Prosecution Insights
Last updated: April 19, 2026
Application No. 18/670,858

METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MICROSTRUCTURED SAMPLE

Non-Final OA §101
Filed
May 22, 2024
Examiner
RIVERA-MARTINEZ, GUILLERMO M
Art Unit
2677
Tech Center
2600 — Communications
Assignee
Carl Zeiss Smt GmbH
OA Round
1 (Non-Final)
78%
Grant Probability
Favorable
1-2
OA Rounds
2y 9m
To Grant
80%
With Interview

Examiner Intelligence

Grants 78% — above average
78%
Career Allow Rate
393 granted / 503 resolved
+16.1% vs TC avg
Minimal +2% lift
Without
With
+2.3%
Interview Lift
resolved cases with interview
Typical timeline
2y 9m
Avg Prosecution
28 currently pending
Career history
531
Total Applications
across all art units

Statute-Specific Performance

§101
5.9%
-34.1% vs TC avg
§103
42.8%
+2.8% vs TC avg
§102
22.0%
-18.0% vs TC avg
§112
26.7%
-13.3% vs TC avg
Black line = Tech Center average estimate • Based on career data from 503 resolved cases

Office Action

§101
DETAILED ACTION This Office action is in response to the Application filed on May 22, 2024, which claims priority to German Patent Application DE 102023113273.3, filed on May 22, 2023. An action on the merits follows. Claims 1-20 are pending on the application. Notice of Pre-AIA or AIA Status The present application, filed on or after March 16, 2013, is being examined under the first inventor to file provisions of the AIA . In the event the determination of the status of the application as subject to AIA 35 U.S.C. 102 and 103 (or as subject to pre-AIA 35 U.S.C. 102 and 103) is incorrect, any correction of the statutory basis for the rejection will not be considered a new ground of rejection if the prior art relied upon, and the rationale supporting the rejection, would be the same under either status. Specification Applicant is reminded of the proper content of an abstract of the disclosure. The abstract should be in narrative form and generally limited to a single paragraph within the range of 50 to 150 words in length. See MPEP § 608.01(b) for guidelines for the preparation of patent abstracts. Claim Interpretation The following is a quotation of 35 U.S.C. 112(f): (f) Element in Claim for a Combination. – An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof. The following is a quotation of pre-AIA 35 U.S.C. 112, sixth paragraph: An element in a claim for a combination may be expressed as a means or step for performing a specified function without the recital of structure, material, or acts in support thereof, and such claim shall be construed to cover the corresponding structure, material, or acts described in the specification and equivalents thereof. The claims in this application are given their broadest reasonable interpretation using the plain meaning of the claim language in light of the specification as it would be understood by one of ordinary skill in the art. The broadest reasonable interpretation of a claim element (also commonly referred to as a claim limitation) is limited by the description in the specification when 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is invoked. As explained in MPEP § 2181, subsection I, claim limitations that meet the following three-prong test will be interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph: (A) the claim limitation uses the term “means” or “step” or a term used as a substitute for “means” that is a generic placeholder (also called a nonce term or a non-structural term having no specific structural meaning) for performing the claimed function; (B) the term “means” or “step” or the generic placeholder is modified by functional language, typically, but not always linked by the transition word “for” (e.g., “means for”) or another linking word or phrase, such as “configured to” or “so that”; and (C) the term “means” or “step” or the generic placeholder is not modified by sufficient structure, material, or acts for performing the claimed function. Use of the word “means” (or “step”) in a claim with functional language creates a rebuttable presumption that the claim limitation is to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites sufficient structure, material, or acts to entirely perform the recited function. Absence of the word “means” (or “step”) in a claim creates a rebuttable presumption that the claim limitation is not to be treated in accordance with 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. The presumption that the claim limitation is not interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, is rebutted when the claim limitation recites function without reciting sufficient structure, material or acts to entirely perform the recited function. Claim limitations in this application that use the word “means” (or “step”) are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. Conversely, claim limitations in this application that do not use the word “means” (or “step”) are not being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, except as otherwise indicated in an Office action. This application includes one or more claim limitations that do not use the word “means,” but are nonetheless being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, because the claim limitation(s) uses a generic placeholder that is coupled with functional language without reciting sufficient structure to perform the recited function and the generic placeholder is not preceded by a structural modifier. Such claim limitation(s) are: “apparatus for analyzing”, “device for determining”, “unit configured to guide”, “detector configured to detect”, “unit configured to supply”, in claims 12-15. Because these claim limitation(s) are being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, they are being interpreted to cover the corresponding structure described in the specification as performing the claimed function, and equivalents thereof. A review of the specification shows that the following appears to be the corresponding structure described in the specification for the 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph limitation: Par. [0155-159, 161-162] describe a programmed computing device or computer, including for example software, hardware, or a combination of hardware and software, capable of performing the described functionality. If applicant does not intend to have these limitation(s) interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph, applicant may: (1) amend the claim limitation(s) to avoid them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph (e.g., by reciting sufficient structure to perform the claimed function); or (2) present a sufficient showing that the claim limitation(s) recite sufficient structure to perform the claimed function so as to avoid them being interpreted under 35 U.S.C. 112(f) or pre-AIA 35 U.S.C. 112, sixth paragraph. Claim Rejections - 35 USC § 101 35 U.S.C. 101 reads as follows: Whoever invents or discovers any new and useful process, machine, manufacture, or composition of matter, or any new and useful improvement thereof, may obtain a patent therefor, subject to the conditions and requirements of this title. Claim 11 is rejected under 35 USC 101 because the claimed invention is directed to a computer program per se and does not fall within at least one of the four categories of patent eligible subject matter recited in 35 U.S.C. 101 (Benson, 409 U.S. at 71-72, 175, USPQ at 676). For more information, see MPEP § 2106. For examination purposes examiner has interpreted “computer program product comprising instructions” to be a non-transitory computer readable medium stored therein instructions that, upon execution of the program by at least one computer, cause the latter to carry out steps as recited. See MPEP 2106.01 (I). Allowable Subject Matter Claims 1-10 and 12-20 are allowed. The following is a statement of reasons for the indication of allowable subject matter: The prior art of record fails to anticipate or render obvious the following limitations as claimed: In view of claim 1 in its entirety, the further limitations of “… analyzing an image of a microlithographic microstructured sample, wherein the sample comprises at least one first segment and at least one second segment which has an edge and is raised vis-à-vis the first segment, and wherein the image includes a plurality of pixels and a two-dimensional intensity distribution depending on the pixels, the method comprising the following steps: a) determining a plurality of edge candidates for an image representation of the edge of the at least one second segment on the basis of gradients of the two-dimensional intensity distribution, b) determining a one-dimensional intensity distribution of the image in a direction perpendicular to the plurality of edge candidates, wherein in the direction, the one-dimensional intensity distribution comprises a first region with a first mean intensity value, the plurality of edge candidates and a second region with a second mean intensity value greater than the first mean intensity value, and c) determining the edge candidate of the plurality of edge candidates which among the plurality of edge candidates is closest to the first region of the one-dimensional intensity distribution as the image representation of the edge of the at least one second segment” as recited in claim 1. Examiner was not able to find art similar to aforementioned feature limitation of claim 1 above. Claims 1-10 and 17-20 are dependent upon claim 1. Claim 12 recite similar feature limitations as in claim 1 above. Claims 13-16 are dependent upon claim 12. Contact Information Any inquiry concerning this communication or earlier communications from the examiner should be directed to GUILLERMO M RIVERA-MARTINEZ whose telephone number is (571) 272-4979. The examiner can normally be reached on 9 am to 5 pm. Examiner interviews are available via telephone, in-person, and video conferencing using a USPTO supplied web-based collaboration tool. To schedule an interview, applicant is encouraged to use the USPTO Automated Interview Request (AIR) at http://www.uspto.gov/interviewpractice. If attempts to reach the examiner by telephone are unsuccessful, the examiner’s supervisor, Andrew Bee can be reached on 571-270-5183. The fax phone number for the organization where this application or proceeding is assigned is 571-273-8300. Information regarding the status of an application may be obtained from the Patent Application Information Retrieval (PAIR) system. Status information for published applications may be obtained from either Private PAIR or Public PAIR. Status information for unpublished applications is available through Private PAIR only. For more information about the PAIR system, see https://ppair-my.uspto.gov/pair/PrivatePair. Should you have questions on access to the Private PAIR system, contact the Electronic Business Center (EBC) at 866-217-9197 (toll-free). If you would like assistance from a USPTO Customer Service Representative or access to the automated information system, call 800-786-9199 (IN USA OR CANADA) or 571-272-1000. /GUILLERMO M RIVERA-MARTINEZ/ Primary Examiner, Art Unit 2677
Read full office action

Prosecution Timeline

May 22, 2024
Application Filed
Mar 07, 2026
Non-Final Rejection — §101 (current)

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Study what changed to get past this examiner. Based on 5 most recent grants.

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Prosecution Projections

1-2
Expected OA Rounds
78%
Grant Probability
80%
With Interview (+2.3%)
2y 9m
Median Time to Grant
Low
PTA Risk
Based on 503 resolved cases by this examiner. Grant probability derived from career allow rate.

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