Prosecution Insights
Last updated: July 17, 2026
Application No. 18/633,983

Laser-Beam Homogenization or Shaping

Non-Final OA §103
Filed
Apr 12, 2024
Priority
Apr 18, 2023 — provisional 63/460,030
Examiner
CHIEN, LUCY P
Art Unit
2871
Tech Center
2800 — Semiconductors & Electrical Systems
Assignee
KLA Corporation
OA Round
1 (Non-Final)
83%
Grant Probability
Favorable
1-2
OA Rounds
4m
Est. Remaining
89%
With Interview

Examiner Intelligence

Grants 83% — above average
83%
Career Allowance Rate
763 granted / 918 resolved
+15.1% vs TC avg
Moderate +6% lift
Without
With
+5.6%
Interview Lift
resolved cases with interview
Typical timeline
2y 7m
Avg Prosecution
22 currently pending
Career history
938
Total Applications
across all art units

Statute-Specific Performance

§103
81.7%
+41.7% vs TC avg
§102
7.9%
-32.1% vs TC avg
§112
0.3%
-39.7% vs TC avg
Black line = Tech Center average estimate • Based on career data from 918 resolved cases

Office Action

§103
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . Claim Rejections - 35 USC § 103 In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis (i.e., changing from AIA to pre-AIA ) for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Claim(s) 1-3,5-9,18,19, is/are rejected under 35 U.S.C. 103 as being unpatentable over Coleman et al (US 6856460) in view of Yang, Lei et al (CN 109520609A) and in view of Longeaud (US 20130286457) Regarding Claim 1, Coleman et al discloses (Fig. 1) a light source (110), comprising: diffractive optics (150, forming part of a transfer lens 140) to diffract the deflected laser beam (column 4, lines 12-16); a multi-mode fiber (120, column 4, lines 6-8) to transmit the diffracted laser beam. Coleman et al does not disclose one or more deflection mirrors to deflect a laser beam at varying angles; and a plurality of lenses, disposed between the diffractive optics and the multi-mode fiber, to provide the diffracted laser beam to the multi-mode fiber. Longeaud discloses one or more deflection mirrors to deflect a laser beam at varying angles [0032]. Yang, Lei et al discloses (Fig. 1) a plurality of lenses (5,6), disposed between the diffractive optics (4) and the multi-mode fiber (7), to provide the diffracted laser beam to the multi-mode fiber. It would have been obvious to one of ordinary skill in the art to modify Coleman et al to include Longeaud discloses one or more deflection mirrors to deflect a laser beam at varying angles [0032] motivated by the desire to because the laser beam direction and optical delivery systems and scanning mirrors are commonly used to provide angular beam steering to further include Yang, Lei et al’s plurality of lenses (5,6), disposed between the diffractive optics (4) and the multi-mode fiber (7), to provide the diffracted laser beam to the multi-mode fiber motivated by the desire to improve coupling efficiency. Regarding Claim 2, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Coleman et al discloses (Fig. 1) wherein the diffractive optics (150, forming part of a transfer lens 140) comprise a multi-lens array (MLA) to diffract the deflected laser beam (plurality of lenses taught by Yang, Lei et al’s) Regarding Claim 3, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Coleman et al discloses (Fig. 1) wherein the diffractive optics (150, forming part of a transfer lens 140) comprise a diffractive optical element (DOE)(150) to diffract the deflected laser beam. Regarding Claim 5, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Yang, Lei et al discloses (Fig. 1) the multi-mode fiber comprises an end-face; and the plurality of lenses (5,6) comprises: a projection lens to collect and collimate(4) the diffracted laser beam; and a coupling lens (8) to focus the collimated, diffracted laser beam onto the end-face, the end-face being positioned in a back focal plane of the coupling lens. Regarding Claim 6, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Yang, Lei et al discloses (Fig. 1) the projection lens (5) has a first focal length; the coupling lens (6) has a second focal length; the projection lens (5) is separated from the coupling lens (6) by a distance along an optic axis of the laser beam equal to the sum of the first focal length and the second focal length; and the end-face of the multi-mode fiber is separated from the coupling lens by a distance along the optic axis of the laser beam equal to the second focal length. It would have been obvious to optimize lens spacing to satisfy imaging conditions (sum of focal lengths) to maximize coupling efficiency into the multimode fiber. Regarding Claim 7, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Longeaud discloses wherein the one or more deflection mirrors comprise a first scanning mirror (the scanning mirror reflects and deflects laser beams [0030-0031]. Regarding Claim 8, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Longeaud discloses wherein the one or more deflection mirrors further comprise a static mirror to receive the laser beam from the first scanning mirror and direct the laser beam toward the diffractive optics [0032]. Regarding Claim 9, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Longeaud discloses wherein the one or more deflection mirrors further comprise a second scanning mirror to receive the laser beam from the first scanning mirror and direct the laser beam toward the diffractive optics.[0032] Regarding Claim 18, Coleman et al discloses (Fig. 1) a generating a laser beam (110), diffracting the deflected laser beam (150, forming part of a transfer lens 140); providing the diffracted laser beam to a multi-mode fiber (120, column 4, lines 6-8) and transmitting the diffracted laser beam through the multi-mode fiber. Coleman et al does not disclose deflecting the laser beam at varying angles; provide the diffracted laser beam to the multi-mode fiber. Longeaud discloses one or more deflection mirrors to deflect a laser beam at varying angles [0032]. Yang, Lei et al discloses (Fig. 1) a plurality of lenses (5,6), disposed between the diffractive optics (4) and the multi-mode fiber (7), to provide the diffracted laser beam to the multi-mode fiber. It would have been obvious to one of ordinary skill in the art to modify Coleman et al to include Longeaud discloses one or more deflection mirrors to deflect a laser beam at varying angles [0032] motivated by the desire to because the laser beam direction and optical delivery systems and scanning mirrors are commonly used to provide angular beam steering to further include Yang, Lei et al’s plurality of lenses (5,6), disposed between the diffractive optics (4) and the multi-mode fiber (7), to provide the diffracted laser beam to the multi-mode fiber motivated by the desire to improve coupling efficiency. Regarding Claim 19, In addition to Coleman et al, Longeaud, and Yang, Lei et al, Longeaud discloses [0032] wherein deflecting the laser beam comprises deflecting the laser beam at the varying angles and at varying spatial offsets using a first scanning mirror and a second mirror. Claim(s) 4 is/are rejected under 35 U.S.C. 103 as being unpatentable over Coleman et al (US 6856460) and of Yang, Lei et al (CN 109520609A) and of Longeaud (US 20130286457) in view of Savage-Leuchs (US 20110249319) Regarding Claim 4, Coleman et al, Longeaud, and Yang, Lei et al, Coleman et al discloses everything as disclosed above. Coleman et al, Longeaud, and Yang, Lei et al, do not disclose the multi mode fiber has a square core. Savage-Leuchs discloses the multi mode fiber has a square core [0101]. It would have been obvious to one of ordinary skill in the art to modify Coleman et al, Longeaud, and Yang, Lei et al to include Savage-Leuchs multi mode fiber has a square core [0101] motivated by the desire to improve mode mixing. Allowable Subject Matter Claim 10-17,20,21 are objected to as being dependent upon a rejected base claim, but would be allowable if rewritten in independent form including all of the limitations of the base claim and any intervening claims. Regarding Claim 10, The prior art does not disclose nor would it be obvious to one of ordinary skill in the art to combine all the references and to include another reference to disclose wherein the diffractive optics are first diffractive optics, the multi-mode fiber is a first multi-mode fiber, and the plurality of lenses are a first plurality of lenses, the light source further comprising: second diffractive optics to diffract the deflected laser beam; a second multi-mode fiber to transmit the laser beam as diffracted by the second diffractive optics; a second plurality of lenses, disposed between the second diffractive optics and the second multi-mode fiber, to provide the laser beam as diffracted by the second diffractive optics to the second multi-mode fiber; and a first beam splitter disposed between the one or more deflection mirrors and the first diffractive optics, and between the one or more deflection mirrors and the second diffractive optics, wherein: the first diffractive optics, the first multi-mode fiber, and the first plurality of lenses are disposed along a first optical path; and the second diffractive optics, the second multi-mode fiber, and the second plurality of lenses are disposed along a second optical path. Claims 11-16 depends on Claim 10, therefore are objected. Regarding Claim 17, The prior art does not disclose nor would it be obvious to one of ordinary skill in the art to combine all the references and to include another reference to disclose laser to generate the laser beam; a plurality of alignment mirrors disposed between the laser and the one or more deflection mirrors, to adjust an optical path of the laser beam to direct the laser beam toward the one or more deflection mirrors; and a lens assembly, disposed between the plurality of alignment mirrors and the one or more deflection mirrors, to adjust the diameter of the laser beam to a specified value and to collimate the laser beam. Regarding Claim 20, The prior art does not disclose nor would it be obvious to one of ordinary skill in the art to combine all the references and to include another reference to disclose further comprising dividing the deflected laser beam between a first optical path and a second optical path, wherein: the multi-mode fiber is a first multi-mode fiber or a second multi-mode fiber; the first optical path comprises first diffractive optics that diffract the deflected laser beam, the first multi-mode fiber, and a first plurality of lenses to provide the laser beam as diffracted by the first diffractive optics to the first multi-mode fiber; and the second optical path comprises second diffractive optics that diffract the deflected laser beam, the second multi-mode fiber, and a second plurality of lenses to provide the laser beam as diffracted by the second diffractive optics to the second multi-mode fiber. Regarding Claim 21, The prior art does not disclose nor would it be obvious to one of ordinary skill in the art to combine all the references and to include another reference to disclose further comprising dividing the deflected laser beam between a first optical path, a second optical path, and a third optical path, wherein: the multi-mode fiber is a first multi-mode fiber, a second multi-mode fiber, or a third multi-mode fiber; the first optical path comprises first diffractive optics that diffract the deflected laser beam, the first multi-mode fiber, and a first plurality of lenses to provide the laser beam as diffracted by the first diffractive optics to the first multi-mode fiber; the second optical path comprises a second beam splitter, second diffractive optics that diffract the deflected laser beam, the second multi-mode fiber, and a second plurality of lenses to provide the laser beam as diffracted by the second diffractive optics to the second multi-mode fiber; and the third optical path comprises third diffractive optics that diffract the deflected laser beam, the third multi-mode fiber, and a third plurality of lenses to provide the laser beam as diffracted by the third diffractive optics to the third multi-mode fiber. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to LUCY P CHIEN whose telephone number is (571)272-8579. The examiner can normally be reached 9AM-5PM PST Monday, Tuesday, and Wednesday. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael Caley can be reached at 571-272-2286. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /LUCY P CHIEN/Primary Examiner, Art Unit 2871
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Prosecution Timeline

Apr 12, 2024
Application Filed
Apr 29, 2026
Non-Final Rejection mailed — §103 (current)

Precedent Cases

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
83%
Grant Probability
89%
With Interview (+5.6%)
2y 7m (~4m remaining)
Median Time to Grant
Low
PTA Risk
Based on 918 resolved cases by this examiner. Grant probability derived from career allowance rate.

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