Last updated: July 17, 2026

Application No. 18/633,117

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAME

Non-Final OA

Filed

Apr 11, 2024

Priority

Jun 01, 2023 — RE 10-2023-0071149 +1 more

Examiner

BENNETT, CHARLEE

Art Unit

Tech Center

Assignee

Samsung Electronics Co., Ltd.

OA Round

1 (Non-Final)

This examiner grants 58% of cases after interview

— +36.2% interview lift. A telephonic interview to clarify the technical implementation could significantly improve the outcome.

Based on 556 resolved cases, 2023–2026

Examiner Intelligence

BENNETT, CHARLEE View full profile →

Grants 58% of resolved cases

Career Allowance Rate

323 granted / 556 resolved

-1.9% vs TC avg

Strong +36% interview lift

Without

With

+36.2%

Interview Lift

resolved cases with interview

Typical timeline

3y 8m

Avg Prosecution

44 currently pending

Career history

614

Total Applications

across all art units

Statute-Specific Performance

§101

0.1%

-39.9% vs TC avg

§103

90.3%

+50.3% vs TC avg

§102

0.3%

-39.7% vs TC avg

§112

1.4%

-38.6% vs TC avg

Black line = Tech Center average estimate • Based on career data from 556 resolved cases

Prosecution Timeline

Apr 11, 2024

Application Filed

May 29, 2026

Non-Final Rejection mailed (current)

Precedent Cases

Applications granted by this same examiner with similar technology

18/587,724

Patent 12685074

APPARATUS, SYSTEMS, AND METHODS OF MEASURING EDGE RING DISTANCE FOR THERMAL PROCESSING CHAMBERS

2y 4m to grant Granted Jul 14, 2026

17/288,468

Patent 12676285

SUBSTRATE STATE DETECTION FOR PLASMA PROCESSING TOOLS

5y 2m to grant Granted Jul 07, 2026

17/529,684

Patent 12666897

PRE-CLEAN CHAMBER ASSEMBLY ARCHITECTURE FOR IMPROVED SERVICEABILITY

4y 7m to grant Granted Jun 23, 2026

17/704,840

Patent 12665166

Process Chamber And Process Kits For Advanced Packaging

4y 3m to grant Granted Jun 23, 2026

17/934,878

Patent 12666925

JIGS AND METHODS OF TEACHING SUBSTRATE HANDLING IN SEMICONDUCTOR PROCESSING SYSTEMS USING JIGS

3y 9m to grant Granted Jun 23, 2026

Study what changed to get past this examiner. Based on 5 most recent grants.

Strategy Recommendation AI-generated — please review before filing

Get a prosecution strategy drawn from examiner precedents, rejection analysis, and claim mapping.

Typically takes 5-10 seconds — AI-generated, attorney review required before filing

Prosecution Projections

1-2

Expected OA Rounds

58%

Grant Probability

94%

With Interview (+36.2%)

3y 8m (~1y 5m remaining)

Median Time to Grant

Low

PTA Risk

Based on 556 resolved cases by this examiner. Grant probability derived from career allowance rate.