Prosecution Insights
Last updated: April 19, 2026
Application No. 18/651,146

SEMICONDUCTOR PROCESS EQUIPMENT

Non-Final OA §112
Filed
Apr 30, 2024
Examiner
BURKMAN, JESSICA LYNN
Art Unit
3653
Tech Center
3600 — Transportation & Electronic Commerce
Assignee
Applied Materials, Inc.
OA Round
1 (Non-Final)
82%
Grant Probability
Favorable
1-2
OA Rounds
1y 11m
To Grant
99%
With Interview

Examiner Intelligence

Grants 82% — above average
82%
Career Allow Rate
161 granted / 197 resolved
+29.7% vs TC avg
Strong +18% interview lift
Without
With
+18.2%
Interview Lift
resolved cases with interview
Fast prosecutor
1y 11m
Avg Prosecution
27 currently pending
Career history
224
Total Applications
across all art units

Statute-Specific Performance

§101
0.9%
-39.1% vs TC avg
§103
40.9%
+0.9% vs TC avg
§102
21.8%
-18.2% vs TC avg
§112
31.3%
-8.7% vs TC avg
Black line = Tech Center average estimate • Based on career data from 197 resolved cases

Office Action

§112
Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . DETAILED ACTION Information Disclosure Statement The Information Disclosure Statements filed on May 1st 2024 and January 2nd, 2026 have been considered by the examiner. Claim Rejections - 35 USC § 112 The following is a quotation of 35 U.S.C. 112(b): (b) CONCLUSION.—The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the inventor or a joint inventor regards as the invention. The following is a quotation of 35 U.S.C. 112 (pre-AIA ), second paragraph: The specification shall conclude with one or more claims particularly pointing out and distinctly claiming the subject matter which the applicant regards as his invention. Claims 2 and 4 are rejected under 35 U.S.C. 112(b) or 35 U.S.C. 112 (pre-AIA ), second paragraph, as being indefinite for failing to particularly point out and distinctly claim the subject matter which the inventor or a joint inventor (or for applications subject to pre-AIA 35 U.S.C. 112, the applicant), regards as the invention. Claim 2 recites the limitation "the array of linear stators" in L1. There is insufficient antecedent basis for this limitation in the claim. The claim will be interpreted as if it read “the plurality of stators.” Claim 2 recites the limitation " " in L2. There is insufficient antecedent basis for this limitation in the claim. The claim will be interpreted as if it read “the plurality of sensors.” Claim 4recites the limitation "each first sensor" in L1. There is insufficient antecedent basis for this limitation in the claim. The claim will be interpreted as if it read “each sensor.” Allowable Subject Matter Claims 1,3, and 5-20 are allowable. Claims 2 and 4 would be allowable once the 35 U.S.C112 rejections are overcome. Independent claims 1 and 10 are allowable for disclosing “an array of first recesses formed in the first surface.” Independent claim 15 is allowable for disclosing “a linear array of top sensors coupled to the first side of the member.” The closest prior art of US 20210249291 discloses magnetic levitation assembly for a processing station (conveying device 100), comprising: a membrane (hermetic seal 16) comprising: a body comprising a non-ferromagnetic material (stator 100), wherein the body has a first surface (action surface 102) and a second surface (not labeled); a plurality of stators (Fig. 9G) comprising one or more stator poles (Fig. 9C). There is no teaching or suggestion in the prior art that would render it obvious to a person with ordinary skill in the art before the effective filing date of the invention to have recesses in the body as recited. There is also no teaching or suggestion of having sensors on the top surface of a stator as recited. Claims 3, 5-9, 11-14 and 16-20 are allowable by virtue of their dependencies. Conclusion Any inquiry concerning this communication or earlier communications from the examiner should be directed to JESSICA LYNN BURKMAN whose telephone number is (571)272-5824. The examiner can normally be reached M-Th 7:30am to 6:00pm EST. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Michael McCullough can be reached at (571)272-7805. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of published or unpublished applications may be obtained from Patent Center. Unpublished application information in Patent Center is available to registered users. To file and manage patent submissions in Patent Center, visit: https://patentcenter.uspto.gov. Visit https://www.uspto.gov/patents/apply/patent-center for more information about Patent Center and https://www.uspto.gov/patents/docx for information about filing in DOCX format. For additional questions, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /J.L.B./Examiner, Art Unit 3653 /MICHAEL MCCULLOUGH/Supervisory Patent Examiner, Art Unit 3653
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Prosecution Timeline

Apr 30, 2024
Application Filed
Feb 07, 2026
Non-Final Rejection — §112 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
82%
Grant Probability
99%
With Interview (+18.2%)
1y 11m
Median Time to Grant
Low
PTA Risk
Based on 197 resolved cases by this examiner. Grant probability derived from career allow rate.

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