, KEATH T | 8 | 30.2% | +24.7% |
| KENDALL, BENJAMIN R | 7 | 33.4% | +21.5% |
| CROWELL, ANNA M | 6 | 44.6% | +30.5% |
| MACARTHUR, SYLVIA | 5 | 65.7% | +25.9% |
| ZERVIGON, RUDY | 5 | 66.8% | -5.4% |
| MOORE, KARLA A | 5 | 43.1% | +14.0% |
| BAREFORD, KATHERINE A | 4 | 13.8% | +28.4% |
| LAOBAK, ANDREW KEELAN | 4 | 75.4% | +34.5% |
| PHAM, THOMAS T | 4 | 51.4% | +15.7% |
| SATHIRAJU, SRINIVAS | 3 | 88.9% | +6.2% |
Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 3 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 18935665 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 14d |
| 19232884 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — |
| 19233036 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 60d overdue |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 36d overdue |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 31d overdue |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 19d overdue |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 3d overdue |
| 17997558 | REPLACING APPARATUS AND REPLACING METHOD | CADUGAN, ERICA E | 2d overdue |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 6d |
| 18350519 | PLASMA PROCESSING METHOD AND APPARATUS | ZERVIGON, RUDY | 14d |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17747861 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 31d overdue |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 18d overdue |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 11d overdue |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 3d overdue |
| 18552108 | SUBSTRATE LIQUID-TREATMENT DEVICE | MACARTHUR, SYLVIA | 14d |
| 16992550 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHEN, KEATH T | 28d |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 29d |
| 18159295 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 30d |
| Art Unit | Apps |
|---|---|
| 1716 | 29 |
| 1718 | 28 |
| 1713 | 21 |
| 1794 | 9 |
| 1717 | 7 |
| 1714 | 6 |
| 2896 | 6 |
| 1759 | 5 |
| 2899 | 5 |
| 2844 | 4 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19272175 | SUBSTRATE PROCESSING METHOD | EMPIE, NATHAN H | — | §102§103 | Non-Final OA | — | Pending | Jul 17, 2025 |
| 19265822 | PLASMA-PROCESSING APPARATUS AND PLASMA-PROCESSING METHOD | KAISER, SYED M | — | §102 | Non-Final OA | — | Pending | Jul 10, 2025 |
| 19264096 | PLASMA PROCESSING APPARATUS | TRAN, MINH | — | §102§103 | Non-Final OA | — | Pending | Jul 09, 2025 |
| 19240089 | PLASMA PROCESSING APPARATUS | LE, TUNG X | — | §103 | Non-Final OA | — | Pending | Jun 17, 2025 |
| 19234767 | VALVE AND SUBSTRATE PROCESSING APPARATUS | BARRY, DAPHNE MARIE | 3753 | §102 | Non-Final OA | — | Pending | Jun 11, 2025 |
| 19232884 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19233036 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | — | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19232127 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | WIECZOREK, MICHAEL P | 1715 | §103§112 | Non-Final OA | — | Pending | Jun 09, 2025 |
| 19221714 | RECORDING MEDIUM, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING METHOD | HU, JENSEN | 2169 | §101 | Final Rejection | — | Pending | May 29, 2025 |
| 19213239 | Substrate Processing Method and Substrate Processing Apparatus | WALTERS JR, ROBERT S | — | §112 | Non-Final OA | — | Pending | May 20, 2025 |
| 19211708 | RECIPE OPTIMIZATION METHOD AND HEAT TREATMENT APPARATUS | PROCTOR, CACHET I | — | §103§112 | Non-Final OA | — | Pending | May 19, 2025 |
| 19212511 | Substrate Processing Method and Substrate Processing Apparatus | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | — | Pending | May 19, 2025 |
| 19210017 | FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS | CHEN, BRET P | 1715 | §112 | Non-Final OA | — | Pending | May 16, 2025 |
| 19207755 | PLASMA PROCESSING APPARATUS AND MATCHING DEVICE | KAISER, SYED M | — | §102 | Non-Final OA | — | Pending | May 14, 2025 |
| 19205415 | CLEANING METHOD AND FILM-FORMING APPARATUS | MILLER, MICHAEL G | — | §103 | Non-Final OA | — | Pending | May 12, 2025 |
| 19204688 | PLASMA PROCESSING APPARATUS | SWANSON, ANDREW L | — | §101§102§103§112DP | Non-Final OA | — | Pending | May 12, 2025 |
| 19191504 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | — | Pending | Apr 28, 2025 |
| 19185246 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | — | Pending | Apr 22, 2025 |
| 18846977 | EXHAUST STRUCTURE AND EXHAUST METHOD FOR FLOW RATE CONTROL DEVICE, AND GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD COMPRISING SAME | HICKS, ANGELISA | — | §103§112 | Non-Final OA | — | Pending | Apr 17, 2025 |
| 19175014 | SUBSTRATE PROCESSING APPARATUS, MEASURING DEVICE, AND MEASURING METHOD | AMARA, MOHAMED K | — | §102§103 | Non-Final OA | — | Pending | Apr 10, 2025 |
| 19170138 | DEVELOPING APPARATUS, DEVELOPING METHOD, AND COMPUTER PROGRAM | WHITESELL, STEVEN H | — | §102§103 | Non-Final OA | — | Pending | Apr 04, 2025 |
| 19096492 | AREA SELECTIVE DEPOSITION USING METAL CARBONYL PRECURSORS | EMPIE, NATHAN H | 1712 | §102§103 | Non-Final OA | — | Pending | Mar 31, 2025 |
| 19093922 | METHOD FOR OPERATING FILM FORMING DEVICE AND FILM FORMING DEVICE | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | — | Pending | Mar 28, 2025 |
| 19090475 | SUBSTRATE EVALUATION METHOD AND SUBSTRATE PROCESSING APPARATUS | AKANBI, ISIAKA O | — | §102§103 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 19090806 | COOLING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND COOLING METHOD | RUPPERT, ERIC S | — | §102§103 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 18684088 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Final Rejection | — | Pending | Mar 24, 2025 |
| 19086206 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TALBOT, BRIAN K | 1712 | §103§112 | Non-Final OA | — | Pending | Mar 21, 2025 |
| 19083581 | PLASMA PROCESSING APPARATUS | CHAN, WEI | — | §103Other | Non-Final OA | — | Pending | Mar 19, 2025 |
| 19082876 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | AYALEW, TINSAE B | — | §102§103§112 | Non-Final OA | — | Pending | Mar 18, 2025 |
| 19111422 | PROCESSOR THAT IMPLEMENTS INDIRECT ADDRESSING-STYLE CONDITIONAL JUMP INSTRUCTIONS, PROGRAM RECORDING MEDIUM, AND METHOD | METZGER, MICHAEL J | 2183 | §103 | Non-Final OA | — | Pending | Mar 13, 2025 |
| 19078750 | INSPECTION METHOD, INSPECTION DEVICE, AND PROGRAM | SANGHERA, JAS A | — | §102§103 | Non-Final OA | — | Pending | Mar 13, 2025 |
| 19070912 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Mar 05, 2025 |
| 19063605 | MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING METHOD, AND STORAGE MEDIUM | WASEL, MOHAMED A | — | §102Other | Non-Final OA | — | Pending | Feb 26, 2025 |
| 19062585 | ETCHING METHOD, PRECOAT METHOD, AND ETCHING APPARATUS | AHMED, SHAMIM | — | §102§103 | Non-Final OA | — | Pending | Feb 25, 2025 |
| 19056816 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NUCKOLS, TIFFANY Z | — | §103 | Non-Final OA | — | Pending | Feb 19, 2025 |
| 19050019 | SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM | AN, IG TAI | — | §103 | Non-Final OA | — | Pending | Feb 10, 2025 |
| 19033032 | COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND STORAGE MEDIUM | TADESSE, YEWEBDAR T | 1718 | §102 | Non-Final OA | — | Pending | Jan 21, 2025 |
| 19023119 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCLUDING A PRE-TREATMENT PROCESS OF SUPPLYING A HEATED FLUID TO A SECOND SURFACE OF A SUBSTRATE AND SUPPLYING A PRE-WETTING LIQUID TO A FIRST SURFACE OF THE SUBSTRATE, WHILE ROTATING THE SUBSTRATE | BERGNER, ERIN FLANAGAN | — | §103§112 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19022101 | PLASMA PURGE METHOD AND PLASMA PROCESSING APPARATUS | GOLIGHTLY, ERIC WAYNE | — | §103 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19021284 | CONTROL PROGRAM, INFORMATION PROCESSING PROGRAM, CONTROL METHOD, INFORMATION PROCESSING METHOD, PLASMA PROCESSING DEVICE, AND INFORMATION PROCESSING DEVICE | LEE, WILSON | 2844 | §102§103 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19010740 | 3D IMAGING BY LIQUID IMMERSION WITH TILT AND/OR ROTATION | ZHAO, DAQUAN | 2484 | — | Non-Final OA | — | Pending | Jan 06, 2025 |
| 19010575 | BONDING METHOD AND BONDING APPARATUS | PATWARDHAN, ABHISHEK A | 1746 | §103§112 | Non-Final OA | — | Pending | Jan 06, 2025 |
| 19005674 | Transfer System and Semiconductor Manufacturing Method | TIGHE, BRENDAN P | — | §103 | Non-Final OA | — | Pending | Dec 30, 2024 |
| 18879383 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | LEE, DOUGLAS | 1714 | §102§103 | Non-Final OA | — | Pending | Dec 27, 2024 |
| 18999454 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | 63d | Pending | Dec 23, 2024 |
| 18986780 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, CHI Q | — | §112 | Non-Final OA | — | Pending | Dec 19, 2024 |
| 18984165 | TREATMENT SOLUTION SUPPLY APPARATUS, REPORTING METHOD, AND STORAGE MEDIUM | PAN, YONGJIA | — | §102§103 | Non-Final OA | — | Pending | Dec 17, 2024 |
| 18961960 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | TOLIN, MICHAEL A | 1745 | §102§103 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18962032 | DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBSTRATE PROCESSING APPARATUS | ASTACIO-OQUENDO, GIOVANNI | — | §112 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18958279 | METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS | MAYY, MOHAMMAD | 1718 | §102§103 | Final Rejection | — | Pending | Nov 25, 2024 |
| 18958534 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | §103Other | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18956676 | SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE PROCESSING METHOD | PARIHAR, PRADHUMAN | 1714 | §101§102§103 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18868298 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | ZHANG, RICHARD Z | 1711 | §102§103§112 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18954901 | METHOD FOR FORMING INSULATION FILM | GAMBETTA, KELLY M | 1718 | §103§112 | Final Rejection | — | Pending | Nov 21, 2024 |
| 18953435 | SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VISUALIZATION METHOD | BROUGHTON, KATHLEEN M | — | §102§112 | Non-Final OA | — | Pending | Nov 20, 2024 |
| 18951828 | SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRANSFER METHOD | MOSCOSO, JUAN SALVADOR | — | §103 | Non-Final OA | — | Pending | Nov 19, 2024 |
| 18949248 | SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD | LEE, DOUGLAS | 1714 | §103 | Final Rejection | — | Pending | Nov 15, 2024 |
| 18949607 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MCCLAIN, GERALD | 3652 | §102 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18946836 | Transfer Module, and Substrate Transfer Method in Semiconductor Manufacturing Apparatus | ISLAM, MUHAMMAD S | — | §102§103§112 | Non-Final OA | — | Pending | Nov 13, 2024 |
| 18945702 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MYERS, GLENN F | — | §102§103 | Non-Final OA | — | Pending | Nov 13, 2024 |
| 18944260 | METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS | ARTMAN, THOMAS R | — | §102§103 | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18944017 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NGUYEN, CHI Q | — | §112DP | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18939729 | PLASMA PROCESSING APPARATUS | LUONG, HENRY T | — | §103 | Non-Final OA | — | Pending | Nov 07, 2024 |
| 18937082 | SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS | HALL JR, TYRONE VINCENT | — | §102 | Non-Final OA | — | Pending | Nov 05, 2024 |
| 18935665 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2844 | DP | Final Rejection | 14d | Pending | Nov 04, 2024 |
| 18935537 | PLASMA PROCESSING APPARATUS | BENNETT, CHARLEE | — | §103 | Non-Final OA | — | Pending | Nov 03, 2024 |
| 18923883 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §112 | Final Rejection | 40d | Pending | Oct 23, 2024 |
| 18921728 | Teaching Method and Substrate Processing System | MORFORD, ALEXANDRA ROBYN | — | §101§103 | Non-Final OA | — | Pending | Oct 21, 2024 |
| 18918374 | VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS | HALL JR, TYRONE VINCENT | — | §102 | Non-Final OA | — | Pending | Oct 17, 2024 |
| 18918152 | ETCHING METHOD | AHMED, SHAMIM | 1713 | §102§103DP | Non-Final OA | — | Pending | Oct 17, 2024 |
| 18917538 | FILM FORMING METHOD | TUROCY, DAVID P | 1718 | §103 | Final Rejection | — | Pending | Oct 16, 2024 |
| 18857016 | FILM-FORMING METHOD AND SUBSTRATE-PROCESSING DEVICE | TADAYYON ESLAMI, TABASSOM | 1718 | §103§112 | Final Rejection | 21d | Pending | Oct 15, 2024 |
| 18914666 | SUBSTRATE PROCESSING APPARATUS | AHADI, ELIA | — | §102§103 | Non-Final OA | — | Pending | Oct 14, 2024 |
| 18856129 | FLOWRATE CONTROL UNIT FOR TEMPERATURE ADJUSTMENT AND SEMICONDUCTOR MANUFACTURING DEVICE | ZERVIGON, RUDY | — | §102§112 | Non-Final OA | — | Pending | Oct 11, 2024 |
| 18913135 | METHOD FOR SEMICONDUCTOR MANUFACTURING | BRAYTON, JOHN JOSEPH | 1794 | §103§112 | Non-Final OA | — | Pending | Oct 11, 2024 |
| 18909227 | DISPLAY DEVICE, RECORDING MEDIUM, AND DISPLAY METHOD | PEREN, VINCENT ROBERT | 2617 | §103 | Final Rejection | — | Pending | Oct 08, 2024 |
| 18855160 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CULBERT, ROBERTS P | — | §102§112 | Non-Final OA | — | Pending | Oct 08, 2024 |
| 18907922 | FILM-FORMING METHOD AND FILM-FORMING APPARATUS | LUONG, HENRY T | — | §103 | Non-Final OA | — | Pending | Oct 07, 2024 |
| 18893492 | ELECTRICAL ENERGY PRODUCED BY ROTATING MAGNETS | TADESSE, YEWEBDAR T | 1717 | §102§103 | Non-Final OA | — | Pending | Sep 23, 2024 |
| 18893142 | SUBSTRATE PROCESSING APPARATUS | LE, TUNG X | — | §102§103 | Non-Final OA | — | Pending | Sep 23, 2024 |
| 18887050 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | MCDONALD, RODNEY GLENN | — | §103 | Non-Final OA | — | Pending | Sep 17, 2024 |
| 18882797 | DATA ANALYSIS SYSTEM, DATA ANALYSIS DEVICE, DATA ANALYSIS METHOD, AND RECORDING MEDIUM | ERDMAN, CHAD G | — | §101§103 | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18830662 | OZONE CONCENTRATOR, SUBSTRATE PROCESSING APPARATUS, AND OZONE SUPPLY METHOD | CHORBAJI, MONZER R | — | §102 | Non-Final OA | — | Pending | Sep 11, 2024 |
| 18825163 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | LUND, JEFFRIE ROBERT | — | §112 | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18820492 | PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS | GARCIA, SANTIAGO | — | §102 | Final Rejection | — | Pending | Aug 30, 2024 |
| 18817042 | PLASMA ADJUSTMENT USING SOURCE-LESS RESONANT STRUCTURE | MILLER, JR, JOSEPH ALBERT | — | §102§103 | Non-Final OA | — | Pending | Aug 27, 2024 |
| 18812476 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | COUSINEAU, CONNOR DANIEL | — | §103§112 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18810920 | FLOW DIVIDER AND LIQUID PROCESSING SYSTEM | CLEMENTE, ROBERT ARTHUR | — | §102 | Non-Final OA | — | Pending | Aug 21, 2024 |
| 18808265 | INSPECTION METHOD AND INSPECTION APPARATUS | CARLSON, JOSHUA MICHAEL | 2877 | §103§112 | Final Rejection | — | Pending | Aug 19, 2024 |
| 18838595 | SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103§112 | Final Rejection | 21d | Pending | Aug 14, 2024 |
| 18797266 | INJECTOR AND PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112DP | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18797088 | SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD | VU, STEPHEN A | — | §102§103§112DP | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18794757 | METHODS TO QUICKLY ADJUST THE TEMPERATURE OF AT LEAST ONE PROCESSING LIQUID USED TO PROCESS A SEMICONDUCTOR SUBSTRATE IN A WET PROCESS | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Aug 05, 2024 |
| 18792992 | APPARATUS FOR PLASMA PROCESSING AND METHOD OF ETCHING | CROWELL, ANNA M | — | §102§103DP | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18792259 | VACUUM TRANSFER DEVICE AND METHOD FOR CONTROLLING VACUUM TRANSFER DEVICE | BABAA, NAEL N | 3763 | §112Other | Non-Final OA | — | Pending | Aug 01, 2024 |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 1716 | §102§103 | Final Rejection | 3d overdue | Pending | Jul 31, 2024 |
| 18788530 | COPPER-LAYER ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS | CARTER, JONATHAN LANGDON | 1713 | §102§103 | Non-Final OA | — | Pending | Jul 30, 2024 |
| 18834129 | SUBSTRATE PROCESSING APPARATUS | HASSANZADEH, PARVIZ | — | §102§103 | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18781793 | ETCHING SYSTEM FOR FORMING RECESSED FEATURES WITH HIGH ASPECT RATIO | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18771025 | EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD | NGUYEN, HUNG | 2882 | §103 | Final Rejection | 10d overdue | Pending | Jul 12, 2024 |
| 18771873 | METHOD OF FORMING HARD MASK STRUCTURE | GOODWIN, DAVID J | — | §102§103 | Non-Final OA | — | Pending | Jul 12, 2024 |
| 18764779 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | ALANKO, ANITA KAREN | 1713 | §102§103 | Final Rejection | — | Pending | Jul 05, 2024 |
| 18761581 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Jul 02, 2024 |
| 18761944 | SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD | HARM, NICKOLAS R | 1745 | §102 | Final Rejection | 34d | Pending | Jul 02, 2024 |
| 18726285 | DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS | KEFAYATI, SOORENA | 2884 | §112 | Final Rejection | — | Pending | Jul 02, 2024 |
| 18757803 | SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROCESSING AND RECORDING MEDIUM | SHAFAYET, MOHAMMED | 1713 | §101§102§103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18759466 | INFORMATION PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | OUELLETTE, JONATHAN P | — | §101§102 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18754942 | INTEGRATED HIGH EFFICIENCY TRANSISTOR COOLING | KOO, LAMONT B | — | §102 | Non-Final OA | — | Pending | Jun 26, 2024 |
| 18750960 | SYSTEMS FOR REAL-TIME PULSE MEASUREMENT AND PULSE TIMING ADJUSTMENT TO CONTROL PLASMA PROCESS PERFORMANCE | CHEN, KEATH T | — | §103§112 | Non-Final OA | — | Pending | Jun 21, 2024 |
| 18750539 | PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | — | §102§103 | Non-Final OA | — | Pending | Jun 21, 2024 |
| 18747506 | CONTROL DEVICE, CONTROL METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | SHARMIN, ANZUMAN | — | §103§112 | Final Rejection | — | Pending | Jun 19, 2024 |
| 18720641 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MOORE, KARLA A | 1713 | §103 | Non-Final OA | — | Pending | Jun 16, 2024 |
| 18743589 | SUBSTRATE-PROCESSING APPARATUS AND FILM-FORMING METHOD | MOORE, KARLA A | — | §102 | Non-Final OA | — | Pending | Jun 14, 2024 |
| 18569248 | METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | 14d | Pending | Jun 13, 2024 |
| 18718981 | GAS TREATMENT METHOD AND GAS TREATMENT DEVICE | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | Jun 12, 2024 |
| 18734683 | METHOD FOR ETCHING A METAL HARD MASK | CARTER, JONATHAN LANGDON | — | §103§112 | Non-Final OA | — | Pending | Jun 05, 2024 |
| 18716150 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | POUDEL, SANTOSH RAJ | — | §112 | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18733473 | SYSTEMS AND METHODS THAT UTILIZE METAL-COATED PROCESSING HEADS TO IMPROVE WET PROCESSING OF SEMICONDUCTOR SUBSTRATES | CULBERT, ROBERTS P | 1716 | §102§103§112 | Final Rejection | — | Pending | Jun 04, 2024 |
| 18674349 | Remote Plasma Device and Plasma Processing Apparatus | FORD, NATHAN K | — | §102§103§112 | Non-Final OA | — | Pending | May 24, 2024 |
| 18713456 | TEST METHOD, CORRECTION AMOUNT CALCULATION METHOD, AND TEST DEVICE | PATEL, PARESH H | 2858 | §102 | Non-Final OA | — | Pending | May 24, 2024 |
| 18711900 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CRANDALL, JOEL DILLON | — | §102§103§112 | Non-Final OA | — | Pending | May 21, 2024 |
| 18668767 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PROGRAM | NORTON, JENNIFER L | — | §101§103 | Final Rejection | — | Pending | May 20, 2024 |
| 18668806 | SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD | WEDDLE, ALEXANDER MARION | — | §101§103§112 | Non-Final OA | — | Pending | May 20, 2024 |
| 18663644 | SUBSTRATE PROCESSING APPARATUS | MACARTHUR, SYLVIA | — | §102§103 | Non-Final OA | — | Pending | May 14, 2024 |
| 18661470 | MIXED-SPECIES BUFFER FILM FOR STRUCTURAL INTEGRITY OF METALLIZATION | ALBRECHT, PETER M | — | §103 | Non-Final OA | — | Pending | May 10, 2024 |
| 18655619 | APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE, AND METHOD OF TRANSPORTING SUBSTRATE | LOWE, MICHAEL S | 3652 | §103 | Non-Final OA | 60d | Pending | May 06, 2024 |
| 18707235 | SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD | CHIN, EDWARD | — | §102§103 | Non-Final OA | — | Pending | May 03, 2024 |
| 18653410 | FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | GAMBETTA, KELLY M | 1718 | §112 | Non-Final OA | 54d | Pending | May 02, 2024 |
| 18648828 | SUBSTRATE PROCESSING APPARATUS | SWEELY, KURT D | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18648903 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KNUDSON, BRAD ALLAN | — | §103 | Non-Final OA | — | Pending | Apr 29, 2024 |
| 18704093 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | RAHMAN, MOIN M | — | §102 | Non-Final OA | — | Pending | Apr 24, 2024 |
| 18633928 | PROCESSING APPARATUS | YU, YUECHUAN | — | §102§112Other | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18632595 | PROCESSING SYSTEM, AND PROCESSING METHOD | DRODGE, JOSEPH W | — | §103§112Other | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18628349 | PLASMA PROCESSING APPARATUS | BERMAN, JASON | — | §102§103 | Non-Final OA | — | Pending | Apr 05, 2024 |
| 18626693 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | DEO, DUY VU NGUYEN | 1713 | §103§112 | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18622694 | DIE TO WAFER BONDING METHOD AND APPARATUS WITH THERMAL CONTACT DIE SHAPE CONTROL | AHMED, SHAHED | — | §102§103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18622713 | DIE TO WAFER BONDING METHOD AND APPARATUS WITH THERMAL CONTACTLESS DIE SHAPE CONTROL | NGUYEN, DUY T V | — | §102§103 | Final Rejection | — | Pending | Mar 29, 2024 |
| 18620111 | SELECTIVE ETCHING OF SILICON ADJACENT TO SILICON-GERMANIUM | TRAN, BINH X | 1713 | §103§112 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620549 | SELF-ALIGNED CONTACT FORMATION ON SOURCE/DRAIN | STUESSY, NOLAN GABRIEL | 2812 | §102§103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620178 | ECCENTRICITY BASED WAFER SHAPE CONTROL | THOMAS, BINU | — | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620541 | WAFER TEMPERATURE MEASUREMENT FOR WET ETCHING BATH APPLICATIONS | MILLER, JR, JOSEPH ALBERT | — | §102§103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18619755 | METALLIZATION AND PLANARIZATION | MAZUMDER, DIDARUL A | — | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620222 | METHOD FOR SEMICONDUCTOR PROCESSING | BERRY, PAUL ANTHONY | — | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620762 | CONTROLLING ETCH EDGE EFFECTS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18618354 | INTEGRATING NITRIDE STRESS COMPENSATION LAYERS FOR THICK OXIDE WAFER CREATION | HARBOTTLE, CHARLOTTE ELIZABETH | 2818 | §103§112 | Final Rejection | — | Pending | Mar 27, 2024 |
| 18619016 | VERTICALLY STACKED CAPACITORS AND METHOD OF FORMING THE SAME | MOJADDEDI, OMAR F | — | §102 | Final Rejection | — | Pending | Mar 27, 2024 |
| 18616634 | USING LASER BASED SYSTEM FOR MEAN OF SHAPING OF UNSINGULATED & SINGULATED DIES BY SUBSTRATE LATTICE MANIPULATION | STEWART, ROBERT LINCOLN | 4100 | §102§103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18616526 | PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD | SWEELY, KURT D | 1713 | §103 | Final Rejection | — | Pending | Mar 26, 2024 |
| 18616594 | SUBSTRATE PROCESSING APPARATUS | PAIK, SANG YEOP | — | §102 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18617380 | MULTIPATTERNING WITH CROSSLINKABLE OVERCOAT | SULLIVAN, CALEEN O | — | §102§103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18615346 | METHOD FOR PATTERNING MASK LAYER USING METAL-CONTAINING RESIST | SULLIVAN, CALEEN O | — | §102 | Non-Final OA | — | Pending | Mar 25, 2024 |
| 18610344 | SUBSTRATE PROCESSING APPARATUS | PAIK, SANG YEOP | — | §102§103 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18611527 | PLASMA ASSISTED METAL OXIDE REDUCTION | BERRY, PAUL ANTHONY | 4100 | §103§112 | Final Rejection | — | Pending | Mar 20, 2024 |
| 18610909 | SYSTEM AND METHOD FOR ADJUSTING ETCH SELECTIVITY OF ETCHANT SOLUTION | REMAVEGE, CHRISTOPHER | 4100 | §112 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18609525 | FILM FORMING METHOD AND FILM FORMING APPARATUS | BRATLAND JR, KENNETH A | 1714 | §103§112 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18607202 | HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS | LAOBAK, ANDREW KEELAN | 1713 | §102§103 | Final Rejection | — | Pending | Mar 15, 2024 |
| 18606289 | GRID-LESS ION ENERGY DETECTOR | OSENBAUGH-STEWART, ELIZA W | 2881 | §102§103§112 | Final Rejection | — | Pending | Mar 15, 2024 |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 11d overdue | Pending | Mar 12, 2024 |
| 18690810 | PLASMA PROCESSING APPARATUS, CONTROL METHOD, AND STORING MEDIUM | MILLER, JR, JOSEPH ALBERT | — | §102§112 | Non-Final OA | — | Pending | Mar 11, 2024 |
| 18599876 | PILLAR CRITICAL DIMENSION REDUCTION BY ISOTROPIC PLASMA ETCHING WITH HIGH SELECTIVITY TO SILICON-CONTAINING ANTIREFLECTIVE COATING AND SILICON NITRIDE | JOHNSON, CHRISTOPHER A | 2899 | §103 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18600373 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | — | §103 | Final Rejection | — | Pending | Mar 08, 2024 |
| 18591695 | IN SITU REMOVABLE BLOCKING LAYER FORMATION | CHEN, DAVID Z | 2815 | §112 | Non-Final OA | — | Pending | Feb 29, 2024 |
| 18589845 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | DANIELS, MATTHEW J | 2891 | §103§112 | Final Rejection | — | Pending | Feb 28, 2024 |
| 18589570 | BOTTOM-UP DIRECTIONAL ATOMIC LAYER DEPOSITION (ALD) | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | 5d overdue | Pending | Feb 28, 2024 |
| 18589744 | DISTRIBUTOR AND PLASMA PROCESSING APPARATUS | CHEN, KEATH T | — | §103§112DP | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589947 | INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING SYSTEM | WENG, PEI YONG | — | §101§102§103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18588318 | IN-SITU VARIABLE TEMPERATURE BOW METROLOGY | SADATE-MOUALEU, MIREILLE SANDRA | 2855 | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18588751 | VERTICAL FEATURE GROWTH USING FLUORINE-CONTAINING GAS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Final Rejection | 56d | Pending | Feb 27, 2024 |
| 18588315 | SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | — | §102§103 | Final Rejection | — | Pending | Feb 27, 2024 |
| 18581954 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | — | §102§103 | Non-Final OA | — | Pending | Feb 20, 2024 |
| 18441518 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD | KITT, STEPHEN A | 3652 | §103§112 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18440435 | DIE SHAPE CONTROL FOR DIE TO WAFER BOND ENHANCEMENT | BLACKWELL, ASHLEY NICOLE | 2897 | §103 | Final Rejection | — | Pending | Feb 13, 2024 |
| 18436543 | APPARATUS FOR PLASMA PROCESSING | NGUYEN, SOPHIA T | 2893 | §103 | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18429479 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, THANH T | 2893 | §102 | Non-Final OA | — | Pending | Feb 01, 2024 |
| 18427992 | STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM | FLETCHER III, WILLIAM P | 1759 | §102§103§112DP | Non-Final OA | — | Pending | Jan 31, 2024 |
| 18425323 | SENSOR IN CHAMBER INSERT RING ASSEMBLY | OTT, PATRICK S | 1794 | §102§103§112 | Non-Final OA | — | Pending | Jan 29, 2024 |
| 18419733 | ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN ULTRA HIGH 3D INTEGRATION | OJEH, NDUKA E | 2892 | §102 | Non-Final OA | — | Pending | Jan 23, 2024 |
| 18418849 | TUNGSTEN-BASED ADDITIVE FOR THROUGH-SUBSTRATE ETCHING | RODRIGUEZ VILLANU, SANDRA MILENA | 2898 | §103§112 | Non-Final OA | — | Pending | Jan 22, 2024 |
| 18412676 | FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS | COLE, VICTOR | 3762 | §102§112 | Non-Final OA | — | Pending | Jan 15, 2024 |
| 18411359 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §102 | Non-Final OA | — | Pending | Jan 12, 2024 |
| 18407527 | METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICONDUCTOR SUBSTRATE | TRAN, TAN N | 2812 | §102 | Non-Final OA | 41d | Pending | Jan 09, 2024 |
| 18407499 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS MAINTENANCE METHOD | TREMARCHE, CONNOR J. | — | §102§103 | Non-Final OA | — | Pending | Jan 09, 2024 |
| 18404489 | CORRECTING OF DESIGN AND MASK SHAPE POSITION DUE TO DIE AND WAFER DISTORTION FOR BONDING | OH, JIYOUNG | 2818 | §103 | Final Rejection | — | Pending | Jan 04, 2024 |
| 18398213 | CONSUMABLE MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING CONSUMABLE MEMBER | LEE, WOO KYUNG | 2815 | §102§103 | Final Rejection | — | Pending | Dec 28, 2023 |
| 18395132 | SINGLE MASK MULTI-CRITICAL DIMENSION ETCHING USING ETCH STOP | LU, JIONG-PING | 2815 | §102§103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18573700 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUTER-READABLE RECORDING MEDIUM | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18392102 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | — | Pending | Dec 21, 2023 |
| 18536789 | FILM FORMING APPARATUS | BERMAN, JASON | 1794 | §102§103 | Final Rejection | — | Pending | Dec 12, 2023 |
| 18534880 | SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS | THOMAS, BINU | 1759 | §102§103 | Non-Final OA | — | Pending | Dec 11, 2023 |
| 18524015 | SUBSTRATE PROCESSING APPARATUS, PLASMA MEASUREMENT METHOD, AND PLASMA REGULATION METHOD | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Nov 30, 2023 |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | 60d | Pending | Nov 29, 2023 |
| 18521112 | INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND OPTIMAL SOLUTION SEARCH METHOD | NGUYEN, NHA T | — | §102 | Non-Final OA | — | Pending | Nov 28, 2023 |
| 18564314 | FILM FORMATION METHOD AND FILM FORMATION DEVICE | PHAM, THOMAS T | 1713 | §103§112 | Non-Final OA | — | Pending | Nov 27, 2023 |
| 18518696 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Nov 24, 2023 |
| 18517486 | OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS | GARBER, ERIN R | 2878 | §103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18517206 | METHOD AND SYSTEM FOR PLASMA PROCESS | PHAM, THOMAS T | 1713 | §102§103Other | Final Rejection | — | Pending | Nov 22, 2023 |
| 18563382 | PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING DEVICE | WALKE, AMANDA C | — | §102§103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18518256 | Semiconductor device and semiconductor device manufacturing method | RAMPERSAUD, PRIYA M | 2897 | §102§103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18512566 | PLASMA PROCESSING APPARATUS AND RF SYSTEM | CROWELL, ANNA M | 1716 | §102 | Non-Final OA | — | Pending | Nov 17, 2023 |
| 18511327 | LAYER STACK FOR EXTREME ULTRAVIOLET LITHOGRAPHY | LEE, ALEXANDER N | — | §102§103 | Non-Final OA | — | Pending | Nov 16, 2023 |
| 18510273 | PLASMA PROCESSING APPARATUS | BRAYTON, JOHN JOSEPH | 1794 | §103§112 | Final Rejection | — | Pending | Nov 15, 2023 |
| 18509560 | INTEGRATED NANOSHEET MEMORY ELEMENTS, DEVICES AND METHODS | YAP, DOUGLAS ANTHONY | 2899 | §102§103 | Non-Final OA | 6d | Pending | Nov 15, 2023 |
| 18505810 | SUB-MILLISECOND OPTICAL DETECTION OF PULSED PLASMA PROCESSES | MENDOZA, ALEXANDRIA ARELLANO | 2877 | §103 | Non-Final OA | — | Pending | Nov 09, 2023 |
| 18386618 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | PHAM, THOMAS T | 1713 | §102§103 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18500087 | SUBSTRATE PROCESSING APPARATUS | BOYER, RANDY | — | §102 | Non-Final OA | — | Pending | Nov 01, 2023 |
| 18498698 | ENDPOINT DETECTION IN DRY DEVELOPMENT OF PHOTORESIST | SULLIVAN, CALEEN O | — | §102§103 | Non-Final OA | — | Pending | Oct 31, 2023 |
| 18385528 | METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | — | Pending | Oct 31, 2023 |
| 18383602 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BELAY, DILNESSA B | — | §102§103 | Non-Final OA | — | Pending | Oct 25, 2023 |
| 18382809 | FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS | FERNANDEZ, PEDRO C | 2844 | §103 | Final Rejection | — | Pending | Oct 23, 2023 |
| 18381269 | SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD | WOLDEGEORGIS, ERMIAS T | 2893 | §103 | Final Rejection | 9d | Pending | Oct 18, 2023 |
| 18380776 | SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC LAYER ETCHING (ALE) | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Oct 17, 2023 |
| 18555055 | SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | 34d | Pending | Oct 12, 2023 |
| 18483608 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE | MACARTHUR, SYLVIA | 1716 | §102 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 1713 | §102§103 | Final Rejection | 27d | Pending | Oct 06, 2023 |
| 18479986 | PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD | BRAYTON, JOHN JOSEPH | 1794 | §102§103 | Final Rejection | — | Pending | Oct 03, 2023 |
| 18375958 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM | WILSON, GREGORY A | 3762 | §103 | Final Rejection | 36d overdue | Pending | Oct 02, 2023 |
| 18374679 | PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103§112 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18372995 | SUBSTRATE PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §102§103 | Non-Final OA | — | Pending | Sep 26, 2023 |
| 18552108 | SUBSTRATE LIQUID-TREATMENT DEVICE | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | 14d | Pending | Sep 22, 2023 |
| 18470491 | METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | CHACKO DAVIS, DABORAH | 1737 | §102§103 | Non-Final OA | — | Pending | Sep 20, 2023 |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §102§103§112Other | Final Rejection | 19d overdue | Pending | Sep 18, 2023 |
| 18550535 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103§112 | Non-Final OA | — | Pending | Sep 14, 2023 |
| 18367742 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | LEE, KEVIN G | 1711 | §103 | Final Rejection | — | Pending | Sep 13, 2023 |
| 18243059 | INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD | BARBEE, MANUEL L | 2857 | §101§102 | Final Rejection | 46d | Pending | Sep 06, 2023 |
| 18462003 | TREATMENTS FOR METAL OXIDE PHOTORESIST FILMS | WALKE, AMANDA C | 1722 | §102§103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18240010 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | §103DP | Final Rejection | — | Pending | Aug 30, 2023 |
| 18239006 | PLASMA TREATMENT DEVICE AND ELECTRODE MECHANISM | HASSANZADEH, PARVIZ | 1716 | §103 | Non-Final OA | — | Pending | Aug 28, 2023 |
| 18237409 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Final Rejection | — | Pending | Aug 24, 2023 |
| 18453350 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Aug 22, 2023 |
| 18231278 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §102§103§112 | Final Rejection | 29d | Pending | Aug 08, 2023 |
| 18263920 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | §103 | Final Rejection | 22d | Pending | Aug 02, 2023 |
| 18227370 | PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SOURCE FREQUENCY OF SOURCE RADIO-FREQUENCY POWER | YU, YUECHUAN | 1718 | §102§103 | Non-Final OA | — | Pending | Jul 28, 2023 |
| 18227156 | SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING METHOD, AND SUPPLY METHOD | LEE, KEVIN G | 1711 | §103 | Final Rejection | 28d | Pending | Jul 27, 2023 |
| 18360384 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | §103 | Final Rejection | — | Pending | Jul 27, 2023 |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 18d overdue | Pending | Jul 26, 2023 |
| 18223703 | INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND PROCESS CONDITION OPTIMIZATION METHOD | KITT, STEPHEN A | 1717 | §102§103 | Non-Final OA | — | Pending | Jul 19, 2023 |
| 18353747 | PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD | CHEN, KEATH T | 1716 | §101§103 | Final Rejection | 33d | Pending | Jul 17, 2023 |
| 18353300 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | RIDDLE, CHRISTINA A | 2882 | §103 | Final Rejection | 5d | Pending | Jul 17, 2023 |
| 18353757 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | KACKAR, RAM N | 1716 | §103 | Final Rejection | 55d | Pending | Jul 17, 2023 |
| 18271898 | METHOD FOR FORMING SILICON-CONTAINING FILM AND FILM FORMING APPARATUS | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 14d | Pending | Jul 12, 2023 |
| 18350519 | PLASMA PROCESSING METHOD AND APPARATUS | ZERVIGON, RUDY | 1716 | §102§103 | Non-Final OA | 14d | Pending | Jul 11, 2023 |
| 18218450 | DISPLAY METHOD AND INFORMATION PROCESSING APPARATUS | RICKS, DONNA J | 2618 | §103§112 | Non-Final OA | — | Pending | Jul 05, 2023 |
| 18345134 | FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS | BOWMAN, ANDREW J | 1717 | §103 | Final Rejection | 34d | Pending | Jun 30, 2023 |
| 18210338 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | LAZO, THOMAS E | 3745 | §103§112 | Non-Final OA | — | Pending | Jun 15, 2023 |
| 18206106 | MOUNTING PAD, MOUNTING MECHANISM, AND SUBSTRATE TRANSFER MECHANISM | LEE, GILBERT Y | 3675 | §112 | Non-Final OA | — | Pending | Jun 06, 2023 |
| 18329372 | VACUUM HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §112 | Final Rejection | 49d overdue | Pending | Jun 05, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | §103§112 | Final Rejection | 31d overdue | Pending | May 31, 2023 |
| 18325423 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | 28d | Pending | May 30, 2023 |
| 18319419 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | May 17, 2023 |
| 18035401 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE | LUND, JEFFRIE ROBERT | 1716 | §103 | Non-Final OA | — | Pending | May 04, 2023 |
| 18296944 | PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS | KACKAR, RAM N | 1716 | §103§112 | Non-Final OA | — | Pending | Apr 06, 2023 |
| 18193324 | Dry Developing Metal-Free Photoresists | LEE, ALEXANDER N | 1737 | §112 | Final Rejection | 1d overdue | Pending | Mar 30, 2023 |
| 18192186 | DEPOSITION METHOD AND PROCESSING APPARATUS | SEHAR, FAKEHA | 2893 | §103 | Final Rejection | 56d | Pending | Mar 29, 2023 |
| 18187558 | Impedance Matching Network and Control Method | FERNANDEZ, PEDRO C | 2844 | §103 | Final Rejection | 12d | Pending | Mar 21, 2023 |
| 18185674 | PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD | HUNTER, JOHN S | 3761 | §103 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §103§112 | Final Rejection | 36d overdue | Pending | Mar 10, 2023 |
| 18044386 | LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD | ZABEL, ANDREW JOHN | 2818 | §103 | Non-Final OA | — | Pending | Mar 08, 2023 |
| 18025250 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | TADESSE, YEWEBDAR T | 1717 | §103 | Final Rejection | — | Pending | Mar 08, 2023 |
| 18179503 | Ceramic Pedestal Shaft with Heated/Cooled Gas Tube | BENNETT, CHARLEE | 1718 | §103§112 | Non-Final OA | — | Pending | Mar 07, 2023 |
| 18043757 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | PRICE, CRAIG JAMES | 3753 | §102§103§112 | Non-Final OA | — | Pending | Mar 02, 2023 |
| 18108391 | PLASMA PROCESSING APPARATUS | SWEELY, KURT D | 1718 | §103 | Final Rejection | — | Pending | Feb 10, 2023 |
| 18161298 | DEPOSITION METHOD AND DEPOSITION APPARATUS | SLUTSKER, JULIA | 2891 | §103 | Final Rejection | 61d | Pending | Jan 30, 2023 |
| 18159865 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | — | Pending | Jan 26, 2023 |
| 18159295 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103§112 | Non-Final OA | 30d | Pending | Jan 25, 2023 |
| 18014884 | FILM FORMING APPARATUS AND FILM FORMING METHOD | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | — | Pending | Jan 06, 2023 |
| 18146535 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | §102§103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18055490 | HEAT TREATMENT APPARATUS | TREMARCHE, CONNOR J. | 3762 | §103 | Non-Final OA | — | Pending | Nov 15, 2022 |
| 17983128 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Nov 08, 2022 |
| 17997558 | REPLACING APPARATUS AND REPLACING METHOD | CADUGAN, ERICA E | 3722 | §103§112 | Non-Final OA | 2d overdue | Pending | Oct 31, 2022 |
| 17950685 | HIGH RESOLUTION LATENT IMAGE PROCESSING, CONTRAST ENHANCEMENT AND THERMAL DEVELOPMENT | CHU, JOHN S Y | 1737 | §103Other | Non-Final OA | — | Pending | Sep 22, 2022 |
| 17943729 | Hybrid Development of EUV Resists | CHACKO DAVIS, DABORAH | 1737 | §103§112 | Non-Final OA | — | Pending | Sep 13, 2022 |
| 17898104 | METHODS FOR FORMING SEMICONDUCTOR DEVICES WITH ISOLATION STRUCTURES | KIM, SU C | 2899 | §102 | Final Rejection | 22d | Pending | Aug 29, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | §112 | Final Rejection | 145d overdue | Pending | Aug 23, 2022 |
| 17890766 | METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR STRESS FILM TUNING | CLEVELAND, MICHAEL B | 1700 | §102§103Other | Final Rejection | — | Pending | Aug 18, 2022 |
| 17817091 | ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SENSOR | KOTOWSKI, LISA MICHELLE | 2859 | §103Other | Non-Final OA | 5d overdue | Pending | Aug 03, 2022 |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103§112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17862889 | SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM | BAND, MICHAEL A | 1794 | §103 | Non-Final OA | — | Pending | Jul 12, 2022 |
| 17850250 | SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Jun 27, 2022 |
| 17848596 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | REYES, JOSHUA NATHANIEL PI | 1718 | §103§112 | Final Rejection | — | Pending | Jun 24, 2022 |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | ZERVIGON, RUDY | 1718 | §103 | Final Rejection | 91d overdue | Pending | Jun 21, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 51d overdue | Pending | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | §103 | Final Rejection | 26d | Pending | Jun 17, 2022 |
| 17756980 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Jun 07, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | §101§103 | Final Rejection | 60d overdue | Pending | May 24, 2022 |
| 17747861 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 31d overdue | Pending | May 18, 2022 |
| 17734125 | ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | CROWELL, ANNA M | 1716 | §103 | Non-Final OA | — | Pending | May 02, 2022 |
| 17657194 | INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC DEVICE, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS | SUN, XIUQIN | 2857 | §103 | Final Rejection | 7d | Pending | Mar 30, 2022 |
| 17753886 | GAS SUPPLY DEVICE AND GAS SUPPLY METHOD | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Mar 17, 2022 |
| 17676411 | APPARATUS FOR PERFORMING SPUTTERING PROCESS AND METHOD THEREOF | BAND, MICHAEL A | 1794 | §103§112 | Final Rejection | 23d | Pending | Feb 21, 2022 |
| 17456609 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS | CRAMER, HALEE PAIGE | 2891 | §103 | Final Rejection | — | Pending | Nov 26, 2021 |
| 17452642 | SUBSTRATE HOLDER, SUBSTRATE TRANSFER DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER | NIELSEN, DEREK LANG | 2899 | §103 | Final Rejection | 1d overdue | Pending | Oct 28, 2021 |
| 17501889 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112 | Final Rejection | 57d | Pending | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | §103 | Non-Final OA | 3d overdue | Pending | Sep 27, 2021 |
| 17428597 | FILM FORMING APPARATUS AND FILM FORMING METHOD | BAND, MICHAEL A | 1794 | §103Other | Non-Final OA | 33d | Pending | Aug 04, 2021 |
| 17347824 | DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE POLISHING MEMBER | POON, DANA LEE | 3723 | §103 | Final Rejection | — | Pending | Jun 15, 2021 |
| 17183138 | SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK | MELLOTT, JAMES M | 1759 | §103 | Final Rejection | 71d | Pending | Feb 23, 2021 |
| 17118158 | PART FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM | KIRKWOOD, SPENCER HAMMETT | 3761 | §103 | Final Rejection | — | Pending | Dec 10, 2020 |
| 17114096 | FURNACE WITH METAL FURNACE TUBE | FORD, NATHAN K | 1716 | §103 | Non-Final OA | 97d overdue | Pending | Dec 07, 2020 |
| 17037087 | METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE SYSTEMS | LOPEZ ALVAREZ, OLVIN | 2117 | §101§103 | Final Rejection | — | Pending | Sep 29, 2020 |
| 16992550 | FILM FORMING APPARATUS AND FILM FORMING METHOD | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | Aug 13, 2020 |
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