62 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18812757 | METHOD TO PERFORM IN-SITU VACUUM CONTAMINATION MEASUREMENT AND IDENTIFICATION IN ARBITRARILY LARGE CHAMBERS | LE, MINH Q | 3753 | Non-Final OA | Aug 22, 2024 |
| 18793162 | HEAT EXCHANGER FOR UVO CLEANING SYSTEM | WEILAND, HANS R. | 3763 | Non-Final OA | Aug 02, 2024 |
| 18793570 | SPATIALLY-VARYING SPECTRAL METROLOGY FOR LOCAL VARIATION DETECTION | PERSAUD, DEORAM | 2882 | Non-Final OA | Aug 02, 2024 |
| 18755644 | WAVEPLATE COMPENSATOR DESIGN | UNDERWOOD, JARREAS C | 2877 | Non-Final OA | Jun 26, 2024 |
| 18743118 | Multiple Pass Optical Measurements Of Semiconductor Structures | KIM, PETER B | 2882 | Non-Final OA | Jun 14, 2024 |
| 18652438 | DYNAMIC FREEFORM OPTICS FOR LITHOGRAPHY ILLUMINATION BEAM SHAPING | KIM, PETER B | 2882 | Non-Final OA | May 01, 2024 |
| 18642417 | SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING TARGET USING MULTIPLE WAVELENGTHS | YAZBACK, MAHER | 2877 | Non-Final OA | Apr 22, 2024 |
| 18642348 | HIGH-PRECISION ALIGNABLE OPTICAL MOUNTING | DUONG, HENRY ABRAHAM | 2872 | Non-Final OA | Apr 22, 2024 |
| 18624444 | PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES | PEREZ-GUZMAN, CARLOS GABRIEL | 2877 | Non-Final OA | Apr 02, 2024 |
| 18618280 | SINGLE GRAB PUPIL LANDSCAPE VIA OUTSIDE THE OBJECTIVE LENS BROADBAND ILLUMINATION | WHITESELL, STEVEN H | 1759 | Final Rejection | Mar 27, 2024 |
| 18612383 | SYSTEM AND METHOD FOR DEVICE-LIKE OVERLAY TARGETS MEASUREMENT | STOCK JR, GORDON J | 2877 | Final Rejection | Mar 21, 2024 |
| 18611299 | FLUORESCENCE MODE FOR WORKPIECE INSPECTION | COOK, JONATHON | 2877 | Non-Final OA | Mar 20, 2024 |
| 18603002 | DEEP LEARNING MODEL DIAGNOSTICS TOOLS USING STACKED IMAGES | DHOOGE, DEVIN J | 2677 | Non-Final OA | Mar 12, 2024 |
| 18594991 | METHOD AND SYSTEM FOR BONDING HIGH FLUENCE OPTICS TO OPTOMECHANICAL ASSEMBLIES | STONER, KILEY SHAWN | 1735 | Non-Final OA | Mar 04, 2024 |
| 18590913 | FLATNESS PRECISION IMPROVEMENT WITH SYSTEMATIC ERROR REDUCTION VIA INDUCED WAFER TILT VARIATION | LYONS, MICHAEL A | 2877 | Non-Final OA | Feb 28, 2024 |
| 18588822 | SYSTEM AND METHOD FOR GROWTH OF QUASI-PHASE MATCHED STRONTIUM TETRABORATE AND LITHIUM TRIBORATE CRYSTALS FOR FREQUENCY CONVERSION | KUNEMUND, ROBERT M | 1714 | Non-Final OA | Feb 27, 2024 |
| 18587703 | SIDE-BY-SIDE OFF-CENTER DIE OVERLAY TARGET | LAPAGE, MICHAEL P | 2877 | Non-Final OA | Feb 26, 2024 |
| 18438384 | ADAPTIVE AND ROBUST DETECTION OF LARGE DEFECTS AND IMAGE MISALIGNMENT | ALLEN, KYLA GUAN-PING TI | 2661 | Non-Final OA | Feb 09, 2024 |
| 18424069 | SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION | KIM, ROBERT H | 2881 | Non-Final OA | Jan 26, 2024 |
| 18421580 | OVERLAY MARK DESIGN ENABLING LARGE OVERLAY MEASUREMENT | SOHRABY, PARDIS | 2664 | Non-Final OA | Jan 24, 2024 |
| 18421454 | OVERLAY METROLOGY TARGET FOR DIE-TO-WAFER OVERLAY METROLOGY | WHITESELL, STEVEN H | 1759 | Final Rejection | Jan 24, 2024 |
| 18408395 | OPTICAL BEAM SENSOR WITH CENTER TRANSMISSIVE CUT-OUT | FAYE, MAMADOU | 2884 | Final Rejection | Jan 09, 2024 |
| 18391595 | Boron-Coated Back-Illuminated Image Sensor With Fluoride-Based Anti-Reflection Coating | GREER, RIANNA BLISS | 2814 | Non-Final OA | Dec 20, 2023 |
| 18542072 | Optics for In-Situ Scanning Electron Microscope Repair | MCCORMACK, JASON L | 2881 | Non-Final OA | Dec 15, 2023 |
| 18535159 | SYSTEM AND METHOD OF FINDING PIXEL-TO-DESIGN TARGET FOR DRAM INSPECTION | CONNER, SEAN M | 2663 | Non-Final OA | Dec 11, 2023 |
| 18529854 | SYSTEM AND METHOD FOR DURATION-BASED SAMPLE PATH ADJUSTMENT | NIMOX, RAYMOND LONDALE | 2857 | Non-Final OA | Dec 05, 2023 |
| 18387015 | Methods And Systems For Measurement Of Semiconductor Structures With Active Tilt Correction | FABIAN JR, ROBERTO | 2877 | Non-Final OA | Nov 04, 2023 |
| 18375920 | Magnetically Opposed, Iron Core Linear Motor Based Motion Stages For Semiconductor Wafer Positioning | DESAI, NAISHADH N | 2834 | Non-Final OA | Oct 02, 2023 |
| 18375512 | IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION | KALISZEWSKI, ALINA ROSE | 2881 | Non-Final OA | Sep 30, 2023 |
| 18369609 | SYSTEMS AND METHODS FOR GENERATING A FLAT-TOP ILLUMINATION BEAM BASED ON INTERLACING, INCOHERENTLY OVERLAPPING SPOTS | CHANG, AUDREY Y | 2872 | Non-Final OA | Sep 18, 2023 |
| 18467371 | ANGLE RESOLVED REFLECTOMETRY FOR THICK FILMS AND HIGH ASPECT RATIO STRUCTURES | STOCK JR, GORDON J | 2877 | Final Rejection | Sep 14, 2023 |
| 18234773 | MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY | XING, CHRISTINA ILONA | 2877 | Final Rejection | Aug 16, 2023 |
| 18231688 | Methods And Systems For Scatterometry Based Metrology Of Structures Fabricated On Transparent Substrates | GRAY, SUNGHEE Y | 2877 | Non-Final OA | Aug 08, 2023 |
| 18353098 | METROLOGY SAMPLING PLANS FOR ONLY OUT OF SPECIFICATION DETECTION | STEAR, RYAN JAMES | 2857 | Non-Final OA | Jul 16, 2023 |
| 18138709 | HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL | TSAI, HSIEN C | 2881 | Non-Final OA | Apr 24, 2023 |
| 18136747 | Full Wafer Measurement Based On A Trained Full Wafer Measurement Model | HENSON, MISCHITA L | 2857 | Non-Final OA | Apr 19, 2023 |
| 18136772 | Combined Spectroscopic Reflectometry And Pattern Recognition Based Measurements Of Semiconductor Structures | UNDERWOOD, JARREAS C | 2877 | Non-Final OA | Apr 19, 2023 |
| 18128125 | MULTI-MODE OPTICAL INSPECTION | DULANEY, KATHLEEN YUAN | 2666 | Non-Final OA | Mar 29, 2023 |
| 18178528 | DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS | LU, ZHIYU | 2665 | Non-Final OA | Mar 05, 2023 |
| 18116187 | INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION | GARBER, ERIN R | 2878 | Non-Final OA | Mar 01, 2023 |
| 18090447 | PATTERN SEGMENTATION FOR NUISANCE SUPPRESSION | SUMMERS, GEOFFREY E | 2669 | Final Rejection | Dec 28, 2022 |
| 17993565 | Methods And Systems For Data Driven Parameterization And Measurement Of Semiconductor Structures | DINH, PAUL | 2851 | Non-Final OA | Nov 23, 2022 |
| 17982472 | PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR ACCELERATED ETCH PROCESS DEVELOPMENT | KIM, EUNHEE | 2188 | Non-Final OA | Nov 07, 2022 |
| 18049863 | METHOD AND APPARATUS FOR DYNAMIC SEALING BETWEEN ZONES OF ULTRA-CLEAN VACUUM SYSTEM | JOERGER, KAITLIN S | 3652 | Final Rejection | Oct 26, 2022 |
| 17956643 | Spectroscopic Reflectometry And Ellipsometry Measurements With Electroreflectance Modulation | YAZBACK, MAHER | 2877 | Non-Final OA | Sep 29, 2022 |
| 17948151 | HIGH-RESOLUTION EVALUATION OF OPTICAL METROLOGY TARGETS FOR PROCESS CONTROL | WHITESELL, STEVEN H | 1759 | Final Rejection | Sep 19, 2022 |
| 17944009 | METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS | COCCHI, MICHAEL EDWARD | 2188 | Non-Final OA | Sep 13, 2022 |
| 17862052 | MINIATURE ELECTRON OPTICAL COLUMN WITH A LARGE FIELD OF VIEW | TANDY, LAURA ELOISE | 2881 | Final Rejection | Jul 11, 2022 |
| 17850888 | Method and System for Providing a Quality Metric for Improved Process Control | KAY, DOUGLAS | 2857 | Non-Final OA | Jun 27, 2022 |
| 17834767 | SENSORS, IMAGING SYSTEMS, AND METHODS FOR FORMING A SENSOR | SWANSON, WALTER H | 2815 | Non-Final OA | Jun 07, 2022 |
| 17713017 | METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION | BALI, VIKKRAM | 2663 | Non-Final OA | Apr 04, 2022 |
| 17762030 | CALIBRATED MEASUREMENT OF OVERLAY ERROR USING SMALL TARGETS | SCHNASE, PAUL DANIEL | 2877 | Non-Final OA | Mar 18, 2022 |
| 17696636 | SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS | OTT, PATRICK S | 1794 | Non-Final OA | Mar 16, 2022 |
| 17591569 | COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE IMAGING | TANDY, LAURA ELOISE | 2881 | Non-Final OA | Feb 02, 2022 |
| 17590116 | Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry | JEFFERSON, QUOVAUNDA | 2899 | Non-Final OA | Feb 01, 2022 |
| 17466703 | WAFER ALIGNMENT IMPROVEMENT THROUGH IMAGE PROJECTION-BASED PATCH-TO-DESIGN ALIGNMENT | DHOOGE, DEVIN J | 2677 | Non-Final OA | Sep 03, 2021 |
| 17408106 | Coolant Microleak Sensor for a Vacuum System | VILLALUNA, ERIKA J | 2852 | Final Rejection | Aug 20, 2021 |
| 17321263 | SYSTEM AND METHOD FOR AUTOMATICALLY IDENTIFYING DEFECT-BASED TEST COVERAGE GAPS IN SEMICONDUCTOR DEVICES | SULTANA, DILARA | 2858 | Non-Final OA | May 14, 2021 |
| 17228543 | Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source | HORIKOSHI, STEVEN Y | 2875 | Final Rejection | Apr 12, 2021 |
| 17099476 | MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM | LOGIE, MICHAEL J | 2881 | Non-Final OA | Nov 16, 2020 |
| 16935432 | Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation | SCHINDLER, DAVID M | 2858 | Final Rejection | Jul 22, 2020 |
| 16864972 | Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspection Systems | ANGEBRANNDT, MARTIN J | 1737 | Final Rejection | May 01, 2020 |
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